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Ulvac RFS-1305L Instruction Manual

Solid-state rf power supply matching box
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Solid-State RF Power Supply
Matching Box
Model:
RF Power Supply
Control Panel
Matching Box
Matching Controller
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RFS-1305L
/ RFS-1310L
RFS-1350LH
/ RFS-13100L
RFS-2775L
RFP-L
MBX-1305L
/ MBX-1305Lu
MBX-1330L
/ MBX-1330Lu
MBX-13100L
/ MBX-2750L
AMC-8L
/ AMC-9L
AMC-8LT
/ AMC-9LT
* Read this manual before using the system .
Store this manual carefully so that it can be used at anytime.
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/ RFS-1330L
/ RFS-2750L
/ MBX-1310L
/ MBX-1350L
/ MBX-2775L
Revised 17th edition 08/29/2023
RF0029E-17
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ULVAC,Inc.
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Summary of Contents for Ulvac RFS-1305L

  • Page 1 RF0029E-17 Solid-State RF Power Supply Matching Box Model: RF Power Supply RFS-1305L / RFS-1310L / RFS-1330L RFS-1350LH / RFS-13100L / RFS-2750L RFS-2775L Control Panel RFP-L Matching Box MBX-1305L / MBX-1305Lu / MBX-1310L MBX-1330L / MBX-1330Lu / MBX-1350L MBX-13100L / MBX-2750L...
  • Page 2 The content listed in this manual is subject to change without prior notice because of changes in system specifications or system improvements. The copyright of this manual and safety guide is held by the ULVAC Inc.  You are forbidden from copying all or a portion of this manual without the consent of the ULVAC Inc.
  • Page 3 RF Power Supply and Matching Box Introduction 1. Safety precautions Most accidents are attributed to carelessness during operation, inspection, maintenance, or repair. Failure to comply with the safety precautions or neglecting to anticipate danger causes accidents to happen more easily. Accidents can be prevented before they happen by anticipating potentially dangerous situations at an early stage.
  • Page 4 RF Power Supply and Matching Box Introduction 2. Safety symbols Safety symbols are used throughout this manual and labeled on the system to call the operator's attention to safety. The terminology used in safety symbols is classified below. This symbol indicates the possibility of impending death or serious injury when the hazard cannot be avoided.
  • Page 5 7) Secondary damage, process patents, and/or products manufactured by your company using this system that has occurred from a system defect 8) When a defect is judged by ULVAC technicians to have occurred because usage did not meet the system's usage conditions 9) Consumables (consumable parts are listed in "Chapter 6.
  • Page 6 If you have determined there is a malfunction or if you have any questions, contact one of the locations listed below. When contacting ULVAC, please inform us of the product names, model numbers, serial numbers, and about the symptoms of the problem in as much detail as possible.

  • Page 7: Table Of Contents

    RF Power Supply and Matching Box Table of Conte Table of Contents 1. For Safe Operation ..................................... 1 1-1. Precautions when handling the system ..........................1 1-2. Warning label/nameplate locations ............................. 2 1-3. Contact information .................................. 2 2. Overview ......................................... 3 2-1.
  • Page 8 RF Power Supply and Matching Box Table of Conte 5-2-2. Remote operation method (external control) ..................... 55 5-2-3. Remote operation method (external preset operation) .................. 56 5-3. Matching adjustment ................................58 5-3-1. Matching fundamentals ............................... 58 5-3-2. Matching adjustment ..............................59 5-3-3.

  • Page 9: For Safe Operation

    RF Power Supply and Matching Box 1. For Safe Operation 1. For Safe Operation In order to safely use the system, this chapter describes the precautions, locations of warning labels, and contact information for safe operation. 1-1. Precautions when handling the system This section describes safety precautions for the system.

  • Page 10: Warning Label/Nameplate Locations

    Do not use gasoline or organic solvents. If a label is damaged, missing, or illegible, contact ULVAC or an exclusive dealer. A nameplate is also affixed to the top surface of the power supply. Take special care to ensure the nameplate is always legible.

