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Ulvac DC-2 Operation Manual

2kw/4kw dc power
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2kW/4kW DC Power
model：DC-2/DC-4
5th Edition: July 14, 2023
ULVAC, Inc.
Before using this product, be sure to read this manual.
Also, keep this manual at hand with care

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  • Page 1 DC0053E-05 2kW/4kW DC Power model：DC-2/DC-4 5th Edition: July 14, 2023 ULVAC, Inc. Before using this product, be sure to read this manual. Also, keep this manual at hand with care...
  • Page 2 The copyrights of the operation manual and this safety guide belong to ULVAC, Inc.  A part and whole part of this operation manual are prohibited to copy without a permit of ULVAC, Inc.

  • Page 3: Precautious Points On Safety

    DC Power 【DC-2/DC-4】 Introduction 1. Precautious points on safety Major part of the accidents occurs in relation to the operation carelessly conducted by the operator, the inspection/service and the repair work. Also, if you do not observe the basic caution matters on safety and neglect the dangerous preperception, it is easy to occur.

  • Page 4: Safety Symbol Marks

    DC Power 【DC-2/DC-4】 Introduction 2. Safety symbol marks In this operation manual and the warning display of the product main body, the symbol marks about the safety in order to understand the matters to be observed are being put up.
  • Page 5 DC Power 【DC-2/DC-4】 Introduction 2） Safety symbol marks on the unit main body The following safety symbol marks are placed on the unit main body. List of safety symbol marks Safety symbol marks Description Heavy loads ・There is a danger of getting injury.
  • Page 6 Safety symbol marks Description High temperature heated part ・Do not touch, or you may get burned. The connector part shall not be lifted. Otherwise it may be damaged. Do not hold and lift the connector. Weight indication (same for both DC-2/DC-4)

  • Page 7: About This Product

    DC Power 【DC-2/DC-4】 Introduction 3. About this product The sentences and illustrations in this operation manual are based on the information at the time of this operation manual prepared. This operation manual may be subject to change without prior notice. Since these changes give the influence on the inspection, confirm the latest information in our company’s...

  • Page 8: Suspecting Abnormality

    DC Power 【DC-2/DC-4】 Introduction 4. Suspecting abnormality If you notice a presence of abnormality, refer to 7."Trouble shooting" in this manual and check the symptom and the trouble. To avoid mutual loss caused by misunderstanding and misconception, please clarify the details of the trouble in order to repair the product as soon as possible.

  • Page 9: About Responses To Rohs

    DC Power 【DC-2/DC-4】 Introduction 7. About responses to RoHS The following 10 specified environmentally hazardous chemical substances regulated by the RoHS Directive are not contained in the main body and the cable assembly attached as standard above t he threshold (Revised RoHS Directive 2011/65 / EU and (EU) 2015 / 863).

  • Page 10: Table Of Contents

    3-2-3. How to install ................................. 8 3-2-4. About clearance ................................9 3-3. W ............................... 10 IRING AND CONNECTING 3-3-1. Cables connected to DC-2/4 ..........................10 3-3-2. Wiring for USER I/O port processing ......................... 10 4. DESCRIPTION OF FUNCTIONS ........11 4-1. N ........................... 11 AME AND FUNCTION OF EACH PART 4-1-1.
  • Page 11 DC Power 【DC-2/DC-4】 Table of Contents 4-1-2. Product back face..............................12 4-2. D .......................... 13 ESCRIPTION OF EACH OPERATION MODE 4-2-1. Description of LOCAL mode function........................ 13 4-2-2. Description of HOST mode function ........................13 4-2-3. Description of HOST+ mode functions......................13 4-2-4.
  • Page 12 DC Power 【DC-2/DC-4】 Table of Contents 8. APPENDIX ..............42 8-1. O ..........................45 VERVIEW OF SERIAL COMMUNICATIONS 8-1-1. SERIAL communication specifications ......................45 8-1-2. How to connect ................................46 8-2. H ..........................47 OW TO SET SERIAL COMMUNICATION 8-3. C .............................

