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Ulvac HPS-510S Instruction Manual

Air－cooled solid state type electron beam power supply
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EB0024-04e
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AIR－COOLED SOLID STATE TYPE
ELECTRON BEAM POWER SUPPLY
model：HPS-510S
rd
4
edition AUG．01，2023
ULVAC，Inc．
※Read this manual before using this product.
Store this manual carefully so that it can be used at any time.

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  • Page 1 EB0024-04e AIR－COOLED SOLID STATE TYPE ELECTRON BEAM POWER SUPPLY model：HPS-510S edition AUG．01，2023 ULVAC，Inc． ※Read this manual before using this product. Store this manual carefully so that it can be used at any time.
  • Page 2 EB0024-04e...
  • Page 3 The copyrights for this manual and safety guide are the property of the ULVAC Inc. This manual cannot be copied in a whole or in part without the permission of ULVAC Inc. You are forbidden from using this instruction manual for other products or applications except those approved by the ULVAC Inc.
  • Page 4 Introduction ELECTRON-BEAM POWER SUPPLY ～HPS-510S～ １．Safety precautions １ The majority of accidents are related to careless operation, inspection, maintenance, and repair. Furthermore, accidents are more likely to occur when basic safety cautions are not observed and risks are not assessed.
  • Page 5 Introduction ELECTRON-BEAM POWER SUPPLY ～HPS-510S～ ２．Safety symbols There are safety symbols in this manual and on product warning labels to call attention to the safety points that must be observed. The terminology used in these safety symbols is classified below.
  • Page 6 Do not use gasoline or organic solvents. If labels are not visible because they have been damaged or lost, contact ULVAC or an exclusive distributor. The power source serial number is listed on the nameplate on the back of the power source. Ensure...
  • Page 7 １ This system has been shipped after undergoing an extensive in-house inspection. However, in the event a failure occurs that ULVAC Inc. is responsible for, such as a manufacturing defect or accident during shipment, please inquire with the ULVAC Inc. or the nearest sales office or dealer regarding repairs.
  • Page 8 To ensure long-term use of the power source, periodic overhauls (exchange of consumables, etc.) are recommended. Table 0.1 lists the parts (consumables) recommended for exchange. The recommended exchange period is not a guarantee by ULVAC of a product's lifespan. Table 0．1 List of parts (consumables) recommended for exchange No．...
  • Page 9 Introduction ELECTRON-BEAM POWER SUPPLY ～HPS-510S～ ８．RoHS compliance ８．１ Europe RoHS List of environmentally hazardous substances Toxic and hazardous material or element Threshold Lead（Pb） 1000ppm Mercury（Hg） 1000ppm Cadmium（Cd） 100ppm Hexavalent chromium（CrⅥ+） 1000ppm Polybrominate bipyenyl（PBB） 1000ppm Polybrominated diphenyl ether（PBDE） 1000ppm ８．２ China RoHS China ＲｏＨＳ...

  • Page 10: Table Of Contents

    Table of contents ELECTRON-BEAM POWER SUPPLY ～HPS-510S～ Table of contents １. Using this product safely ................................1 １.１. Precautions when handling the product ......................1 １.２. Contact information ..............................1 ２. Overview ......................................2 ２.１. Introduction ..................................2 ２.２. Features ..................................2 ２.３.

  • Page 11: Using This Product Safely

    To order parts, ask questions about products, and to make inquiries related to product malfunctions, first verify the product information and then contact ULVAC or an exclusive dealer. Especially when you have determined the product has malfunctioned, inform us of the product information (serial number/lot number) along with the product's history and symptoms in as much detail as possible.

  • Page 12: Overview

    The HPS-510S solid-state electron beam power source (hereafter referred to as EB power source) was designed to improve circuit stability and performance based on years of technological achievements by ULVAC. The HPS-510S is a power source for the EGK/EGL series of electron beam guns for evaporation sources (hereafter referred to as an EB gun).

  • Page 13: Configuration

    XYOUT CABLE WATER HIGH VOLTAGE CABLE FLOW SWITCH WATER INPUT CABLE INLET EARTH GUN GND CABLE GROUND LOW IMPEDANCE GROUND LOW IMPEDANCE FIRST CLASS 10Ω OR LESS CLASS A 10Ω OR LESS Figure 2．1 Configuration example of the HPS-510S and EGL-35M...