  • Page 11: Overview

    RF Power Supply and Matching Box 2. Overview 2. Overview This chapter describes the system's features, configuration, and specifications. 2-1. Introduction This system has been designed for plasma generation in RF sputtering, plasma CVD, etching, and other plasma processing applications. This system combines an RF power supply and matching box. It can continuously output its rated power at a single frequency of 13.56/27.12 MHz for high frequency loads.

  • Page 12: Configuration

    RF Power Supply and Matching Box 2. Overview 2-3. Configuration This system consists of an RF power supply, an RF power supply control panel, a matching box, and a matching controller. The system's configuration is shown in "Figure 2-1. System configuration". The basic configuration requires the devices below.
  • Page 13 RF Power Supply and Matching Box 2. Overview Table 2-1 Matching system Matching box Matching controller Comments MBX-1305L MBX-1305Lu MBX-1310L MBX-1330L MBX-1350L MBX-13100L AMC-8L / AMC-9L For inverted-L matching network MBX-2750L MBX-2775L MBX-1330Lu For inverted-T matching network AMC-8LT / AMC-9LT...

  • Page 14: Specifications

    This system consists of an RF power supply, a matching box, and a matching controller. The specifications for each of these components are listed below. Table 2-2 RF power supply individual specifications Specification value Classification Item RFS-1305L Phase, frequency Single phase, 50/60 Hz Input voltage 200 V/220 V ±10% (180 to 242 V)
  • Page 15 RF Power Supply and Matching Box 2. Overview Table 2-3 RF power supply individual specifications Classification Item Specification value RFS-1310L RFS-1330L Input Phase, frequency Single phase, 50/60 Hz Three phase, 50/60 Hz Input voltage 200 V/220 V ±10% (180 to 242 V) Fluctuation range Input capacity 1.7 kVA or less...
  • Page 16 RF Power Supply and Matching Box 2. Overview Table 2-4 RF power supply individual specifications Classification Item Specification value RFS-1350LH Input Phase, frequency Three phase, 50/60 Hz Input voltage 200/220 VAC ±10% (180 to 242 V) Fluctuation range Input capacity 8 kVA or less Connector N/MS3102A22-22P...
  • Page 17 RF Power Supply and Matching Box 2. Overview Table 2-5 RF power supply individual specifications Classification Item Specification value RFS-13100L Input Phase, frequency Three phase, 50/60 Hz Input voltage 200 V/220 V ±10 % (180 to 242 V) Fluctuation range Input capacity 15.5 kVA or less Connector...
  • Page 18 RF Power Supply and Matching Box 2. Overview Table 2-6 RF power supply individual specifications Classification Item Specification value RFS-2750L Input Phase, frequency Three phase, 50/60 Hz Input voltage 200 V/220 V ±10% (180 to 242 V) Fluctuation range Input capacity 9 kVA or less Connector CE05-2A32-17PD-D...
  • Page 19 RF Power Supply and Matching Box 2. Overview Table 2-7 RF power supply individual specifications Classification Item Specification value RFS-2775L Input Phase, frequency Three phase, 50/60 Hz Input voltage 200 V/220 V ±10% (180 to 242 V) Fluctuation range Input capacity 13 kVA or less Connector CE05-2A32-17PD-D...
  • Page 20 RF Power Supply and Matching Box 2. Overview Table 2-8 RF power supply common specifications Classification Item Specification value Protective Pf overpower Controls Pf power RF droop functions Pr overpower Controls Pf power RF droop RF amplifier overcurrent Controls Pf power RF droop RF amplifier overvoltage Controls Pf power...
  • Page 21 RF Power Supply and Matching Box 2. Overview Table 2-9 Matching box individual specifications Classification Item Specification value MBX-1305L MBX-1305Lu 13.56 MHz ± 0.05% RF input Frequency Rated power 50 W to 500 W or lower Input impedance 50 Ω RF output Permissible 2.5 kVpp or less (limited by capacitor's withstand current)
  • Page 22 RF Power Supply and Matching Box 2. Overview Table 2-10 Matching box individual specifications Classification Item Specification value MBX-1310L MBX-1330L 13.56 MHz ± 0.05% RF input Frequency Rated power 50 W to 1 kW or lower 150 W to 3 kW or lower Input impedance 50 Ω...
  • Page 23 RF Power Supply and Matching Box 2. Overview Table 2-11 Matching box individual specifications Classification Item Specification value MBX-1330Lu 13.56 MHz ± 0.05% RF input Frequency Rated power 150 W or higher, 3.0 kW or less Input impedance 50 Ω RF output Permissible 15 kVpp or less...
  • Page 24 RF Power Supply and Matching Box 2. Overview Table 2-12 Matching box individual specifications Classification Item Specification value MBX-1350L MBX-13100L 13.56 MHz ± 0.05% RF input Frequency Rated power 250 W to 5 kW or lower 500 W to 10 kW or lower Input impedance 50 Ω...
  • Page 25 RF Power Supply and Matching Box 2. Overview Table 2-13 Matching box individual specifications Classification Item Specification value MBX-2750L 27.12 MHz ± 0.05% RF input Frequency Rated power 250 W or higher, 5.0 kW or less Input impedance 50 Ω RF output Permissible 15 kVpp or less...
  • Page 26 RF Power Supply and Matching Box 2. Overview Table 2-14 Matching box individual specifications Classification Item Specification value MBX-2775L 27.12 MHz ± 0.05% RF input Frequency Rated power 375 W or higher, 7.5 kW or less Input impedance 50 Ω RF output Permissible 15 kVpp or less...
  • Page 27 AMC-9L(T): 480 W x 300 D x 50 H (not including protrusions) Weight Approx. 5 kg Table 2-16 VPP/VDC rating RF system VPP rating VDC rating RFS-1305L / MBX-1305L-LV 50 ～ 1000 V -50V ～ -1000 V RFS-1310L / MBX-1310L-LV RFS-1330L...
  • Page 28 RF Power Supply and Matching Box 2. Overview Table 2-17 RF system cooling water - Water quality Item Reference value Water temperature 25°C or less Specific resistance 25°C 5 kΩ/cm or higher 25°C 7 to 9 Chlorine ions 100 ppm or lower Sulfate ions 100 ppm or lower Total iron...

