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Ulvac RMG-1303 Instruction Manual

Matching unit integrated high-frequency power supply
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Matching unit integrated
High-Frequency Power Supply
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RMG-1303
RFP-N
Reviced 12th Edition July 1, 2024
RF0052E-12-EN
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ULVAC, Inc
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Summary of Contents for Ulvac RMG-1303

  • Page 1 RF0052E-12-EN Matching unit integrated High-Frequency Power Supply Model: RMG-1303 Controller: RFP-N Reviced 12th Edition July 1, 2024 ULVAC, Inc...
  • Page 2 ➢ The copyright of this manual and the safety guide is held by the ULVAC, Inc. ➢ You are forbidden from copying all or a portion of this manual without the consent of the ULVAC, Inc.

  • Page 3: Safety Precautions

    RF POWER SUPPLY and MATCHINGBOX Introduction 1. Safety precautions Most accidents are attributed to carelessness during operation, inspection, maintenance, or repair.Failure to comply with the safety precautions or neglecting to anticipate danger causes accidents to happen more easily. Accidents can be prevented before they happen by anticipating potentially dangerous situations at an early stage.。...
  • Page 4 RF POWER SUPPLY and MATCHINGBOX Introduction 2. Safety symbols This symbol indicates the possibility of impending death or serious injury when the hazard cannot be avoided. Work that ignores this warning has a high probability of severely injuring people or damaging factory equipment (including this system).
  • Page 5 If you have determined there is a malfunction or if you have any questions, contact one of the locations listed on the last page. When contacting ULVAC, please inform us of the product names, model name, manufacturing numbers, and about the symptoms of the problem in as much detail as possible.
  • Page 6 １ This system has been shipped after undergoing an extensive in-house inspection. However, in the event a failure occurs that ULVAC Inc. is responsible for, such as a manufacturing defect or accident during shipment, please inquire with the ULVAC Inc. or dealer regarding repairs. The system will be repaired or replaced at no charge.

  • Page 7: Table Of Contents

    2. For Safe Operation .................. 4 2-1. Precautions when handling the system ..........4 2-2. Warning label / nameplate locations ..........6 2-3. Contacting ULVAC ................6 3. Overview ....................7 3-1. Introduction .................. 7 3-2. Features ..................7 3-3.
  • Page 8 RF POWER SUPPLY and MATCHINGBOX 1.Contents 5-8-1. Communication function in RS232-C operation mode ....32 5-8-2. RS232C operation mode connector pin assignment ....... 32 5-8-3. RS-232C operation mode commands .......... 33 5-9. Instantaneous voltage drop ............37 5-10. RF pulse function ................39 5-10-1.
  • Page 9 RF POWER SUPPLY and MATCHINGBOX 1.Contents 6-2-5. RF ON-OFF operation ............... 74 6-3. Operation method using external analog control ........ 75 6-3-1. Selection of external analog control mode ........75 6-3-2. Preset operation ..............75 6-3-3. Setting the Matching Mode ............76 6-3-4.

  • Page 10: For Safe Operation

    AC power supply has been shut off, then wait three minutes or more before opening the specified cover.Interior maintenance work must be done by a technician specified by ULVAC or under the direction of such a person. For maintenance work where the interior may...
  • Page 11 RF POWER SUPPLY and MATCHINGBOX 2. For Safe Operation Do not use this product near implantable cardiac pacemakers, implantable cardioverter-defibrillators, or medical electrical equipment. Radio waves can affect those devices and devices.

  • Page 12: Warning Label / Nameplate Locations

    Use a cloth and water to clean the warning labels. Do not use gasoline or organic solvents. If a label is damaged, missing, or illegible, contact ULVAC or an exclusive dealer. A nameplate is also affixed to the top surface of the power supply.

  • Page 13: Overview

    RF POWER SUPPLY and MATCHINGBOX 3. Overview 3. Overview 3-1. Introduction This system has been designed for plasma generation in RF sputtering, plasma CVD, etching, and other plasma processing applications. This system combines an RF generator and a matching box. It can continuously output its rated power at the single frequency of 13.56 MHz for high frequency loads.

  • Page 14: System Configuration

    The basic configuration of this system is shown below. Breaker External Controller (earth leakage breaker) (Plc, etc.) AC01-R etc. External control cable Input cable RMG-1303 CONT-N RFP-N (Controller) Plasma chamber Figure 3-1. Basic System Configuration Table 3-2. Equipment required for basic system configuration Notation...

