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Ulvac DC-10-D Operation Manual

10kw/20kw dc power supply
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10kW/20kW DC Power Supply
Model：DC-10-D/DC-20-D (800V model)
DC-10-DH/DC-20-DH (1000V model)
3rd Edition: October 20, 2023
ULVAC, Inc.
Before using this product, be sure to read it.
Also, keep this manual at hand with care

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Summary of Contents for Ulvac DC-10-D

  • Page 1 DC0072E-03 10kW/20kW DC Power Supply Model：DC-10-D/DC-20-D (800V model) DC-10-DH/DC-20-DH (1000V model) 3rd Edition: October 20, 2023 ULVAC, Inc. Before using this product, be sure to read it. Also, keep this manual at hand with care...
  • Page 2 The copyrights of the operation manual and this safety guide belong to ULVAC, Inc.  A part and whole part of this operation manual are prohibited to copy without a permit of ULVAC, Inc.

  • Page 3: Precautious Points On Safety

    DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 Introduction 1. Precautious points on safety Major part of the accidents occurs in relation to the operation carelessly conducted by the operator, the inspection/service and the repair work. Also, if you do not observe the basic caution matters on safety and neglect the dangerous preperception, it is easy to occur.

  • Page 4: Safety Symbol Marks

    DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 Introduction 2. Safety symbol marks In this operation manual and the warning display of the product main body, the symbol marks about the safety in order to understand the matters to be observed are being put up.
  • Page 5 DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 Introduction 2） Safety symbol marks on the unit main body The following safety symbol marks are placed on the unit main body. List of Safety Symbol Marks Safety symbol marks Explanation Heavy loads ・There is a danger of getting injury.

  • Page 6: About This Product

    DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 Introduction 3. About this product The sentences and illustrations in this operation manual are based on the information at the time of this operation manual prepared. This operation manual may be subject to change without prior notice. Since these changes give the influence on the inspection, confirm the latest information in our company’s...

  • Page 7: Suspecting Abnormality

    DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 Introduction 4. Suspecting abnormality If you notice a presence of abnormality, refer to 8."Trouble shooting" in this manual and check the symptom and the trouble. To avoid mutual loss caused by misunderstanding and misconception, please clarify the details of the trouble in order to repair the product as soon as possible.

  • Page 8: Table Of Contents

    DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 Table of Contents TABLE OF CONTENTS INTRODUCTION ..............I 1. P .................... II RECAUTIOUS POINTS ON SAFETY 2. S ......................III AFETY SYMBOL MARKS 3. A ......................V BOUT THIS PRODUCT 4. S ..................... VI USPECTING ABNORMALITY 5.
  • Page 9 DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 Table of Contents 4-5 O .................. 19 UTPUT ONTROL ELECTION 4-5-1 LOCAL mode setting ....................19 4-5-2 USER mode setting ....................20 4-5-3 HOST/HST+/CSTM mode setting ................20 4-6 M LEVEL S ....... 20 ONITOR IGNALS AND...

  • Page 10: For Your Safety Use

    DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 1. For Your Safety Use 1. For Your Safety Use In order to use this unit in a safe manner, we describe the caution points on safety, the attached position of warning labels and the contact party.

  • Page 11: Warning Label / Name Plate Affixing Position

    DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 1. For Your Safety Use 1-2 Warning Label / Name Plate Affixing Position REFERENCE The affixing position of warning labels is shown in the appendix "External View" in Chapter 9. Keep these warning labels clean at all times so that all of them are legible. Use cloth and water for the cleaning of the warning labels.

  • Page 12: Overview

    2-1 Introduction The DC-10-D/DC-20-D is designed as a DC power supply for sputtering with an output of 10/20kW. The rated power can be supplied to the load by optimizing the load impedance of plasma. 2-2 Features ・...

  • Page 13: Composition

    DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 2. Overview 2-3 Composition 2-3-1 Configuration of a model without EtherCAT option [E] Power supply body 1 unit D-Sub connector for USER1 PORT (product of JAE: DC-C4-J12-F1/DC-37PF-N): 1 set 2-3-2 Configuration of a model with EtherCAT option [E]...