  • Page 29: Setup

    RF Power Supply and Matching Box 3. Setup 3. Setup The section describes necessary preparation and precautions before operation of the system. 3-1. Accessories The following products are included with the RF power supply and automatic matching controller. Table 3-1 RF power supply accessories Name Comments Quantity...

  • Page 30: Installation And Drilling Rack Holes

    RF Power Supply and Matching Box 3. Setup 3-2. RF power supply installation Install the RF power supply according to the following procedure. Caution This system cannot be adapted for lightning surges, spike voltage, or momentary power failures. If a lightning surge, spike voltage, or momentary power failure is input from the power receiving facilities, the system may be damaged or malfunction.

  • Page 31: Matching Box Installation

    RF Power Supply and Matching Box 3. Setup 3-3. Matching box installation Install the matching box according to the following procedure. 3-3-1. Matching box installation location Since all wiring acts as an inductor at the frequency (13 MHz/27 MHz) used by the RF power supply, decide on an installation location for the matching box where the distance between the load and the matching box's RF access port is as short as possible.

  • Page 32: System Wiring

    RF Power Supply and Matching Box 3. Setup 3-5. System wiring 3-5-1. Connecting cables First check the connector names and dedicated cables between each unit, then see "Figure 3-3 System wiring" and connect the cables. See "Table 3-3 Cable list" for the cables used. Please prepare the wiring between the matching box and the chamber and the GND wiring yourself.
  • Page 33 RF Power Supply and Matching Box 3. Setup Table 3-3 Cable list Type Name Comments AC INPUT INPUT cable The factory-side terminal is untreated. 13 MHz 1 kW to 3 kW: 3.5 sq 13 MHz 5 kW: 5.5 sq 13 MHz 10 kW: 14 sq 27 MHz 5 kW: 22 sq...

  • Page 34: Input Power Supply Wiring

    RF Power Supply and Matching Box 3. Setup 3-5-2. Input power supply wiring Warning First connect the supplied input cable's connector to the RF power supply and then connect the other end. Turn off your main breaker before wiring the input power supply. * Wire the pins for the RF power * Wire the pins for the RF power supply input connector as shown below...