  • Page 15: Specifications Of The Main Unit

    RF POWER SUPPLY and MATCHINGBOX 3. Overview 3-5. Specifications of the main unit Table 3-3.RMG-1303(RF power supply part) Specifications Specifications Item RMG-1303(RF power supply part) Input frequency Single-phase 50 Hz -60 Hz Rated input voltage AC100V-220V Power factor 0.85 or more(rated output and when matching)
  • Page 16 10 A breaker conforming to UL 489/IEC 60947 -2 for RF RMG-1303. ※Even if the voltage fluctuation is within the allowable range, do not operate the product at a voltage outside the rated input voltage range. Table 3-4.RMG-1303(Matching circuit part) Specifications Specifications Item RMG-1303(Matching circuit part)

  • Page 17: Controller Specifications

    Table 3-7. VPP/VDC Sensor Specifications VPP/VDC Sensor model VDC Scale VPP Scale VDP-13HT 0～-2500V 0～3000V VDP-13HM 0～-2500V 0～2500V VDP-13MM 0～-1000V 0～2500V VDP-13MT 0～-1000V 0～3000V VDP-13ML 0～-1000V 0～1000V Table 3-8. Standard Installed Sensors Main model Model of VPP/VDC sensor installed as standard RMG-1303 VDP-13HM...

  • Page 18: Set Up

    RF POWER SUPPLY and MATCHINGBOX 4.Set up 4. Set up 4-1. Checking the accessories Table 4-1. Standard accessories Name of product Remarks Quantity Connector for DB-25PF-N：JAE（Dsub-25-Male: Short circuit external control number 02 and 15）/ DB-C8-J10-F4-1R：JAE (hood) A.C. Cable clamp ACCD86AS：Kitagawa 4-2.

  • Page 19: How To Install

    RF POWER SUPPLY and MATCHINGBOX 4.Set up 4-3. How to install Provide ample clearance in the area around the power supply for air intake. When using the power supply in a rack mount, ensure there can be ample ventilation so the temperature inside the rack does not exceed the specified temperature.
  • Page 20 RF POWER SUPPLY and MATCHINGBOX 4.Set up Be sure to connect to the load of the RMG -1303.Depending on the connection method, there may be symptoms such as unstable matching operation, high power loss, or RF noise generation. There may also be an impact to the process. Take note of the items below to accurately and firmly make the connections.
  • Page 21 10 mm or more. RMG -1303 Mounting Tapholes (Fix with countersunk screws, etc.) Chamber RF output electrode Mounting plate for Chamber Chamber mounting hole RMG-1303 Figure 4-2. Example of mounting on load...

  • Page 22: How To Install（Connector Output

    Chamber Be sure to connect the shield side of RMG-1303 the coaxial cable to the ground of the load Electrode...

  • Page 23: System Wiring

    First check the connector names and dedicated cables between each unit, then connect the cables by referring under below.For the cables used, also see under below. Please prepare the wiring between the RMG-1303 and the chamber and the wiring for GND.

  • Page 24: Input Power Supply Wiring

    For wiring connection work, first complete the wiring of GND before starting other wiring work. First, connect the connector of the input cable to RMG-1303, and then connect the other side. When removing the wiring, be sure to remove the GND wiring at the end.

  • Page 25: Connecting The Earth Terminal

    4-5-3. Connecting the earth terminal Due to the resonance phenomenon, a high voltage is generated inside the RMG-1303. If you do not perform sufficient grounding work, you may receive an electric shock. Be sure to perform grounding work. Perform the grounding work so that the grounding resistance of 100Ω...

  • Page 26: Installation Environment Conditions

    RF POWER SUPPLY and MATCHINGBOX 4.Set up 4-6. Installation environment conditions The ambient temperature must be between 10 ° C and 40 ° C during operation ➢ (RF-ON). Place in a well-ventilated place with the top plate facing up and away from direct ➢...

  • Page 27: Function Description

    RF POWER SUPPLY and MATCHINGBOX 5. Function description 5. Function description 5-1. Function of the main unit ② ③ ④ ⑤ ① ⑥ ⑨ ⑦ ⑧ Figure 5-1.Frant and Back ⑩ Figure 5-2.Mantenance surface...
  • Page 28 RF POWER SUPPLY and MATCHINGBOX 5. Function description ⑪ Figure 5-3.Output Surface...
  • Page 29 Connector for input from 100 to 200 VAC. ⑦ IEC60320-C14（3-pole with ground） MAIN switch The main switch of the RMG-1303. ⑧ If you turn it off and then turn it on again, wait at least 30 seconds. Connector output This is a blank port for modifying the output of the port optional connector.

  • Page 30: Controller Functions

    RF POWER SUPPLY and MATCHINGBOX 5. Function description 5-2. Controller functions The controller can set RF Parameter, display operation status, turn ON/OFF the output, and UP-DOWN the matching unit validator. External IO or digital signal control is possible without using a controller. Figure 5-4.

  • Page 31: Protective Function

    RF output stops. When the internal If the temperature inside the RMG-1303 rises too high, an temperature is alarm is output and the RF output stops. abnormal...

