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Ulvac HPS-600N Operation Manual

Electron beam power supply electron beam gun controller
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Electron Beam Power Supply
Electron Beam Gun Controller
Model:
Power Supply Main Unit
Gun Controller
Operation Manual
HPS-600N/HPS-1000N
EGC-10GS
Components Division
Before using this product, be sure to read it.
Also, keep this manual at hand with care.
EB0039-09e
10th edition:
july, 14, 2022
ULVAC, Inc.

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Summary of Contents for Ulvac HPS-600N

  • Page 1 EB0039-09e Operation Manual Electron Beam Power Supply Electron Beam Gun Controller Model: Power Supply Main Unit HPS-600N/HPS-1000N Gun Controller EGC-10GS 10th edition: july, 14, 2022 ULVAC, Inc. Components Division Before using this product, be sure to read it. Also, keep this manual at hand with care.
  • Page 2 ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ Introduction ⅰ...
  • Page 3 The copyrights of the operation manual and this safety guide belong to ULVAC, Inc. Components Division.  A part and whole part of this operation manual are prohibited to copy without a permit of ULVAC, Inc. Components Division.  Handling for this product of this operation manual and to use the manual in the application other than that ULVAC, Inc.
  • Page 4 ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ Introduction 1. Precautious points on safety Major part of the accidents occurs in relation to the operation carelessly conducted by the operator, the inspection/service and the repair work. Also, if you do not observe the basic caution matters on safety and neglect the dangerous preperception, it is easy to occur.
  • Page 5 ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ Introduction 2. Safety symbol marks In this operation manual and the warning display of the product main body, the symbol marks about the safety in order to understand the matters to be observed are being put up.
  • Page 6 ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ Introduction 3. Labeling Position of Warning Label Meaning of Warning Label High Voltage Danger Label: This indicates a situation where a high voltage occurs inside involving the risk of electrocution. High Temperature Warning Label: This indicates a situation where a high temperature occurs inside involving the risk of a burn.
  • Page 7 ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ Introduction 4. About this product The sentences and illustrations in this operation manual are based on the information at the time of this operation manual prepared. This operation manual may be subject to change without prior notice.
  • Page 8 ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ Introduction 5. Suspecting abnormality If you notice something wrong with the product, check the symptom and the failure with reference to the Troubleshooting in Section 7 of this manual. To avoid mutual loss caused by misunderstanding and misconception, please clarify the details of the trouble in order to repair the product as soon as possible.

  • Page 9: Table Of Contents

    ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ Table of Contents Table of Contents 1. For your safety use ....................1 Caution on handling ..............................1 When you make an inquiry ............................. 1 2. Overview ........................2 2.1. Introduction ..................................2 2.2. Feature ..................................... 2 2.3.

  • Page 10: For Your Safety Use

    ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 1. For your safety use 1. For your safety use In order to use this unit in a safe manner, we describe the caution points on safety, the attached position of warning labels and the contact party.

  • Page 11: Overview

    This power supply (HPS-600N/1000N) supports the electron beam evaporation source (hereinafter referred to as an EB power supply) with more stable circuits and higher performance based on ULVAC's years of accumulation of technologies and actual achievement. In combination with an EB gun controller (EGC-10GS), it can support both of optical thin film EB guns and metallic thin film EB guns.

  • Page 12: Equipment Configuration

    2-source type 1 unit *2 2 units *1: A 1-source type has "-100" after the model. (HPS-600N-100/HPS-1000N-100) *2: A 1-source type has "-200" after the model. (HPS-600N-200/HPS-1000N-200) A 2- model is a type with two output lines for operation with two EB guns sharing one power source supply main unit.
  • Page 13 ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 2. Overview An equipment configuration example with a 2-source type is shown in Fig. 2.2. EARTH GUN GND of the power supply connects to SYSTEM GND. Front Panel Connecter CONTROL COIL OUT POWER LOCAL CONTROL Vacuum Chamber...

  • Page 14: Eb Power Supply Specifications

    ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 2. Overview 2.4. EB Power Supply Specifications Table 2.2: EB Power Supply Specifications Specification value Category Item HPS-600N HPS-1000N Phase number, Frequency Three-phase 50/60Hz Input voltage AC200 ～ 220V Variation range AC190 ～ 231V Input type 9.0 kVA or less...
  • Page 15 ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 2. Overview Table 2.3: Gun Controller Specifications Specification value Category Item G-TYPE S-TYPE Phase number, Frequency Three-phase 50/60Hz Input voltage AC200～220V Variation range 190 ～ 231V Input type Input capacity 382VA or less 5 mA or less for each phase (in combination with the power...

