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Ulvac RFP-N Instruction Manual

High-frequency power supply
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High-Frequency Power Supply
RF Generator
Matching Box
Model:
Control Panel
RF Generator
Matching Box
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* Read this manual before using the system.
Store this manual carefully so that it can be used at anytime.
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RFP-N
RFS-1305N
RFS-1310N
RFS-1330N
RFS-1350N
MBX-1305N
MBX-1310N
MBX-1330N
MBX-1350N
Revised 18th Edition 2023/07/19
RF0040E-18
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ULVAC Inc.

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Summary of Contents for Ulvac RFP-N

  • Page 1 RF0040E-18 High-Frequency Power Supply RF Generator Matching Box Model: Control Panel RFP-N RF Generator RFS-1305N RFS-1310N RFS-1330N RFS-1350N Matching Box MBX-1305N MBX-1310N MBX-1330N MBX-1350N Revised 18th Edition 2023/07/19 ULVAC Inc. * Read this manual before using the system. Store this manual carefully so that it can be used at anytime.
  • Page 2 The content of this manual may differ from the system being used because of improvements to the system.  If you have any questions or items of concern, contact ULVAC or your exclusive dealer.  Please operate the system safely and administer it correctly.
  • Page 3 RF POWER SUPPLY and MATCHINGBOX Introduction 1. Safety precautions Most accidents are attributed to carelessness during operation, inspection, maintenance, or repair. Accidents happen more easily by failing to comply with the safety precautions or neglecting to anticipate danger. Accidents can be prevented before they happen by anticipating potentially dangerous situations.
  • Page 4 RF POWER SUPPLY and MATCHINGBOX Introduction 2. Safety symbols This symbol indicates the possibility of impending death or serious injury when the hazard cannot be avoided. Work that ignores this warning has a high probability of severely Danger injuring people or damaging factory equipment (including the system).
  • Page 5 If you have determined there is a malfunction or if you have any questions, contact one of the locations listed below. When contacting ULVAC, please inform us of the product name or model number, the serial number, and the symptoms of the problem in as much detail as possible.
  • Page 6 5. Response method 1) For domestic transactions 1. ULVAC will send a replacement system, or you will return the system to ULVAC or the nearest ULVAC service center where it will be repaired. 2. If an on-site response is required, consult separately with ULVAC, Inc.

  • Page 7: Table Of Contents

    RF POWER SUPPLY and MATCHINGBOX Contents Contents 1. For Safe Operation ..........................1 1-1. Precautions when handling the system ..................1 1-2. Warning labels/nameplate ......................2 1-3. Contact information ........................2 2. Overview .............................. 3 2-1. Introduction ..........................3 2-2. Features ............................3 2-3.
  • Page 8 RF POWER SUPPLY and MATCHINGBOX Contents 4-3. Descriptions of parameter functions ................... 45 4-4. Descriptions of external control (RS-232C) functions ............... 59 5. Operation ............................62 5-1. RF Generator operating procedures .................... 62 5-1-1. Turning on the RF Generator ....................62 5-1-2.

  • Page 9: For Safe Operation

    Interior maintenance work must be done by a technician specified by ULVAC or under the direction of such a person. For maintenance work where the interior may be...

  • Page 10: Warning Labels/Nameplate

    To order parts, ask questions about products, and to make inquires related to product malfunctions, first verify the product information and then contact ULVAC or an exclusive dealer. Especially when you have determined the system has malfunctioned, inform us of the system information along with the system's history and symptoms in as much detail as possible.

  • Page 11: Overview

    RF POWER SUPPLY and MATCHINGBOX 2. Overview 2. Overview This chapter describes the system's features, configuration, and specifications. 2-1. Introduction This system has been designed for plasma generation in RF sputtering, plasma CVD, etching, and other plasma processing applications. This system combines an RF Generator and matching box. It can continuously output its rated power at a single frequency of 13.56 MHz for high frequency loads.

  • Page 12: System Configuration

    The basic configuration requires the equipment below. ① RF generator (RFS-****N) ② Matching box (MBX-****N) ③ Control panel (RFP-N) * Not used in external control and with built-in types. Figure 2-1 System configuration (standalone controller type) Figure 2-2 System configuration (built-in controller type)
  • Page 13 RF POWER SUPPLY and MATCHINGBOX 2. Overview Table 2-1 Details on the system configuration diagram codes Wiring diagram code Supported model Remarks RFS-1305N 13.56 MHz/500 W RF Generator RFS-1310N 13.56 MHz/1000 W RF Generator RFS-****N RFS-1330N 13.56 MHz/3000 W RF Generator RFS-1350N 13.56 MHz/5000 W RF Generator MBX-1305N...