  • Page 14: Specifications

    DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 2. Overview 2-5 Specifications Table 2-3: Electrical specifications; 800V Item Specifications Model DC-10-D DC-20-D Rated input voltage AC208V Input voltage variation AC187V～229V range Number of phases / Three-phase for 50/60Hz Frequency Input connection Connector Input current*1...
  • Page 15 DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 2. Overview Table 2-4: Electrical specifications; 1000V Item Specifications Model DC-10-DH DC-20-DH Rated input voltage AC208V Input voltage variation AC187V～229V range Number of phases / Three-phase for 50/60Hz Frequency Input connection Connector Input current*1 50A or less...
  • Page 16 DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 2. Overview Table 2-5: Control Specifications Item Specifications LOCL Operation mode on the unit's front panel Cannot be used because USER1 PORT on the back of the Unit is E-model used for EtherCAT PORT. USER Operation mode using Analog and Digital signals from USER1 PORT Standard on the back of the Unit.

  • Page 17: Connection Of Input/Output Section

    DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 2. Overview 2-6 Connection of Input/Output Section 2-6-1 Connection of input/output section [HARTING] connector is employed for the input section. Although the genuine cable can be purchased from us, if you prepare a cable by yourself, purchase...

  • Page 18: Connection Of Output Section

    DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 2. Overview 2-6-2 Connection of output section As with the input section, a [HARTING] connector is employed also in the output section. Although the genuine cable can be purchased from us, if you prepare a cable by yourself, purchase...

  • Page 19: Preparation

    DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 3. Preparation 3. Preparation We describe necessary preparation and caution matters in step where after this unit is delivered at your hand, you use this unit. 3-1 Unpacking When unpacking, check the following points: 1) Check the product's appearance for any flows or dents.

  • Page 20: How To Install

    DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 3. Preparation φ3 AC input 基板 3ΦＡＣ入力 Substrate 187～229V 187～229V DC Power ＤＣ電源 supply DC Power Supply ＤＣ電源 φ3 AC input Output cable 3ΦＡＣ入力 出力ケ－ブル M/Sケーブル P/S cable 187～229V 187～229V DC Power ＤＣ電源 supply ＣＡＴＨＯＤＥ ＡＮＯＤＥ...

  • Page 21: About Clearance

    DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 3. Preparation 3-2-4 About clearance This product has an intake in the front part and an exhaust port in the rear part. Provide sufficient clearance as shown in Fig. 3-3. Left side of power supply 300mm or more...

  • Page 22: Wiring And Connecting

    DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 3. Preparation Secure a distance equal to or greater than the minimum cable clearance in reference to Fig. 3-4. Figure 3-4: Minimum clearance 3-3 Wiring and Connecting Never connect cables under an energized state. When installing or removing cables, be sure to turn off the upper circuit WARNING breaker and ensure safety by lockout, tagout, etc.

  • Page 23: Definition Of The Unit Names For Use As A System

    DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 3. Preparation Unit1 Unit2 Unit3 Figure 3-5: Rear P/S cable connection diagram 3-3-3 Definition of the unit names for use as a system The names of each unit when used in the system are shown in Table 3-2.

  • Page 24: Interlocks For Use As A System

    DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 3. Preparation In single-unit In P/S connection Example: 3-unit connection UNIT1 UNIT2 UNIT3 If the settings are incorrect, the system is put into a warning state and becomes unable to output them. *By changing the setting value, the limit value (SET/LIMT/IGNV,VOLT,CRNT,POW) is initialized.

  • Page 25: Description Of Functions

    DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 4. Description of Functions 4. Description of Functions This section describes various functions of this power supply. 4-1 Name and Function of Each Part 4-1-1 Front panel ⑫ ⑬ ① ④ ⑤ ③ ⑥ ⑦ ⑧,⑨,⑩,⑪...

  • Page 26: Back Panel

    DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 4. Description of Functions 4-1-2 Back panel ⑨ ⑩ ⑤ ⑫ ⑪ ⑧ ⑦ ⑥ ⑬ ① ② ③ ④ Figure 4-2: Product back (without EtherCAT option) ⑭ Figure 4-3: Product back (with EtherCAT option) Table 4-2. Names and functions on the back of the product No．...