  • Page 14: Specifications

    ２．Overview ELECTRON-BEAM POWER SUPPLY ～HPS-510S～ ２.４.Specifications Table 2．1 Electrical specifications Maximum input power 5 kW ( 10 kV／0．5 A) Variable range - 4 kV ～ - 10 kV Acceleration voltage Variation ± 1 ％ or less （for - 10 kV／0．5 A ）...

  • Page 15: Externally Input And Output Signals

    ２．Overview ELECTRON-BEAM POWER SUPPLY ～HPS-510S～ ２.５.Externally input and output signals The following chart shows the externally input and output signals Table 2．2 Externally input and output signals Model name Name of externally input signal Signal level (voltage signal) Notes HV ON...

  • Page 16: Setup

    ３．SETUP ELECTRON-BEAM POWER SUPPLY ～HPS-510S～ ３. SETUP The following provides the necessary preparations and cautions for this device from when you receive it until when you start using ３.１.Unpacking cautions Unpack the box containing the main power very carefully. Check whether any damage occurred from external forces during shipping.

  • Page 17: Installation Location And Installation

    ３．SETUP ELECTRON-BEAM POWER SUPPLY ～HPS-510S～ ３.２.Installation location and installation Install this device in a location with a temperature of 15 - 30 °C and a humidity of 60% or less. Dust and vibration should be kept to a minimum. Furthermore, install the device on a flat surface. Ensure that there is at least 1 m between the wall and their rear surface of the unit.

  • Page 18: Wiring Connections

    4) Electron beam evaporation source (EB gun) EB gun by ULVAC: EGK series and EGL series 5) Types of induction terminals required for the load device Refer to the instruction manual of the EB gun.
  • Page 19 ３．SETUP ELECTRON-BEAM POWER SUPPLY ～HPS-510S～ Caution： Always match the phases of the input cables. R-phase ： Red S-phase ： White T-phase ： Black Caution： This product does not accommodate lightning surges, spike voltage, and instantaneous power failures. If lightning surges, spike voltages, and instantaneous power failures are input by the power supply equipment, the product will be damaged or malfunction.
  • Page 20 ３．SETUP ELECTRON-BEAM POWER SUPPLY ～HPS-510S～ Table 3．2 Earth cables Cable length EARTH GUN GND SYSTEM GND CABLE The required earth must be 14 mm or greater 3．5 ～ 10 m 14 mm with the ground resistance of 10 Ω or less.
  • Page 21 Wire each pin of the accessory INTERFACE plugs (Table 3.1) according to Figure 4.4 in Section 4 and connect to the INTERFACE receptacles on the rear of the HPS-510S. There are three interlocks available: GUN WATER, CHAMBER, and VACCUM. These interlocks are designed to protect users’...

  • Page 22: Part Names

    ４．Part names ELECTRON-BEAM POWER SUPPLY ～HPS-510S～ ４. Part names This section lists the names of the parts of this machine. Furthermore, this section explains the connection methods for each unit. To see external diagrams of each unit, see the accompanying material.
  • Page 23 ４．Part names ELECTRON-BEAM POWER SUPPLY ～HPS-510S～ 1) HIGH VOLTAGE OFF light switch This switch lights when the conditions for all interlocks are met. If the interlock conditions are not met or the HIGH VOLTAGE key switch is in the LOCK position, this switch is not lit.
  • Page 24 ４．Part names ELECTRON-BEAM POWER SUPPLY ～HPS-510S～ Caution： When installing the side panels, always use the screws removed earlier. If screws with a different length are used, the panel interlock may not lock or the door switch may be damaged. 8) VOLT SET potentiometer Set the acceleration voltage applied to the EB gun.
  • Page 25 ４．Part names ELECTRON-BEAM POWER SUPPLY ～HPS-510S～ 10) OVER LOAD indicator (red) This indicator switches on when there is a discharge or short circuit in the EB gun causing excess current. For sustained vacuum discharge or mechanical short circuits, the indicator lights for approximately 1 to 2 seconds and then the high voltage output is switched to off.
  • Page 26 ４．Part names ELECTRON-BEAM POWER SUPPLY ～HPS-510S～ magnet coil is at room temperature (when first switched on), turn the trimmer all the way in the clockwise direction. As the trimmer is gradually turned in the counter clockwise direction, the MAGNET indicator switches on.
  • Page 27 ４．Part names ELECTRON-BEAM POWER SUPPLY ～HPS-510S～ Caution： Always adjust X-MIN, X-MAX, Y-CTR and Y-MAX so that the beam does not run off the crucible. When adjusting X-MIN and X-MAX, start the adjustment from X-MIN. The following shows the relation of the beam movement range in the x- and y-direction and the trimmers.
  • Page 28 ４．Part names ELECTRON-BEAM POWER SUPPLY ～HPS-510S～ 18) POWER indicator (yellow) This indicator shows that the MAIN circuit breaker is ON. 19) COOLING indicator (yellow) This indicator shows that the fan used inside the power source is rotating correctly. This indicator is usually on.

