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Ulvac HPS-1600F Operation Manual

Electron beam power supply / electron beam gun controller
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Electron Beam Power Supply
Electron Beam Gun Controller
Model: Power Supply
Main Unit
Gun Controller
Operation Manual
HPS-1600F
EGC-10GS/EGC-16GS-H
５th edition: September, 1, 2022
Before using this product, be sure to read it.
Also, keep this manual at hand with care.
EB0029-05e
ULVAC, Inc.
Components Division

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Summary of Contents for Ulvac HPS-1600F

  • Page 1 EB0029-05e Operation Manual Electron Beam Power Supply Electron Beam Gun Controller Model: Power Supply Main Unit HPS-1600F Gun Controller EGC-10GS/EGC-16GS-H ５th edition: September, 1, 2022 ULVAC, Inc. Components Division Before using this product, be sure to read it. Also, keep this manual at hand with care.
  • Page 2 The copyrights of the operation manual and this safety guide belong to ULVAC, Inc. Components Division.  A part and whole part of this operation manual are prohibited to copy without a permit of ULVAC, Inc. Components Division.  Handling for this product of this operation manual and to use the manual in the application other than that ULVAC, Inc.
  • Page 3 ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ Introduction 1. Precautious Points on Safety Major part of the accidents occurs in relation to the operation carelessly conducted by the operator, the inspection/service and the repair work. Also, if you do not observe the basic caution matters on safety and neglect the dangerous preperception, it is easy to occur.
  • Page 4 ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ Introduction 2. Safety Symbol Marks In this operation manual and the warning display of the product main body, the symbol marks about the safety in order to understand the matters to be observed are being put up.
  • Page 5 ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ Introduction 3. Labeling Position of Warning Label Meaning of Warning Label High Voltage Danger Label: This indicates a situation where a high voltage occurs inside involving the risk of electrocution. High Temperature Warning Label: This indicates a situation where a high temperature occurs inside involving the risk of a burn.
  • Page 6 ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ Introduction 4. About Warranty Although the product has undergone strict in-house tests before shipment, please make an inquiry to the headquarter components division, service office, or agent if malfunction occurs with the product because of our fault such as manufacturing error or transportation problem. The product is repaired or exchanged for free of charge.
  • Page 7 ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ Introduction 5. Suspecting Abnormality If you notice something wrong with the product, check the symptom and the failure with reference to the Troubleshooting in Section 7 of this manual. To avoid mutual loss caused by misunderstanding and misconception, please clarify the details of the trouble in order to repair the product as soon as possible.
  • Page 8 ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ Introduction 8. Hazardous Substances regulated by the RoHS Directive The following substances regulated by the RoHS Directive are not contained in the product itself or in the cable assembly that comes with the standard (Revised RoHS Directive RoHS”2011/65/EU”and（EU）...

  • Page 9: Table Of Contents

    ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ Table of Contents Table of Contents 1. For Your Safety Use ....................1 Caution on handling ..............................1 When you make an inquiry ............................. 1 2. Overview ........................2 2.1. Introduction ..................................2 2.2. Feature ..................................... 2 2.3.

  • Page 10: For Your Safety Use

    ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 1. For Your Safety Use 1. For Your Safety Use In order to use this unit in a safe manner, we describe the caution points on safety, and the contact party. 1.1 Caution on handling Caution on safety related to this unit is described. After well reading the following, use this unit.

  • Page 11: Overview

    This chapter describes characteristics/configuration/specification of this product. 2.1. Introduction The solid-state type electron beam power supply, HPS-1600F, (hereafter referred to as EB power supply) is designed to stabilize circuits and improve performance based on ULVAC's many years of technological accumulation and achievements. HPS-1600F is a power supply that supports electron beam evaporation sources: EGL series (hereinafter referred to as EB guns).

  • Page 12: Equipment Configuration

    (14) There are no parts that require periodic replacement, such as vacuum tubes. 2.3. Equipment configuration This equipment consists of the power supply main unit: HPS-1600F and the Gun controller. In addition, the configuration in combination with an EB gun is as shown in Fig. 2.1.
  • Page 13 ２．Overview ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ This equipment can be divided into two types by selecting the Gun control: the main unit with the S or H type gun control. Table 2.1 shows the correspondence between the Gun controllers and the EB guns.
  • Page 14 ２．Overview ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ REFERENCE The S type Gun controller has different factory default settings from those of EGC-10GS combined with our 10 kW EB power supply, HPS-1000N. When using it as a Gun controller for the 10 kW power supply, contact us or our exclusive distributors.