  • Page 14: Cooling Water Quality Standard

    RF POWER SUPPLY and MATCHINGBOX 2. Overview 2-4. Cooling water quality standard Table 2-2 Cooling water quality standard* Item Substance Water quality standard Water temperature 25°C or lower (no condensation) ∙ 5 kΩ Specific resistance cm or higher 7.0 to 8.0 －...

  • Page 15: Individual Rf Generator Specifications

    RF POWER SUPPLY and MATCHINGBOX 2. Overview 2-5. Individual RF Generator specifications Table 2-3 RFS-1305N specifications Specification value Classification Item RFS-1305N Input frequency Single-phase 50 to 60 Hz Input voltage 200 to 220 VAC Fluctuation range Rated voltage ±10% (180 to 242 VAC) Input capacity Approx.
  • Page 16 RF POWER SUPPLY and MATCHINGBOX 2. Overview Table 2-4 RFS-1310N specifications Specification value Classification Item RFS-1310N Input frequency Single-phase 50 to 60 Hz Input voltage 200 to 220 VAC Fluctuation range Rated voltage ±10% (180 to 242 VAC) Input capacity Approx.
  • Page 17 RF POWER SUPPLY and MATCHINGBOX 2. Overview Table 2-5 RFS-1330N specifications Specification value Classification Item RFS-1330N Input frequency Three-phase 50 to 60 Hz Input voltage 200 to 220 VAC Fluctuation range Rated voltage ±10% (180 to 242 VAC) Input capacity Approx.
  • Page 18 RF POWER SUPPLY and MATCHINGBOX 2. Overview Table 2-6 RFS-1350N specifications Specification value Classification Item RFS-1350N Input frequency Three-phase 50 to 60 Hz Input voltage 200 to 220 VAC Fluctuation range Rated voltage ±10% (180 to 242 VAC) Input capacity Approx.

  • Page 19: Common Rf Generator Specifications

    RF POWER SUPPLY and MATCHINGBOX 2. Overview 2-6. Common RF Generator specifications Table 2-7 Common RF Generator specifications (protection functions) Classification Item Protection operation OVER_REF Suppresses the output power when reflected wave power is too large. Suppresses the output power when the RF amplifier's input power is too OVER_POW large.
  • Page 20 RF POWER SUPPLY and MATCHINGBOX 2. Overview Table 2-8 Common RF Generator specifications (ALARM) Alarm name Alarm occurrence conditions EXT.INTER LOCK When the external interlock was disengaged while RF-ON. RF COVER OPEN When the coaxial connector cover was removed while RF-ON. MBX COVER OPEN When the matching box interlock was disengaged while RF-ON.

  • Page 21: Individual Controller Specifications

    * When a warning occurs, RF output continues and the warning name flashes on the display screen. * When the cause of the warning goes away, the warning name display disappears. 2-7. Individual controller specifications Table 2-10 RFP-N specifications Specification value Item...

  • Page 22: Individual Matching Box Specifications

    RF POWER SUPPLY and MATCHINGBOX 2. Overview 2-8. Individual matching box specifications Table 2-11 MBX-1305N specifications Specification value Classification Item MBX-1305N Rated input Supply power 24 VDC/3 A max (supplied from the RF generator) voltage/current Frequency 13.56 MHz ± 0.05% Rated power 30 W or higher, 500 W or less RF input...
  • Page 23 RF POWER SUPPLY and MATCHINGBOX 2. Overview Table 2-12 MBX-1310N specifications Specification value Classification Item MBX-1310N Rated input Supply power 24 VDC/3 A max (supplied from the RF generator) voltage/current Frequency 13.56 MHz ± 0.05% Rated power 30 W or higher, 1000 W or less RF input 50 Ω...
  • Page 24 RF POWER SUPPLY and MATCHINGBOX 2. Overview Table 2-13 MBX-1330N specifications Specification value Classification Item MBX-1330N Rated input Supply power 24 VDC/3 A max (supplied from the RF generator) voltage/current Frequency 13.56 MHz ± 0.05% Rated power 30 W or higher, 3000 W or less RF input 50 Ω...
  • Page 25 RF POWER SUPPLY and MATCHINGBOX 2. Overview Table 2-14 MBX-1350N specifications Specification value Classification Item MBX-1350N Rated input Supply power 24 VDC/3 A max (supplied from the RF generator) voltage/current Frequency 13.56 MHz ± 0.05% Rated power 50 W or higher, 5000 W or less RF input 50 Ω...

  • Page 26: Common Matching Box Specifications

    RF POWER SUPPLY and MATCHINGBOX 2. Overview 2-9. Common matching box specifications Table 2-15 VPP/VDC sensor specifications VPP/VDC sensor model VDC scale VPP scale VDP-13HU 0 to -2500 V 0 to 10000 V VDP-13HH 0 to -2500 V 0 to 5000 V VDP-13HM 0 to -2500 V 0 to 2500 V...