  • Page 13: For Your Safety Use

    DC Power 【DC-2/DC-4】 1. For your safety use 1. For your safety use In order to use this unit in a safe manner, we describe the caution points on safety, the attached position of warning labels and the contact party.

  • Page 14: Warning Label / Name Plate Affixing Position

    DC Power 【DC-2/DC-4】 1. For your safety use 1-2. Warning label / Name plate affixing position REFERENCE The affixing position of warning labels is shown in the appendix "External View" in Chapter 8. Keep these warning labels clean at all times so that all of them are legible. Use cloth and water for the cleaning of the warning labels.

  • Page 15: Overview

    2-1 Introduction The DC-2/DC-4 is designed as a DC power supply for sputtering with an output of 2/4 kW. The rated power can be supplied to the load by optimizing the load impedance of plasma. 2-2 Features ・...

  • Page 16: Specifications

    DC Power 【DC-2/DC-4】 2. Overview 2-4 Specifications Table 2-1: Electrical specification Item Specifications Model DC-2 DC-4 Rated input voltage AC200V/220V Input voltage variation AC180V～242V range Number of phases / Three-phase for 50/60Hz Frequency Input connection MS Connector (N/MS3102A16-10P) Input current 11.5A or less*1...

  • Page 17: Specification Of I/Osection

    DC Power 【DC-2/DC-4】 2. Overview Table 2-2: Other specifications Item Specifications Cooling system Forced air cooling system Outer dimensions 241 mm (W × 610 mm (D) × 133 mm (H) or less *No protrusions included. DC-2：15kg DC-4：15kg Mass Usage environment Indoor use at 1,000m or less above sea level without direct sunlight and corrosive gas 5～40℃...

  • Page 18: Output Connector Specification

    DC Power 【DC-2/DC-4】 2. Overview 2-5-2. OUTPUT connector specification It is recommended that you purchase our dedicated cables. If you prepare a cable by yourself, purchase connector component parts with reference to the items in [Table 2-5. Connector configuration at the cable side of output section], select a suitable wiring material. Contact the manufacturer for the conditions etc in the cable arrangement.

  • Page 19: Preparation

    DC Power 【DC-2/DC-4】 3. Preparation 3. Preparation This chapter describes necessary preparation and caution matters in step where after this unit is delivered at your hand, you use this unit. 3-1. Unpacking Unpack the product package and take out the products.

  • Page 20: How To Install

    DC Power 【DC-2/DC-4】 3. Preparation φ3 AC input Substrate 基板 3ΦＡＣ入力 180～242V 出力ケ－ブル Output cable 180～242V ＣＡＴＨＯＤＥ System ground ＡＮＯＤＥ システムアース System ground システムアース System ground システムグランド ア－スケ－ブル長 システムグランド システムア－ス Earth cable System ground System earth 3.5m～10m A cable equivalent to 14sq is An electric wire of 3.5 mm...

  • Page 21: About Clearance

    DC Power 【DC-2/DC-4】 3. Preparation 3-2-4. About clearance This product intakes air at the front face while discharges air at the back face. Take special care for the clearance of the front and back faces. As the Fig.3-3, reserve a sufficient clearance in order to intake air.

  • Page 22: Wiring And Connecting

    3-3-1. Cables connected to DC-2/4 The use of DC power needs an input and output cables separately. ・ Input cable: three-phase + GND with a withstand voltage of 600V or more and a withstand current of 25A or more.

  • Page 23: Description Of Functions

    DC Power 【DC-2/DC-4】 4. Description of Functions 4. Description of Functions This chapter describes various functions of this power supply. 4-1. Name and function of each part 4-1-1. DC power front panel ①,② ④,⑤,⑥,⑦ ⑫ ⑬ ⑧,⑨,⑩,⑪ ③ Figure 4-1: Product front face Table 4-1: Product front face names and the functions Nｏ．...