  • Page 32: Interlock Function

    RF POWER SUPPLY and MATCHINGBOX 5. Function description Panel safty interlock The RF output stops when the opening and closing panels such as the maintenance panel are safety interlock mode. IO safty interlock When the interlock of the external control connector is activated, the RF output stops.

  • Page 33: Alarm Function (List Of Alarms)

    The metal plate of the housing part is detached or loose. FAN TOO SLOW The cooling fan is stopped or the rotation speed is low. DC SOURCE ERROR The RMG-1303 internal AC/DC circuit (Pfc circuit) is not operating. CPU BOARD ERROR I2C communication is not working properly in the CPU inside the device.
  • Page 34 RF POWER SUPPLY and MATCHINGBOX 5. Function description AMP OC (ABS) The input current to the RF amplifier exceeds the rated current. CONTROL ABORT The setting value of RF output power and the monitor value have diverged for 30 seconds. PR OVER PR monitor value is excessive for 30 seconds.

  • Page 35: Warning Function

    Details of warning factors AC VOLTAGE DROP Input voltage is low. (Alarm during RF ON) BOARD HOT The environmental temperature inside the RMG-1303 and the temperature of the control circuit are rising. AMP LOSS LIMIT The loss in the RF amplifier is large.

  • Page 36: External Analog Control Function

    RF POWER SUPPLY and MATCHINGBOX 5. Function description 5-7. External analog control function 5-7-1. Pin assignment for external analog operation Table 5-6. External analog control (EXT.CONT) pin assignment Pin No. function Overview 01-14（COM） RFON command CLOSE=RF ON command 02-15（COM） Interlock CLOSE=Interlock release command 03-16（E）...
  • Page 37 RF POWER SUPPLY and MATCHINGBOX 5. Function description RMG-1303 Control device side sequencer, etc. Dsub-25 Cinnector（Female） +12V DC12V or more / 12mA or more capacity contact RF ON RF ON(COM) +12V DC12V or more / 12mA or more capacity contact...

  • Page 38: External Serial Communication Control Function (Rs-232C)

    RF POWER SUPPLY and MATCHINGBOX 5. Function description 5-8. External serial communication control function (RS-232C) 5-8-1. Communication function in RS232-C operation mode Table 5-7. Communication Parameter Baud rate 9600bps character length 8bit Parity bit No parity bit Stop bits 1bit X Parameter No X Parameter Table 5-8.

  • Page 39: Rs-232C Operation Mode Commands

    RF POWER SUPPLY and MATCHINGBOX 5. Function description 5-8-3. RS-232C operation mode commands ※The word ” □” in the command denotes space (0x 20), and [CR] denotes reset (0x0D). Table 5-9. Command list Command name Details RFOP Settings RFOP□AAAA[CR] Enter the desired mode in AAAA（Example:RFOP□ANALOG[CR]） PANEL / ANALOG / SERIAL / FBUS / EXT.ON / EXT.POW Response when reception :[CR] Response when rejected...
  • Page 40 RF POWER SUPPLY and MATCHINGBOX 5. Function description Reset command RESET[CR] Reset the alarm. Response when reception :[CR] Response when rejected AMC Settings AMC□AAAA[CR] Enter the matching mode for AAAA（Example:AMC□AUTO[CR]） AUTO / MANU Response when reception :[CR] Response when rejected PRG Settings PRGNO□A[CR] Enter the program number for A（Example:PRGNO□F[CR]...
  • Page 41 RF POWER SUPPLY and MATCHINGBOX 5. Function description Table 5-10. Status Check Command List Command name Details RFOP status confirmation RFOP?[CR] Response when reception :AAAAAA[CR] Response when rejected The RFOP status is output to AAAAAA. (Zero suppress) AMOP status confirmation AMOP?[CR] Response when reception :AAAAAA[CR] Response when rejected...
  • Page 42 RF POWER SUPPLY and MATCHINGBOX 5. Function description DUTY setting confirmation PDUTY? Response when reception :AAA Response when rejected DUTY setting value is output to AAA without a decimal point. (zero suppress) FREQ setting confirmation PFREQ? Response when reception :AAAAAA Response when rejected PFREQ setting value is output to AAAAAA without a decimal point.

  • Page 43: Instantaneous Voltage Drop

    RF POWER SUPPLY and MATCHINGBOX 5. Function description 5-9. Instantaneous voltage drop The RMG -1303 complies with the SEMI-F 47 standard, and its operating dura tion at an instantaneous voltage drop is within the recommended range of SEM I-F47-0706. In the area above the yellow line in the figure below, the operatio n continues without outputting an alarm.
  • Page 44 RF POWER SUPPLY and MATCHINGBOX 5. Function description Table 5-12. Operation at Instantaneous Voltage Drop at 200 VAC Input Sag depth Duration Behavior (During 100 VAC input operation) 0.02sec RF output continues and no alarm occurs. 0.2sec RF output continues and no alarm occurs. 0.5sec RF output continues and no alarm occurs.