  • Page 27: Setup

    RF POWER SUPPLY and MATCHINGBOX 3. Setup 3. Setup This chapter describes the necessary setup and precautions from when the product is delivered up until it is ready to be used. 3-1. Checking the accessories Table 3-1 RFS-1305N/RFS-1310N standard accessories Name Remarks Quantity...

  • Page 28: Rf Generator Installation

    RF POWER SUPPLY and MATCHINGBOX 3. Setup 3-2. RF generator installation Install the RF generator according to the following procedure. Caution The RFS-1330N, RFS-1350N, and MBX-1350N are heavy objects. When moving them, always hold the handles and use two or more workers to lift them up and move them.

  • Page 29: Rf Generator Mounting Structure

    RF POWER SUPPLY and MATCHINGBOX 3. Setup 3-2-1. RF generator mounting structure This product has a structure that can be rack mounted. For drilling installation holes in the rack, refer to the included outline drawing. The RF generator's front panel is not designed to bear the RF Generator's weight. In mounting the RF generator, ensure that undue force is not exerted on the front panel.

  • Page 30: Rf Generator Installation Environment

    RF POWER SUPPLY and MATCHINGBOX 3. Setup 3-2-2. RF Generator installation environment  Ambient temperature of 10°C to 40°C when operating (RF-ON).  Install so that the top panel is facing up in a location with good ventilation that avoids direct sunlight, heat, dust, vibrations, and humidity.

  • Page 31: Matching Box Installation

    RF POWER SUPPLY and MATCHINGBOX 3. Setup 3-3. Matching box installation Install the matching box according to the following procedure. 3-3-1 Matching box installation method Danger In order to prevent electric shock accidents, confirm that the main breaker that generates dangerous voltages for the RF Generator and DC Generator has been shut off and confirm that the AC Generator has been shut off before performing any installation or removal work, and wait an addition three minutes or more after shutting them off.
  • Page 32 RF POWER SUPPLY and MATCHINGBOX 3. Setup Caution The MBX-1330N/MBX-1350N cooling water connector is Rc3/8 (PT3/8) female. Please use this connector by converting it to the connector of the tube that will be used with the appropriate conversion connector. To obtain the specified water flow rate, use a Synflex tube with a diameter of 3/8 inches or larger.

  • Page 33: In The Case Of Connector Output

    RF POWER SUPPLY and MATCHINGBOX 3. Setup When using the matching box's panel with punched holes for ventilation and the fan installation panel as the top panel, there is a risk that contaminants will enter the matching box from that top panel and short circuit the internal circuits or cause arcing due to insulation deterioration, so take care to use the maintenance panel as the top panel.
  • Page 34 RF POWER SUPPLY and MATCHINGBOX 3. Setup Connect to the output connector on the side panel of the matching box using an RF output coaxial cable. Use the following items. ・ HN output cable: RF393-HH ・ DIN output cable: RF393-DD Use after attaching a connector on the load side as well.

  • Page 35: System Wiring

    * Ground the RF generator with Class D grounding. * Ground the matching box with Class A grounding. * The RFP-N and CONT-N cables are not used for the built-in controller type and when not using a controller. * To prevent breaking cables and deterioration when laying down cables, ensure a bending radius...
  • Page 36 DIN-type plug (7/16 DIN) Communication cable AMC cable AMC-N between the RF Generator and MBX Panel cable CONT-N Required when using RFP-N IF cable Prepare this separately yourself. External control connector External communication connector RS-232C cable Prepare this separately yourself.

  • Page 37: Input Rf Generator Wiring

    RF POWER SUPPLY and MATCHINGBOX 3. Setup 3-4-2. Input RF Generator wiring Danger Always turn off your main breaker before wiring the input RF Generator. First connect the included input cable connector to the RF Generator and then connect the opposite side.

  • Page 38: Connecting The Earth Terminal

    RF POWER SUPPLY and MATCHINGBOX 3. Setup Danger In order to prevent electric shock accidents, work in the following manner. Always turn off your primary main breaker when wiring the input RF Generator. First complete the GND wiring, then start work on the other wiring. Connect the included input cable connector to the RF generator first, and then wire it to the opposite side.

  • Page 39: About The Interlock

    RF POWER SUPPLY and MATCHINGBOX 3. Setup Caution Do not connect an RF Generator with a different specification to the matching box and do not input power that exceeds the maximum transmission power under any circumstances. Wire with 5.5 SQ or larger wire rod. Use of a copper plate is not recommended.