  • Page 16: External I/O Signal

    ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 2. Overview Table 2.3: LOCAL CONTROLLER BOX Specifications Specification value Category Item G-TYPE S-TYPE X-POS、Y-POS ±5VDC/10mA or less ±5VDC/10mA or less Input X-SWP、Y-SWP 10VDC/10mA or less 10VDC/10mA or less (Voltage/Current) 10VDC/10mA or less EMISSION 10VDC/10mA or less 10VDC/10mA or less X-POS、Y-POS...
  • Page 17 ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 2. Overview The variable range of EMISSION CONTROL, DEF CONTROL, and X/Y-axis CONTROL (POSITION and SWEEP) is that set on the front panel of the gun controller. For details, see "4.4 Gun Controller Front Panel." REFERENCE The variable range of EMISSION CONTROL, DEF CONTROL, and X/Y-axis CONTROL (POSITION and SWEEP) is that set on the front panel of the gun controller.

  • Page 18: Preparation

    ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 3．Preparation 3. Preparation We describe necessary preparation and caution matters in step where after this unit is delivered at your hand, you use this unit. 3.1. Precautions in Unpacking Carefully unpack the box of the power supply main unit. Check for damage by external forces during transportation.

  • Page 19: About Transportation Of Power Supply

    DANGER The weight of HPS-600N/1000N is approx. 120 kg. Transport with careful attention to the surroundings during the transportation. Hanging operation especially with a crane requires four-point hanging.

  • Page 20: Installation Site And Installation

    ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 3．Preparation 3.3. Installation Site and Installation Install the EB power supply and the gun controller in a site with a temperature of 15 to 30 ﾟC, a humidity of 60 % or less, and a low amount of dust and vibration. In addition, avoid installing in a site with an uneven floor.

  • Page 21: Things To Be Prepared

    Three-phase, 190 to 231 VAC, Capacity of 50A, Frequency of 50/60 Hz System ground The earth with a ground resistance of 10Ω or less (equivalent to Article 18: Class A Grounding of the electrical equipment technical standards) is necessary. Fig. 3.1 shows the ULVAC's recommended grounding method. WARNING This power supply needs the earth with a ground resistance of 10 Ω...
  • Page 22 ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 3．Preparation VACUUM POWER CHAMBE SUPPLY EARTH GUN GND CABLE SYSTEM GND CABLE EARTH GUN GND terminal Grounding electrode Class A grounding Φ20 mm, A copper load of 5 m Ground or more A wet site as much as possible where...

  • Page 23: Cable Connection

    ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 3．Preparation 3.5. Cable Connection Before connecting between cables, make sure that no power is supplied to the equipment side, such as a main breaker on your equipment. In addition, make connections following the order shown below.
  • Page 24 ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 3．Preparation Table 3．3: Earth Cable CABLE LENGTH EARTH GUN GND SYSTEM GND CABLE The earth with 14 mm or more and a ground 3．5 ～ 10m 14 mm resistance of 10 Ω or less is necessary.
  • Page 25 ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 3．Preparation 2) Control cable Connect the supplied CONTROL cable (Tables 3.1 and 3.2) between the receptacle, CONTROL 1, on the back of the main unit and the receptacle, CONTROL, on the back of the gun controller.
  • Page 26 ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 3．Preparation 4) Interlock connector Do the wiring of each pin of the supplied INTERLOCKS plug (Tables 3.1 and 3.2) following Fig. 4.9 in Section 4 [Description of Each Part] and connect it to the INTERLOCK receptacle on the back of the gun controller.

  • Page 27: Description Of Each Part

    In addition, how to connect each unit is described here. For the external dimension drawing of each unit, see the attached data. 4.1. Front panel of power supply main unit ① ② ③ ⑤ ⑥ ④ ⑦ Figure 4.1: Front view of HPS-600N/1000N...
  • Page 28 ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 4．Description of Each Part 1) POWER indicator (Yellow) This lights up when the MAIN circuit breaker is ON and the START signal of the EXT. START connector is input. This does not light up unless the START signal of the EXT. START connector is input.