  • Page 27: Rising Operation

    DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 4. Description of Functions 4-2 Rising Operation When the breaker is turned on, the monitor starts up after several tens of seconds and the top screen appears. Before the top screen appears, the power supply is in the process of starting up, so no operations are accepted.

  • Page 28: Output Control Mode Selection

    DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 4. Description of Functions Table 4-3: Each operation mode and overview Operation mode Overview LOCL Operation on the front panel Operate with an external control device, such as a PLC, connected to USER1 USER PORT. HOST...

  • Page 29: User Mode Setting

    DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 4. Description of Functions Also even in the top screen, the output control mode can be changed. 4-5-2 USER mode setting The output control mode can be selected by combining the High and Low signals of pins 27 and 28 of USER1 PORT.

  • Page 30: About Setpoint

    DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 4. Description of Functions 4-7 About SETPOINT When the output detection value is within the setpoint setting value of the command value, the front SETPOINT LED lights up and the USER IO PORT's SETPOINT signal is output.

  • Page 31: Description Of Micro Arc Function

    DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 4. Description of Functions Table 4-7: Image of parameter change in switching MENU Layer 1 Layer 2 Layer 3 Layer 4 VOLT 150V 130V LEVEL CRNT 10us MARC 100us TIME 150us TIME 1000us HARC 5cont CONT...

  • Page 32: Description Of Arc Delay Function

    DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 4. Description of Functions 4-10 Description of Arc Delay Function It is possible to delay the time required for the arc process to start after the voltage detection level is reached at an arc. This can be used to intentionally increase the arc energy.

  • Page 33: Description Of Hard Arc Function

    DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 4. Description of Functions 4-11 Description of Hard Arc Function The hard-arc process is performed when micro-arc processes are performed the set number of times within the set time. For instructions on how to set parameters, refer to [5-1-2 Parameter setting through front panel operation].
  • Page 34 DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 4. Description of Functions ・Ramp time (from the start of electric discharge to the command value) Command value Ramp time Ignition voltage Command value Without ramp time With ramp time Figure 4-8: Image of rising waveform during ramp (from the start of electric...

  • Page 35: Description Of Each Parameter And Function

    DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 4. Description of Functions 4-13 Description of Each Parameter and Function For each parameter functions and menus, refer to Tables 4-8, 4-9, and 4-10. * The menu marked in an optional item is a function available only when a product equipped with the optional function is purchased.
  • Page 36 DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 4. Description of Functions Table 4-9：Each parameter (SET layer) MENU Layer 1 Layer 2 Layer 3 Layer 4 Description Option Setting of ignition voltage limit. The output is limited when the output voltage reaches the set value at ignition.
  • Page 37 DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 4. Description of Functions Table 4-10: Each parameter (MONI layer) MENU Layer 1 Layer 2 Layer 3 Layer 4 Description Option WARN The WARNING process log (up to 99 processes) can be confirmed. FAIL The FAIL process log (up to 99 processes) can be confirmed.

  • Page 38: Display Of Error Code On Front Panel

    DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 4. Description of Functions 4-14 Display of ERROR Code on Front Panel When FAIL or WARNING occurs, the corresponding ERROR code is displayed on the front panel. Table 4-11: Error code list (FAIL) FAIL name Code...

  • Page 39: Indication In The Event Of Multiple Errors

    DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 4. Description of Functions Table 4-12: Error code list (WARNING) WARNING name Code Error content W10* WRN SUB UNIT Warning in the secondary unit with the P/S connection established Internal communication error => If this persists, the process shifts...

  • Page 40: How To Operate

    DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 5. How to Operate 5. How to Operate This section describes how to operate and handle this power supply. 5-1 How to Operate in LOCAL Mode This section describes the power operation in the LOCAL mode.
  • Page 41 DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 5. How to Operate ③ The current operation mode is displayed. LOCL: Select this for use in the LOCAL mode. HOST： Select this for use in the HOST mode. USER： Select this for use in the USER mode.