  • Page 40: Functions

    RF POWER SUPPLY and MATCHINGBOX 4. Functions 4. Functions 4-1. Descriptions of RF generator functions 4-1-1. Descriptions of front panel functions Figure 4-1 RFS-1305N/RFS-1310N front panel example Figure 4-2 RFS-1330N/RFS-1350N front panel example (built-in controller type) Figure 4-3 RFS-1330N/RFS-1350N front panel example (standalone controller type)

  • Page 41: Descriptions Of Rear Panel Functions

    RF POWER SUPPLY and MATCHINGBOX 4. Functions ① STANDBY LED  Turns on when the RF Generator breaker is turned on and the control circuit board is energized. Turns off when the breaker is turned off and the control circuit board is not energized.
  • Page 42 RF POWER SUPPLY and MATCHINGBOX 4. Functions Figure 4-5 RFS-1330N/RFS-1350N rear panel example (built-in controller type) Figure 4-6 RFS-1330N/RFS-1350N rear panel example (built-in controller type) ① MAIN POWER switch  The switch for supplying 200 VAC to the RF generator. The power supply is turned on when the switch is moved to the "ON"...
  • Page 43 RF POWER SUPPLY and MATCHINGBOX 4. Functions ③ RF-OUTPUT connector  The RF output connector. Connect this connector to the matching box. If the interlock cover is not correctly attached, the interlock will operate and RF cannot be output. ④ AMC connector ...
  • Page 44 RF POWER SUPPLY and MATCHINGBOX 4. Functions ⑫ Cooling water OUTLET joint  The cooling water discharge joint. * Rc1/4 (PT1/4) female connector...

  • Page 45: Descriptions Of Control Panel Functions

    RF POWER SUPPLY and MATCHINGBOX 4. Functions 4-1-3. Descriptions of control panel functions The control panel allows you to configure RF generator and matching box parameters and to view the operating status. You can also turn the RF generator output on or off and set the position of the matching box variable capacitors up or down.The system can be controlled from the EXT.CONT terminal even when the control panel is connected or not used.

  • Page 46: Descriptions Of Protection Functions

    RF POWER SUPPLY and MATCHINGBOX 4. Functions 4-1-4. Descriptions of protection functions Table 4-2 RF generator protection functions list Protection cause Protection Details Pf droop Suppresses traveling wave power if reflected wave power exceeds the rating. RF-OFF Traveling wave power stops when the above status continues for 30 seconds or longer. Pf droop Suppresses traveling wave power if the RF amplifier input current exceeds the rated value.

  • Page 47: Descriptions Of External Control Functions

    RF POWER SUPPLY and MATCHINGBOX 4. Functions 4-1-5. Descriptions of external control functions Table 4-3 External control (EXT.CONT) pin assignments Pin No Name Overview 1-2(COM) RF-ON command CLOSE: RF-ON 3-4(E) RF-ON response RF-ON: CLOSE 5-6(E) Interlock response When interlock/alarm: OPEN 7-8(E) ALARM signal Alarm: CLOSE...
  • Page 48 RF POWER SUPPLY and MATCHINGBOX 4. Functions * When performing external control, see "Table 4-3 External control (EXT.CONT) pin assignments" and use the included connector to connect external control. Even if the external control terminal is not used, connect pin 16 and pin 17 (external interlock) with a jumper wire. RF generator External Control RF generator...
  • Page 49 RF POWER SUPPLY and MATCHINGBOX 4. Functions RF-ON/OFF EXT.CONT(1-2) Power Setting EXT.CONT(12-9) Pf Monitor EXT.CONT(10-9) 100msec～1sec 100msec～1sec Motor Strobe OPEN EXT.CONT(32-31) CLOSE TUNE/MATCH Analog Preset EXT.CONT(18/19-13) TUNE/MATCH Position Monitor EXT.CONT(44-45/46-47) Figure 4-9 Timing chart during external control...
  • Page 50 RF POWER SUPPLY and MATCHINGBOX 4. Functions Table 4-4 Program No. selection SELECT NO PROGRAM NO ○OPEN ○OPEN ○OPEN ○OPEN ●CLOSE ○OPEN ○OPEN ○OPEN ○OPEN ●CLOSE ○OPEN ○OPEN ●CLOSE ●CLOSE ○OPEN ○OPEN ○OPEN ○OPEN ●CLOSE ○OPEN ●CLOSE ○OPEN ●CLOSE ○OPEN ○OPEN ●CLOSE ●CLOSE...

  • Page 51: Descriptions Of Matching Box

    RF POWER SUPPLY and MATCHINGBOX 4. Functions 4-2. Descriptions of Matching Box ① ⑤ ② ⑥ Figure 4-11 MBX-1305N/MBX-1310N external connectors ① ② ③ ④ ⑤ ⑥ Figure 4-12 MBX-1330N external connectors...
  • Page 52 RF POWER SUPPLY and MATCHINGBOX 4. Functions ① ② ③ ④ ⑤ ⑥ Figure 4-13 MBX-1350N external connectors ① AMC connector  The communication connector to connect to the RF generator with the AMC-N cable. ② RF-INPUT connector  The RF output connector. Connect this connector to the RF generator. If the interlock cover is not correctly attached, the interlock will operate and RF cannot be output.

