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Materials exposed to vacuum
Flange, tube
Sensor, Feedthrough
Internal volume
Max. pressure (absolute)
≥500 Torr/mbar (F.S.)
50 ... 200 Torr/mbar (F.S.)
10 ... 30 Torr/mbar (F.S.)
Bursting pressure (absolute)
Compensated temperature range
Admissible temperature
Storage
Operation
Bakeout (inoperative)
Relative humidity
Use
Degree of protection
BG 5140 BEN
(2017-09)
Stainless steel AISI 316L
Ceramic (Al
O
≥99.5%)
2
3
3
≤6.1 cm
400 kPa
300 kPa
200 kPa
600 kPa
+10 °C ... +50 °C
–20 °C ... +85 °C
0 °C ... +70 °C
≤110 °C at the flange
≤80% at temperatures
≤+31 °C decreasing to 50%
at +40 °C
Only indoors,
altitude up to 4000 m NN
IP 40
9
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