Ulvac RFS-13200F Manuals

Manuals and User Guides for Ulvac RFS-13200F. We have 1 Ulvac RFS-13200F manual available for free PDF download: Instruction Manual

Ulvac RFS-13200F Instruction Manual

Ulvac RFS-13200F Instruction Manual (74 pages)

Solid-State RF Power Supply Matching Box

Brand: Ulvac | Category: Power Supply | Size: 3.33 MB

Table of Contents

Table of Contents
7
For Safe Operation
9
2 Overview

11
- Introduction
  11
- Features
  11
- Configuration
  12
- Specifications
  13
3 Setup

22
- Accessories
  22
- Power Supply Installation
  23
  - Installation and Drilling Rack Holes
    23
  - RF Power Supply Mounting Structure
    23
- Matching Box Installation
  24
  - Matching Box Installation Location
    24
  - Installation
    24
- Automatic Matching Controller Installation
  24
- System Wiring
  25
  - Connecting Cables
    25
  - Input Power Supply Wiring
    26
  - Connecting the Earth Terminal
    26
4 Functions

27
- RF Power Supply
  27
- Automatic Matching Controller Functions
  36
5 Operation

44
6 Maintenance

60
- RF Power Supply Maintenance and Inspection
  60
- Matching Box Maintenance and Inspection
  61
7 Troubleshooting

63
- Troubleshooting Related to the RF Power Supply
  63
- Troubleshooting Related to the Matching Box
  64
8 Reference Materials

65

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