  • Page 53: Descriptions Of Parameter Functions

    " " key and the " " key at the same time. The values for parameters can be displayed and modified on the front panel or the RFP-N. Figure 4-15 Main screen (P1) Item...
  • Page 54 RF POWER SUPPLY and MATCHINGBOX 4. Functions Figure 4-16 Operation mode selection screen (P2) Item Parameter details Sets the RF generator operation method. PANEL: Operates from the control panel. ANALOG: Operates from the EXT.CONT connector. RFOP SERIAL: Not normally used. EXT.ON: ON/OFF operation is performed from the EXT.CONT connector, and the POWER setting is configured from the control panel.
  • Page 55 RF POWER SUPPLY and MATCHINGBOX 4. Functions Figure 4-17 Variable capacitor limit configuration screen (P3) Item Parameter details Sets the TUNE variable capacitor upper limit. Sets the MATCH variable capacitor upper limit. Sets the TUNE variable capacitor lower limit. Sets the MATCH variable capacitor lower limit. Sets the TUNE variable capacitor preset point.
  • Page 56 RF POWER SUPPLY and MATCHINGBOX 4. Functions Figure 4-19 Soft start configuration screen (P5) Item Parameter details Turn on to use the Pr value in the auto matching complete jud gment. OFF: Determined by and matching sensor. ON: Determined by the reflected wave. AND: Determined by the reflected wave and matching sensor.
  • Page 57 RF POWER SUPPLY and MATCHINGBOX 4. Functions Figure 4-21 Arc shutoff operation configuration screen (P7) Item Parameter details Performs the arc cut operation when a reflected wave of "rated reflected wave ASr2 + ASr2" is exceeded within the set time in ASDLY or after arc shutoff, even when a reflected wave of the value set in ASr or greater occurs.
  • Page 58 RF POWER SUPPLY and MATCHINGBOX 4. Functions Figure 4-23 Motor speeds configuration screen (P9) Item Parameter details The speed setting in the start of operation of the TUNE variable capacitor. Not used. (May not be displayed depending on the software version.) The speed setting maximum of the TUNE variable capacitor.
  • Page 59 RF POWER SUPPLY and MATCHINGBOX 4. Functions Figure 4-24 Limiter configuration screen (P10) Item Parameter details ON when you want to automatically perform a preset operation when RF is APRESET turned off. ON when you want to forcibly perform the auto matching operation when FAMC RF-ON.* Not normally set.
  • Page 60 RF POWER SUPPLY and MATCHINGBOX 4. Functions Figure 4-26 External IO voltage configuration screen (P12) Item Parameter details Performs fine adjustments of the Pf external analog monitor voltage. PfMADJ * Not normally set. Performs fine adjustments of the Pr external analog monitor voltage. PrMADJ * Not normally set.
  • Page 61 RF POWER SUPPLY and MATCHINGBOX 4. Functions Figure 4-27 Pf offset adjustment screen (P13) Item Parameter details Performs fine adjustments of the actual output value for the Pf setting value. PfOS * Not normally set. Select FBUS. NONE: No selection ECAT: EtherCAT *Normally not used.
  • Page 62 RF POWER SUPPLY and MATCHINGBOX 4. Functions Figure 4-29 Motor operation configuration screen (P15) Item Parameter details TUNE variable capacitor pulse count per revolution * Not normally modified. MATCH variable capacitor pulse count per revolution * Not normally modified. TUNE variable capacitor pulse offset count. * Not normally modified.
  • Page 63 RF POWER SUPPLY and MATCHINGBOX 4. Functions Figure 4-31 Current time configuration screen (P17) Item Parameter details TIME Displays and configures the current time. Model Displays the RF generator model. Soft.Ver Displays the software version. FBUS Displays the FBUS software version * When the breaker is turned on, the above current time configuration screen may be displayed.
  • Page 64 RF POWER SUPPLY and MATCHINGBOX 4. Functions Figure 4-33 Impedance sensor screen (P19) Item Parameter details Impedance sensor value M: motor value/threshold/gain Impedance sensor value Z: motor value/threshold/gain Impedance sensor value O: motor value/threshold/gain Displays the reflected wave power Displays TUNE current value Displays MATCH current value Select matching mode AUTO: Set auto matching...
  • Page 65 RF POWER SUPPLY and MATCHINGBOX 4. Functions Table 4-5 List of initial parameter values RFS-1350N Parameters RFS-1305N RFS-1310N RFS-1330N AUTO AUTO AUTO AUTO 2500V 2500V 2500V 2500V 2500V 2500V 5000V 10000V RFOP PANEL PANEL PANEL PANEL AMOP PANEL PANEL PANEL PANEL ADLY 0.0s...
  • Page 66 RF POWER SUPPLY and MATCHINGBOX 4. Functions Parameters RFS-1305N RFS-1310N RFS-1330N RFS-1350N 8.00r 8.00r 8.00r 11.20r 8.00r 8.00r 8.00r 11.20r 3000 G 10 3000 G 10 3000 G 10 3000 G 10 1475 G 10 1475 G 10 1475 G 10 1475 G 10 1475 G 10 1475 G 10...