  • Page 42: Parameter Setting Through Front Panel Operation

    DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 5. How to Operate 5-1-2 Parameter setting through front panel operation Pressing the MENU button switches to the menu screen. Move the cursor onto the target menu and press the ENT button to move to the layer of that menu.

  • Page 43: How To Operate In User Mode

    DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 5. How to Operate ◀ button ENT button Use the ◄ ►buttons to select the number of digits, and the ▲▼ buttons to increase or decrease the value or change the settings. ◄ ► ▲ ▼...
  • Page 44 DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 5. How to Operate Table 5-1: Pin assignment of USER1 PORT Voltage Pin No. Signal name Type Return Detail level COMA Analog signal common for USER1 PORT. VOUT Output voltage monitor signal IOUT Output current monitor signal *1...
  • Page 45 DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 5. How to Operate Table 5-2: USER 1 PORT connecting equivalent circuit Signal type Signal Equivalent circuit DC ON PLC等 PLC etc. DC-10-D/DC-20-D側 DC Power Supply side PARAMETER +15V RESET Digital input PSEL 3.3kΩ ISEL INTERLOCK READY PLC etc.

  • Page 46: Pin Assignment Of User2 Port

    DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 5. How to Operate 5-2-2 Pin assignment of USER2 PORT The pin assignment of USER2 PORT is as follows: For wiring, connect with an external control device, such as a PLC, in reference to the [Table 5-4: USER2 PORT connection equivalent circuit] section.

  • Page 47: Recommended Digital I/O Connection Circuit

    DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 5. How to Operate 5-2-3 Recommended digital I/O connection circuit Fig. 5-1 shows the recommended USER IO PORT digital I/O connection circuit. AD　INTERFACE PLC etc. DC Power Supply AUX +15V When using AUX of the power supply.

  • Page 48: How To Operate In Host Mode

    DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 5. How to Operate 5-3 How to Operate in HOST Mode In the HOST mode, it is possible to control directly from the HOST computer via SERIAL communication. For instructions on how to operate and set, refer to the items in Chapter 6: SERIAL Communication.

  • Page 49: Serial Communication

    DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 6. SERIAL Communication 6. SERIAL Communication This section describes serial communications according to RS-232C, RS-485. 6-1 Overview of SERIAL Communications It has a communication interface that can be accessed from SERIAL PORT. It can be operated directly by serial communication from the HOST computer.

  • Page 50: How To Connect

    DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 6. SERIAL Communication 6-1-2 How to connect RS-232C communication 2 pin is RXD and 3 pin is TXD. Use a cross cable when connecting to the HOST computer. The cable connecting between HOST and DC power supply shall be 10m or less at the longest in length.

  • Page 51: How To Set Serial Communication

    DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 6. SERIAL Communication 6-2 How to Set SERIAL communication When using RS-232C or RS-485, please set according to the following procedure. Operation button 操作ボタン RESET MENU Figure 6-4 Operation button (Front) ERROR ○ HOST communication setting For operation according to RS-232C or RS-485 communications, change the operation mode to the [HOST] or [HST+] setting.
  • Page 52 DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 6. SERIAL Communication ○ Network address setting When controlling multiple units on a network via RS-485 communication, set the address of each unit. The addresses are set from the front panel. The setting method is as follows: ●...
  • Page 53 DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 6. SERIAL Communication ● Setting of communication rate The communication rate between the power supply and the HOST computer can be set. The default value is 9,600 bps. If the communication state may become unstable, in such a case where the RS-485 compliant cable length is too long, it is recommended to decrease the communication rate for use.

  • Page 54: Communication Message Packet

    DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 6. SERIAL Communication 6-3 Communication Message Packet A communication message packet consists of four types of fields as follows. • Header field: (SOF, each address, command + data field length information) • Command field: (See the command list to be described later.) •...
  • Page 55 DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 6. SERIAL Communication ● Command field The command field consists of 1byte values (0x00 to 0xFF). The command type consists of Write and Read. The Write command changes parameter set values or executes each operation. The Read command is a command that requests parameter settings, data, and status information.