  • Page 45: Rf Pulse Function

    RF POWER SUPPLY and MATCHINGBOX 5. Function description 5-10. RF pulse function 5-10-1. Reference value of usable range of pulse function Table 5-13. Reference Values for Pulse Function Item Reference value Pulse frequency 500Hz or more and 100KHz or less Pulse period 10μsec or more and 2000μsec or less Pulse on duty...
  • Page 46 RF POWER SUPPLY and MATCHINGBOX 5. Function description Pulse rise time Pulse fall time Pulse period Pulse width Figure 5-10. Pulse Output Reference Waveforms *Pulse output waveform, behavior when using pulse, operation of auto matching, etc. greatly differ depending on load conditions. When using the pulse output function, perform verification and experiment to confirm the actual behavior.

  • Page 47: Setting Of Various Parameter

    RF POWER SUPPLY and MATCHINGBOX 5. Function description 5-11. Setting of various Parameter 5-11-1. Maintenance mode setting It is not used during normal basic operation, but in order to set or adjust detailed Parameter, it is necessary to operate after setting in maintenance mode. In maintenance mode, display the target life screen shown below with RF OFF, hold down the "ESC"...
  • Page 48 RF POWER SUPPLY and MATCHINGBOX 5. Function description Table 5-14. Parameter on the Main Screen Details Item Parameter Details 000.0W / 000.0W = Output monitor value/Output setting value In the range from 1W to less than 30W, set and display in 0.1W units. In the range from 30W to 300W, set and display in 1W units.
  • Page 49 RF POWER SUPPLY and MATCHINGBOX 5. Function description Table 5-15. Main Screen Indicator Details Symbol Details Appears when outputting in continuous output mode. Π Appears when output in pulse output mode. Appears when the output droops due to excessive reflected power. Appears when the arc cut function is operating.

  • Page 50: Settings On The Operation Mode Screen

    RF POWER SUPPLY and MATCHINGBOX 5. Function description 5-11-3. Settings on the operation mode screen Figure 5-14. Operation Mode Screen (Normal Mode) Fugure 5-15. Operation Mode Screen (Maintenance mode) Table 5-16. Parameter on the Operational Mode Screen Details Item Details Selection of operation mode for RFON operation and output power setting PANEL : Control from Controller...
  • Page 51 RF POWER SUPPLY and MATCHINGBOX 5. Function description Setting auto matching completion judgment : Completion judgment is made with the reflection power below the allowable residual reflection power set value. : Completion determination by impedance sensor only. : Allowable residual reflection power setting value and AUTO completion judgment by impedance sensor.

  • Page 52: Settings On The Variable Capacitor Limit Setting Screen

    RF POWER SUPPLY and MATCHINGBOX 5. Function description 5-11-4. Settings on the variable capacitor limit setting screen Figure 5-16. Variable capacitor limit setting screen (Normal Mode) Figure 5-17. Variable capacitor limit setting screen (Maintenance Mode) Table 5-18. Parameter on the variable capacitor limit setting screen details Item Details TUNE variable capacitor operation upper limit value setting.
  • Page 53 RF POWER SUPPLY and MATCHINGBOX 5. Function description MATCH variable capacitor position monitor value. Display from 0% to 99% in 1% units Table 5-19. Variable capacitor limit setting screen indicator details Symbol Details Appears when outputting in continuous output mode. Π...

  • Page 54: Settings On The Menu Mode Screen

    RF POWER SUPPLY and MATCHINGBOX 5. Function description 5-11-5. Settings on the menu mode screen Figure 5-18. Menu Mode Screen (Normal Mode) Figure 5-19. Menu Mode Screen (maintenance mode) Table 5-20. Parameter on the Menu Mode Screen Details Item Details Target Life Display TLIFE Display in the range of 0kWhr to 99999kWhr...

  • Page 55: Settings On The Pulse Mode Selection Screen

    RF POWER SUPPLY and MATCHINGBOX 5. Function description 5-11-6. Settings on the pulse mode selection screen Figure 5-20. Pulse Mode Setting Screen 1 (maintenance mode) Figure 5-21. Pulse Mode Setting Screen 2 (maintenance mode) Table 5-22. Parameter on the Pulse Mode Screen Details Item Details : Continuous output mode...
  • Page 56 RF POWER SUPPLY and MATCHINGBOX 5. Function description Table 5-23. Pulse Mode Screen Indicator Details Symbol Details Appears when outputting in continuous output mode. Π Appears when output in pulse output mode.