  • Page 29: Back Panel Of Power Supply Main Unit

    ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 4．Description of Each Part 4.2. Back panel of power supply main unit ⑰ ⑩ ⑨ ⑯ ⑧ ⑱ ⑤ ⑮ ⑭ ⑦ ③ ④ ⑬ ⑥ ⑪ ② ① ⑫ Figure 4.2: Back view of HPS-600N/1000N...
  • Page 30 ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 4．Description of Each Part 1) INPUT receptacle This is a receptacle for connecting the supplied INPUT cable (three-core) (Tables 3.1 and 3.2). 2) EARTH GUN GND terminal This is a terminal for connecting the supplied EARTH GUN GND cable (14 mm ) (Tables 3.1 and 3.2).
  • Page 31 ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 4．Description of Each Part 9) FIL．CUR．MONITOR connector This is a BNC connector for external output of the filament current. (For the output part, see Fig. 4.3.) For the signal level, see Table 2.3. +15 V EMISSION (BEAM) monitor...
  • Page 32 ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 4．Description of Each Part REFERENCE Each common needs to be in a floating condition at a withstand voltage of 1,500 VAC or more above the earth and the portions between the common ports need to be insulated. If the power supply equipment you use connects to the earth, use isolation amplifiers to insulate signals.
  • Page 33 ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 4．Description of Each Part 13) POWER 2 receptacle This is a receptacle for connecting the supplied POWER cable (Tables 3.1 and 3.2). This is the connector for the 2nd source for a 2-source type. 14) CONTROL 2 receptacle This is a receptacle for connecting the supplied CONTROL cable.

  • Page 34: Alarm Fuse

    ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 4．Description of Each Part 4.3. Alarm Fuse Alarm fuses are built in for protection of each circuit. Alarm fuses are attached in FUSE BOX under the front side of the power supply (F3, F11, F12, F13, F14, F15) and, in the left panel of the power supply, attached above the center part (F1, F2) and below the center part (F1, F2).
  • Page 35 ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 4．Description of Each Part Table 4.1 shows the fuse capacity and the purpose of use. If a blowout occurs during the operation, the high voltage supply becomes OFF and the fuse indicator of the power supply main unit is turned off. If the fuse F1 or F2 is blown, it presses the button of the micro switch to indicate the blowout.

  • Page 36: Gun Controller Front Panel

    ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 4．Description of Each Part 4.4. Gun Controller Front Panel ⑥ ⑦ ④ ③ ⑨ ⑤ ⑧ ① ② Figure 4．6: Gun Controller Front Panel 1) LOCAL CONTROL connector This connector is for connecting the supplied LOCAL CONTROL BOX (Tables 3.1 and 3.2).

  • Page 37: Gun Controller Back Panel

    ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 4．Description of Each Part 8) ENTER key This is used for DISPLAY operation. This is used for accepting the operation and parameters. 9) Up/Down/Left/Right key This is used for DISPLAY operation. This is used such as for moving the cursor, setting the parameters, and switching the screens.
  • Page 38 ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 4．Description of Each Part Every interlock is provided to ensure human safety and prevent damage to the EB gun. Therefore be sure to avoid any wiring which may short-circuit the interlocks and operation with the interlocks short-circuited because they are dangerous.
  • Page 39 ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 4．Description of Each Part Table 4.2: EB System Interlock Information Item Name Content Monitored by the EB gun controller. INTERLOCK is OK when the resistance value of the EB gun's coil connected to the EB GUN MAGNET gun controller is within the range.
  • Page 40 ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 4．Description of Each Part Equipment wiring Power supply 装置側配線 電源内部 GUN WATER CHAMBER VACCUM MODE CHANGE XY SWEEP In a case that no 外部接点を 外部接点による高電圧のON／OFF ON/OFF of the high voltage by external contacts external contact is 使用しない場合...
  • Page 41 HV SWEEP：0 ～ -3kVp-p ／0 ～ 10 V High voltage sweep control HV COM High voltage control HV：-4kV(-2kV) ～ -10kV(-6kV)／0 ～ 10 V ※Displays the HPS-600N in () HV COM High voltage common EMISSION：0 ～ 1.0A／0 ～ ±10 V Beam current control...
  • Page 42 ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 4．Description of Each Part 4) CONTROL receptacle This is a receptacle for connecting the supplied CONTROL cable (Tables 3.1 and 3.2). 5) COIL OUT receptacle This is a receptacle for connecting the supplied DEF／XY OUT cable or the XY OUT cable (Tables 3.1 and 3.2).
  • Page 43 ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 4．Description of Each Part 10) SIGNAL connector (※ Optional function This is a connector for outputting the function of externally releasing the EMISSION output limit and the status information on the EB power supply system. Do the wiring of the part where each signal is necessary as shown in Fig.
  • Page 44 ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 4．Description of Each Part Hearth position contact of gun On gun controller ガン側ハースポジション接点 ガンコントローラ側 HEARTH 1 HEARTH 2 HEARTH 3 HEARTH 4 COMMON MODE HV MODE XY Contact of equipment 装置側接点 Figure 4.12: PSG Connector Wiring Table 4.4: Description of PSG Connector Signal...