  • Page 24: Product Back Face

    DC Power 【DC-2/DC-4】 4. Description of Functions 4-1-2. Product back face ⑩ ⑦ ④ ⑧ ⑨ ③ ⑥ ⑤ ① ② Figure 4-2: Product back face Table 4-2: Product back face names and the function Nｏ． Name Shape Function ①...

  • Page 25: Description Of Each Operation Mode

    DC Power 【DC-2/DC-4】 4. Description of Functions 4-2. Description of each operation mode This power supply can be used in the following operation modes. The operation mode is switched on the front panel or using commands via the SERIAL communication port.

  • Page 26: User Io Port Pin Assignment

    DC Power 【DC-2/DC-4】 4. Description of Functions 4-2-5. USER IO port pin assignment The pin assignment in USER mode is as follows. When operating in USER mode, please refer to 【Table 5-5 USER control signal connection equivalent circuit】 and connect with external control equipment such as PLC.

  • Page 27: Selection Of Output Control Mode

    DC Power 【DC-2/DC-4】 4. Description of Functions 4-3. Selection of output control mode The constant voltage, constant current, or constant power control modes can be selected. The setting procedure is different for various control modes. 4-3-1. Setup in LOCAL mode This setting is executed from the front panel.

  • Page 28: About Dc Output Sequence

    DC Power 【DC-2/DC-4】 4. Description of Functions Table 4-8: Scale conversion table of LEVEL signal (LEVEL) DC-2 DC-4 V-control 0～1200V Output voltage I-control 0～5.00A 0～10.00A setting level: LEVEL 0 to 10V P-control 0～2000W 0～4000W * In the USER control and the SERIAL communication control.

  • Page 29: Arc Mode Switchover

    DC Power 【DC-2/DC-4】 4. Description of Functions Table 4-9: Retainable parameters MENU screen hierarchy Description Voltage value for MICRO ARC detection MENU/CNFG/ARC/LEVL/VLEV Micro ARC interrupting time MENU/CNFG/ARC/MARC/SHDN MENU/CNFG/ARC/MARC/MASD Presence or absence of ARC detection in resonance HARD ARC interrupting time...

  • Page 30: Description Of Micro Arc Function

    DC Power 【DC-2/DC-4】 4. Description of Functions 4-7. Description of MICRO ARC function This product erases arcs by resonant circuit upon the generation of ARC. If failed in the ARC extinction by the above resonant circuit, the micro arc function stops the INVERTER operation and improves the ARC.

  • Page 31: Description Of Hard Arc Function

    DC Power 【DC-2/DC-4】 4. Description of Functions 4-8. Description of HARD ARC function In preparation for a case unable to eliminate an ARC problem even executing ARC extinction by means of resonant circuit or micro arc processing, a hard arc function is equipped so as to execute an interruption time longer than that of micro arc.

  • Page 32: Display Of Error Code And Warning Code On Front Panel

    DC Power 【DC-2/DC-4】 4. Description of Functions 4-9. Display of error code and warning code on front panel When an error and a warning occur, an occurrence code is described in the front panel of the power supply. Displayed error codes, warning codes, and the content is as follows.

  • Page 33: About Setpoint

    DC Power 【DC-2/DC-4】 4. Description of Functions 4-11. About SETPOINT If the DC output value is within ±2% of the set value in its initial state, the front SETPOINT LED lights up and the SETPOINT signal becomes active. The SETPOINT judgment criterion value is ±2% in the initial state, but can be changed between ±2% and ±8%.

