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RF POWER SUPPLY and MATCHINGBOX
This section explains the maintenance necessary to use this product for many years.
If maintenance is neglected, the product will deteriorate more quickly and result in breakdown.
Perform maintenance after reading this section carefully.
6-1. Maintenance and inspection
We recommend performing an overhaul at the usage intervals listed below so that you can
use PHS-N for many years.
Table 6- Parts of PHS-04N recommended for periodic replacement
No.
1
Organic EL display section 4 years
2
Electrolytic condenser
3
Fuse
4
Switching power supply
* The recommended exchange usage intervals do not guarantee the lifetime of the parts.
* The speed of deterioration of these parts differs greatly depending on your usage
frequency and conditions of the device.
* In particular, the lifetime of power semiconductors changes by usage methods. High usage
environment temperatures, frequent on/off cycling, and operation near rated values
shorten the lifetime.
* Higher usage environment temperatures further shorten the lifetime of parts.
* Machine operation parts (such as contactors) have a lifetime prescribed by the number of
operations. Therefore, lifetime is shortened by the number of operations.
* When equipment has been stored while off, internal elements may deteriorate in a shorter
time than the recommended periodic exchange intervals above.
* Always have ULVAC perform the overhaul. When the customer or a third-party has
exchanged parts without ULVAC's permission, ULVAC will charge a fee both during and
after the warranty term based on the free-repair regulations (P.V).
Part name
Recommended exchange usage interval
4 years
4 years
4 years
18
6. Maintenance
6. Maintenance
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