  • Page 15: Specifications

    ２．Overview ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 2.4. Specifications Table 2.3: Electrical Specifications Maximum applicable 16 kW ( - 10 kV／1．6 A ) ： power Variable range - 4 kV ～ - 10 kV ： Stability ±1％ or less (at -10 kV) High-Voltage Output ：...

  • Page 16: External I/O Signal

    ２．Overview ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 2.5. External I/O signal External I/O signals are shown below. Table 2.4: External I/O Signal Model name External I/O signal name Signal level (Voltage signal) Remarks FIL．CUR．MONITOR 50 A／1 V（50 Amax） Waveform output 0 ～ 1．6 A／0 ～ + 5 V...

  • Page 17: External Dimensions And Mass

    ２．Overview ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ REFERENCE Only for EMISSION CONTROL, operation can be done even if the signal source is a negative voltage with the same pin number. Common ports (high-voltage, beam current, and magnet coil common ports) of each...

  • Page 18: Preparation

    ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 3．Preparation 3. Preparation We describe necessary preparation and caution matters in step where after this unit is delivered at your hand, you use this unit. 3.1. Precautions in unpacking Carefully unpack the box of the power supply main unit. Check for damage by external forces during transportation.

  • Page 19: Installation Site And Installation

    ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 3．Preparation Quantity Accessories Name Specifications 1-source 2-source HP 20 ( 2．0 A ) ― Alarm fuse F 21、F 22、F 23 S type Note HP 50（ 5．0 A ） ― H type Alarm fuse for F 2 HP 32 ( 3．2 A )

  • Page 20: Power Receiving Equipment

    Grounding resistance of 10 Ω or less (Japanese standard conforms to Article 18 Class A grounding work of electrical equipment technical standards). Basically, class A grounding work. Fig. 3.1 shows the ULVAC's recommended grounding method. WARNING This power supply needs the earth with a ground resistance of 10 Ω or less.

  • Page 21: Cable Connection

    ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 3．Preparation 4) Electron beam evaporation source (EB gun) EB gun of ULVAC （EGL Series） 5) Various introduction terminals necessary for the loading equipment. See the operations manual of EB gun. 6) Each interlock and switch necessary for the loading equipment See the operations manual of EB gun.
  • Page 22 ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 3．Preparation DANGER Be sure to connect the EARTH GUN GND cable. If the EARTH GUN GND cable is not connected, it is extremely danger because the power supply enclosure is in a floating condition. Before turning on the power to the EB power supply, always make sure that the EARTH GUN GND cable is connected and then turn on the MAIN circuit breaker.
  • Page 23 ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 3．Preparation DANGER The EB power supply generates a voltage that is enough to pose a danger to human life. Take more than enough care in such a way as to attach a metallic cover to the high-voltage introduction terminal so that the operator will never contact the high-voltage.
  • Page 24 ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 3．Preparation 5) FIL. PWR cable Connect FIL. PWR cable (Table 3.1) to the FIL. PWR 1 connector on the back of the main unit and to the FIL. PWR connector of the TRAN BOX. When using 2 sources, connect the FIL. PWR 2 connector on the back of the main unit to the FIL.
  • Page 25 ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 3．Preparation 10) XY OUT cable Connect the supplied XY OUT cable (Table 3.1) between the XY OUT connector on the back of the Gun controller and coil current introduction terminal in the chamber. (Fig. 2.1) Table 3.3 shows the correspondence between connector pins and output. For connection on the side of the EB gun (loading), see the operations manual of the EB gun.

  • Page 26: Description Of Each Part

    This section describes the name of each part of this product. In addition, how to connect each unit is described here. For the external dimension drawing of each unit, see the attached data. 4.1. Front panel of power supply main unit Figure 4.1: Front view of HPS-1600F...
  • Page 27 ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 4. Description of Each Part 1） POWER indicator (Yellow) This lights up when the MAIN circuit breaker is ON and the START signal of the EXT. START connector is input. This does not light up unless the START signal of the EXT. START connector is input.

