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7. Consumable List
Location of Use
Main valve
Oil diffusion pump
Oil sealed rotary
vacuum pump
Three-way valve
Roughing piping
Operational panel
Liquid nitrogen trap
Specifications and quantity is different for special models.
Parts
O-ring for suction
flange
O-ring for valve body
O-ring for valve pole
Gasket for suction
flange
Oil for use
Sheathed Heater
Oil
Vibration-control
rubber
O-ring
O-ring
O-ring
O-ring for center
healing
O-ring for VENT.
Valve.
O-ring for gauge port
Pirani vacuum meter
probe
Indicator lamp
Illuminated Button
Switch
O-ring for suction
flange
Specifications
V120 (Attached
component)
(Attached component)
P10 (Attached
component)
V100
Lion-S
Single-phase 100 V,
0.6 kW
SMR-100
ME-20
S 42 (Attached
component )
P-25 (Attached
component )
P-10A (Attached
component )
NW25
N8
N16
WP-01
LMS-4BH
AR22F5L
V120
25
Replacemen
Material
Quantity
t by user
FPM
1
FPM
1
FPM
2
NBR
1
――
0.1L
――
1
――
1
――
4
FPM
3
FPM
2
FPM
3
FPM
2
NBR
1
NBR
1
――
1
――
1
――
2
NBR
1
OK
OK
NG
OK
OK
OK
OK
OK
NG
NG
NG
OK
OK
OK
OK
NG
NG
OK
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