  • Page 29: Rear Panel

    ４．Part names ELECTRON-BEAM POWER SUPPLY ～HPS-510S～ Caution： If the XY CONTROL switch is set to REMOTE without signal input to the PRG/MON conn ector, the coil current may not be fixed and the beam may be irradiated to an unexpected location or the coil may be damaged.
  • Page 30 ４．Part names ELECTRON-BEAM POWER SUPPLY ～HPS-510S～ Danger： Always connect the EARTH GUN GND cable. If the EARTH GUN GND cable is not connected, the power source chassis will enter a floating state and become extremely dangerous. Before switching on the EB power, confirm that the EARTH GUN GND cable is connected and then switch on the main circuit breaker.
  • Page 31 ４．Part names ELECTRON-BEAM POWER SUPPLY ～HPS-510S～ Table 4.1 shows the fuse capacity and usages. If melting occurs during operation, the high voltage is switched off and the fuse indicator of the power unit switches off. When the F 1 fuse melts, the micro switch button is pressed to warn of the melting.
  • Page 32 ４．Part names ELECTRON-BEAM POWER SUPPLY ～HPS-510S～ ③ Beam current remote function Beam current is controlled by an analog signal from a deposition controller（thickness controller）. Performed the wiring while referring to Figure 4.4. The INTERFACE connector COM must be floating. If the power source device to be used is connected to an earth, it is necessary to use an isolating amplifier and isolate signals.
  • Page 33 ４．Part names ELECTRON-BEAM POWER SUPPLY ～HPS-510S～ Machine side wiring Power source side GUN WATER CHAMBER VACCUM When external High voltage on/off by external contact point is contact point not used For self-holding Jumper model Non Voltage Contact point HV ON SIGNAL(CLOSE) 125V AC／1 Amax BEAM CURRENT CONTROL 0～+10V...
  • Page 34 ４．Part names ELECTRON-BEAM POWER SUPPLY ～HPS-510S～ Note: The INTERFACE connectors commons require floating at a withstand voltage of AC 1,500 V or more using an earth, and insulation is required between each common. If the power source device to be used is connected to an earth, it is necessary to use an isolating amplifier and isolate signals.
  • Page 35 ４．Part names ELECTRON-BEAM POWER SUPPLY ～HPS-510S～ Note: The variable range of X and Y-axis controls (POSITION and SWEEP) is the range set on the front panel. X-Coil current is not linear to the control voltage. To check the Monitor output, use an oscilloscope or other device that can check the waveform.
  • Page 36 ４．Part names ELECTRON-BEAM POWER SUPPLY ～HPS-510S～ HV-Monitor Beam current monitor +15V +15V 100Ω 1kΩ 100Ω 1kΩ X-Monitor Y-Monitor +15V +15V 100Ω 100Ω 1kΩ 1kΩ -15V GUN GND Figure 4.6 Diagram of monitor output pins...

  • Page 37: Local Control Box

    ４．Part names ELECTRON-BEAM POWER SUPPLY ～HPS-510S～ ４.３. Local control box Figure 4．5 Local control box...
  • Page 38 ４．Part names ELECTRON-BEAM POWER SUPPLY ～HPS-510S～ 1） EMISSION dial This dial is used to set the beam current. The range is from 0 to 100. The ranges are 0 to 100/0 to 500 mA. 2） X-AXIS POSITION dial This dial sets the direct current flowing to the x-axis magnet coil.