  • Page 34: Operate

    DC Power 【DC-2/DC-4】 5. How to Operate 5. Operate This chapter describes how to operate and handle this power supply. 5-1. How to operate in LOCAL mode This section describes the power operation in the LOCAL mode. In the LOCAL mode, set ON/OFF of the DC output and various parameters on the front panel of the power supply.
  • Page 35 DC Power 【DC-2/DC-4】 5. How to Operate Present output values are indicated in the second line from the left as: output power, voltage, and current. The "R" at the lower right appears in the READY state. ・If WARNING occurs, the code is displayed at the upper right of the screen.

  • Page 36: Parameter Tree In Menu Screen

    DC Power 【DC-2/DC-4】 5. How to Operate 5-1-2. Parameter tree in MENU screen After that, carry out the operation using various buttons on the front panel. For the menu hierarchy, see the parameter tree below. Figure 5-1 DC-2/4 Parameter Tree...

  • Page 37: About Buttons On Front Panel

    DC Power 【DC-2/DC-4】 5. How to Operate 5-1-3. About buttons on front panel * For the button arrangement, see Figure 4-1 and Table 4-1. ・DC ON/OFF button In the state where READY and INTERLOCK OK light up, pressing the DC ON button starts the DC output.

  • Page 38: About Menu Screen

    DC Power 【DC-2/DC-4】 5. How to Operate ・About FNC button By pressing the FNC button additionally at the same time, the function described at the lower side works. MENU ・ARC COUNT check:”FNC+ESC” Pressing the FNC and ESC (ARC) buttons together enables one to check the number of times that HARD ARCS occur.
  • Page 39 DC Power 【DC-2/DC-4】 5. How to Operate ・CNFG: This is used to set various parameters. SYTM: The operation mode and output control mode can be set. *. They cannot be changed while DC ON is ON. LIMT: This is used to decide the limits of each output value.
  • Page 40 ・POWR: This enables one to setting the limit value of the output power. The setting ranging from 200 W to rated value (DC-2:2000W, DC-4:4000W) can be specified. ・VOLT: This enables one to setting the limit value of the output voltage.
  • Page 41 DC Power 【DC-2/DC-4】 5. How to Operate ・MASD: The stop of inverter operation is enabled for allowing only the resonant circuit for ARC detection. DISBL: The ARC extinction is executed only by the resonant circuit. If the ARC extinction is successful only by the resonant circuit, the inverter stop is not executed.
  • Page 42 DC Power 【DC-2/DC-4】 5. How to Operate ・OTHR: Ignition voltage, SETPOINT, SERIAL communication settings etc can be selected. IG V: Ignition voltage setting can be specified. SETP: The criteria for the SETPOINT can be specified. HOST: Serial communication related setting can be specified.
  • Page 43 DC Power 【DC-2/DC-4】 5. How to Operate ・MONI: You can check the occurrence history of ARC detection count, WARNING, ERROR. WARN: This displays the log of WARNING. FAIL: This displays the log of ERROR. BUS: This displays the current input bus voltage (*).

  • Page 44: Parameter List

    DC Power 【DC-2/DC-4】 5. How to Operate ・FUNC: This enables one to set the the ramp function and the time. SERV: This enables one to check the hardware configuration. ・SERV:This enables one to check the hardware configuration. HARD: This displays M/N of the power supply.

  • Page 45: How To Operate In User Mode

    DC Power 【DC-2/DC-4】 5. How to Operate Variable Description Hierarchically Setting rage Unit Initial value width Setup of ignition voltage CNFG/OTHR/IG V 900～1200 1200 2～8 Criterion of SETPOINT CNFG/OTHR/SETP 0.05～2.00 Ignition determination setting CNFG/OTHR/IJ 0.05 0.15 Table 5-3: Arc parameter (Detection of arc, Process-related parameters)

  • Page 46: Precautions For Wiring Of User Io Port

    DC Power 【DC-2/DC-4】 5. How to Operate 5-2-1. Precautions for wiring of USER IO PORT For wiring of USER IO PORT, you are recommended to follow the procedure below since noise may be caused. (1) Use of a twisted shield pair wire (2) Insulation of signals by photocouplers etc.
  • Page 47 DC Power 【DC-2/DC-4】 5. How to Operate Table 5-5: USER control signal connecting equivalent circuit Signal type Signal Equivalent circuit DPG-2/4 DC ON PLC等 DC-2/4 +15V PLC etc. AD INTERFACE側 AD INTERFACE side ARC MODE RESET 1.0kΩ Digital input PSEL 3.9kΩ...

