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Ulvac RFS-13100F Instruction Manual

Solid-state rf power supply matching box
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Solid-State RF Power Supply
Matching Box
Model:
RF Power Supply
Matching Box
Matching Controller
Instruction Manual
/
RFS-13100F
RFS-13150F
/
RFS-13200F
RFS-27400F
/
MBX-13100F
MBX-13150F
MBX-13200F
/
MBX-27400F
/
AMC-9L
AMC-9LT
※Read this manual before using the product.
Store this manual carefully so that it can be used at anytime.
Revised 8th edition 08/29/2023
i
RF0033E_08
ULVAC Inc.

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Summary of Contents for Ulvac RFS-13100F

  • Page 1 RF0033E_08 Instruction Manual Solid-State RF Power Supply Matching Box Model: RF Power Supply RFS-13100F RFS-13150F RFS-13200F RFS-27400F Matching Box MBX-13100F MBX-13150F MBX-13200F MBX-27400F Matching Controller AMC-9L AMC-9LT Revised 8th edition 08/29/2023 ULVAC Inc. ※Read this manual before using the product.
  • Page 2 The content listed in this manual is subject to change without prior notice because of changes in product specifications or product improvements. The copyright of this manual and safety guide is held by the ULVAC Inc.  You are forbidden from copying all or a portion of this manual without the consent of the ULVAC Inc.
  • Page 3 RF Power Supply and Matching Box Introduction 1. Safety precautions Most accidents are attributed to carelessness during operation, inspection, maintenance, or repair. Failure to comply with the safety precautions or neglecting to anticipate danger causes accidents to happen more easily. Accidents can be prevented before they happen by anticipating potentially dangerous situations at an early stage.
  • Page 4 RF Power Supply and Matching Box Introduction 2. Safety symbols Safety symbols are used throughout this manual and labeled on the product to call the operator's attention to safety. The terminology used in safety symbols is classified below. This symbol indicates the possibility of impending death or serious injury when the hazard cannot be avoided.
  • Page 5 5. Response method 1) For domestic transactions ① ULVAC will send a replacement product, or you will return the product to ULVAC or the nearest ULVAC service center where it will be repaired. ② If an on-site response is required, consult separately with ULVAC, Inc.
  • Page 6 If you have determined there is a malfunction or if you have any questions, contact one of the locations listed below. When contacting ULVAC, please inform us of the product name, model number, serial number, and about the symptoms of the problem in as much detail as possible.

  • Page 7: Table Of Contents

    RF Power Supply and Matching Box Table of Contents For Safe Operation ..........................1 1-1. Precautions when handling the product ..................1 1-2. Warning label/nameplate locations ................... 2 1-3. Contact information ........................2 2. Overview ............................3 2-1. Introduction ..........................3 2-2.
  • Page 8 RF Power Supply and Matching Box Table of Contents 6-2. Matching box maintenance and inspection ................53 7. Troubleshooting ..........................55 7-1. Troubleshooting ........................55 7-1-1. Troubleshooting related to the RF power supply ............. 55 7-1-2. Troubleshooting related to the matching box ..............56 8.

  • Page 9: For Safe Operation

    RF Power Supply and Matching Box 1. For Safe Operation For Safe Operation In order to safely use the product, this chapter describes precautions, location of warning labels, and contact information for safety operation. 1-1. Precautions when handling the product This section describes safety precautions for the product.

  • Page 10: Warning Label/Nameplate Locations

    To order parts, ask questions about products, and to make inquires related to product malfunctions, first verify the product information and then contact ULVAC or an exclusive dealer. Especially when you have determined the product has malfunctioned, inform us of the product information along with the product's history and symptoms in as much detail as possible.

  • Page 11: Overview

    RF Power Supply and Matching Box 2. Overview 2. Overview This chapter describes the product's features, configuration, and specifications. 2-1. Introduction This system has been designed for plasma generation in RF sputtering, plasma CVD, etching, and other plasma processing applications. This system combines an RF power supply and matching box. For high frequency loads, it can continuously output its rated power at a single frequency of 13.56 MHz.