  • Page 35: Connecting The Ground Terminal

    RF Power Supply and Matching Box 3. Setup 3-5-3. Connecting the ground terminal For the ground connection, see "Figure 3-5 Grounding the system" and securely connect the system to ground. Warning High voltages (several kilovolts) are generated by resonance in the matching box. You may get an electric shock if the system is not properly grounded.

  • Page 36: Connecting The Water Cooling Tube

    RF Power Supply and Matching Box 3. Setup 3-5-4. Connecting the water cooling tube An optional flow meter can be attached to the 13 MHz 1 kW and 13 MHz 3 kW RF power supplies. When using the flow meter, connect it to the "OUT" side of the RF power supply's cooling water connector. Connect the flow meter's wire to the "FLOW"...

  • Page 37: Functions

    RF Power Supply and Matching Box 4. Functions 4. Functions This chapter describes the functions of each unit. 4-1. RF power supply The RF power supply can be run locally by the control panel and it can be run remotely by an external analog signal.

  • Page 38: Control Panel Functions And Explanations

    RF Power Supply and Matching Box 4. Functions 4-1-2. Control panel functions and explanations 1) Fluorescent display Shows the setting values for each mode's functions. Shows measurement values. Shows the operating status. 2) Operation keys ON: Outputs RF. OFF: Stops RF. (Doubles as the RESET key.) Left key/right key: Can select menus and input an increase or decrease in setting values.

  • Page 39: Measurement Display

    RF Power Supply and Matching Box 4. Functions 4-1-3. Measurement display Table 4-2 Power supply measurement display list Item Display value Comments Traveling Traveling wave power (Pf) wave power Reflected Reflected wave power (Pr) wave power VDC voltage Voltage at the matching box's output terminal VPP voltage Voltage at the matching box's output terminal...

  • Page 40: External Control Terminal Pin Assignments

    RF Power Supply and Matching Box 4. Functions Table 4-4 ALARM content details 【MB COVER OPEN】 Displayed when the cover is open or the fan stops. After closing the cover, clear with RESET. 【COVER OPEN/MB-FAIL】 【INTERLOCK】 When the external interlock signal is not input (OPEN) When the user-side error is cleared, recover with RESET.
  • Page 41 RF Power Supply and Matching Box 4. Functions Table 4-5 RF power supply INTERFACE pin assignments Connector name Pin number Signal name Comments Input/ output INTERFACE 1-14 External interlock Close to release the interlock Input (D-sub 25 female) 2-15 RESET Close to input reset Input 3-16...
  • Page 42 RF Power Supply and Matching Box 4. Functions Inside power supply Ext Control Device EXT Interlock Input※ RESET※ RF ON command※ 25V 100mA max RF ON Answer (NO) 25V 100mA max ALARM (NO) 25V 100mA max ＡＲＣ (NO) 25V 100mA max Interlock Response (NO) POWER SET...

  • Page 43: Caution When Using The External Control Terminal (Interface)

    RF Power Supply and Matching Box 4. Functions 4-1-6. Caution when using the external control terminal (INTERFACE) If connecting an inductive load (relay or coil) to the output of the external control terminal, insert a diode or use a relay with a surge absorbing element so that counter-electromotive force is not generated. +12V Counter EMF prevention diode...

  • Page 44: Rf Power Supply Parameters

    RF Power Supply and Matching Box 4. Functions 4-1-7. RF power supply parameters How to start the configuration menu On the operation mode selection screen, simultaneously press the "ESC" key and "ENT" key for 3 seconds or more to open the configuration menu. 　RF　OPERATION　SELECT 　<PANEL>...
  • Page 45 RF Power Supply and Matching Box 4. Functions ∙ Internal arcing shut off Operates when the reflected wave feedback A/D value recognized by the CPU is the set value or higher. (Sampling frequency 200 μs.) ∙ High-speed arcing shut off Hardware detection. When the reflected wave feedback's voltage becomes higher than the set value, it is shut off by the logic.

  • Page 46: Automatic Matching Controller Functions

    RF Power Supply and Matching Box 4. Functions 4-2. Automatic matching controller functions With the automatic matching controller, matching by automatic control and matching by manual control is possible. It can also be controlled by a variable capacitor operation via the external analog signal. 4-2-1.

