Pfeiffer Vacuum CCR 351 Operating Instructions Manual page 11

Ceramic capacitance gauge
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Relation Measuring signal analog - pressure
Pressure p
c
Example: Gauge with 10 Torr F.S.
2)
Source: NPL (National Physical Laboratory)
Guide to the Measurement of Pressure and Vacuum,
ISBN 0904457x / 1998
BG 5140 BEN
(2017-09)
Measurement signal U
p = (U
out
Conversion Torr ↔ Pascal
Torr
hPa
1013.25 / 760 =
1.00
1.3332...
Measurement signal U
p = (3 V / 5 V) × 10 Torr
= 0.6 × 10 Torr = 6 Torr
[V]
out
/ 5 V) × c (F.S.)
2)
101325 / 760 =
133.3224...
= 3 V
out
2)
Pa
11

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