  • Page 57: Settings On The Arc Parameteretting Screen

    RF POWER SUPPLY and MATCHINGBOX 5. Function description 5-11-7. Settings on the arc Parameteretting screen Figure 5-22. Arc Parameteretting Screen (maintenance mode) Table 5-24. Parameter on the Arc Setting Screen Parameter details Item Details Output cutoff time setting when arc occurs. ASTOP Set in 1μsec unit from 10μsec to 999μsec.

  • Page 58: Settings On The Alarm Threshold Setting Screen

    RF POWER SUPPLY and MATCHINGBOX 5. Function description 5-11-8. Settings on the alarm threshold setting screen Figure 5-23. Alarm Threshold Setting Screen (maintenance mode) Table 5-26. Parameter on the alarm threshold setting screen details Item Details Setting of reflected power threshold for excessive reflected power alarm. PROL Set in 1W unit from 1W to 80W.

  • Page 59: Settings On The Monitor Value Offset Setting Screen

    RF POWER SUPPLY and MATCHINGBOX 5. Function description 5-11-9. Settings on the monitor value offset setting screen Figure 5-24. Monitor offset setting screen (maintenance mode) Table 5-28. Parameter on the monitor value offset setting screen details. Item Details Offset setting of output power monitor value. PFOS Set in 0.1W unit from -30W to 30W Offset setting of reflection power monitor value.

  • Page 60: Settings On The Auto-Matching Operation Setting Screen

    RF POWER SUPPLY and MATCHINGBOX 5. Function description 5-11-10. Settings on the auto-matching operation setting screen Figure 5-25. Auto-matching operation setting screen (maintenance mode) Table 5-30. Parameter on the auto-matching operation setting screen ditails. Item Details : Auto start of preset operation at RFOFF. APRESET : Does not automatically start preset operation at RFOFF.

  • Page 61: Settings On The Security Setting Screen

    RF POWER SUPPLY and MATCHINGBOX 5. Function description 5-11-11. Settings on the security setting screen Figure 5-26. Security Settings Screen (maintenance mode) Table 5-32. Parameter on the Security Configuration Screen Details Item Details : The control key is disabled when the controller is not operated PLOCK for a certain period of time.

  • Page 62: Settings On The Control Mode Setting Screen

    RF POWER SUPPLY and MATCHINGBOX 5. Function description 5-11-12. Settings on the control mode setting screen Figure 5-29. Control Mode Setting Screen (maintenance mode) Table 5-34. Parameter on the control mode setting screen details. Item Details : Setting to set the alarm signal pin of external analog control to CLOSE when an alarm is generated.

  • Page 63: Settings On The Fan Speed Setting Screen

    RF POWER SUPPLY and MATCHINGBOX 5. Function description 5-11-13. Settings on the fan speed setting screen Figure 5-30. Fan Speed Setting Screen (maintenance mode) Table 5-36. Parameter on the Fan Speed Setting Screen Ditails. Item Details : Monitored value of the temperature around the CPU inside the TEMP power supply.

  • Page 64: Settings On The External Analog Vdc Output Setting Screen

    RF POWER SUPPLY and MATCHINGBOX 5. Function description 5-11-14. Settings on the external analog VDC output setting screen Figure 5-31. External Analog VDC Output Setting Screen (maintenance mode) Table 5-38. Parameter on the External Analog VDC Output Setting Screen Ditails Item Details : Invert positive/negative of VDC monitor output of external...

  • Page 65: Setting On The Variable Capacitor Speed Setting Screen

    RF POWER SUPPLY and MATCHINGBOX 5. Function description 5-11-15. Setting on the variable capacitor speed setting screen Figure 5-32. Varicon Speed Setting Screen (maintenance mode) Table 5-40. Parameter on the Variable capacitor Speed Setting Screen Ditails Item Details Left : Setting of The rotational speed of the TUNE variable capacitor in the vicinity of the auto-matching completion position.

  • Page 66: Setting On The Matching Circuit Constant Setting Screen

    RF POWER SUPPLY and MATCHINGBOX 5. Function description 5-11-16. Setting on the matching circuit constant setting screen Figure 5-33. Matching Circuit Constant Setting Screen 1 (maintenance mode) Figure 5-34. Matching Circuit Constant Setting Screen 2 (maintenance mode) Table 5-42. Parameters on the Matching Circuit Constant Setting Screen Ditails Item Details Left...
  • Page 67 RF POWER SUPPLY and MATCHINGBOX 5. Function description TUNE variable capacitor position monitor value. 0% to 99% in 1.0% increments MATCH variable capacitor position monitor value. 0% to 99% in 1.0% increments. Displays the impedance calculated from the current variable capacitor LOAD_Z position based on the input circuit constant.

  • Page 68: Monitor Value Offset Setting Screen

    RF POWER SUPPLY and MATCHINGBOX 5. Function description 5-11-17. Monitor value offset setting screen Figure 5-35. Monitor value offset setting screen (maintenance mode) Table 5-44. Parameters on the Monitor value offset setting screen details Item Details Fine adjustment of PF monitor output voltage for external analog PFMADJ control.