  • Page 48: I/Oconnection Circuit

    DC Power 【DC-2/DC-4】 5. How to Operate 5-3. Recommended digital I/O connection circuit A recommended digital I/O connection circuit is shown in Figure 5-2. PLC etc. PLC等 DPG-2Z/4Z DC-2/4 AD INTERFACE側 AD INTERFACE SIDE +15V/+24V Digital output 100Ω デジタル出力 1.3kΩ～2.4kΩ...

  • Page 49: Maintenance

    DC Power 【DC-2/DC-4】 6. Maintenance 6. Maintenance This chapter describes the contents of necessary maintenance in order to use this power supply for a long time. Ignorance of maintenance work accelerates wear-out of the unit and raises the probability of failure and malfunctioning 6-1.

  • Page 50: About Recommended Replacement Parts

    DC Power 【DC-2/DC-4】 6. Maintenance 6-2. About recommended replacement parts For a longer use of the power supply, we recommend periodical overhauls. See Table 6-1 which shows the recommended replacement parts. For an overhaul, be sure to contact us. If you or a manufacturer other than us replaces the parts without our permission, the repair cost shall be borne by you based on our free-of-charge repair terms and conditions (P.V.) regardless of the remaining...

  • Page 51: Troubleshooting

    DC Power 【DC-2/DC-4】 7. Troubleshooting 7. Troubleshooting This chapter describes how to take measures against trouble. 7-1. Troubleshooting In the event of a trouble, do the initial diagnosis according to the procedure below. If the symptom is not improved even after troubleshooting, contact us.
  • Page 52 DC Power 【DC-2/DC-4】 7. Troubleshooting Symptom Possible cause Measure (3) Check that the recovery is successful by the RESET signal. (4) If the phenomenon recurs even the E190 (1) Overvoltage of instructed voltage LEVEL OVER ERROR instruction voltage being within the prescribed value range, exchange the products.
  • Page 53 DC Power 【DC-2/DC-4】 7. Troubleshooting Symptom Possible cause Measure (1) Check the impedance of the load. W210 (1) Load short-circuit (2) If the problem persists even the DEAD SHORT (2) Abnormalities in inner elements impedance is normal, exchange the WARNING products.

  • Page 54: Appendix

    DC Power 【DC-2/DC-4】 8. Appendix 8. Appendix The following documents about DC are attached. (1) External view of DC (2) China RoHS compliant (3) Operating instructions for serial communications Figure 8-1: External view of DC...
  • Page 55 DC Power 【DC-2/DC-4】 8. Appendix 中华人民共和国中国电子行业标准SJ / T11364-2014 People's Republic of China Electronic Industry Standard SJ / T11364-2014 有毒有害物质或元素/ Hazardous substance 部件名称/Part name Cr6+ PBDE 印刷电路板/printed bord ○ ○ ○ ○ ○ ○ 电子零件/Electronic parts ○ ○ ○ ○ ○...
  • Page 56 DC Power 【DC-2/DC-4】 8. Appendix 2kW/4kW DC Power model： DC-2/DC-4...

  • Page 57: Overview Of Serial Communications

    8. Appendix 8-1. Overview of serial communications DC-2/4 is equipped with a communication interface accessible from a SERIAL port. A direct operation is available via SERIAL communication from the HOST computer. As shown in Fig.8-2, the connector of the SERIAL port is a D-Sub 9 pin male connector which is located on the unit back face.

