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ULK-10A
Ulvac ULK-10A Manuals
Manuals and User Guides for Ulvac ULK-10A. We have
2
Ulvac ULK-10A manuals available for free PDF download: Instruction Manual, Manual
Ulvac ULK-10A Instruction Manual (69 pages)
Oil Diffusion Pump
Brand:
Ulvac
| Category:
Water Pump
| Size: 1.32 MB
Table of Contents
Before Use
2
Safety Symbol Mark
3
Safety Precautions
4
Type/Description and Position of Warning Label on this Machine
10
Acceptance and Storage of Pump
11
Acceptance of Unpacked Pump
11
Transportation
12
Ambient Conditions During Storage, Installation, and Operation
13
Protective Equipment
14
Table of Contents
15
1 For Safe Use
18
Product-Specific Risk and Safety Measure
18
Leakage of Hazardous Gas and Substances
18
Transportation of Heavy Load Items
18
Electric Shock
19
High Temperature
19
Leakage of High-Temperature Cooling Water
20
Rise of Oil
20
Explosion
21
Material Safety Data Sheet (SDS)
22
2 Overview
23
About Oil Diffusion Pump
23
Performance Specifications
24
Mounting
30
Installation
30
Preparation
30
Oil Filling
31
Water Piping
32
Intake Port Pipe (Connection to Vacuum Chamber Side)
33
Exhaust Port Pipe (Piping to Auxiliary Pump)
34
Electric Connection
36
4 Operation
39
Operational Precautions
39
Operation Start
41
Operation Stop
43
5 How to Handle Thermostat (Option)
44
6 Maintenance/ Inspection
45
Maintenance
45
Periodical Inspection
45
Oil Level
46
Inspection of Vacuum Pump Oil
46
Oil Replacement
46
Disassembling of Pump
50
Cleaning of Pump
55
Assembling of Nozzle
55
Attachment of Pump in the Line
56
Removal of Heater
56
Attachment of New Heater
59
Inspection after Storage for Long Period of Time
60
Overhaul
60
Trouble Check List
61
7 Disposal
64
Warranty Clauses
65
Warrantable Items
65
Duration of Guarantee
65
Warrantee Scope
65
Response Procedure
66
Disclaimer
66
Main Replacement Parts
67
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Ulvac ULK-10A Manual (13 pages)
Oil Diffusion Pump
Brand:
Ulvac
| Category:
Water Pump
| Size: 0.55 MB
Table of Contents
Preface
2
Worker's Requirements
2
Table of Contents
3
Before Replacement of the Heater
2
1 Parts Used
4
Table of Major Parts
4
Table of Replacement Parts
4
Bolts Used
5
Miscellaneous
5
2 Tools to Use
6
Table of Working Tools
6
3 Removing the Heater
7
4 Installing the Heater
9
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