  • Page 69: Analog Input Adjust Setting Screen

    RF POWER SUPPLY and MATCHINGBOX 5. Function description 5-11-18. Analog Input Adjust setting screen Fugure 5-36. Analog Input Adjust setting screen (maintenance mode) Table 5-46. Parameters on the Analog Input Adjust setting screen details Item Details Fine adjustment of the PF setting input value for external analog control. P.IADJ Set in 1 resolution unit from -200 to 200 Fine adjustment of TUNE preset input value for external analog control.

  • Page 70: Setting On The Model Confirmation Screen

    RF POWER SUPPLY and MATCHINGBOX 5. Function description 5-11-19. Setting on the model confirmation screen Figure 5-37. Model Confirmation Screen (maintenance mode) Table 5-48. Parameters on the Model Confirmation Screen details Item Details MODEL Displays the P/S Mode. Displays the rated output power. Displays the rated reflected power.

  • Page 71: Software Version Confirmation Screen

    RF POWER SUPPLY and MATCHINGBOX 5. Function description 5-11-20. Software version confirmation screen Figure 5-38. Software Version Confirmation Screen (maintenance mode) Table 5-50. Parameters on the Software Version Confirmation Screen details Item Details Main Displays the software version of the main program. Displays the software version of the subprogram.

  • Page 72: Alarm History Confirmation Screen

    RF POWER SUPPLY and MATCHINGBOX 5. Function description 5-11-21. Alarm history confirmation screen Figure 5-39. Alarm history confirmation screen1 (maintenance mode) Figure 5-40. Alarm history confirmation screen1 (maintenance mode) Table 5-52. Parameters on the Alarm history confirmation screen details Item Details Select the alarm log number from the 16 recorded.

  • Page 73: Setting On The Auto-Matching Constant Setting Screen

    RF POWER SUPPLY and MATCHINGBOX 5. Function description 5-11-22. Setting on the auto-matching constant setting screen. Figure 5-41. Auto-matching constant setting screen.（maintenance mode） Table 5-54. Parameters on the Auto-matching constant setting screen details Item Details 0000/0000 = PF: Mag monitored value of PR/PF: Mag threshold setting of PR.
  • Page 74 RF POWER SUPPLY and MATCHINGBOX 5. Function description Table 5-55. Auto-matching constant setting screen Indicator Details Symbol Details Appears when outputting in continuous output mode. Π Appears when output in pulse output mode. AUTO Indicates that it is in auto matching mode. MANU Indicates that it is in manual matching mode...

  • Page 75: List Of Parameters

    RF POWER SUPPLY and MATCHINGBOX 5. Function description 5-11-23. List of parameters Table 5-56. List of parameters Parameters Min. Typ. Max. PRG. 300.0 80.0 -2500 2500 +2500 2500 5000 AUTO RFOP PANEL AMOP PANEL AUTO ADLY 999.9 999.9 ○ ○ ○...
  • Page 76 RF POWER SUPPLY and MATCHINGBOX 5. Function description 9999 PROL PROT VPOL 2500 5000 VPOT VDOL 2500 2500 VDOT PROM PFOS PROS VPOS -500 VDOS -500 APRESET FAMC LIMCONT LMVT LMVM PLOCK ROCKT PASS 0000 0000 FFFE ALARM S.TRD FBUS NONE 0000 0000...
  • Page 77 5. Function description 5.00 PFMADJ -200 PRMADJ -200 VPMADJ -200 VDMADJ -200 P.IADJ -200 T.IADJ -200 M.IADJ -200 MODEL RMG-1303 3200 4095 2146 4095 1564 4095 *Parameters marked with a circle in the PRG row are stored for each PRG No.

  • Page 78: Operation

    RF POWER SUPPLY and MATCHINGBOX 6. Operation 6. Operation 6-1. Power activation Before energizing the system, check that the cables between each unit are correctly wired, and then turn on the main breaker for the unit. If there are no problems, the main screen is displayed on the panel.

  • Page 79: Preset Operation

    RF POWER SUPPLY and MATCHINGBOX 6. Operation 6-2-2. Preset operation If you want to preset the TUNE/MATCH variable capacitor before RF output in the "AMC = AUTO" state, press the "▶" key several times to display the variable control limit setting screen shown below. Press the "◀" "▶" key to select the "MPS" parameter, then press the "ENT"...

  • Page 80: Setting The Matching Mode

    RF POWER SUPPLY and MATCHINGBOX 6. Operation Finally, press the "ENT" key to confirm the setting change. When the setting is changed in the RF output, the actual output changes at the same time as the numeric value increases or decreases, but if it is not confirmed by the "ENT" key, it returns to the original value when the cursor is moved.