  • Page 67: Descriptions Of External Control (Rs-232C) Functions

    RF POWER SUPPLY and MATCHINGBOX 4. Functions 4-4. Descriptions of external control (RS-232C) functions Table 4-6 Communication parameters Communication speed 9600 bps Character length 8bit Parity check None Stop bit length 1bit X parameter None Table 4-7 Connector pin layout D-sub 9-pin Pin No.
  • Page 68 RF POWER SUPPLY and MATCHINGBOX 4. Functions RF Generator Control equipment (D-sub 9-pin) (D-sub 25-pin) Signal Signal Pin No. Pin No. name name ① ② ② ③ ③ ④ ④ ⑤ ⑤ ⑥ ⑥ ⑦ ⑦ ⑧ ⑧ ⑳ ⑨ Figure 4-35 RS-232C connection example (9-pin to 25-pin) Table 4-8 RS-232C mode commands Command name...
  • Page 69 RF POWER SUPPLY and MATCHINGBOX 4. Functions Select PANEL: AMOP_ PANEL[CR] Select ANALOG: AMOP_ANALOG [CR] Select matching mode AMOP_XXXX[CR] Select SELECT: AMOP_ SELECT [CR] Response when command accepted: [CR] Response when command not accepted: N[CR] Select PANEL: RFOP_ PANEL[CR] Select ANALOG: RFOP_ANALOG [CR] Select RF Generator operating RFOP_XXXX[CR] Select EXT.ON: RFOP_EXT.ON [CR]...

  • Page 70: Operation

    RF POWER SUPPLY and MATCHINGBOX 5. Operation 5. Operation 5-1. RF Generator operating procedures 5-1-1. Turning on the RF Generator Before energizing the system, check that the cables between each unit are correctly wired, and then turn on the main breaker for the RF generator. If there are no problems, the main screen is displayed on the panel.
  • Page 71 RF POWER SUPPLY and MATCHINGBOX 5. Operation  Change to "RFOP=PANEL" and "AMOP=PANEL". Change the setting by pressing the " " ▲ " " keys to select the appropriate parameter, and then press the "ENT" key. Press the " " ▼...
  • Page 72 RF POWER SUPPLY and MATCHINGBOX 5. Operation Figure 5-4 Main screen Pf setting (P1) ③ AMC mode setting  When the AMC setting is set to "AMC=MANU", the position of TUNE and MATCH variable capacitors can be moved by manual operations from the control panel. ...
  • Page 73 RF POWER SUPPLY and MATCHINGBOX 5. Operation ④ RF-ON operation  Press the "ON" key to start RF output. The Pf monitor value converges to within ±1 W of the Pf setting value by feedback control. If this value does not converge to within ±1 W of the Pf setting value, the cause may be an increase in reflected wave power, arc shutoff operation, or another droop operation.

  • Page 74: Remote Operation (External Control Operation) Method

    RF POWER SUPPLY and MATCHINGBOX 5. Operation 5-1-3. Remote operation (external control operation) method ① Operation mode menu selection  On the P2 control mode selection screen, change the settings to "RFOP=ANALOG" and "AMOP=ANALOG".  For the standalone controller type, the above settings are automatically set when the controller is removed.
  • Page 75 RF POWER SUPPLY and MATCHINGBOX 5. Operation ④ Preset operation setting by program number  On the P2 control mode selection screen, change the settings to "RFOP=ANALOG" and "AMOP=SELECT".  While RF is off, change the program number with the program strobe signal and input the motor strobe signal to perform a preset operation.

  • Page 76: Special Commands

    RF POWER SUPPLY and MATCHINGBOX 5. Operation 5-1-4. Special commands The following commands and functions are available for RFP-N (control panel) special operations. Table 5-1 Special command details Item Parameter details ▲ ▼ While simultaneously pressing the " " and "...

  • Page 77: Matching Adjustment

    RF POWER SUPPLY and MATCHINGBOX 6. Matching Adjustment 6. Matching Adjustment 6-1. Matching adjustment overview 6-1-1. Matching fundamentals As shown in the basic matching circuit figure below, the matching box consists of the TUNE variable capacitor (C1), the MATCH variable capacitor (C2), and a coil (L). The TUNE variable capacitor primarily serves to terminate at 50 Ω, and the MATCH variable capacitor primarily serves for phase correction.
  • Page 78 RF POWER SUPPLY and MATCHINGBOX 6. Matching Adjustment ② At the point where there is even a little discharge, manually operate the TUNE/MATCH variable capacitors and adjust them in the direction where the discharge grows stronger (the direction where Pr decreases). * It depends on the equipment, process conditions, gas pressure, gas type, electrode configuration, temperature and the presence of an igniter, but generally, if you move the variable capacitors in the direction where VPP increases, electrical discharge will occur more easily.