  • Page 47: Control Panel Functions And Explanations

    RF Power Supply and Matching Box 4. Functions Table 4-7 Part names Part names Description 1. AC POW connector The connector that supplies 100 VAC. 2. DET connector Connect the DET cable. 3. AMC connector Connect the AMC cable. 4. AMC.EXT connector Wire when using external control.

  • Page 48: Automatic Matching Controller Amc.ext Pin Assignments

    RF Power Supply and Matching Box 4. Functions 4-2-3. Automatic matching controller AMC.EXT pin assignments Table 4-8 Automatic matching controller AMC.EXT pin assignments Signal name Contents Input/ number output AUTO/MANUAL Close: Enabled only when ANALOG or PR·RC mode Input switching The controller section switches to manual mode, shifts the positions of the variable capacitors according to the TUNE/MATCH analog preset input voltage.

  • Page 49: Automatic Matching Controller Preset Pin Assignments

    RF Power Supply and Matching Box 4. Functions Inside AMC Ext. Control Device AUTO/MANUAL switch* 25V 100mA max BUSY 25V 100mA max MANUAL response ＴＵＮＥ analog preset ＭＡＴＣＨ preset ＴＵＮＥ monitor ＭＡＴＣＨ monitor 25V 100mA max STANDBY signal Figure 4-7 Automatic matching controller AMC.EXT pin assignments * Please prepare contacts with a capacity of 12 VDC and 12 mA or higher.
  • Page 50 RF Power Supply and Matching Box 4. Functions Figure 4-8 Automatic matching controller PRESET pin assignments (AMC-9L/AMC-9LT) * Please prepare contacts with a capacity of 12 VDC and 12 mA or higher. * If using semiconductor devices, please prepare devices with a leakage current 0.1 mA or lower. * Caution when using the external control terminal.
  • Page 51 RF Power Supply and Matching Box 4. Functions Table 4-10 Preset number selection (AMC-9L/AMC-9LT) SELECT NO PRESET NO ○ ○ ○ ○ ● ○ ○ ○ ○ ● ○ ○ ● ● ○ ○ ○ ○ ● ○ ● ○ ●...

  • Page 52: Caution When Using The External Control Terminals (Amc.ext/Preset)

    RF Power Supply and Matching Box 4. Functions Open AUTO/MANUAL switch Close （AMC.EXT[1-9]） Open SELECT1 Close （SELECT[3-11]） 50 ms or more SELECT2 （SELECT[4-12]） SELECT3 （SELECT[5-13]） SELECT4 （SELECT[6-14]） Open RECALL Close （SELECT[2-10]） 100 ms or more BUSY （AMC.EXT[2-10]） Variable capacitors operating * Loading a preset from PRESET No.

  • Page 53: Matching Controller Parameters

    4. Functions RF Power Supply and Matching Box 4-2-6. Matching controller parameters How to start the configuration menu On the operation mode selection screen, simultaneously press the "ESC" key and "ENT" key for 3 seconds or more to open the configuration menu. 　AMC　CONTROL　SELECT 　<PANEL>...

  • Page 54: Operation

    RF Power Supply and Matching Box 5. Operation 5. Operation 5-1. Operating the RF power supply 5-1-1. Setup before operation Before energizing the system, check that the cables between each unit are correctly wired. Feed cooling water to the system. Make sure the water volume is the specified rate. When the cooling water flow stabilizes, turn on the automatic matching controller's (AMC-9L) main switch.

  • Page 55: Local Operation Method (Panel Operation)

    RF Power Supply and Matching Box 5. Operation 5-1-2. Local operation method (panel operation) 1) Operation mode menu selection To change the operation mode, press the "ESC" key several times to display the configuration screen, then select <PANEL> with the right and left keys and press the "ENT" key. 　RF　OPERATION　SELECT 　<PANEL>...
  • Page 56 RF Power Supply and Matching Box 5. Operation Increase or decrease the settings with the arrow keys. 　Fw : 0.00/0.01　kW 　Re : 0　W (Power settings screen) Press the left key to move the cursor position to the left. If there is no value in the destination, the following occurs. 0 →...

