Table of Contents
Advertisement
2. Maintenance and Repair that Can be Made by User
1) O-ring replacement (except for oil sealed rotary vacuum pump)
2) Cleaning of the feed-though collar and the glass bell jar.
3) Replacement of oil for the sealed vacuum pump and oil diffusion pump.
4) Replacement of the element of oil mist trap.
5) Replacement of the heater of the oil diffusion pump.
To make repair or maintenance other than the above, contact us.
3. Removal, Maintenance, and Installation of Devices
3-1 Oil sealed rotary vacuum pump
1) Required tools
2) Removal procedure
- All devices of the coater stop.: Confirm
- The breaker of the devices are turned off.: Confirm
- The primary power supply of the coater is removed.: Confirm
- Remove the side panel and rear panel (optional) if they are attached.
- Remove the clamp and the flexible tube.
- Remove the motor wiring (2 locations).
- Remove the earth wire from the R. P base.
- Remove the vibration-control rubber nuts (4 locations).
- Remove the pump unit. In this case two or more people lift the motor
portion and front cover.
- Remove the vibration-control rubber (4 locations).
3) Oil replacement
Refer to the separate sheet
– Oil Sealed Rotation Vacuum Pump User's Manual
4) Order of attachment
- Vibration-control rubber (4 locations)
- Attach the motor portion and front cover. In this case, two or more
people lift them to attach.
- Attach the nuts for vibration control (4 locations)
- Attach wiring for the motor (2 locations)
- Attach the earth wire to the R.P base.
- Attach the flexible tube and fix it with clamp.
- Attach the side panel and rear panel (optional).
Phillips head (+) screwdriver, 8 mm spanner x 1,
4 mm Hexagonal wrench x 1
19
Advertisement
Table of Contents
