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RFS-13100F
Ulvac RFS-13100F Manuals
Manuals and User Guides for Ulvac RFS-13100F. We have
1
Ulvac RFS-13100F manual available for free PDF download: Instruction Manual
Ulvac RFS-13100F Instruction Manual (74 pages)
Solid-State RF Power Supply Matching Box
Brand:
Ulvac
| Category:
Power Supply
| Size: 3.33 MB
Table of Contents
Table of Contents
7
For Safe Operation
9
Precautions When Handling the Product
9
Warning Label/Nameplate Locations
10
Contact Information
10
2 Overview
11
Introduction
11
Features
11
Configuration
12
Specifications
13
3 Setup
22
Accessories
22
Power Supply Installation
23
Installation and Drilling Rack Holes
23
RF Power Supply Mounting Structure
23
Matching Box Installation
24
Matching Box Installation Location
24
Installation
24
Automatic Matching Controller Installation
24
System Wiring
25
Connecting Cables
25
Input Power Supply Wiring
26
Connecting the Earth Terminal
26
4 Functions
27
RF Power Supply
27
RF Power Supply Part Names and Functions
27
Control Panel Functions and Explanations
28
Measurement Display
29
Protective Functions
29
External Control Terminal Pin Assignments
31
Caution When Using the External Control Terminal (INTERFACE)
33
RF Power Supply Parameters
34
Automatic Matching Controller Functions
36
Automatic Matching Controller Part Names and Functions
36
Control Panel Functions and Explanations
37
Automatic Matching Controller AMC.EXT Pin Assignments
38
Automatic Matching Controller PRESET Pin Assignments
39
Caution When Using the External Control Terminals (AMC.EXT/PRESET)
41
Matching Controller Parameters
42
5 Operation
44
Operating the RF Power Supply
44
Setup before Operation
44
Local Operation Method (Panel Operation)
45
Remote Operation Method (External Control)
46
RF Output Timing
48
Measurement Value Display
49
Automatic Matching Controller Operation
50
Local Operation Method (Panel Operation)
50
Remote Operation Method (External Control)
53
Remote Operation Method (External Preset Operation)
54
Matching Adjustment
56
Matching Fundamentals
56
Increasing and Decreasing the Number of Coil Short Circuits
57
Adding a Fixed Capacitor
58
6 Maintenance
60
RF Power Supply Maintenance and Inspection
60
Matching Box Maintenance and Inspection
61
7 Troubleshooting
63
Troubleshooting Related to the RF Power Supply
63
Troubleshooting Related to the Matching Box
64
8 Reference Materials
65
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