  • Page 12: Configuration

    RF Power Supply and Matching Box 2. Overview 2-3. Configuration This system consists of an RF power supply, a matching box, and a matching controller. The system's configuration is shown in "Figure 2-1. System configuration". The basic configuration requires the items below. ...

  • Page 13: Specifications

    This system consists of an RF power supply, a matching box, and a matching controller. The specifications for each of these components are listed below. Table 2-1 RF power supply individual specifications Specification value Classification Item RFS-13100F RFS-13150F Phase, frequency Three-phase 50/60 Hz Input voltage...
  • Page 14 RF Power Supply and Matching Box 2. Overview Table 2-2 RF power supply individual specifications Specification value Classification Item RFS-13200F Phase, frequency Three-phase 50/60 Hz Input voltage 400/440/480 VAC Fluctuation range ±10% (360 V to 528 V) Input Input capacity 32 kVA or less Connector N/MS3102A32-17P...
  • Page 15 RF Power Supply and Matching Box 2. Overview Table 2-3 RF power supply individual specifications Specification value Classification Item RFS-27400F Phase, frequency Three-phase 50/60 Hz Input voltage 400/440/480 VAC Fluctuation range ±10% (360 V to 528 V) Input Input capacity 70 kVA or less Connector Terminal level UF1005-150A...
  • Page 16 RF Power Supply and Matching Box 2. Overview Table 2-4 RF common specifications Classification Item Specification value Pf overpower Controls Pf power RF droop Pr overpower Controls Pf power RF droop RF amplifier Controls Pf power RF droop overcurrent RF amplifier Controls Pf power RF droop overvoltage...
  • Page 17 RF Power Supply and Matching Box 2. Overview Table 2-5 Matching box individual specifications Classification Item Specification value MBX-13100F MBX-13150F RF input Frequency 13.56 MHz ± 0.05% Rated power 500 W to 10 kW or lower 750 W to 15 kW or lower 50 Ω...
  • Page 18 RF Power Supply and Matching Box 2. Overview Table 2-6 Matching box individual specifications Classification Item Specification value MBX-13200F RF input Frequency 13.56 MHz ± 0.05% Rated power 1 kW or higher to 20 kW or less Input impedance 50 Ω RF output Permissible 15 kVpp or less...
  • Page 19 RF Power Supply and Matching Box 2. Overview Table 2-7 Matching box individual specifications Classification Item Specification value MBX-27400F RF input Frequency 27.12 MHz ± 0.05% Rated power 4 kW or higher to 40 kW or less Input impedance 50 Ω RF output Permissible 15 kVpp or less...
  • Page 20 Do not contain corrosive gas Exterior Exterior dimensions 480 W x 350 D x 49 H (not including protrusions) Weight Approx. 5 kg Table 2-9 VPP rating RF system VPP rating RFS-13100F/MBX-13100F 500V～10 KV RFS-13150F/MBX-13150F 750V～15 KV RFS-13200F/MBX-13200F 750V～15 KV RFS-27400F/MBX-27400F 750V～15 KV...
  • Page 21 RF Power Supply and Matching Box 2. Overview Table 2-10 RF system cooling water - Water quality Item Reference value Water temperature 25°C or less 5 kΩ/cm or higher Specific resistance (25°C) PH (25°C) 7 to 9 Chlorine ions (Cl 100 ppm or lower Sulfate ions (SO ) 100 ppm or lower...

  • Page 22: Setup

    Three-phase 400 V, 5 m User terminal untreated 1. AC input cable (R:S:T:GND=red:white:black:green) 1 set RFS-13100F / RFS-13150F: 8 sq RFS-13200F: 22 sq RFS-27400F: 60sq RF power supply GND cable, 5 m 2. GND cable User terminal untreated wire size...

