Pfeiffer Vacuum TMH 1600M Operating Instructions Manual

Pfeiffer Vacuum TMH 1600M Operating Instructions Manual

Turbomolecular drag pumps. with magnetic bearings
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Operating Instructions
TMH 1600M / TMU 1600M
PM 800 344 BE/C (0011)
Turbomolecular Drag Pumps.
With Magnetic Bearings

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Summary of Contents for Pfeiffer Vacuum TMH 1600M

  • Page 1 Operating Instructions TMH 1600M / TMU 1600M Turbomolecular Drag Pumps. With Magnetic Bearings PM 800 344 BE/C (0011)
  • Page 2: Table Of Contents

    Index Page Page 1. Safety Instructions ........3 4. Operations ..........9 1.1. For Your Orientation............3 4.1. Before Switching ON............9 1.2. Pictogram Definitions............3 4.2. Switching ON..............9 4.3. Heating (only for pumps with casing heating unit)..9 2.
  • Page 3: Safety Instructions

    – Hazards which can be caused by the media being Abbreviations on the type plate of the pump pumped. TMH 1600M: Fully magnetic bearing pump Avoid exposing any part of the body to vacuum. Suffix”C“: Surface protection for passive protection of Observe the safety and accident prevention regulations.
  • Page 4: Understanding The Tmh 1600 M/ Tmu 1600M

    The motor and bearing com- partments have to be protected with sealing gas. Pumps with the designation TMH 1600M T/TMU 1600M T – The turbopumps may only be used to pump those media (please see the rating plate) can be heated in the area of the pressure stages with the heaters integrated in the casing and against which they are chemically resistant.
  • Page 5: Installation

    3. Installation 3.1. Preparations For Installation Connecting Via A Vibration Compensator The maximum permissible temperature at the Do not carry out any unauthorised conversions vibration compensator is 100°C. or alterations to the turbopump. Where a vibration compensator is in use constructional –...
  • Page 6: Fitting The Splinter Shield (Accessory)

    ➡ Fit the delayed opening fore-vacuum safety valve (e.g. Fitting The Splinter Shield (Accessory) TVV 001, Accessory) in the fore-vacuum line (in PFEIFFER ➡ Insert the splinter shield in the ISO-K flange in condition on rotary vane vacuum pumps already integrated as delivery.
  • Page 7: Air Cooling (Accessory)

    ➡ Place the pump on its high vacuum flange Connection to the cooling water mains ➡ Fit the dirt trap (Accessory) in the supply line. (Caution: do not damage the sealed surfaces). ➡ Connect the supply line with hose clips onto one of the two ➡...
  • Page 8: Connecting The Sealing Gas

    3.6. Connecting The Sealing Gas 3.8. Connecting The Magnetic Bearing Controller To protect the pump, particularly where corrosive or dust pro- ducing processes are involved, it is necessary to use sealing ➡ Plug in the connecting cable between the magnetic gas.
  • Page 9: Connecting The Temperature Management System (Tms)

    95 Connection box 96 Connecting cable for the heating elements Pumps with the designation TMH 1600M T/TMU 1600M T (please see the rating plate) can be heated to a maximum of 90 °C in the Holweck stages range with the heaters and tem- perature sensors (TMS) integrated in the middle casing.
  • Page 10: Operations With The Tms

    <711: BkP Pon> = 280 W can be used for the switch on and switch off threshholds. Gas type characteristic line The TMH 1600M P C H can not be operated in PLEASE NOTE connection with a diaphragm pump. Run up D-C = Gas mode «0»...
  • Page 11: Safety Bearings

    4.7. Safety Bearings 4.9. Shutting Down For Longer Periods Where heavy, external vibration or improper operating is Vacuum pumps are sometimes used to pump involved, the rotor is supported by an additional, dry-running aggressive or hazardous gases. There is a dan- safety bearing;...
  • Page 12: What To Do In Case Of Breakdowns

    5. What To Do In Case Of Breakdowns ? The Magnetic Bearing Controller TCM 1601 contains an integrated malfunction diagnosis system (error code table). The malfunction messages are explained in operating instructions for the TCM 1601, PM 800 478 BN and their possible causes are listed.
  • Page 13: Maintenance

    6. Maintenance No liability for personal injury nor material dama- PLEASE NOTE ge will be accepted for damages and operational interruptions which have been caused by impro- per maintenance; in addition, all guarantees become invalid. Your pump can be cleaned on the spot if it is not very dirty. Please check procedures with your local PFEIFFER Service Center.
  • Page 14: Technical Data

    8. Technical Data Feature Unit TMH 1600M TMH 1600M TMH 1600M H TMU 1600M TMU 1600M Connection nominal diameter: Inlet DN 200 ISO-K DN 250 ISO-K DN 200 ISO-K DN 250 ISO-K DN 200 CF-F DN 250 CF-F Outlet DN 40 ISO-KF...
  • Page 15: Dimensions

    8.1. Dimensions 9° M8 (8x) DN 200 CF-F DN 200 ISO-K DN 250 CF-F DN 250 ISO-K ø295 DN 40 ISO-KF ø250 DN 10 ISO-KF...
  • Page 16: Spare Parts

    9. Spare Parts Pos. Description Pieces Size Number Comments Ordering Quantity Spare parts TMH/U 1600M Synthetic foot P 4098 582 FA see Section 2.1. USIT ring P 3529 133 -A Venting Valve TVF 005 G 1/8” PM Z01 135 see Section 2.1. Temperature sensor, complete PM 073 593 -X see Section 3.9.
  • Page 17: Accessories

    10. Accessories Description Size Number Operating Instructions/ Order Quantity Comments Magnetic Bearing Controller TCM 1601 90 - 265 V; 50/60 Hz PM C01 675 PM 800 478 BN Connecting cable turbopump - TCM PM 051 003 -T other lengths on request Pumping Station Control Unit TCS 180 100 - 115/230 V;...
  • Page 18: Declaration Of Contamination

    Declaration of Contamination of Vacuum Equipment and Components The repair and/or service of vacuum components will only be The manufacturer could refuse to accept any equipment carried out if a correctly completed declaration has been without a declaration. submitted. Non-completion will result in delay. This declaration can only be completed and signed by authorised and qualified staff: 1.
  • Page 19: Manufacturer's Declaration

    EU Directive 98/37/EEC, Annex II B. We certify conformity with EU Electromagnetic Compatibility Directive 89/336/EEC and EU Low Voltage Directive 73/23/EEC. Produkt/Product: TMH 1600M TMU 1600M Angewendete Richtlinien, harmonisierte Normen und angewendete, nationale Normen: Guidelines, harmonised standards, national standards in which have been applied:...
  • Page 20 18th Floor, Chokchail Intíl Bldg. Korea Assistencia Técnica e Representação S/C Ltda. 690 Sukhumvit Road Rua Bernadino de Compos, 551 Pfeiffer Vacuum Korea Ltd., 3F Haein Building 453, Klongton, Klongtoey Dokok-Dong, Kang Nam-Ku, Seoul, 135-270 CEP 04620-002 São Paulo, SP - Brasil Bangkok 10110...

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Tmu 1600m

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