Ulvac VWR-400M/ERH Instruction Manual page 3

Compact vacuum evaporator

Table of Contents

(4) Operations -------------------------------------------------------------------------------- 13

2. Evacuation device operation ------------------------------------------------- 14

2-1 Preparation ------------------------------------------------------------------ 14

2-2 Operations ------------------------------------------------------------------- 14

2-3 Shut down ------------------------------------------------------------------ 14

3. Vapor deposition operation --------------------------------------------------- 15

3-1 Opening the vacuum chamber ------------------------------------------ 15

3-2 Vacuum chamber evacuation ------------------------------------------- 15

4. Creating a film ------------------------------------------------------------------- 16

4-1 Preparation ------------------------------------------------------------------ 16

4-2 Creating a film ------------------------------------------------------------- 16

5. Handling malfunctions --------------------------------------------------------- 17

5-1 Instantaneous power outage -------------------------------------------- 17

5-2 Long power outage -------------------------------------------------------- 17

5-3 Operation after power recovery ----------------------------------------- 17

5-4 Instantaneous water outage---------------------------------------------- 17

5-5 Long water outage---------------------------------------------------------- 17

5-6 Operation after water recovery------------------------------------------ 17

(5) Maintenance and repair --------------------------------------------------------------- 18

3-1 Oil sealed rotary vacuum pump ----------------------------------------- 19

3-2 Oil diffusion pump ---------------------------------------------------------- 20

3-3 Oil mist trap ------------------------------------------------------------------ 21

3-4 Glass bell jar O-ring ------------------------------------------------------- 21

3-5 Glass bell jar ----------------------------------------------------------------- 21

4. Maintenance and Inspection Points ---------------------------------------- 22

5. Troubleshooting ----------------------------------------------------------------- 23

6. Storage of Equipment ---------------------------------------------------------- 24

7. Consumable List ---------------------------------------------------------------- 24

(6) Disposal ----------------------------------------------------------------------------------- 26

1. Cautions upon Disposal ------------------------------------------------------- 26

(7) Optional Parts ---------------------------------------------------------------------------- 26

1. Standard Optional Parts List ------------------------------------------------- 26

Table of Contents