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Related Manuals for Ulvac EXO-13
Summary of Contents for Ulvac EXO-13
- Page 1 RF0031E-03 INSTRUCTION MANUAL EXTERNAL OSCILLATOR UNIT FOR RF POWER SUPPLY EXO-13 MODEL： version 2023.07.01 ULVAC Inc. ※ Read this manual before operation this product Keep this manual at your hand for immediate reference.
- Page 3 The contents of this manual are subject to change without notice for improvement. If you come up with any question or trouble, contact your local ULVAC representative or distributor. Always use the product safely and take care of it correctly.
- Page 4 EXTERNAL OSCILLATOR FOR RF POWER SUPPLY EXO-13 INTRODUCTION １．SAFTY CAUTIONS １ Most accidents are attributed to careless operation, inspection, maintenance or repair. Also failure to comply with safety cautions or predict potential danger is responsible for accidents. Accidents can be prevented by predicting a potentially dangerous situation at an early stage.
- Page 5 EXTERNAL OSCILLATOR FOR RF POWER SUPPLY EXO-13 INTRODUCTION ２．SAFETY DENOTATIONS Safety denotations are used throughout this manual and labeled on the product to call operators attention to safety. Safety denotations are classified as follows. Failure to comply with this involves the possibility of impending death or serious personal injury.
- Page 6 Before using the product, contact your local ULVAC representative or ULVAC Inc. to confirm the latest information. ULVAC products are warranted free from defects in material and workmanship for a period of twelve (12) months from the date of shipping. In addition, about the parts exchanged for repair, we will consider as...
- Page 7 No charge repair provisions １ This system has been shipped after undergoing an extensive in-house inspection. However, in the event a failure occurs that ULVAC Inc. is responsible for, such as a manufacturing defect or accident during shipment, please inquire with the ULVAC Inc. or dealer regarding repairs. The system will be repaired or replaced at no charge.
- Page 8 EXTERNAL OSCILLATOR FOR RF POWER SUPPLY EXO-13 INTRODUCTION ４．IN CASE OF NOTICING ABNORMALITIES OF THE PRODUCT If any trouble is found, check the trouble symptom and verify that it is a trouble referring to " Troubleshooting " in this manual. Complete information about the trouble will prevent loss on both sides due to misunderstanding or misjudgment and allow us to take quick actions for repair.
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Page 9: Table Of Contents
EXTERNAL OSCILLATOR FOR RF POWER SUPPLY EXO-13 table of contents Table of contents １. FOR SAFETY OPERATION ................................. 1 １.１. LOCATION OF NAMEPLATE ..........................1 １.２. CONTACT INFORMATION ............................. 1 ２. GENERAL DESCRIPTION ................................2 ２.１. INTRDUCTION ................................2 ２.２. -
Page 11: For Safety Operation
Figure １．１ Location of nameplate. １.２.CONTACT INFORMATION If you encounter any trouble, come up with any question or order a part, please contact ULVAC or your local ULVAC representative, after confirming information of the product. In case of trouble, let us know the product information (product model, serial No., Lot No.) and trouble symptom and situation in detail as much... -
Page 12: General Description
EXTERNAL OSCILLATOR FOR RF POWER SUPPLY EXO-13 2．GENERAL DESCRIPTION ２. GENERAL DESCRIPTION This section describes character, construction and specification about this product. ２.１.INTRDUCTION This unit is designed as an external oscillation source for RF power supply. It outputs rated signal on a single frequency of 13.56 MHz. -
Page 13: Cofiguration
EXTERNAL OSCILLATOR FOR RF POWER SUPPLY EXO-13 2．GENERAL DESCRIPTION ２.３.COFIGURATION This unit consists of the main body and two BNC cables, and can supply the oscillation signal to two RF power supplies. Fig 2. 1 shows the system configuration. RF POWER SUPPLY... -
Page 14: Specification
EXTERNAL OSCILLATOR FOR RF POWER SUPPLY EXO-13 2．GENERAL DESCRIPTION ２.４.SPECIFICATION Item EXTERNAL OSCILLATOR UNIT Input voltage DC 9V/10Ｖ/12V/15Ｖ/24V Input variable range DC 8 to 32Ｖ Input capacity 1VA or less D1200D four pole connector Xkey type （Made by TYCO/AMP） Input Input connector DC jack 2.1mm(inside diameter)/5.5mm(outside diameter) -
Page 15: Preparation
EXTERNAL OSCILLATOR FOR RF POWER SUPPLY EXO-13 3．PREPARATION ３. PREPARATION The section describes necessary preparation and precaution before operation of the product. ３.１.ACCESSORY AND OPTION The followings are standard accessory and options. Please confirm parts regarding the excess and deficiencies, and damage when opening. -
Page 16: Name And Function Of The Product Parts
EXTERNAL OSCILLATOR FOR RF POWER SUPPLY EXO-13 3．PREPARATION ３.３.NAME AND FUNCTION OF THE PRODUCT PARTS Table 3.1 Names and Functions of Components Name of component Function ①POWER LED Lights green when a voltage is applied to the power supply ②ＩＮ Ａ... -
Page 17: Installation And Connecting Input And Output Cables
EXTERNAL OSCILLATOR FOR RF POWER SUPPLY EXO-13 3．PREPARATION ３.４.INSTALLATION AND CONNECTING INPUT AND OUTPUT CABLES Install this unit according to the following procedure. CAUTION This product does not accept lightning surge, spike voltage and moment power failure. If lightning surge, spike voltage or moment power failure are input, damage or error are led. Operate it without lightning surge, spike voltage and moment power failure. -
Page 18: Connecting Input And Output Cables
EXTERNAL OSCILLATOR FOR RF POWER SUPPLY EXO-13 3．PREPARATION ３.４.３. Connecting input and output cables Before connecting the RF power supply or connected anything, check the names of connectors and then connect them with special cables. Refer to " Fig 2.1 System configuration"... -
Page 19: Maintenance
EXTERNAL OSCILLATOR FOR RF POWER SUPPLY EXO-13 4．MAINTENANCE ４. MAINTENANCE The section describes necessary maintenance to use the product for years. If you fail to do maintenance, wear of the product would be accelerated and shutdown of the product would be led. Read this section carefully and do maintenance ４.１.INSPECTION... -
Page 20: Troubleshooting
EXTERNAL OSCILLATOR FOR RF POWER SUPPLY EXO-13 5．TROUBLESHOOTING ５. TROUBLESHOOTING The section describes action on trouble. ５.１.TROUBLESHOOTING If trouble occurs, diagnose it referring to table 5.1. Table 5．1 Troubleshooting for RF Power Supply Trouble symptom Possible cause and corrective action POWER LED does not light. -
Page 21: Attached Materials
EXTERNAL OSCILLATOR FOR RF POWER SUPPLY EXO-13 6．ATTACHED MATERIALS ６. ATTACHED MATERIALS ・ External oscillator unit outside drawing POWER IN A IN B OUT1 OUT2 OUT3 OUT4 Fig.6.1 External oscillator unit outside drawing...