  • Page 23: Power Supply Installation

    RF Power Supply and Matching Box 3. Setup 3-2. Power supply installation Install the RF power supply according to the following procedure. Caution This product cannot be adapted for lightning surges, spike voltage, or momentary power failures. If a lightning surge, spike voltage, or momentary power failure is input from the power receiving facilities, the product may be damaged or malfunction.

  • Page 24: Matching Box Installation

    RF Power Supply and Matching Box 3. Setup 3-3. Matching box installation Install the matching box according to the following procedure. 3-3-1. Matching box installation location Since all wiring acts as an inductor at the frequency of 13 MHz used by the RF power supply, decide on an installation location for the matching box where the distance between the load and the matching box's RF access port is as short as possible.

  • Page 25: System Wiring

    RF Power Supply and Matching Box 3. Setup 3-5. System wiring 3-5-1. Connecting cables First check the connector names and dedicated cables between each unit, then see "Figure 3-3 System wiring" and connect the cables. See "Table 3-3 Cable list" for the cables used. Please prepare the wiring between the matching box and the chamber and the GND wiring yourself.

  • Page 26: Input Power Supply Wiring

    RF Power Supply and Matching Box 3. Setup 3-5-2. Input power supply wiring Warning First connect the supplied input cable's connector to the RF power supply and then connect the other end. Turn off your main breaker before wiring the input power supply. * Wire the pins for the RF power supply input connector as shown below 3-phase...

  • Page 27: Functions

    RF Power Supply and Matching Box 4. Functions 4. Functions This chapter describes the functions of each unit. 4-1. RF power supply The RF power supply can be run locally by the control panel and it can be run remotely by an external analog signal.

  • Page 28: Control Panel Functions And Explanations

    RF Power Supply and Matching Box 4. Functions 4-1-2. Control panel functions and explanations 1) Fluorescent display Shows the setting values for each mode's functions. Shows measurement values. Shows the operating status. 2) Operation keys ON: Outputs RF. OFF: Stops RF. (Doubles as the RESET key.) Left key/right key: Can select menus and input an increase or decrease in setting values.

  • Page 29: Measurement Display

    RF Power Supply and Matching Box 4. Functions 4-1-3. Measurement display Table 4-2 RF power supply measurement display list Item Display value Comments Traveling wave power Traveling wave power (Pf) Reflected wave power Reflected wave power (Pr) VDC voltage Voltage at the matching box's output terminal VPP voltage Voltage at the matching box's output terminal 4-1-4.
  • Page 30 RF Power Supply and Matching Box 4. Functions Table 4-4 ALARM content details Display Contents 【 COVER OPEN 】 Displayed when the cover is open. After closing the cover, clear with RESET. 【 COVER OPEN /MB FAIL 】 【 INTERLOCK 】 When the external interlock signal is not input (OPEN) When the user-side error is cleared, recover with RESET.

  • Page 31: External Control Terminal Pin Assignments

    RF Power Supply and Matching Box 4. Functions 4-1-5. External control terminal pin assignments When performing external control, see "Figure 4-3 RF power supply INTERFACE connector pin assignments" and use the included connector to connect external control. Even if the external control terminal is not used, connect pin 1 and pin 14 (external interlock) with a jumper wire.
  • Page 32 RF Power Supply and Matching Box 4. Functions Inside Power Supply Ext. Control Device Ext. Interlock Input* RESET* RF ON command* RF ON 25V 100mA max answer (NO) 25V 100mA max ALARM (NO) 25V 100mA max ＡＲＣ (NO) 25V 100mA max Interlock response (NO) POWER SET...

  • Page 33: Caution When Using The External Control Terminal (Interface)

    RF Power Supply and Matching Box 4. Functions 4-1-6 Caution when using the external control terminal (INTERFACE) If connecting an inductive load (relay or coil) to the output of the external control terminal, insert a diode or use a relay with a surge absorbing element so that counter-electromotive force is not generated.