  • Page 57: Remote Operation Method (External Control)

    RF Power Supply and Matching Box 5. Operation Press the "ENT" key and the cursor disappears. 　Fw : 1.01/1.01　kW 　Re : 0　W (Power settings screen) 5-1-3. Remote operation method (external control) 1) Operation mode menu To change the operation mode, press the "ESC" key several times to display the configuration screen, then select the <ANALG>...

  • Page 58: Rf Output Timing

    Minimum Model value 30 ms RFS-1310L RFS-1330L RFS-1350LH RFS-2750L RFS-2775L 50 ms RFS-1305L 200 ms RFS-13100L * Can be changed with the user soft start function Press ON key (Soft recognition) RF output 10 ms Rise time Figure 5-1 RF output timing chart...

  • Page 59: Measurement Value Display

    RF Power Supply and Matching Box 5. Operation 5-1-5. Measurement value display 1) VPP, VDC menu If the up key is pressed while displaying the measurement screen in normal operation, the VPP and VDC measurement display is shown, but only while pressed. Press the "ENT" key and the screen display can be fixed as the VPP, VDC measurement display.

  • Page 60: Automatic Matching Controller Operation

    RF Power Supply and Matching Box 5. Operation 5-2. Automatic matching controller operation This section explains the local operation (panel operation) method, remote operation (external control), and the external preset (external control) method. 5-2-1. Local operation method (panel operation) 1) Operation mode menu To change the operation mode, press the "ESC"...
  • Page 61 RF Power Supply and Matching Box 5. Operation During manual matching mode, you can set a preset or perform a recall operation (operation to move to the positions of the variable capacitors set by a preset) by pressing the "ENT" key. 3)-1 Recall operation During manual mode, press the "ENT"...
  • Page 62 RF Power Supply and Matching Box 5. Operation Select PRESET to display the preset configuration screen. 　MATCH [ 10% ] TUNE [ 90% ] 　[ PRESET-1 ] [　1 ] (Preset configuration screen) Select the number you wish to register (1 to 16) and press the "ENT" key to display the set preset name screen.

  • Page 63: Remote Operation Method (External Control)

    RF Power Supply and Matching Box 5. Operation 5-2-2. Remote operation method (external control) 1） Operation mode menu To change the operation mode, press the "ESC" key several times to display the configuration screen, then select <ANALOG> with the left and right keys and press the "ENT" key. 　AMC　CONTROL　SELECT 　PANEL PR・RC <ANALOG>...

  • Page 64: Remote Operation Method (External Preset Operation)

    RF Power Supply and Matching Box 5. Operation ON/OFF MANU MANU/AUTO AUTO ９９ TUNE/MATCH ANALOG PRESET ０ ９９ TUNE/MATCH POSITION ０ Figure 5-2 Timing chart during external analog recall operation 5-2-3. Remote operation method (external preset operation) 1) Operation mode menu * The external control terminal (PRESET) function is an AMC-9L only function.
  • Page 65 RF Power Supply and Matching Box 5. Operation 3) Save external preset The current MBX TUNE and MATCH positions are saved to the specified PRESET number by closing PRESET connector pins 1-9. Open AUTO/MANUAL switch Close （AMC.EXT[1-9]） Open SELECT1 Close （SELECT[3-11]）...

  • Page 66: Matching Adjustment

    RF Power Supply and Matching Box 5. Operation 4) Load external preset value (recall operation) After selecting the preset number with the SELECT(1 to 4) signal, move to the saved MBX TUNE and MATCH positions by closing PRESET connector pins 2-10. Open AUTO/MANUAL switch Close...

  • Page 67: Matching Adjustment

    RF Power Supply and Matching Box 5. Operation Figure 5-5 Basic matching circuit Warning High voltage is present in the matching box. Never put your hand into the matching box when energized. Even if not energized, the coil and variable capacitors in the matching box may retain a charge.

  • Page 68: Increasing And Decreasing The Number Of Coil Short Circuits

    RF Power Supply and Matching Box 5. Operation Can match at low power but Pr A variable capacitor in the matching Short the coil across 2 to 3 turns. increases abruptly if Pf is box is abnormally discharging. increased. Coaxial connector poor contact or Correct poor contact or poor wiring contact between MBX and insufficient withstanding voltage.

