Ulvac CRYO-U Series Instruction Manual page 25

Bakeable Type Cryopump Instruction Manual
Revision History
Date Revision No.
2006-06-07 2006.06
2009-09-28 2009SR01
2010-11-04 2010NR02
2011-10-26 2011OR03
2013-07-25 2013JU04
2013-11-08 2013NR05
2014AL06
2014-04-18
2018-05-10 2018MY07
2019-03-11 2019MH08
First edition
Full-fledged revision.
Cover: Export control policy has been revised.
"Introduction" and "SERVICE NETWORK" have been
revised.
Cover: Export control policy has been revised.
P.1-2 WARNING section has been added.
Table1-3 applicable models have been added.
Section 2.5 CAUTION sections have been added.
"SERVICE NETWORK" has been revised.
Cover: Export control policy has been revised.
"Introduction" and "SERVICE NETWORK" have been
revised.
P.2-2 The content has been modified.
P.3-2 "Caution" has been modified.
SERVICE NETWORK has been revised.
Cover has been modified.
1. SPECIFICATIONS
Table 1-1 Note has been added.
ULVAC CRYOGENICS INCORPORATED
Contents
R-1