  • Page 45: Local Control Box

    ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 4．Description of Each Part 4.6. Local Control Box DEFLECTION ② X-AXIS Y-AXIS POSITION POSITION ③ ⑤ SWEEP SWEEP ④ ⑥ EMISSION ① LOCAL CONTROL BOX Figure 4.13: External View of Local Control Box for G-TYPE...
  • Page 46 ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 4．Description of Each Part EMISSION knob This is for setting beam current. The range is 0 to 100. Or the range is 0 to 100 / 0 to 1,000 mA (MAX POWER without adjustment). DEFLECTION knob (Only G-TYPE) This is for setting current passing through the DEFLECTION coil.
  • Page 47 ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 4．Description of Each Part REFERENCE If in XY SCAN MENU of DISPLAY of the gun controller, the CONTROL mode is set to REMOTE, the control is moved to the outside and therefore operation can be done by LOCAL CONTROL BOX.
  • Page 48 ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 4．Description of Each Part X-AXIS POSITION knob ① This is for setting the direct current passing through the X-axis of the XY sweep coil. ② The beam position can be moved in the X-axis direction by changing the current.

  • Page 49: Operation

    ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 5．Operation 5. Operation This section describes how to operate this product. 5.1. Pre-operation Check Check the following before energizing the EB power supply. In addition, be sure to perform the first test in the LOCAL operation mode.
  • Page 50 ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 5．Operation CAUTION If the EARTH GUN GND cable is too long, cut it to the right length and connect. Never coil it. It may become a noise source, having an effect on other equipment. If noise affects other equipment, it is effective to put the OUTPUT cable and the EARTH GUN GND cable together in a metal-shielded conduit etc.
  • Page 51 ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 5．Operation WARNING If the wiring of the coil is not correct, beams may be irradiated at unexpected points or the coil may be damaged. Especially if the DEFLECTION coils 1 and 2 are connected in the opposite direction, a beam is irradiated to the bottom of the chamber and the chamber may be damaged.

  • Page 52: Local Operation

    ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 5．Operation 5.2. LOCAL Operation EB power supply settings Before turning on the power supply, set the power supply main unit and the gun controller/LOCAL CONTROL BOX to the following positions. Table 5.1: Power Supply Main Unit and Gun Controller/LOCAL CONTROL BOX Settings...

  • Page 53: Local Operation With G-Type

    ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 5．Operation Table 5.2: Each Menu Settings of Gun Controller Unit Menu Item Content Setting LOCAL/REMOTE operation settings CONTROL MODE LOCAL HV output voltage settings Option HV SET Gun controllers G and S in CONTROL MODE LOCAL/REMOTE operation settings...
  • Page 54 ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 5．Operation...
  • Page 55 ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 5．Operation MAG-INTLK adjustment If the resistance value of the coil extremely decreases (due to a short-circuit etc.) or increases (due to a break etc.), the GUN MAGNET indicator of the INTLK menu of the gun controller DISPLAY turns to red to notify the operator.
  • Page 56 ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 5．Operation filament or a break or disconnection of the wiring on the loading side. Check the loading side. In addition, if the fuses F14 and F15 on the front of the power supply main unit are blown at the instant when the EMISSION knob is turned, the cause would be a short circuit between the right and left terminals of the filament.
  • Page 57 ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 5．Operation Maximum XY sweep coil current This limits the range of the XY sweep coil current. If you do not limit the current, the range of the XY sweep coil current is ±1.5A. (Entire DISPLAY XY MONIOR) To limit this current, use the CURRENT MAX function (limit) of X-AXIS and Y-AXIS.