  • Page 28: Back Panel Of Power Supply Main Unit

    ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 4. Description of Each Part 4.2. Back panel of power supply main unit Figure 4.2: Back view of HPS-1600F...
  • Page 29 ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 4. Description of Each Part 1） INPUT connector This is a connector for connecting the supplied INPUT cable (three-core) (Table 3.1). 2） EARTH GUN GND terminal This is a terminal for connecting the supplied EARTH GUN GND cable (14 mm ) (Table 3.1).
  • Page 30 ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 4. Description of Each Part 8） HV MONITOR connector This is a BNC connector for external output of the high voltage setting. (For the output part, see Fig. 2.4.) For the signal level, see Table 2.4.
  • Page 31 ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 4. Description of Each Part 11）FIL．VOLT indicator （Red） This lights up to indicate that a voltage is applied to the filament. 12）Alarm fuse This is an alarm fuse for protection of the filament power circuit. Also please refer to "4.3 Alarm fuse."...

  • Page 32: Alarm Fuse

    ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 4. Description of Each Part 4.3. Alarm fuse Alarm fuses are included for protection of each circuit. Alarm fuses are installed on the back of the power supply unit (F14), inside the left side panel (F1), and inside the right side panel (F2/F3/F11/F12/F13).
  • Page 33 ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 4. Description of Each Part Table 4.1: Fuse Capacity and Purpose of Use Q’ty Purpose of Use Attachment position Fuse No. Capacity Center part on the left 75 A Protection of the power supply circuit for the inverter circuit...

  • Page 34: Gun Controller Front Panel

    ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 4. Description of Each Part 4.4. Gun controller front panel ⑥ ⑦ ④ ③ ⑨ ⑤ ⑧ ① ② Figure 4．5: Gun Controller Front Panel 1） LOCAL CONTROL connector This connector is for connecting the supplied LOCAL CONTROL BOX (Tables 3.1).

  • Page 35: Gun Controller Back Panel

    ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 4. Description of Each Part 7） ESCAPE key This is used for DISPLAY operation. This is used for returning to the previous screen and canceling the selected options. 8） ENTER key This is used for DISPLAY operation. This is used for accepting the operation and parameters.
  • Page 36 ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 4. Description of Each Part b) CHAMBER This is necessary for human safety. Connect the chamber close switch. c) VACCUM This is necessary for human safety and safe operation of the EB gun. Connect the vacuum check switch.
  • Page 37 ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 4. Description of Each Part The interlocks of this EB system work in such a way that the high voltage can be output only when the external interlock, EB power supply interlock, EB Gun controller interlock are all released. The details on the interlocks are shown in Table 4.2.
  • Page 38 ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 4. Description of Each Part Equipment wiring Power supply 装置側配線 電源内部 GUN WATER CHAMBER VACCUM MODE CHANGE XY SWEEP In a case that no 外部接点を 外部接点による高電圧のON／OFF ON/OFF of the high voltage by external contacts external contact is 使用しない場合...
  • Page 39 ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 4. Description of Each Part 3） PROGRAM connector The functions below can be controlled by external direct current signals. The programmed control can be established by doing the wiring for necessary connections following Fig. 4.8 and switching the each setting from LOCAL to PROGRAM on the front panel of the Gun controller.
  • Page 40 ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 4. Description of Each Part 4） CONTROL connector This is a connector for connecting the supplied CONTROL cable (Table 3.1) 5） COIL OUT connector This is a connector for connecting the supplied DEF／XY OUT cable or the XY OUT cable (Tables 3.1).
  • Page 41 ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 4. Description of Each Part REFERENCE Each common needs to be in a floating condition at a withstand voltage of 1,500 VAC or more above the earth and the portions between the common ports need to be insulated. If the power supply equipment you use connects to the earth, use isolation amplifiers to insulate signals.
  • Page 42 ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 4. Description of Each Part 11） PSG connector (※Optional function) When the hearth select output function is active, beam sweep conditions can be set for each crucible. In addition, the HV line and the sweep line can each have two output settings with their respective hearth numbers.

  • Page 43: Local Control Box

    ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 4. Description of Each Part 4.6. Local control box Y-AXIS X-AXIS POSITION POSITION ② ④ SWEEP SWEEP ⑤ ③ ① EMISSION LOCAL CONTROL BOX Figure 4.11: External View of Local Control Box...
  • Page 44 ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 4. Description of Each Part 1） EMISSION knob ① This is for setting beam current. The range is 0 to 100. ② Or the range is 0 to 100 / 0 to 1,600 mA (MAX POWER without adjustment).