  • Page 34: Rf Power Supply Parameters

    RF Power Supply and Matching Box 4. Functions 4-1-6. RF power supply parameters How to start the configuration menu On the operation mode selection screen, simultaneously press the "ESC" key and "ENT" key for 3 seconds or more to open the configuration menu. 　RF　OPERATION　SELECT 　<PANEL>...
  • Page 35 High-speed arcing shut off Hardware detection. When the reflected wave feedback's voltage becomes higher than the set value, it is shut off by the logic. (Operates within 10 µs.) *The initial value of RFS-13100F/13150F is set to 1CNT, but you can change the setting and use it.

  • Page 36: Automatic Matching Controller Functions

    RF Power Supply and Matching Box 4. Functions 4-2. Automatic matching controller functions With the automatic matching controller, matching by automatic control and matching by manual control is possible. It can also be controlled by a variable capacitor operation via the external analog signal. 4-2-1.

  • Page 37: Control Panel Functions And Explanations

    RF Power Supply and Matching Box 4. Functions 4-2-2. Control panel functions and explanations 1) LCD screen Displays the operation mode, control mode and function selection mode menus. Shows the setting values for each mode's functions. Shows measurement values. Shows the operating status. 2) Operation keys AUTO: Selects automatic control mode.

  • Page 38: Automatic Matching Controller Amc.ext Pin Assignments

    RF Power Supply and Matching Box 4. Functions 4-2-3. Automatic matching controller AMC.EXT pin assignments Table 4-8 Automatic matching controller AMC.EXT pin assignments Signal name Contents Input/outp number Closed: Enabled only when ANALOG or PR·RC mode The controller section switches to manual mode, shifts the positions of the variable capacitors according to AUTO/MANUAL the TUNE/MATCH analog preset input voltage.

  • Page 39: Automatic Matching Controller Preset Pin Assignments

    RF Power Supply and Matching Box 4. Functions 4-2-4. Automatic matching controller PRESET pin assignments Table 4-9 Automatic matching controller PRESET pin assignments Pin number Signal name Comments PRESET Close to save the current position number as a preset value to the selected number 2-10 RECALL...
  • Page 40 RF Power Supply and Matching Box 4. Functions Table 4-10 Preset number selection SELECT No. PRESET No. ○ ○ ○ ○ ● ○ ○ ○ ○ ● ○ ○ ● ● ○ ○ ○ ○ ● ○ ● ○ ● ○...

  • Page 41: Caution When Using The External Control Terminals (Amc.ext/Preset)

    RF Power Supply and Matching Box 4. Functions Open AUTO/MANUAL switch Close （AMC.EXT[1-9]） Open SELECT1 Close （SELECT[3-11]） 50 ms or more SELECT2 （SELECT[4-12]） SELECT3 （SELECT[5-13]） SELECT4 （SELECT[6-14]） Open RECALL Close （SELECT[2-10]） 100 ms or more BUSY （AMC.EXT[2-10]） Variable capacitors operating * Loading a preset from PRESET No.

  • Page 42: Matching Controller Parameters

    RF Power Supply and Matching Box 4. Functions 4-2-6. Matching controller parameters How to start the configuration menu On the operation mode selection screen, simultaneously press the "ESC" key and "ENT" key for 3 seconds or more to open the configuration menu. 　AMC　CONTROL　SELECT 　<PANEL>...
  • Page 43 RF Power Supply and Matching Box 4. Functions Table 4-11 Automatic matching controller parameters Item Default Meaning value AUTO RECALL DISABLE Select to implement auto recall operation (automatic recall operation when RF OFF). It competes with the ANALOG preset function so normally select DISABLE. RECALL ACTION Do not Implement recall operation.

  • Page 44: Operation

    RF Power Supply and Matching Box 5. Operation 5. Operation This chapter explains how to operate the product. 5-1. Operating the RF power supply 5-1-1. Setup before operation Before energizing the system, check that the cables between each unit are correctly wired. Feed cooling water to the system.

  • Page 45: Local Operation Method (Panel Operation)

    RF Power Supply and Matching Box 5. Operation 5-1-2. Local operation method (panel operation) 1) Operation mode menu selection To change the operation mode, press the "ESC" key several times to display the configuration screen, then select <PANEL> with the left and right keys and press the "ENT" key. 　RF　OPERATION　SELECT 　<PANEL>...