  • Page 79: Matching Box Internal Adjustment Work

    RF POWER SUPPLY and MATCHINGBOX 6. Matching Adjustment 6-2. Matching box internal adjustment work The adjustment work listed in these matching adjustments carries a risk of coming into contact with hazardous voltages and hazardous energies, so fully read and understand the warnings below before working.

  • Page 80: Adjusting The Number Of Coil Short Circuits (Mbx-1305N/Mbx-1310N)

    For the replacement coil, see "MBX-1305N/MBX-1310N coils" below.  The plate to add a fixed capacitor is an option that is sold separately.  For ordering, contact ULVAC using the contact information listed on the last page. Table 6-2 MBX-1305N/MBX-1310N coils Coil model Specification...

  • Page 81: Adjusting The Number Of Coil Short Circuits (Mbx-1330N/Mbx-1350N)

    RF POWER SUPPLY and MATCHINGBOX 6. Matching Adjustment 6-2-2. Adjusting the number of coil short circuits (MBX-1330N/MBX-1350N) To increase or decrease the number of coil turns for the MBX-1330N and MBX-1350N, open the matching box's maintenance panel and change the number of coil taps. * Location to add the fixed capacitor * Coil taps Figure 6-3 MBX-1330N internal components diagram...
  • Page 82 RF POWER SUPPLY and MATCHINGBOX 6. Matching Adjustment  The number of coils taps is counted from right to left as 1 tap, 2 taps, 3 taps, and so on. The L value increases with each increase in the number of taps. ...

  • Page 83: Adding A Fixed Capacitor

    RF POWER SUPPLY and MATCHINGBOX 6. Matching Adjustment 6-2-3. Adding a fixed capacitor When Pr is at minimum, it will be necessary to add a fixed capacitor if the position of the MATCH variable capacitor is within 0% to 99% and the TUNE variable capacitor is near 0% or 99%. In this case, add the following types of capacitors, and after doing so, ensure that the screws are not loose.

  • Page 84: Matching Box Power Derating

    RF POWER SUPPLY and MATCHINGBOX 6. Matching Adjustment 6-3. Matching box power derating There is an anticipated load current and voltage depending on the matching point. The maximum power that can be safely used is limited based on this, so use the power derating tables below as a guide.
  • Page 85 RF POWER SUPPLY and MATCHINGBOX 6. Matching Adjustment Table 6-7 MBX-1310N/MBX-1305N coils - 2-turn coil MBX-1305N/MBX-1310N-(2T) TUNE 1000 1000 1000 1000 1000 1000 1000 1000 1000 1000 1000 1000 1000 1000 1000 1000 1000 1000 1000 1000 1000 1000 1000 1000 1000 1000...
  • Page 86 RF POWER SUPPLY and MATCHINGBOX 6. Matching Adjustment Table 6-11 MBX-1310N/MBX-1305N coils - 6-turn coil MBX-1305N/MBX-1310N-(6T) TUNE 1000 1000 1000 1000 1000 1000 1000 1000 1000 1000 1000 1000 1000 1000 1000 1000 1000 1000 1000 1000 1000 1000 1000 1000 1000 1000...
  • Page 87 RF POWER SUPPLY and MATCHINGBOX 6. Matching Adjustment * When making adjustments such as adding a fixed capacitor, the deratings will differ from the above derating table. * The above derating tables are different when the matching box is changed to the optional TUNE tap specification.

  • Page 88: Mbx-1330N Derating Reference Values

    RF POWER SUPPLY and MATCHINGBOX 6. Matching Adjustment 6-3-2. MBX-1330N derating reference values Table 6-15 MBX-1330N - 1 tap MBX-1330N-(1T) TUNE 3000 3000 3000 3000 3000 3000 3000 3000 2940 2100 1560 3000 3000 3000 3000 3000 3000 3000 3000 2940 2100 1560...
  • Page 89 RF POWER SUPPLY and MATCHINGBOX 6. Matching Adjustment Table 6-19 MBX-1330N - 5 taps MBX-1330N-(5T) TUNE 3000 3000 3000 3000 3000 3000 2700 1800 1260 3000 3000 3000 3000 3000 3000 2970 1980 1380 1020 3000 3000 3000 3000 3000 3000 3000 2250...

