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No.32000-2-14-2
INSTRUCTION MANUAL
Power Supply for Resistance Heater Evaporation
PSE-150C
SEREM
Please read this manual thoroughly to ensure safe and effective operation
of this equipment.
Keep this manual in a safe place.
Please note that due to performance upgrade, the equipment described in
this manual is subject to changes in dimensions and specifications without
prior notice.
ULVAC KIKO, Inc.
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Table of Contents
Related Manuals for Ulvac SEREM PSE-150C
Summary of Contents for Ulvac SEREM PSE-150C
- Page 1 Please read this manual thoroughly to ensure safe and effective operation of this equipment. Keep this manual in a safe place. Please note that due to performance upgrade, the equipment described in this manual is subject to changes in dimensions and specifications without prior notice. ULVAC KIKO, Inc.
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Page 2: Table Of Contents
Instruction Manual Contents Items marked [ ] are related to safety. 1 Introduction ........................１ 1-1. Suitable operator ..................... １ 1-2. Perusal of Instruction Manual .................. １ 1-3. Keeping Instruction Manual ..................１ 1-4. Warranty ........................１ 1-5. Observance of laws ....................２ 1-6. - Page 3 5-1. Danger and Safety Measure in Maintenance and Repair ........２１ 5-2. Maintenance and Check Point ................２１ 5-3. Measures in trouble ....................２１ 5-4. Storage of Equipment ...................２２ 5-5. Consumption Parts List ..................２２ 6 Disposal ........................２３ 6-1. Caution for Disposal .....................２３ 7. Ulvac KIKO Address List ................... ２４...
- Page 4 The copyright of this user’s manual and safety guides are reserved by Technical Division of Ulvac Kiko. No part of this document, in whole or part may be reproduced without permission of Ulvac Kiko Inc.
- Page 5 Instruction Manual Power Supply Primary Power Supply capacity Prepare the single-phase power supply exceeding 200V 7.5A. In case the power capacity is not adequate, a circuit Capacity check breaker may trip by over current during operation. Prepare islanding power for Primary Power Supply, and do not connect other equipment to the Power Supply.
- Page 6 Instruction Manual Environment This Power Supply is not allowed to use in inflammable ambient since it is not designed for explosion-proof construction. Prohibition It has a risk of fire or burn due to an ignition explosion. Power Supply Cooling Fan is rotating during operation.
- Page 7 Instruction Manual Installation Install this Power Supply in place where satisfying the following conditions. 1) Horizontal place. 2) On the floor having enough strength. 3) Well-ventilated place. 4) Where no exposure to sunlight. 5) Room temperature is in range of 7℃ to 30℃ (44.6°...
- Page 8 It has a risk of causing Power Supply failure. Prohibition Maintenance/Repair/Disposal Do not disassemble or modify. Ulvac KIKO shall not be responsible if disassembled or Prohibition modified. Weight of Power Supply is 40kg approx. Do not mount or detach Power Supply in Warning unreasonable posture.
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Page 9: Introduction
Instruction Manual 1 Introduction 1-1. Suitable operator This Power Supply shall be operated by a person having experience of operating a vacuum evaporation equipment or the person who are trained based on this instruction manual 1-2. Perusal of Instruction Manual Peruse this Instruction Manual thoroughly before operating this Power Supply to operate correctly. -
Page 10: Observance Of Laws
Consult factory if you have any question. 1-6. Safety Control in Repair In case requesting Ulvac to repair, please advise existence of hazardous substance for safety control of repair personnel. Please attach the filled Use Situation Check Sheet to Power Supply. -
Page 11: Outline Of Product
Please observe the following prohibited operation to use Power Supply normally. Do not use this Power Supply for the other purpose than the vacuum evaporation. Do not use other cable than the dedicated cable. Prohibition Do not resale/repair/modify unless Ulvac authorized. 2-2. Safety Device and Purpose/Function Item Purpose Function... -
Page 12: Product Specifications
Instruction Manual 2-3. Product specifications Input AC 200V Single-phase 1.5kVA (50/60Hz) Allowable voltage fluctuation range: ±10% Output Max.150A Control method Thyristor AC phase control method Control signal External automatic control input DC0-10V/0-100% setting Reception impedance 1MΩ Output control Constant power operation/constant current operation/constant... -
Page 13: Functional Description
Instruction Manual 2-5. Functional Description 2-5-1 Front Key Operation ⑥ ⑨ ⑦ ⑧ ① ④ ⑤ ③ ② Panel Layout Drawing Item Equipment name Function Main Power Supply MAIN operation switch Power Switch of this equipment ① (Circuit protector) POWER For main switch turn ON and turn OFF: Operation switch Switches operation or state of stop... - Page 14 Instruction Manual Item Equipment name Function For output voltage range switchover (HIGH: 10V, LOW: Operation switch HIGH/LOW * Note 2 When lamp lighting: HIGH, When lamp lights out: LOW * Operation is allowed when POWER OFF only REMOTE Connector for remote Connect a wireless remote controller box for external ⑩...