  • Page 58: How To Connect

    DC Power 【DC-2/DC-4】 8. Appendix 8-1-2. How to connect RS232C communication For DC, RXD has 2 pins and TXD has 3 pins. Connect to the HOST computer with a crossing cable. The cable connecting between HOST and DC shall be 10 m or less at the longest in length.

  • Page 59: How To Set Serial Communication

    DC Power 【DC-2/DC-4】 8. Appendix 8-2. How to set serial communication When using RS232C or RS485, you need to make the settings according to the procedure below. ○NET Address settings For multiple-unit control on the network via RS485 communication, Address of every unit needs to be set.
  • Page 60 DC Power 【DC-2/DC-4】 8. Appendix * If pressing ESC without pressing ENT, the value is not accepted and the editing mode exits. The selectable range if from 1 to 127. If the Address setting does not match the Address number of the header field to be described later, the communication is not established.

  • Page 61: Communication Message Packet

    8-3. Communication message packet DC-2/4 communication message packets consist of the four types of fields as shown below. • Header field (SOF, each address, command + data field length information) • Command field (See the command list to be described later.) •...
  • Page 62 0 byte (no values included). In the DC-2/4, the data length for the Read command transmitted from the HOST side are all 0 byte. Based on the data length information included in the header field, DC estimates the data length to be transmitted.

  • Page 63: Communication Protocol

    DC Power 【DC-2/DC-4】 8. Appendix 8-4. Communication protocol The following shows the step of communication transactions between DC and HOST computer. HOST DPG-10/20 DC-2/4 Message メッセージ送信 transmitting Message メッセージ受信 receiving ACK/NAK ACK / NAK待ち waiting ACK/NAK ACK / NAK送信 transmitting ACK/NAK ACK / NAK受信...
  • Page 64 DC Power 【DC-2/DC-4】 8. Appendix (4) Acknowledgment message transmitted from DC DC judges whether it is a Write or Read command based on the incoming message. When receiving a Read command, DC collects required data and transmits a 1-byte command status + data as an acknowledgment message.

  • Page 65: Command Between Host And Dc

    Write command The commands below changes various parameters of DC or requests DC to executes specific operations. For setting parameters etc, see the instruction manual for DC-2/4. Table 8-4: Write command list Command Transmission data...
  • Page 66 DC Power 【DC-2/DC-4】 8. Appendix Command Transmission data Acknowledgment data Command Command Capacity Description Capacity Description Set the output control mode. The settable Level depends on this output control mode. See the command 0x12 for setting Level. 0x14 OUTPUT MODE...
  • Page 67 DC Power 【DC-2/DC-4】 8. Appendix Command Transmission data Acknowledgment data Command Command name Capacity Description Capacity Description Setting of whether or not stopping the inverter operation can be specified regardless of ARC extinction by means of resonance circuit. In the DISABLE setting, ARC extinction is executed by...
  • Page 68 DC Power 【DC-2/DC-4】 8. Appendix READ Command The following commands are for reading various parameters and the product status. From the HOST side, specify "0" for the data field length and transmit the command. Table 8-5: READ command list Command...
  • Page 69 DC Power 【DC-2/DC-4】 8. Appendix Command Acknowledgment data Command Command name Capacity Description This sends back the power value output from DC. 0x92 POWER？ 2byte DC-2：0～2000 (2000W) DC-4：0～4000 (4000W) This sends back the voltage value output from DC. 0x93 VOLT? 2byte 0～1200 (1200V)
  • Page 70 DC Power 【DC-2/DC-4】 8. Appendix Command Acknowledgment data Command Command name Capacity Description This sends back the output current limit of the power supply currently set in 0xA2 CURRENT LIMIT? 2byte DC-2：0.50A～5.00A (500：0x01F4) DC-4：0.50A～10.00A (1000：0x03E8) This sends back whether the SET value of ARC set in DC is A or B.

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