  • Page 45: Operation

    ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 5. Operation 5. Operation This section describes how to operate this product. 5.1. Pre-operation check Check the following before energizing the EB power supply. In addition, be sure to perform the first test in the LOCAL operation mode.
  • Page 46 ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 5. Operation CAUTION If the EARTH GUN GND cable is too long, cut it to the right length and connect. Never coil it. It may become a noise source, having an effect on other equipment. If noise affects other equipment, it is effective to put the OUTPUT cable and the EARTH GUN GND cable together in a metal-shielded conduit etc.
  • Page 47 ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 5. Operation WARNING If the coil wiring is different, the beam may be radiated to an unexpected place, the coil may be damaged, or the Gun controller may be damaged. Especially when the X-axis magnet coil...

  • Page 48: Local Operation

    ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 5. Operation 5.2. LOCAL operation 1) EB power supply settings Before turning on the power supply, set the power supply main unit and the Gun controller/LOCAL CONTROL BOX to the following positions. Table 5.1: Power Supply Main Unit and Gun Controller/LOCAL CONTROL BOX Settings...
  • Page 49 ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 5. Operation Table 5.2: Each Menu Settings of Gun Controller Menu Item Content Setting LOCAL/REMOTE operation settings CONTROL MODE LOCAL Option HV output voltage settings HV SET LOCAL/REMOTE operation settings CONTROL MODE LOCAL EMISSION Output current upper limit setting...
  • Page 50 ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 5. Operation 6) MAG-INTLK adjustment If the resistance value of the coil extremely decreases (due to a short-circuit etc.) or increases (due to a break etc.), the GUN MAGNET indicator of the INTLK menu of the Gun controller DISPLAY turns to red to notify the operator.
  • Page 51 ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 5. Operation DANGER The EB power supply generates a voltage that is enough to pose a danger to human life. Take more than enough care in such a way as to attach a metallic cover to the high-voltage introduction terminal so that the operator will never contact the high-voltage.
  • Page 52 ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 5. Operation 12) The maximum XY-axis coil current This limits the range of the XY-axis coil current. For the current range with no current limitation, the X coil current is from 0.4 to -3.5 A for the S type and from 2.0 to 16 A for the H type, and the Y coil current is from -1.2 to +1.2 A for the S type and from -2 to +2 A for the H type.
  • Page 53 ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 5. Operation 15) Maximum beam current adjustment This limits the maximum beam current passing through the EB gun. The maximum value of the beam current can be limited by adjusting the EMISSION MAX item in the EMISSION menu. The maximum beam current is decided by the performance of the EB gun and the evaporation material.
  • Page 54 ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 5. Operation 17) Start of vapor deposition The high voltage is switched to ON again. Turn the EMISSION knob of LOCAL CONTROL BOX to pass a beam current. Gradually increase the power until a given vapor deposition rate is obtained.

  • Page 55: Program Operation

    ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 5. Operation 5.3. PROGRAM operation 1) PROGRAM connector connection check When you need to perform operation by external signals using the PROGRAM control, do the wiring following Fig. 4.8. For the combination with a vapor deposition controller, use a controller insulated from analog signals.
  • Page 56 ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 5. Operation Table 5.4: Settings of Power Supply Main Unit and Gun Controller Unit Item Setting MAIN Circuit breaker Power Supply Main Unit SERVICE KEY ENABLE KEY switch REMOTE HV CONTROL MODE REMOTE Gun controller EMISSION CONTROL MODE...

  • Page 57: Power Supply Error State

    ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 5. Operation 5.4. Power supply error state The error states detected by the power supply and the controller and the descriptions are as follows. In addition, how to take measures against each ALARM is described. See this list in reference to 7.
  • Page 58 ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 5. Operation becomes available again. THERMAL ALARM does not occur under normal conditions. If it frequently occurs, check whether the temperature around the power supply is within the range of the specification value, whether the clearance around the power supply follows "3.3 Setup and Installation,"...

  • Page 59: Maintenance

    ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 6. Maintenance 6. Maintenance This section describes necessary details on maintenance to use this product for many years to come. Without appropriate maintenance, the product may be worn faster and finally stop. Therefore carefully read this chapter and do maintenance.

  • Page 60: Maintenance/Inspection Of This Product

    ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 6. Maintenance 6.1. Maintenance/Inspection of this product Except for check items 10 to 12, be sure to switch the three-phase input power supply of the EB power supply to OFF. Table 6.1: Pre-maintenance Check List Inspection period *1...
  • Page 61 ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 6. Maintenance CAUTION NOTE 1： The EB power supply generates a voltage that is enough to pose a danger to human life. Take more than enough care in such a way as to attach a metallic cover to the high-voltage introduction terminal so that the operator will never contact the high-voltage.