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Page 15: Dimensions
Instruction Manual 2-6. Dimensions V.02 2014.09 ７... -
Page 16: Electric Circuit Diagram
Instruction Manual 2-7. Electric Circuit Diagram V.02 2014.09 ８... -
Page 17: Unpacking/Installation
Instruction Manual 3 Unpacking/Installation 3-1. General Precaution 1) Confirm whether delivery matched to the product required. 2) Confirm whether predetermined accessories are included. 3) Secure space longer than 1m (3') to equipment circumference safety of installation work. 4) Install adjacent to evaporation equipment. Check 3-2. -
Page 18: Power Supply
Instruction Manual 3-4. Power Supply Primary Power Supply capacity Prepare the single-phase power supply exceeding 200V 7.5A. Capacity check Warning In case the power capacity is not adequate, a circuit breaker may trip by overcurrent during operation. Primary cable specifications Single-phase 200V cable, 2m (6.6') long, with Φ5 solderless terminal at tip. -
Page 19: Required Tool List
Instruction Manual 3-5. Required Tool List Tool name Usage Connection of the primary Power Supply Phillips-head screwdriver cable Torque wrench/socket (13 opposite side) Evaporation Power Supply cable connection 3-6. Connection ⑥ ④ ⑤ ③ ① ② パネル配置図 Item Connection Connect Power Supply between TB1 terminal R-S. ①... - Page 20 Instruction Manual Pin No. Contents operation POSITION NO.1 When level Close 5 → Signal output operation POSITION NO.2 When level Close 6 → Signal output operation * POSITION NO.3 When level Close 7 → Signal output operation * 8 → Signal output POSITION LOW When ON Tr level L Close operation POSITION HIGH...
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Page 21: Driving Operation
Instruction Manual 4 Driving Operation 4-1. Contents of Danger in Operation and Safety Measures Do not operate when an evaporation source is installed in the load side. Prohibition It has a risk of causing Power Supply failure. Maximum output is 150A. Warning Do not operate with a load larger than 150A. -
Page 22: Remote Control Box (Optional)
Instruction Manual 4-2-3 Remote Control Box (optional) 1) Connect to the connector for remote control. 2) It is possible to operate same as main body panel function. * Panel operation is allowed when connected to the remote control. POWER DOWN ON/OFF 4-2-4 Operation Mode Setting 1) Push and hold down [RESET] switch and shift to "Parameter input mode". - Page 23 Instruction Manual Factory Item Setting Contents default Sets time from command to when the adjustment Control RESPONSE- operation (response) is finished. response TIME Setting range: 0 to 10 SEC speed (seconds The shorten this time shall make the control response speed faster. (Example) Adjust after checking hunting, etc.
- Page 24 Instruction Manual Factory Item Setting Contents default Setting current Inputs current conversion value when output is span 100%. I-SCALE (When output Setting range: 0 to 150A 150(A) (HIGH) range HIGH) (Example) Because Power Supply maximum current is 150A, --- "150" A. Power limit Inputs using maximum power value.
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Page 25: Soft Start Operation
Instruction Manual 4-2-5 Soft Start Operation 1) Conduct setting of all items, i.e. T1, T2, T3, P1, P3. Output ％ MANUAL output or output by external input signal (0-10V) (P2) is P1 set value. (P2) Time (SEC) 2) Precaution 2)-1 P3≧P1 Set in condition of (P3 output hall be larger than P1 output). -
Page 26: Dip Switch Setting
Instruction Manual 2-6 DIP Switch setting 1) By switchover DIP Switch on CPU substrate, display indication and operation mode can be changed. DIP, SW * is factory default Service mode * OFF: Normal use ON: Do not set to ON Storage of MANUAL output setting * OFF: Not store when power is OFF ON: Stores when power is OFF... -
Page 27: Parameter Setting Operation
Instruction Manual 4-2-7 Parameter setting operation 1) Supplementary description Press RESET key 4 or 5 seconds. Shifts to parameter mode. Voltage indication field shows Indication No. of Voltage indication field 01 _ _ the parameter item. Current indication field _ _ _0 Current indication field shows the set value. -
Page 28: Operation When Power Failure Returns
Instruction Manual 4-3-3 Operation when power failure returns Please execute it from basic operation (4-2-2) again. V.02 2014.09 ２０... -
Page 29: Maintenance And Repair
Instruction Manual 5 Maintenance and Repair 5-1. Danger and Safety Measure in Maintenance and Repair Do not disassemble or modify. Ulvac KIKO shall not be responsible if disassembled or modified. Warning Prohibition 5-2. Maintenance and Check Point Maintenance Check Point... -
Page 30: Storage Of Equipment
Instruction Manual Trouble Conceivable Cause Measures Value is displayed when Due to characteristic of thyristors, POWER turned ON whereas there is a leak current. Even Not abnormal. "0" setting output is set to "0", outputs several * Since this Power Supply conducts automatic control between parameter set value by detecting the load output in real time, normal operation cannot be performed if various setting data are incorrect. -
Page 31: Disposal
Instruction Manual 6 Disposal 6-1. Caution for Disposal Disposal of Power Supply unit is obliged to laws. Dispose Power Supply unit according to laws Observance of Caution appropriately. Consult factory if you have any laws question. Relevant regulation: Laws about processing of a waste and cleaning. Process method: 1) Transportation: An industrial waste collection transportation supplier.