  • Page 46: Remote Operation Method (External Control)

    RF Power Supply and Matching Box 5. Operation Press the left key to move the cursor position to the left. If there is no value in the destination, the following occurs. 0 → 10 　Fw : 0.00/1.01　kW 　Re : 0　W (Power settings screen) Press the down key and the set value at the digit where the cursor is displayed will get smaller.
  • Page 47 RF Power Supply and Matching Box 5. Operation then select the <ANALG> operation mode with the left and right keys and press the "ENT" key. 　RF　OPERATION　SELECT 　PANEL SERIAL <ANALG> (Operation mode selection screen) When the setting is complete, the power display screen is displayed. 　Fw : 0.00/0.00　kW 　Re...

  • Page 48: Rf Output Timing

    RF Power Supply and Matching Box 5. Operation 5-1-4. RF output timing The timing from pushing the RF ON key and until outputting power is shown below. RF starts to be output after 10 ms elapses with the RF ON key in the pressed state. The RF output rise time is approx.

  • Page 49: Measurement Value Display

    RF Power Supply and Matching Box 5. Operation 5-1-5. Measurement value display 1) VPP, VDC menu If the up key is pressed while displaying the measurement screen in normal operation, the VPP measurement display is shown, but only while pressed. Press the "ENT" key and the screen display can be fixed as the VPP measurement display.

  • Page 50: Automatic Matching Controller Operation

    RF Power Supply and Matching Box 5. Operation 5-2. Automatic matching controller operation This section explains the local operation (panel operation) method, remote operation (external control), and the external preset (external control) method. 5-2-1. Local operation method (panel operation) 1) Operation mode menu To change the operation mode, press the "ESC"...
  • Page 51 RF Power Supply and Matching Box 5. Operation 3)-1 Recall operation During manual mode, press the "ENT" key on the variable capacitor position display screen to display the function selection screen. 　OPERATION SELECT A・REC <REC> PRESET (Function selection screen) Point the cursor to REC and press the "ENT" key to display the preset selection screen. 　MATCH [ 50% ] TUNE [ 50% ] 　[ PRESET-1 ]...
  • Page 52 RF Power Supply and Matching Box 5. Operation You can change the string with the arrow keys. After determining the name, confirm the preset name by pressing the "ENT" key and the variable capacitor position display screen is displayed. 　MATCH [50%] 　TUNE [50%] [ 1]...

  • Page 53: Remote Operation Method (External Control)

    RF Power Supply and Matching Box 5. Operation 5-2-2. Remote operation method (external control) 1) Operation mode menu To change the operation mode, press the "ESC" key several times to display the configuration screen, then select <ANALOG> with the left and right keys and press the "ENT" key. 　AMC　CONTROL　SELECT 　PANEL PR・RC <ANALOG>...

  • Page 54: Remote Operation Method (External Preset Operation)

    RF Power Supply and Matching Box 5. Operation 5-2-3. Remote operation method (external preset operation) 1) Operation mode menu To change the operation mode, press the "ESC" key several times to display the configuration screen, then select operation mode <PR·RC> with the left and right keys and press the "ENT" key. 　AMC　CONTROL　SELECT 　PANEL <PR・RC>...
  • Page 55 RF Power Supply and Matching Box 5. Operation 4) Load external preset value (recall operation) After selecting the preset number with the SELECT(1 to 4) signal, move to the saved MBX TUNE and MATCH positions by closing PRESET connector pins 2-10. Open AUTO/MANUAL switch Close...

  • Page 56: Matching Adjustment

    RF Power Supply and Matching Box 5. Operation 5-3. Matching adjustment 5-3-1. Matching fundamentals The matching box is composed of variable capacitors (C1, C2) and a coil (L) as shown in "Figure 5-5 Basic matching circuit". The TUNE variable capacitor serves to terminate at 50 Ω and the MATCH variable capacitor serves for phase correction.

