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VTR-060M/ERH
Ulvac VTR-060M/ERH Manuals
Manuals and User Guides for Ulvac VTR-060M/ERH. We have
1
Ulvac VTR-060M/ERH manual available for free PDF download: User Manual
Ulvac VTR-060M/ERH User Manual (33 pages)
Small Vacuum Deposition System
Brand:
Ulvac
| Category:
Industrial Equipment
| Size: 1.16 MB
Table of Contents
Table of Contents
2
For Safe Use of this Product
4
1.Users
9
2.Reading and Understanding the Manual
9
3.Storing the User Manual
9
5.Legal Compliance
9
6.Safety During Repairs
9
2)Product Outline
10
1.Purpose of Use and Prohibited Items
10
2.Safety Equipment and Its Purpose and Function
10
3.Product Specification
11
4.Individual Component Specifications
11
5.Standard Accessories
12
6.Using Switches, Handles and Operation Levers
13
7.Layout of Switches, Handles and Operation Levers
14
Exhaust System Diagram
14
Electrical System Diagram
14
3)Opening the Packaging and Installation
16
1.General Precautions
16
2.Packaging at Delivery
16
3.Location of Installation
16
4.Power Supply
17
Wiring Diagram of Evaporation Power Supply Output
18
5.List of Required Tools
19
1.Hazards During Operation, and Associated Safety Measures
19
2.Operation Procedure (Standard)
20
3.Operation Procedure (Option)
21
3-4 Open Vacuum Tank
22
3-5 Evacuate Vacuum Tank
22
3-6 Preparation for Deposition
22
4.Handling Malfunctions
23
4-1 Instantaneous Power Failure
23
4-2 Long-Term Power Failure
23
4-3 Restoration Procedure after Power Failure
23
5)Maintenance and Repairs
24
Hazards During Maintenance and Repairs, and Associated Safety Measures
24
2.Customer Maintenance and Repairs
24
3.Removing, Maintaining and Fitting the Device
25
3-2 Turbomolecular Pump
26
3-4 Replace Base Plate and Top Lid O-Ring
27
3-5 Clean Inside of Glass Chamber
27
4.Maintenance and Inspection Locations
28
1.Precautions to be Taken for Disposal
32
7)Optional Components
32
1.Standard Optional Components
32
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