  • Page 62: Periodical Inspection

    ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 6. Maintenance 6.2. Periodical inspection Be sure to switch the three-phase input power supply of the EB power supply to OFF before inspection. Table 6.2: Periodical Inspection Check List Inspection period *1 Item Inspection and Work Description...
  • Page 63 ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 6. Maintenance CAUTION NOTE 9 ： If there is looseness at the connection between the fuse box and the INPUT cable, they may produce heat and are burned. In addition, this leads to an open phase etc, causing unstable operation of the power supply.

  • Page 64: About Recommended Replacement Parts

    That time, see the table (table 6.3) below that shows recommended replacement parts for the overhaul. Note in advance that the recommended years for replacement are not an ULVAC's guaranteed value. Table 6.3 Recommended Replacement Parts Periodical maintenance - Ｎｏ．...

  • Page 65: Troubleshooting

    ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 7. Troubleshooting 7. Troubleshooting In this chapter, we describe how to handle when the trouble occurred 7.1. Troubleshooting If any trouble occurs, initial diagnosis needs to be performed following Fig. 7.1. Details on each trouble are described in Tables 7.1 to 7.4.
  • Page 66 ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 7. Troubleshooting WARNING 1. Immediately after the operation, the EB gun (especially around the emitter assembly), evaporation material, filament lead wire, and high-voltage introduction terminal are at a high temperature. Take care not to get burned.
  • Page 67 ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 7. Troubleshooting Start HPS-1600F Trouble judgment of the EB power supply needs Troubleshooting to be made in the LOCAL operation mode. Set to LOCAL mode (Magnet/Emission /High voltage) Not removed Are the side plate Is the top/side plate...
  • Page 68 ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 7. Troubleshooting Continued from the previous page 1. Poor contact in the Not in the emitter Lights up Does the beam Does the filament Is it the DEGUS DEGUS Is the feed power 2. Assembly failure of the...
  • Page 69 ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 7. Troubleshooting Table 7.1: Main Unit Troubleshooting List Symptom Possible cause Possible check point Check the power supply in your fuse box. A: No power received. If no power is received, receive the power. The power supply B: The panel interlock is Check whether the panel is removed.
  • Page 70 ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 7. Troubleshooting Table 7.2: High Voltage Troubleshooting List Symptom Possible cause Possible check point Refer to Section 5 described above. HV SWEEP does not work. B: The contact between Pin 7 Check the INTERLOCKS connector. HV ON does not and Pin 8 of the In reference to Fig.
  • Page 71 ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 7. Troubleshooting Table 7.3: Beam Current Troubleshooting List Symptom Possible cause Possible check point Check that a high voltage is applied. A: No high voltage is applied. Confirm the DEGAS indicator. B: DEGAS mode If it is in the DEGAS mode, release it.
  • Page 72 ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 7. Troubleshooting Table 7.4: Magnet Troubleshooting List Symptom Possible cause Possible check point Check the MAG-INTLK settings. A: A settings error of MAG- Confirm the setting method of MAG-INTLK in Section INTLK. 5.2 and set it again.

  • Page 73: Attached Data

    ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 8. Attached Data 8. Attached Data The data about HPS-1600F below is attached. Figure 8.1: Power Supply Main Unit: External View of HPS-1600F. Filament transformer box, External dimension drawing. Figure 8.2: Figure 8.3: Gun Controller: External View of EGC-10GS/16GS-H.
  • Page 74 ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 8. Attached Data Plan Figure 8.1: Power Supply Main Unit – External View of HPS-1600F...
  • Page 75 ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 8. Attached Data Earth Label Figure 8.2: External view of filament transformer box...
  • Page 76 ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 8. Attached Data Figure 8.3: Gun Controller - External View of EGC-10GS/16GS-H...
  • Page 77 ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 8. Attached Data 42.10 82.00 24.00 X-AXIS Y-AXIS POSITION POSITION SWEEP SWEEP EMISSION LOCAL CONTROL BOX Figure 8.4: Local Control Box - External View...
  • Page 78 ELECTRON-BEAM POWER SUPPLY ～HPS-1600F～ 8. Attached Data 中华人民共和国中国电子行业标准 SJ / T11364-2014 People's Republic of China Electronic Industry Standard SJ / T11364-2014 有毒有害物质或元素/ Hazardous substance 部件名称/Part name Cr6+ PBDE 印刷电路板/printed bord ○ ○ ○ ○ ○ ○ 电子零件/Electronic parts ○ ○...

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