  • Page 81: Operation Method Using External Analog Control

    RF POWER SUPPLY and MATCHINGBOX 6. Operation 6-3. Operation method using external analog control 6-3-1. Selection of external analog control mode When using an external analog control (EXT.CONT) to operate the RF output or set auto-matching, set the following RFOP and AMOP parameters to "ANALOG". Select "EXT-ON"...

  • Page 82: Setting The Matching Mode

    RF POWER SUPPLY and MATCHINGBOX 6. Operation 6-3-3. Setting the Matching Mode There is no matching-mode select pin in external analog control mode. Use the controller or serial communication to select "AUTO" or "AMC = MANU". When "MANU" is set in the external analog control mode, it can be used only for the purpose of stop matching operation during auto-matching operation is available.
  • Page 83 RF POWER SUPPLY and MATCHINGBOX 6. Operation ※ If when the interlock was enabled at this time, the preset operation stops. (The preset operation is not resumed even if the interlock is released later.) When using the preset function, enable the interlock after 500 msec or more have passed after the BUSY signal fell during the preset operation.

  • Page 84: Operating Method With Rs-232C Communication

    RF POWER SUPPLY and MATCHINGBOX 6. Operation 6-4. Operating method with RS-232C communication 6-4-1. Selection of RS-232C communication control operation mode When using external serial communication control (RS-232C) to operate the RF output or set auto-matching, set the following RFOP and AMOP parameters to "SERIAL".

  • Page 85: Setting The Matching Mode

    RF POWER SUPPLY and MATCHINGBOX 6. Operation 6-4-4. Setting the Matching Mode Input the matching mode setting command from the outside using the external serial communication control (RS-232C) connector. For pin assignments and commands of external serial communication control (RS-232C), refer to "Connector pin assignments in external serial communication operation mode"...

  • Page 86: How To Perform Special Operations

    RF POWER SUPPLY and MATCHINGBOX 6. Operation 6-4-6. How to perform special operations The following operations and functions apply to the RFP-N (controller) special operations. Table 6-1. List of special operations Item Details On the target life screen, hold down the "▲" and "▼" keys simultaneously and press the "ESC"...

  • Page 87: Matching Adjustment

    RF POWER SUPPLY and MATCHINGBOX 7. Matching Adjustment 7. Matching Adjustment 7-1. Matching Adjustment overview 7-1-1. Matching fundamentals As shown in “Basic matching circuit” the matching box consists of variable capacitors (C1, C2) and a coil (L). The TUNE variable capacitor serves to terminate real part at 50 Ω...

  • Page 88: Method Of Matching Adjustment

    RF POWER SUPPLY and MATCHINGBOX 7. Matching Adjustment 7-1-2. Method of matching adjustment (1) Set the matching mode to Manual and set the TUNE and MATCH variable control positions to 50%. Turn on RF and increase Pf until 70% to 80% of the maximum reflected power.
  • Page 89 RF POWER SUPPLY and MATCHINGBOX 7. Matching Adjustment Symptom: When VPP increases and Pr decreases as Match variable capacitor approaches 99%（1） Action: Since the inductance in the matching unit is too small, the matching unit is out of matching range. To adjust a matching range by changing a coil tap of a matching unit in Action: the direction of enlarging a coil.
  • Page 90 RF POWER SUPPLY and MATCHINGBOX 7. Matching Adjustment Symptom: VPP rises and Pr decreases as Tune baricon approaches 99%.(1) Cause: The resistance component of the load is too low and is out of the matching range. Action: Add capacitors in parallel to Tune in matching units. Symptom: VPP rises and Pr decreases as Tune baricon approaches 99%.(2) Cause: The resistance component of the load is too low and is out of the...

  • Page 91: Matching Box Internal Adjustment Method

    RF POWER SUPPLY and MATCHINGBOX 7. Matching Adjustment 7-2. Matching box internal adjustment method The adjustment work carries a risk of coming into contact with hazardous voltages and hazardous energies, so fully read and understand the warnings below before working. High voltages are present in the matching box.

  • Page 92: How To Adjust The Number Of Coil Shorts

    RF POWER SUPPLY and MATCHINGBOX 7. Matching Adjustment 7-2-1. How to adjust the number of coil shorts To increase or decrease the number of coil turns, open the matching unit's maintenance window and change tup of the coil. Can change the tap of the coil from 1 tap to 6tap.

  • Page 93: How To Add A Fixed Capacitor

    RF POWER SUPPLY and MATCHINGBOX 7. Matching Adjustment 7-2-2. How to add a fixed capacitor When adding a capacitor to the matching unit, open the maintenance panel side of the matching unit and replace the coil. When adding a capacitor to a load, be careful of the voltage and current, and make sure that there is sufficient margin of withstand voltage and current.
  • Page 94 RF POWER SUPPLY and MATCHINGBOX 7. Matching Adjustment Be careful of withstand voltage and withstand current when inserting a capacitor in parallel to the load. A fixed capacitor is a precision instrument. Shocks from falls or excessive stress may damage it.Please install it without excessive stress such as bending or twist it.

