Ulvac CRYO-U Series Instruction Manual page 11

Bakeable type cryopump

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CRYO-U

Bakeable Type Cryopump Instruction Manual

1.1

Performance of Bakeable type Cryopump ······························ 1-2

1.2

Sheath Heater ·································································· 1-2

1.3

Flange Specifications ························································· 1-3

1.4

Cooling Water Pipe ···························································· 1-3

1.5

Major Components ···························································· 1-4

A bakeable type cryopump has sheathed heater coiled around, degasses the pump by

baking its outer shell to 150ºC - 250 ºC to achieve ultra-high vacuum of lower than 10

Pa easily.

<NOTE> The figure above is provided as an example and may differ from your system.

Figure 1-1

Bakeable Type Cryopump

ULVAC CRYOGENICS INCORPORATED

-8

1-1

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