  • Page 57: Increasing And Decreasing The Number Of Coil Short Circuits

    RF Power Supply and Matching Box 5. Operation Table 5-2 Relationship between the tendency for Pr to decrease and coil short circuits Symptom Cause Corrective action MATCH variable capacitor can Insufficient coil (L) short circuits (L is Short coil across 2 or 3 more match at minimum value.

  • Page 58: Adding A Fixed Capacitor

    RF Power Supply and Matching Box 5. Operation Warning Be careful of withstand voltage and withstand current when inserting a capacitor in parallel to the load. A fixed capacitor is a precision instrument. Shocks from falls or excessive stress may damage it.
  • Page 59 RF Power Supply and Matching Box 5. Operation Adjust the TUNE variable capacitor with a fixed capacitor so that the capacity is 20% to 80% when Pr is at its minimum. Caution Contains high voltage generating parts, so work with extreme caution when making adjustments using a high voltage probe.

  • Page 60: Maintenance

    Note: In order to use this product for many years to come, please ask ULVAC to periodically overhaul the product using the above table as a reference.

  • Page 61: Matching Box Maintenance And Inspection

    F Power Supply and Matching Box 6-2. Matching box maintenance and inspection The matching box inspection should be performed about once every six months and cover the items listed below. Is water leaking from the water-cooled coil? Look at the water-cooled coil connector. Is the inside of the pipe clogged? Has the tip of the water-cooled coil connector disappeared? Has dust accumulated inside the matching box? Check if the...
  • Page 62 F Power Supply and Matching Box * In order to use this product for many years to come, please ask ULVAC to periodically overhaul the product using the above table as a reference.

  • Page 63: Troubleshooting

    The screen does not appear even The required voltage is not applied. when turning on the breaker. ALARM [DC SOURCE FAIL] is Possible internal component damage. Contact ULVAC. displayed when the breaker is turned on. Operation panel indicates External control connector (INTERFACE) pins 1-14 are not "INTERLOCK", RF cannot be turned...

  • Page 64: Troubleshooting Related To The Matching Box

    Not discharging. Check the discharge conditions like gas pressure, etc. Variable capacitors not Auto matching controller problems Contact ULVAC. operating in manual mode. Mechanical problems Check the coupling connecting the variable capacitors and motor to see if it slides.

  • Page 65: Reference Materials

    F Power Supply and Matching Box 8. Reference materials The following materials are included with this manual as a reference.  RFS-13100F External View  RFS-13150F External View  RFS-13200F External View  RFS-27400F External View  MBX-13100F External View ...
  • Page 66 F Power Supply and Matching Box Figure 8-1 RFS-13100F...
  • Page 67 F Power Supply and Matching Box Figure 8-2 RFS-13150F...
  • Page 68 F Power Supply and Matching Box Figure 8-3 RFS-13200F...
  • Page 69 F Power Supply and Matching Box Figure 8-4 RFS-27400F...
  • Page 70 F Power Supply and Matching Box Figure 8-5 MBX-13100F...
  • Page 71 F Power Supply and Matching Box 30Kg AieE eUi ≫ CAUTION DANGER a^abave? Aue? o?iXi Oe? uAalaWe￢ e Ae┴eReT A， e┴e─eoeUe? eae- emoFeAe─e!e\e│eouB Confirm whether a screw is firmly e┤ od Ai eE tight after you change tap position ELECTRIC SHOCK RF IN MBX-13150* MB-SIGNAL...
  • Page 72 F Power Supply and Matching Box 30Kg Inter lock RF IN DET OUT MB-SIGNAL AMC IN OUTLET INLET Figure 8-7 MBX-13200F...
  • Page 73 F Power Supply and Matching Box Figure 8-8 MBX-27400F...
  • Page 74 F Power Supply and Matching Box Figure 8-9 AMC-9L/AMC-9LT...

This manual is also suitable for:

Rfs-13150fRfs-13200fRfs-27400fMbx-13100fMbx-13150fMbx-13200f ... Show all

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