Maintenance; Dimensional Drawing - Ulvac OMT-050A Instruction Manual

5.CAUTION
1) When operation pressure is blow 40Pa the trapped oil returnees to pump
automatically.
2) When operating pressure is higher than 40Pa periodically shut down about
5minutes or high vacuum {below 40Pa} operation is required.

6.MAINTENANCE

1) Element of OMT-050A is subject to exchange every 1,500 to 2,000 hour
of operation due to filling up of the element by dust.
2) Whole gasket also should be exchanged at the same time. These parts are
available at our dealer or our branch.

7.DIMENSIONAL DRAWING

Fig. 1 General Assembly Drawing of OMT-050A
3