  • Page 58: Local Operation With S-Type

    5.2.2. LOCAL operation with S-TYPE The S-TYPE settings can be used with HPS-1000N. HPS-600N has G-TYPE settings only. X coil current check In reference to the operations manual of the EB gun you use and, if no X coil current corresponding to the set acceleration voltage, no cable would be connected to the X coil.
  • Page 59 ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 5．Operation WARNING If the wiring of the coil is not correct, beams may be irradiated at unexpected points or the coil may be damaged. Especially if the X coil is connected in the opposite direction, a beam is irradiated to the bottom of the chamber and the chamber may be damaged.
  • Page 60 ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 5．Operation DANGER The EB power supply generates a voltage that is enough to pose a danger to human life. Take more than enough care in such a way as to attach a metallic cover to the high-voltage introduction terminal so that the operator will never contact the high-voltage.
  • Page 61 ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 5．Operation Maximum XY-axis coil current This limits the range of the XY-axis coil current. If you do not limit the current, the range of the XY-axis coil current is 0.4 to -3.5A for the X coil current and -1.2 to +1.2A for the Y coil current. (Entire DISPLAY XY MONIOR) To limit this current, use the CURRENT MAX function (limit) of Y-AXIS.
  • Page 62 ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 5．Operation REFERENCE If the evaporation material is a sublimation material and a splash (bumping) occurs, the vapor deposition rate becomes more stable by expanding the beam spot. Use the HV SWEEP function as necessary. When the HV SWEEP is set, the beam spot position may deviate. In such a case, adjust the beam position.
  • Page 63 ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 5．Operation REFERENCE If OVER LOAD appears on DISPLAY, take time until the blink of the OVERLOAD indicator is reduced without applying power forcedly. This is due to electric discharge by gas generated from the evaporation material and the blink of the OVER LOAD indication is reduced when the discharge amount of gas becomes low.

  • Page 64: Program Operation

    ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 5．Operation 5.3. PROGRAM Operation PROGRAM connector connection check When you need to perform operation by external signals using the PROGRAM control, do the wiring following Fig. 4.10. For the combination with a vapor deposition controller, use a controller insulated from analog signals.
  • Page 65 ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 5．Operation Table 5.4: Settings of Power Supply Main Unit and Gun Controller Unit Item Setting Power Supply Main Unit MAIN Circuit breaker HPS-600N/1000N SERVICE KEY ENABLE KEY switch REMOTE HV CONTROL MODE REMOTE Gun controller EGC-１０GS...

  • Page 66: Power Supply Error State

    ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 5．Operation 5.4. Power supply error state The error states detected by the power supply and the controller and the descriptions are as follows. In addition, how to take measures against each ALARM is described. See this list in reference to 7.
  • Page 67 ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 5．Operation 4) OVER CURRENT This appears when an error is detected in the output from the gun controller to the gun coil. The gun controller screen shows which of the DEFLECTION coil current, X coil current, and Y coil current is in the OVER CURRENT state.

  • Page 68: Maintenance

    ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 6. Maintenance 6. Maintenance This section describes necessary details on maintenance to use this product for many years to come. Without appropriate maintenance, the product may be worn faster and finally stop. Therefore carefully read this chapter and do maintenance.

  • Page 69: Maintenance/Inspection Of This Product

    ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 6. Maintenance 6.1. Maintenance/Inspection of this product Except for check items 10 to 12, be sure to switch the three-phase input power supply of the EB power supply to OFF. Table 6.1: Pre-maintenance Check List Inspection period *1...
  • Page 70 ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 6. Maintenance CAUTION NOTE 1： The EB power supply generates a voltage that is enough to pose a danger to human life. Take more than enough care in such a way as to attach a metallic cover to the high-voltage introduction terminal so that the operator will never contact the high-voltage.

  • Page 71: Periodical Inspection

    ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 6. Maintenance 6.2. Periodical inspection Be sure to switch the three-phase input power supply of the EB power supply to OFF before inspection. Table 6.2: Periodical Inspection Check List Inspection period *1 Item Inspection and Work Description...
  • Page 72 ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 6. Maintenance CAUTION NOTE 9 ： If there is looseness at the connection between the fuse box and the INPUT cable, they may produce heat and are burned. In addition, this leads to an open phase etc, causing unstable operation of the power supply.