  • Page 39: Operation

    ５．Operation ELECTRON-BEAM POWER SUPPLY ～HPS-510S～ ５. Operation This section lists the operation methods of this machine. ５.１.Pre-operation check list Check the following before supplying electricity to the EB power source. Furthermore, always perform the initial test with LOCAL operation. Caution：...
  • Page 40 ５．Operation ELECTRON-BEAM POWER SUPPLY ～HPS-510S～ 4) Checking the ground wires Confirm that the accessory EARTH GUN GND cable is directly connected properly to the EARTH terminal of the EB power source and the system earth terminal of the load device and that there is no looseness.
  • Page 41 ５．Operation ELECTRON-BEAM POWER SUPPLY ～HPS-510S～ 7) Checking the wiring Confirm that the accessory cables are connected properly. For the XY OUT cable, refer to the EB gun instruction manual and confirm that the wiring of the x-axis and y-axis magnet coils is correct.

  • Page 42: Local Operation

    ５．Operation ELECTRON-BEAM POWER SUPPLY ～HPS-510S～ ５.２.LOCAL operation 1) EB power source settings Before switching on the power, set the settings for the power source unit and LOCAL CONTROL BOX to the following positions. Table 5．1 Settings for the power source unit /LOCAL CONTROL BOX...
  • Page 43 ５．Operation ELECTRON-BEAM POWER SUPPLY ～HPS-510S～ switches off. With the x-axis magnet coil at room temperature and first supplying electricity, turn the MAG-INTLK trimmer all the way in the clockwise direction and then gradually turn it in the counter clockwise direction until the GUN MAGNET indicator lights.
  • Page 44 ５．Operation ELECTRON-BEAM POWER SUPPLY ～HPS-510S～ Warning： If the coil wiring is done incorrectly, the beam may radiate an incorrect location and damage the coil. In particular, if the x-axis magnet coil and COM are connected in reverse, not only will the beam movement in the x-axis direction being incorrect but the beam will radiate the chamber and may damage it.
  • Page 45 ５．Operation ELECTRON-BEAM POWER SUPPLY ～HPS-510S～ Table 5．2 Setting methods for the beam movement range Set X POSITION and X SWEEP to 0. Next, rotate the X MIN trimmer and set the X MIN setting minimum value for the read x-axis magnet coil current.
  • Page 46 In the degassing process of the evaporation material, local discharges (abnormal discharges) are seen. If abnormal discharges occur and a large amount of current flows on the HPS-510S, the over current protective device blocks the beam current and high voltage. Afterwards, the machine automatically recovers to a steady state.

  • Page 47: Program Operation

    ５．Operation ELECTRON-BEAM POWER SUPPLY ～HPS-510S～ ５.３.PROGRAM operation 1) Checking the INTERFACE, PRG/MON connector connections When REMOTE operation is performed using external signals, wire according to Figure 4.4 and Figure 4.5. When using a deposition controller, use a controller that is noise resistant and has isolated analog signals.
  • Page 48 ５．Operation ELECTRON-BEAM POWER SUPPLY ～HPS-510S～ Caution： Before performing PROGRAM operation, always perform the various settings in LOCAL operation. Furthermore, for the external signal, input voltage signals so that the conditions for operating in LOCAL operation match. 4) Checking the load side Using the EB gun instruction manual, check the loading side.

  • Page 49: Maintenance

    ６．Maintenance ELECTRON-BEAM POWER SUPPLY ～HPS-510S～ ６. Maintenance The section describes necessary maintenance so the product can be used for years to come. If you neglect maintenance, the product will wear down more quickly which may cause the product to stop working.