  • Page 56: Communication Protocol

    DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 6. SERIAL Communication 6-4 Communication Protocol The following shows the step of communication transactions between power supply and HOST computer. HOST Power Supply Message メッセージ送信 transmitting Message メッセージ受信 receiving ACK/NAK ACK / NAK待ち waiting ACK/NAK ACK / NAK送信...
  • Page 57 DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 6. SERIAL Communication For a Write command: An acknowledgment message containing a 1byte command status is sent to the HOST side. * For details on the command status, refer to the command status in [Table 6-3].
  • Page 58 DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 6. SERIAL Communication An example of data transmission/reception is shown below. ○Example of transmission/reception of Write command When 20kW is sent to the power supply by Command 0x12 (the LEVEL HI-RES signal setting): When the Address of the power supply is set to 1:...
  • Page 59 DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 6. SERIAL Communication ○Example of transmission/reception of Read command For a query to the power supply about the maximum electric power of Secondary 1 (DC-20-D) by Command 0x85 (READ UNIT POWER) When the Address of the power supply is set to 30:...

  • Page 60: Commands Between Host And Power Supply

    DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 6. SERIAL Communication 6-5 Commands between HOST and Power Supply Write commands： The commands shown below are used to change various parameters for the power supply or to execute specific operations for the power supply. * During output operation, only 0x10 (OFF) and 0x12 (LEVEL) are accepted. The other commands are not accepted.
  • Page 61 DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 6. SERIAL Communication Write Commands Transmission data Response data Read Command Commands Command Capacity Description Capacity Description Name Used to set the limit value of the ignition voltage. It can be set in steps of 10 V.
  • Page 62 DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 6. SERIAL Communication Write Commands Transmission data Response data Read Command Commands Command Capacity Description Capacity Description Name Used to set the delay time for the micro-arc process. The micro-arc process is disabled when it is set to 0 us.
  • Page 63 DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 6. SERIAL Communication Write Commands Transmission data Response data Read Command Commands Command Capacity Description Capacity Description Name Resets the arc count. 0x2D 1byte Cumulative MARC, HARC count reset: 0x00 1byte STATUS RESET ARC Cumulative MARC count reset:...
  • Page 64 DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 6. SERIAL Communication Write Commands Transmission data Response data Read Command Commands Command Capacity Description Capacity Description Name Used to set the rising time of ignition operation. It can be set in steps of 1 ms.
  • Page 65 DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 6. SERIAL Communication Write Commands Transmission data Response data Read Command Commands Command Capacity Description Capacity Description Name Used to set the time for the micro-arc signal for USER1 PORT. ： 100us 0x00 1byte 0x5F 1byte...
  • Page 66 DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 6. SERIAL Communication Write Commands Transmission data Response data Read Command Commands Command Capacity Description Capacity Description Name Used to set the right to make the setting for PARAMETER switching. This can be set when CONTROL MODE is CONTROL [CSTM].
  • Page 67 DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 6. SERIAL Communication Read commands The following commands are used to read various parameters and the product status. * When the data field is two or more bytes, the byte order is little endian. Table 6-5: Read commands list...
  • Page 68 DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 6. SERIAL Communication Read Commands Transmission data Response data Write Command Commands Command Capacity Description Capacity Description Name If FAIL occurs in a P/S-connected system, this responds with the unit with FAIL. The corresponding bit in the P/S system is set to If FAIL occurs in multiple units, the corresponding bits are all set to ON.
  • Page 69 DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 6. SERIAL Communication Read Commands Transmission data Response data Write Command Commands Command Capacity Description Capacity Description Name Responds with the output command value. The response value depends on the number of units to be connected and the output control mode.
  • Page 70 DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 6. SERIAL Communication Read Commands Transmission data Response data Write Command Commands Command Capacity Description Capacity Description Name Responds collectively with each value of the electric power, voltage, current, and condition (Status). Electric power response command:...
  • Page 71 DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 6. SERIAL Communication Read Commands Transmission data Response data Write Command Commands Command Capacity Description Capacity Description Name Responds with the micro-arc processing time. READ MARC ACT TIME HI RES (0xCE) can be used to set even higher resolution.
  • Page 72 DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 6. SERIAL Communication Read Commands Transmission data Response data Write Command Commands Command Capacity Description Capacity Description Name Responds with the voltage-based arc detection READ level. 0x2B 0xAB 2byte 0V, 40V～500V → 0, 40～500 LEVEL 40 ：...
  • Page 73 DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 6. SERIAL Communication Read Commands Transmission data Response data Write Command Commands Command Capacity Description Capacity Description Name Responds within the tolerance range of 10% or more of the rating for the setpoint. READ SETPOINT 0x56...
  • Page 74 DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 6. SERIAL Communication Read Commands Transmission data Response data Write Command Commands Command Capacity Description Capacity Description Name Responds with the rising time for ignition operation. READ *Refer to [4-12. Description of Ramp Up Function.] 0xCC...
  • Page 75 DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 6. SERIAL Communication Read Commands Transmission data Response data Write Command Commands Command Capacity Description Capacity Description Name Responds with the micro-arc count during the last READ output operation. 0xD6 4byte 0xD6 LAST MARC The maximum count is 99,999,999.
  • Page 76 DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 6. SERIAL Communication Read Commands Transmission data Response data Write Command Commands Command Capacity Description Capacity Description Name Detected to FAIL when HARC is detected a set number of times. READ It can be set in steps of 1 time.