  • Page 90: Mbx-1350N Derating Reference Values

    RF POWER SUPPLY and MATCHINGBOX 6. Matching Adjustment 6-3-3. MBX-1350N derating reference values Table 6-21 MBX-1350N - 1 tap MBX-1350N-(1T) TUNE 5000 5000 5000 5000 5000 5000 5000 3550 1950 1000 5000 5000 5000 5000 5000 5000 5000 3550 1950 1000 5000 5000...
  • Page 91 RF POWER SUPPLY and MATCHINGBOX 6. Matching Adjustment Table 6-25 MBX-1350N - 5 taps MBX-1350N-(5T) TUNE 5000 5000 5000 5000 5000 5000 3950 2350 1450 5000 5000 5000 5000 5000 5000 3950 2350 1450 5000 5000 5000 5000 5000 5000 3950 2350 1450...

  • Page 92: Maintenance

    RF POWER SUPPLY and MATCHINGBOX 7. Maintenance 7. Maintenance The chapter describes necessary maintenance so the system can be used for years to come. If you neglect to maintain the system, it will wear down more quickly and malfunction. Read this chapter careful and perform all maintenance.
  • Page 93 RF POWER SUPPLY and MATCHINGBOX 7. Maintenance * When it is time for an overhaul, always use ULVAC. If you replace parts yourself or have parts replaced by another manufacturer without the permission of ULVAC, repairs will be performed for...

  • Page 94: Matching Box Maintenance And Inspection

    * When it is time for an overhaul, always use ULVAC. If you replace parts yourself or have parts replaced by another manufacturer without the permission of ULVAC, repairs will be performed for...

  • Page 95: Troubleshooting

    RF POWER SUPPLY and MATCHINGBOX 8. Troubleshooting 8. Troubleshooting This chapter explains corrective actions for when problems occur. 8-1. Troubleshooting When problems occur, refer to "RF generator troubleshooting list" and "Matching box troubleshooting list" and check the problems. 8-1-1. RF generator troubleshooting Table 8-1 RF generator troubleshooting list Problem Cause...

  • Page 96: Matching Box Troubleshooting

    RF POWER SUPPLY and MATCHINGBOX 8. Troubleshooting 8-1-2. Matching box troubleshooting Table 8-2 Matching box troubleshooting list Problem Cause ①The gas pressure, distance between ES, or substrate load conditions have changed. The matching point has changed. ②Wiring or screws inside the matching box are loose or missing.

  • Page 97: Reference Materials

    RF POWER SUPPLY and MATCHINGBOX 9. Reference Materials 9. Reference Materials The following materials are included with this manual as a reference. ● Outline drawing RFP-N ● Outline drawing RFS-1305N ● RFS-1310N Outline drawing ● Outline drawing RFS-1330N(built-in controller type) ●...
  • Page 98 RF POWER SUPPLY and MATCHINGBOX 9. Reference Materials Figure 9-1 RFP-N outline drawing...
  • Page 99 RF POWER SUPPLY and MATCHINGBOX 9. Reference Materials Figure 9-2 RFS-1305N/RFS-1310N outline drawing...
  • Page 100 RF POWER SUPPLY and MATCHINGBOX 9. Reference Materials Figure 9-3 RFS-1330N/RFS-1350N outline drawing (built-in controller type)
  • Page 101 RF POWER SUPPLY and MATCHINGBOX 9. Reference Materials Figure 9-4 RFS-1330N/RFS-1350N outline drawing (standalone controller type)
  • Page 102 RF POWER SUPPLY and MATCHINGBOX 9. Reference Materials 4×M4 10-M6_Depth_10mm 10-M6 Figure 9-5 MBX-1305N/MBX-1310N outline drawing...
  • Page 103 9. Reference Materials RF POWER SUPPLY and MATCHINGBOX 4-M4 10-M6_Depth_10mm 10-M6 Figure 9-6 MBX-1330N outline drawing...
  • Page 104 RF POWER SUPPLY and MATCHINGBOX 9. Reference Materials 16-Ø6 Figure 9-7 MBX-1350N outline drawing...

  • Page 105: Ce Declaration Of Conformity

    RF POWER SUPPLY and MATCHINGBOX 9. Reference Materials CE Declaration of Conformity...
  • Page 106 RF POWER SUPPLY and MATCHINGBOX 9. Reference Materials...

  • Page 107: People's Republic Of China Electronic Industry Standard Sj/T 11364 -2014 (China Rohs2)

    RF POWER SUPPLY and MATCHINGBOX 9. Reference Materials 中华人民共和国中国电子行业标准 SJ/T11364-2014（中国 RoHS2） People's Republic of China Electronic Industry Standard SJ/T 11364 -2014 (China RoHS2) 有毒有害物质或元素/Hazardous substance 部件名称/Part name Cr6+ PBDE 印刷电路板/Printed board ○ ○ ○ ○ ○ ○ 电子零件/Electronic parts ○ ○...

This manual is also suitable for:

Rfs-1305nRfs-1310nRfs-1330nRfs-1350nMbx-1305nMbx-1310n ... Show all

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