  • Page 50: Maintenance And Inspection

    ６．Maintenance ELECTRON-BEAM POWER SUPPLY ～HPS-510S～ ６.１.Maintenance and inspection Excluding checks 10 to 12, switch off the three-phase input power source of the EB power source before starting. Table 6．1 Preventive maintenance check list Inspection period ※1 Item Inspection/action Notes Daily Weekly Monthly At locations where high voltage is applied, check that protective covers are attached.
  • Page 51 ６．Maintenance ELECTRON-BEAM POWER SUPPLY ～HPS-510S～ Caution： NOTE 1：The voltage generated by the EB power source is sufficient to endanger life. Before touching the EB power source, EB gun, or surrounding area to perform checks, always switch off the main circuit breaker of the EB power source or your MAIN circuit breaker for the EB power source.

  • Page 52: Periodic Inspections

    ６．Maintenance ELECTRON-BEAM POWER SUPPLY ～HPS-510S～ ６.２.Periodic inspections Always switch off the three-phase input power source of the EB power source before performing inspections. Table 6．2 Periodic inspection checklist Inspection period※1 Item Inspection/action Notes Relocation Quarterly Yearly Check for looseness in the connection location ○...
  • Page 53 ６．Maintenance ELECTRON-BEAM POWER SUPPLY ～HPS-510S～ Caution： NOTE 9：If the connection between the fuse box and INPUT cable is loose, heat may be generated and burning may occur. Furthermore, a phase disconnection, etc. may cause the power source to operate in an unstable manner. Check the installation of the fuse box.

  • Page 54: Recommended Exchange Parts

    5 years ※1 These numbers are not guaranteed. If you would like to request an overhaul, please contact the ULVAC Inc. or the nearest sales office or dealer. Contact information Contact ULVAC with the information below or contact your local exclusive dealer.

  • Page 55: Troubleshooting

    ７．Troubleshooting ELECTRON-BEAM POWER SUPPLY ～HPS-510S～ ７. Troubleshooting This section explains corrective action when problems occur. ７.１.Troubleshooting If a problem occurs, make an initial diagnosis using Figure 7.1. More details regarding potential problems are listed in Tables 7.1 to 7.4. The symptoms of troubles listed in this section are limited to previously experienced problems and potential future problems.
  • Page 56 ７．Troubleshooting ELECTRON-BEAM POWER SUPPLY ～HPS-510S～ ＨＰＳ－５１０Ｓ To verify the trouble of Trouble Shooting EB power supply, operate LOCAL function. Protect function was worked by the panel Set manual interlock operation mode. (magnet/emission Protect function was /high voltage) worked by another Does Fuse lump interlock.
  • Page 57 ７．Troubleshooting ELECTRON-BEAM POWER SUPPLY ～HPS-510S～ Table 7．1 Main unit troubleshooting list Symptoms Possible cause Locations to check A： Power is not being Check the power of the fuse box received If power is not being received, supply power Check whether the panel is attached firmly B：...
  • Page 58 E： Power source Having the high voltage on with no load is extremely malfunction dangerous. This must be performed by personnel with experience handling high voltages or an ULVAC engineer. If the high Abnormal discharges are occurring because of voltage is A：...
  • Page 59 ７．Troubleshooting ELECTRON-BEAM POWER SUPPLY ～HPS-510S～ Table 7．3 Beam current troubleshooting list Symptoms Possible cause Locations to check A： High voltage is not Check that high voltage is being applied being applied B： The machine is in Check the DEGAS indicator...
  • Page 60 ７．Troubleshooting ELECTRON-BEAM POWER SUPPLY ～HPS-510S～ Table 7．4 Magnet troubleshooting list Symptoms Possible cause Locations to check Check the MAG-INTLK setting A： Incorrect setting of Check the MAG-INTLK setting method in 4.1 and MAG-INTLK perform the settings again Check the magnet coil wiring B：...

  • Page 61: Reference Materials

    ８．Reference materials ELECTRON-BEAM POWER SUPPLY ～HPS-510S～ ８. Reference materials The following material is included with the HPS-1000S. Diagram 8．1 HPS－510S external view Diagram 8．2 Local control box LCB－05S external view...
  • Page 62 ８．Reference materials ELECTRON-BEAM POWER SUPPLY ～HPS-510S～ Daigram 8．1 HPS－510S external view...
  • Page 63 ８．Reference materials ELECTRON-BEAM POWER SUPPLY ～HPS-510S～ Diagram 8．2 Local control box LCB－05S external view...

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