  • Page 73: About Recommended Replacement Parts

    ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 6. Maintenance 6.3. About recommended replacement parts To use the EB power supply system for a longer period of time, you are recommended to periodically perform an overhaul. See the table below that shows recommended replacement parts for the overhaul.

  • Page 74: Troubleshooting

    ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 7. Troubleshooting 7. Troubleshooting In this chapter, we describe how to handle when the trouble occurred 7.1. Troubleshooting If any trouble occurs, initial diagnosis needs to be performed following Fig. 7.1. Details on each trouble are described in Tables 7.1 to 7.4.
  • Page 75 ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 7. Troubleshooting...
  • Page 76 ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 7. Troubleshooting Start HPS-1000N Trouble judgment of the EB power supply needs Troubleshooting to be made in the LOCAL operation mode. Set to LOCAL mode (Magnet/Emission /High voltage) Not removed Are the side plate Is the top/side plate...
  • Page 77 ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 7. Troubleshooting Table 7.1: Main Unit Troubleshooting List Symptom Possible cause Possible check point Check the power supply in your fuse box. A: No power received. If no power is received, receive the power. The power supply B: The panel interlock is Check whether the panel is removed.
  • Page 78 ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 7. Troubleshooting Table 7.2: High Voltage Troubleshooting List Symptom Possible cause Possible check point A: The contact between Pin 7 Check the INTERLOCKS connector. and Pin 8 of the In reference to Fig. 4.8, check the wiring or the...
  • Page 79 ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 7. Troubleshooting Table 7.3: Beam Current Troubleshooting List Symptom Possible cause Possible check point Check that a high voltage is applied. A: No high voltage is applied. Check the MAIN menu on DISPLAY and whether the B: DEGAS mode HV monitor shows DEGAS.
  • Page 80 ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 7. Troubleshooting Symptom Possible cause Possible check point When the beam Check the isolation insulator of the emitter assembly or current passes, A: Dirt on isolation insulator the high voltage introduction terminal. OVERLOAD Replace with new one if there is extreme dirt.
  • Page 81 ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 7. Troubleshooting Symptom Possible cause Possible check point When the breaker is switched to ON, the dots on the XY monitor A: Breakdown of the power Contact us. goes off scale supply without control and is not controlled.

  • Page 82: Attached Data

    ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 8. Attached Data 8. Attached Data The data about HPS-1000N below is attached. Figure 8.1: Power Supply Main Unit: External View of HPS-1000N Figure 8.2: Gun Controller: External View of EGC-10GS Figure 8.3: G TYPE Local Control Box : External View Figure 8.4: S TYPE Local Control Box : External View...
  • Page 83 ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 8. Attached Data Figure 8.1: Power Supply Main Unit - External View of HPS-1000N (2-source type)
  • Page 84 ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 8. Attached Data Figure 8.2: Gun Controller - External View of EGC-10GS...
  • Page 85 ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 8. Attached Data 44.50 82.00 24.00 DEFLECTION Y-AXIS X-AXIS POSITION POSITION SWEEP SWEEP EMISSION LOCAL CONTROL BOX Figure 8.3: Local Control Box for G TYPE : External View...
  • Page 86 ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 8. Attached Data 42.10 82.00 24.00 X-AXIS Y-AXIS POSITION POSITION SWEEP SWEEP EMISSION LOCAL CONTROL BOX Figure 8.4: Local Control Box for S TYPE : External View...
  • Page 87 ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 8. Attached Data 中华人民共和国中国电子行业标准 SJ / T11364-2014 People's Republic of China Electronic Industry Standard SJ / T11364-2014 有毒有害物质或元素/ Hazardous substance 部件名称/Part name Cr6+ PBDE 印刷电路板/printed bord ○ ○ ○ ○ ○ ○ 电子零件/Electronic parts ○ ○...
  • Page 88 ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～ 8. Attached Data Attachment 8.2:CE Delaration of Conformity...
  • Page 89 ELECTRON-BEAM POWER GENERATOR ～HPS-600N/1000N～...

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Hps-1000nEgc-10gs

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