  • Page 77: Maintenance

    DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 7. Maintenance 7. Maintenance We describe the contents of necessary maintenance in order to use this power supply for a long time. Ignorance of maintenance work accelerates wear-out of the unit and raises the probability of failure and malfunctioning...

  • Page 78: About Recommended Replacement Parts

    DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 7. Maintenance 7-2 About Recommended Replacement Parts For a longer use of the power supply, we recommend periodical overhauls. See Table 7-1 which shows the recommended replacement parts. For an overhaul, be sure to contact us.

  • Page 79: Troubleshooting

    DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 8. Troubleshooting 8. Troubleshooting This chapter describes how to take measures against trouble. 8-1 Troubleshooting In the event of a trouble, do the initial diagnosis according to the procedure below. If the symptom is not improved even after troubleshooting, contact us.
  • Page 80 DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 8. Troubleshooting Symptom Possible cause Measure Turn OFF/ON the breaker. F12* SOFTWARE failure If the condition is not improved, replac FAIL PROCESS e the product. (1) P/S communication failure (2) Serial communication time out Turn OFF/ON the breaker.
  • Page 81 DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 8. Troubleshooting Symptom Possible cause Measure Check the set values of the ARC and FAIL conditions. When harc is detected for the set number of F26* If there is no problem with the setting FAIL ARC ABSO...
  • Page 82 DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 8. Troubleshooting Symptom Possible cause Measure Check the load impedance. If the symptom frequently occurs even W21* Occurred in the event of an output WRN OVER VOLT though there is no problem with the load, overvoltage.

  • Page 83: Appendix

    9. Appendix 9-1. External View of DC Power Supply and Warning Label Affixing Position * DC-10-D, DC-20-D and DC-10-DH, DC-20-DH have different weight and model stickers. Figure 9-1: External view of power supply (a model without EtherCAT option [E]) -74-...
  • Page 84 DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 9 Appendix Figure 9-2: External view of power supply (a model with EtherCAT option [E]) -75-...

  • Page 85: About Compliance With China Rohs

    DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 9 Appendix 9-2 About Compliance with China RoHs 中华人民共和国中国电子行业标准SJ / T11364-2014（中国RoHS2） 中華人民共和国中国電子業界標準SJ / T11364-2014（中国RoHS2） Table 9-1:有毒有害物质或元素/ Toxic or Harmful Substances or Elements 部件名称/ Cr6+ PBDE Part name ○ ○ ○ ○ ○ ○ 印刷电路板/Printed board 电子零件/Electronic parts ○...

  • Page 86: About Ce Declaration Of Conformity

    DC Power Supply 【DC-10-D/DC-20-D/DC-10-DH/DC-20-DH】 9 Appendix 9-3 About CE Declaration of Conformity -77-...

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