Related Manuals for Ulvac RFS-03D
Summary of Contents for Ulvac RFS-03D
- Page 1 RF0024E-03 INSTRUCTION MANUAL RF POWER SUPPLY RFS-03D MODEL： version 2023.07.01 ULVAC Inc. ※ Read this manual before operation this product Keep this manual at your hand for immediate reference.
- Page 3 The contents of this manual are subject to change without notice for improvement. If you come up with any question or trouble, contact your local ULVAC representative or ULVAC,Inc. . Always use the product safely and take care of it correctly.
- Page 4 RF POWER SUPPLY ～RFS-03D～ INTRODUCTION １．SAFTY CAUTIONS １ Most accidents are attributed to careless operation, inspection, maintenance or repair. Also failure to comply with safety cautions or predict potential danger is responsible for accidents. Accidents can be prevented by predicting a potentially dangerous situation at an early stage.
- Page 5 RF POWER SUPPLY ～RFS-03D～ INTRODUCTION ２．SAFETY DENOTATIONS Safety denotations are used throughout this manual and labeled on the product to call operators attention to safety. Safety denotations are classified as follows. Failure to comply with this involves the possibility of impending death or serious personal injury.
- Page 6 No charge repair provisions １ This system has been shipped after undergoing an extensive in-house inspection. However, in the event a failure occurs that ULVAC Inc. is responsible for, such as a manufacturing defect or accident during shipment, please inquire with the ULVAC Inc. or dealer regarding repairs. The system will be repaired or replaced at no charge.
- Page 7 Complete information about the trouble will prevent loss on both sides due to misunderstanding or misjudgment and allow us to take quick actions for repair. If you encounter any trouble or come up with any question, please contact your local ULVAC representative.
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Page 8: Table Of Contents
RF POWER SUPPLY ～RFS-03D～ table of contents Table of contents １. FOR SAFETY OPERATION ................................. 1 １.１. CAUTION For HANDLING............................1 １.２. LOCATION OF WARNING LABELS AND NAMEPLATES ................2 １.３. CONTACT INFORMATION ............................2 ２. GENERAL DESCRIPTION ................................3 ２.１. -
Page 9: For Safety Operation
RF POWER SUPPLY ～RFS-03D～ 1. FOR SAFETY OPERATION １. FOR SAFETY OPERATION This section describes precautions, location of warning labels and contact information for safety operation. １.１.CAUTION For HANDLING Precautions for this product are described. Carefully read these precautions and fully understand them before operation of this product. -
Page 10: Location Of Warning Labels And Nameplates
Figure １．１ Location of warning labels and nameplate. １.３.CONTACT INFORMATION If you encounter any trouble, come up with any question or order a part, please contact ULVAC or your local ULVAC representative, after confirming information of the product. In case of trouble, let us know the product information and trouble symptom and situation in detail as much as possible. -
Page 11: General Description
Instruction manual(this book) This device needs the matching box (adjustment machine). Fig. 2.1 shows the system configuration. The basic configuration includes the following. RF power supply RFS-03D Manual matching box MBX002M RF output cable JA31 ... -
Page 12: Specification Of Power Supply Main Body
RF POWER SUPPLY ～RFS-03D～ 2. GENERAL DESCRIPTION ２.４.SPECIFICATION OF POWER SUPPLY MAIN BODY 2.1 RF Power Supply Specification Specification Item RFS-03D Input voltage 100 VAC, single phase, 50/60 Hz Input variable range 90 V to 120V Input Input capacity 600 VA... -
Page 13: Assignment Of External Control Terminal Pins
RF POWER SUPPLY ～RFS-03D～ 2. GENERAL DESCRIPTION ２.５.ASSIGNMENT OF EXTERNAL CONTROL TERMINAL PINS For external control, make connection using the supplied connectors, referring to Fig. 2.2. Even if the external control terminal is not used, short-circuit pins between 14 and 15 (INTERLOCK) . -
Page 14: Preparation
RF POWER SUPPLY ～RFS-03D～ ３．PREPARATION ３. PREPARATION The section describes necessary preparation and precaution before operation of the product. ３.１.ACCESSORIES The following accessories are included in a RF power supply. 1) Standard accessories of RF power supply Name Type Quantity... -
Page 15: Installation The Product
RF POWER SUPPLY ～RFS-03D～ ３．PREPARATION ■Back panel ③ ⑤ ⑥ ④ ② ⑦ ① Fig. 3.2 RF power supply back panel Table 3.2 Names and Functions of Components Name of component Function ① AC INPUT Connect the power input cable. - Page 16 RF POWER SUPPLY ～RFS-03D～ ３．PREPARATION ■How to install and make holes in the rack The RF power supply can be mounted on a rack. Refer to Fig. 3.3 below how to make mounting holes in a rack. Fig. 3.3 Rack installation hole position ■Structure for mounting RF power supply...
- Page 17 RF POWER SUPPLY ～RFS-03D～ ３．PREPARATION ■WIRING OF SYSTEM 1)Connecting cables Before connecting the RF power supply and matching box, check the names of connectors and cables for exclusive use and connect the wiring referring to Fig. 2.1. and Fig. 3.6.
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Page 18: Operation
RF POWER SUPPLY ～RFS-03D～ ４．OPERATION ４. OPERATION The section describes setting method and operation method of the product. And connection with each unit is also described in the section. ４.１.SETTING METHOD This power supply can control RF ON/OFF and RF POWER SET using the power supply front panel or the external control. - Page 19 RF POWER SUPPLY ～RFS-03D～ ４．OPERATION ⑥ ⑦ ⑧ ⑨ ① ② ③ ④ ⑤ Fig 4.1 Power supply switch position Table 4.1 Switch names Name ① POWER switch ② RF ON/OFF REMOTE/LOCAL switching ③ POWER CONT. REMOTE/LOCAL switching ④ RF ON/OFF switching ⑤...
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Page 20: Maintenance
RF POWER SUPPLY ～RFS-03D～ 5．MAINTENANCE ５. MAINTENANCE The section describes necessary maintenance to use the product for years. If you fail to do maintenance, wear of the product would be accelerated and shutdown of the product would be led. Read this section carefully and do maintenance ５.１.MAINTENANCE AND INSPECTION OF RF POWER SUPPLY... -
Page 21: Troubleshooting
RF POWER SUPPLY ～RFS-03D～ 6．TROUBLESHOOTING ６. TROUBLESHOOTING The section describes action on trouble. ６.１.TROUBLESHOOTING For RF POWER SUPPLY If trouble occurs, make an initial diagnosis with referring to table 6.1. Also please refer to the troubleshooting of the matching box manual. - Page 22 RF POWER SUPPLY ～RFS-03D～ 6．TROUBLESHOOTING Trouble symptom Confirmation item Possible cause Corrective action ③ RF is ON but POWER Check the setting The setting of Set it properly.(Refer to 4.1) cannot be set. of the power supply POWER CONT. LOCAL/REMOTE is...
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Page 23: Attached Materials
RF POWER SUPPLY ～RFS-03D～ 7．ATTACHED MATERIALS ７. ATTACHED MATERIALS Following materials are attached with this manual. ・ RFS-03D outside drawing ・ RFS-03D inside connecting wires charｔ... - Page 24 RF POWER SUPPLY ～RFS-03D～ 7．ATTACHED MATERIALS...
- Page 25 RF POWER SUPPLY ～RFS-03D～ 7．ATTACHED MATERIALS...