  • Page 95: Power Derating

    RF POWER SUPPLY and MATCHINGBOX 7. Matching Adjustment 7-3. Power derating There is an anticipated load current and voltage depending on the matching point. The maximum power that can be safely used is limited based on this, so use the power derating tables below as a guide.
  • Page 96 RF POWER SUPPLY and MATCHINGBOX 7. Matching Adjustment Table 7-6.3 When using the 3rd tap TAP3 TUNE Table 7-7. When using the 4th tap TAP4 TUNE Table 7-8. When using the 5th tap TAP5 TUNE Table 7-9. When using the 6th tap TAP6 TUNE ※...

  • Page 97: Maintenance

    RF POWER SUPPLY and MATCHINGBOX 8. Maintenance 8. Maintenance 8-1. Maintenance and inspection To ensure safe operation of the RMG -1303, it is recommended that an overhaul be performed at each of the recommended replacement periods listed below. Table 8-1. Recommended replacement parts Part name Recommended replacement life Cooling fan...

  • Page 98: Troubleshooting

    RF POWER SUPPLY and MATCHINGBOX 9. Troubleshooting 9. Troubleshooting 9-1. Troubleshooting Table 9-1. Troubleshooting list Phenomenon: In the manual matching operation, the Tune/Match positions where the reflection power is minimum are both within 0% to 99%, but there is no point where the Pr disappears. Causes: The arc cutting operation is intermittently repeated due to the generation of an arc on the load side, and plasma...
  • Page 99 RF POWER SUPPLY and MATCHINGBOX 9. Troubleshooting Phenomenon: Even under the same load condition, reflected power may remain depending on the output, or matching may not be achieved. Causes: The impedance of the load plasma varies depending on the output. The impedance may be out of the matching range or an abnormal oscillation may have occurred.
  • Page 100 RF POWER SUPPLY and MATCHINGBOX 9. Troubleshooting Phenomenon: In manual matching, it can be confirmed that the matching point is within the matching range, but in automatic matching, it does not stop at that point. Causes: The range of the matching point is narrow, and the varicon may have passed the matching point without stopping.
  • Page 101 RF POWER SUPPLY and MATCHINGBOX 9. Troubleshooting Phenomenon: When RF-ON is applied, peripheral equipment malfunctions or measurement values of peripheral equipment become abnormal. Causes: The connection to the load is not coaxial structure and the balance of noise and return current is lost. Or the return path is capacitively coupled with an insulator.
  • Page 102 RF POWER SUPPLY and MATCHINGBOX 9. Troubleshooting Phenomenon: Interlock and alarm are released, but RF-ON operation is not possible. Causes: The operation mode may not be set correctly. Countermeasure: Check that the RFOP parameter is set to the operation mode you want to control.
  • Page 103 RF POWER SUPPLY and MATCHINGBOX 9. Troubleshooting Table 9-2. Recommended LC Filters Rated Rated Model Manufacture Remarks voltage current LC1KV-1.5C-BOX 5.0A ULVAC HN connector LC1KV-5C 5.0A ULVAC Round crimp terminal LC1KV-8C 8.0A ULVAC Round crimp terminal LC1KV-15C 15.0A ULVAC Round crimp terminal LC1KV-20C 20.0A...

  • Page 104: Reference Materials

    RF POWER SUPPLY and MATCHINGBOX 10. Reference Materials 10. Reference Materials The following materials are included with this manual as a reference. ● RFP-N Exterior diagram ● RMG-1303 Exterior diagram ● Matching range Smith chart ● China RoHS compliant Document ●...
  • Page 105 RF POWER SUPPLY and MATCHINGBOX 10. Reference Materials Figure 10-1.RFP-N Exterior diagram...
  • Page 106 RF POWER SUPPLY and MATCHINGBOX 10. Reference Materials Figure 10-2.RMG-1303 Exterior diagram...
  • Page 107 RF POWER SUPPLY and MATCHINGBOX 10. Reference Materials TAP2 TAP1 TAP3 TAP4 TAP5 TAP6 Figure 10-3. RMG-1303 matching range (standard)

  • Page 108: People's Republic Of China Electronic Industry Standard Sj / T11364-2014

    RF POWER SUPPLY and MATCHINGBOX 10. Reference Materials 中华人民共和国中国电子行业标准 SJ / T11364-2014 People's Republic of China Electronic Industry Standard SJ / T11364-2014 有毒有害物质或元素/ Hazardous substance 部件名称/Part name Cr6+ PBDE 印刷电路板/printed bord ○ ○ ○ ○ ○ ○ 电子零件/Electronic parts ○ ○...

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