  • Page 69: Adding A Fixed Capacitor

    RF Power Supply and Matching Box 5. Operation 5-3-4. Adding a fixed capacitor When Pr is at its minimum, it will be necessary to add a fixed capacitor if the position of the MATCH variable capacitor is within 0% to 100% and the TUNE variable capacitor is near 0% or 100%. In this case, add a capacitor as described next.

  • Page 70: Maintenance

    Note: In order to use this system for many years to come, please ask ULVAC to periodically overhaul the system using the above table as a reference.

  • Page 71: Matching Box Maintenance And Inspection

    RF Power Supply and Matching Box 6. Maintenance Danger Never open the power supply's cover when energized. The voltage generated by this power supply is sufficient enough to pose a danger to human life. If by some chance a person touches this high voltage current, it will lead to a serious accident.
  • Page 72 * In order to use this system for many years to come, please ask ULVAC to periodically overhaul the system using the above table as a reference.

  • Page 73: Troubleshooting

    PFC module cannot operate and the alarm sounds. Check the phase order. If the problem is not solved with the above, possible internal component damage. Contact ULVAC. 3 Operation panel indicates External control connector (INTERFACE) pins 1-14 are not "INTERLOCK", RF cannot be turned...

  • Page 74: Troubleshooting Related To The Matching Box

    Not discharging. Check the discharge conditions like gas pressure, etc. 3 Variable capacitors not Auto matching controller problems Contact ULVAC. operating in manual mode. Mechanical problems Check the coupling connecting the variable capacitors and motor to see if it slides.

  • Page 75: Reference Materials

    8. Reference materials The following materials are included with this manual as a reference. ● RFS-1305L External view ● RFS-1310L External view ● RFS-1330L External view ● RFP-L External view ● RFS-1350L External view ● RFS-13100L External view ● RFS-2750L External view ●...
  • Page 76 RF Power Supply and Matching Box Figure 8-1 RFS-1305L external view...
  • Page 77 RF Power Supply and Matching Box * The flow meter is an optional accessory. Figure 8-2 RFS-1310L external view...
  • Page 78 RF Power Supply and Matching Box ＩＮＴＥＲＦＡＣＥ ＲＳ－２３２Ｃ ＣＯＮＴＲＯＬ * The flow meter is an optional accessory. Figure 8-3 RFS-1330L external view...
  • Page 79 RF Power Supply and Matching Box Figure 8-4 RFS-1350LH external view...
  • Page 80 RF Power Supply and Matching Box Figure 8-5 RFP-L external view...
  • Page 81 RF Power Supply and Matching Box Figure 8-6 RFS-13100L external view...
  • Page 82 RF Power Supply and Matching Box RFS -2775L 27MHz 7.5kW RF GENERATOR MAIN Figure 8-7 RFS-2750L external view...
  • Page 83 RF Power Supply and Matching Box RFS -2775L 27MHz 7.5kW RF GENERATOR MAIN Figure 8-8 RFS-2775L exterinal view...
  • Page 84 RF Power Supply and Matching Box Figure 8-9 MBX-1305L / MBX-1305Lu external view...
  • Page 85 RF Power Supply and Matching Box Figure 8-10 MBX-1310L external view...
  • Page 86 RF Power Supply and Matching Box Figure 8-11 MBX-1330L external view...
  • Page 87 RF Power Supply and Matching Box Figure 8-12 MBX-1330Lu external view...
  • Page 88 RF Power Supply and Matching Box Figure 8-13 MBX-1350L external view...
  • Page 89 RF Power Supply and Matching Box Figure 8-14 MBX-13100L external view...
  • Page 90 RF Power Supply and Matching Box Figure 8-15 MBX-2750L external view...
  • Page 91 RF Power Supply and Matching Box Figure 8-16 MBX-2775L exterinal view...
  • Page 92 RF Power Supply and Matching Box Figure 8-17 AMC-8L/AMC-8LT external view...
  • Page 93 RF Power Supply and Matching Box RS-232C FLASH DET IN AMC OUT PRESET AC 100V AMC.EXT Figure 8-18 AMC-9L/AMC-9LT external view...

This manual is also suitable for:

Rfs-1310lRfs-1330l rfs-1350lhRfs-13100lRfs-2750lRfs-2775l

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