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Summary of Contents for Pfeiffer Vacuum CMR 371
- Page 1 OPERATING INSTRUCTIONS Translation of the Original CMR 371∣372∣373∣374∣375 Capacitive gauge...
- Page 2 Dear Customer, Thank you for choosing a Pfeiffer Vacuum product. Your new gauge is designed to support you in your individual application with maximum performance and without malfunctions. The name Pfeiffer Vacuum stands for high-quality vacuum technology, a comprehensive and complete range of top-quality products and first-class service.
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Page 3: Table Of Contents
Foreseeable improper use Responsibilities and warranty Owner requirements Personnel qualification 2.9.1 Ensuring personnel qualification 2.9.2 Personnel qualification for maintenance and repair 2.9.3 Advanced training with Pfeiffer Vacuum 2.10 Operator requirements Product description Function Button and status display Identifying the product... - Page 4 Table of contents 10.2 Dispose of gauges Service solutions by Pfeiffer Vacuum Accessories 12.1 Accessory information 12.2 Ordering accessories Technical data and dimensions 13.1 General 13.2 Technical data 13.3 Dimensions ETL certification EC Declaration of Conformity UK Declaration of Conformity...
- Page 5 List of tables List of tables Tbl. 1: Applicable documents Tbl. 2: Variants Tbl. 3: Abbreviations used Tbl. 4: Permissible ambient conditions Tbl. 5: “STATUS“ light emitting diode Tbl. 6: Constants for converting measuring signal and pressure Tbl. 7: Deviation of output signal between vertical upright and horizontal mounting orientation Tbl.
- Page 6 List of figures List of figures Fig. 1: Button and LED Fig. 2: Establishing vacuum connection Fig. 3: Connection diagram Fig. 4: Measurement cable and Hirschmann cable socket Fig. 5: Relation between measuring signal and pressure Fig. 6: Zero point calibration with "zero" button Fig.
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Page 7: About This Manual
Declaration of conformity A component of these in- structions Tbl. 1: Applicable documents You can find these documents in the Pfeiffer Vacuum Download Center. 1.1.2 Variants This document applies to products with the following article numbers: Article number Type Connection Measuring range min/max. -
Page 8: Target Group
About this manual Pfeiffer Vacuum reserves the right to make technical changes without prior notification. Information that relates to only one of the products is indicated accordingly. The figures in this document are not to scale. The figures show the product with a DN 16 ISO-KF vacuum connection, however, they also apply to the other vacuum connections where applicable. -
Page 9: Abbreviations
About this manual Rating plate The rating plate is located on D-35614 Asslar the side of the unit. Mod. CxR 3xx PT R2x xxx 3103457 xxxxxxxxx Made in Liechtenstein 2023/06 Input xx...xx V DC x W LPS Range xxxx hPa 1.3.4 Abbreviations Abbreviation Explanation... -
Page 10: Safety
Safety instructions according to product life stages All safety instructions in this document are based on the results of a risk assessment. Pfeiffer Vacuum has taken into account all the relevant life stages of the product. Risks during installation DANGER Danger to life due to dangerous contact voltage Voltages above 30 V (AC) or 60 V (DC) are considered dangerous in accordance with EN 61010. - Page 11 ► Only operate the unit in a dry environment. ► Operate the unit away from fluids and sources of moisture. ► Do not switch on the unit if fluid has entered it. Instead contact Pfeiffer Vacuum Service. ► Always disconnect the power supply before cleaning the unit.
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Page 12: Safety Precautions
Safety WARNING Health hazards due to cleaning agent The cleaning agent being used causes health hazards which could include, for example, poisoning, allergies, skin irritations, chemical burns or damage to the airways. ► When handling cleaning agents, observe the applicable regulations. ►... -
Page 13: Limits Of Use Of Product
The gauge is used for vacuum measurement of gases within its defined measuring range. Use the product according to its intended purpose ► Operate the gauge with a Pfeiffer Vacuum total pressure measuring and control unit or with an evaluation unit provided by the customer. -
Page 14: Personnel Qualification
Such training must ensure that individuals are capable of carrying out the required activi- ties and work steps safely and properly. 2.9.2 Personnel qualification for maintenance and repair Advanced training courses Pfeiffer Vacuum offers advanced training courses to maintenance levels 2 and 3. Adequately trained individuals are: 14/44... -
Page 15: Advanced Training With Pfeiffer Vacuum
─ Customer with Pfeiffer Vacuum service training ─ Pfeiffer Vacuum service technician 2.9.3 Advanced training with Pfeiffer Vacuum For optimal and trouble-free use of this product, Pfeiffer Vacuum offers a comprehensive range of courses and technical trainings. For more information, please contact Pfeiffer Vacuum technical training. -
Page 16: Product Description
You will need all the data from the rating plate to safely identify the product when communicating with Pfeiffer Vacuum. ► To ensure clear identification of the product when communicating with Pfeiffer Vacuum, always keep all of the information on the rating plate to hand. -
Page 17: Transport And Storage
Transport and storage 4 Transport and storage 4.1 Transporting the product NOTICE Damage caused by incorrect transport Transport in unsuitable packaging or failure to install all transport locks can result in damage to the product. ► Comply with the instructions for safe transport. Packing We recommend keeping the transport packaging and original protective cover. -
Page 18: Installation
Installation 5 Installation 5.1 Establishing vacuum connection DANGER Risk to life due to electric shock An improperly earthed product is potentially fatal in the event of a fault. ► Connect the product galvanically with the earthed vacuum chamber. ► Ensure that the connection complies with the requirements of a protective bonding according to EN 61010. -
Page 19: Establishing Electric Connection
► Only connect the product to devices which meet the following criteria: ● Requirements of the earthed protective extra-low voltage (PELV) ● Limited power source (LPS) Class 2 ► Secure the line to the product. – Pfeiffer Vacuum measuring and control equipment complies with this requirement. 19/44... - Page 20 2. Tighten the locking screw on the Hirschmann cable socket. – Tightening torque: ≤ 0.2 Nm 3. Connect the gauge to a Pfeiffer Vacuum total pressure measuring and control unit or an evalua- tion unit provided by the customer. –...
- Page 21 Installation Fig. 4: Measurement cable and Hirschmann cable socket Manufacturing measurement cable Additional information regarding the measurement cable type and conductor cross-sections can be ob- tained from the technical data. 1. Observe the following steps to ensure optimum signal quality, whereby ground loops, differences in potential or EMC will influence the measuring signal.
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Page 22: Operation
Operation 6 Operation Once the supply voltage has been established, the measuring signal is available at the electrical con- nection between pins 2 and 3. The measuring signal is independent of the gas type. Recommendations ► On initial operation, perform zero point calibration. ►... -
Page 23: Tbl. 6: Constants For Converting Measuring Signal And Pressure
Operation Measuring signal (U) Pressure (p) Constant (c) [hPa] 0.125 mbar [Torr] 0.094 [Pa] 12.5 Tbl. 6: Constants for converting measuring signal and pressure Converting measuring signal and pressure ► Observe the constants for converting the measuring signal and pressure. ►... -
Page 24: Dismantling
Dismantling 7 Dismantling DANGER Risk to life due to electric shock An improperly earthed product is potentially fatal in the event of a fault. ► Connect the product galvanically with the earthed vacuum chamber. ► Ensure that the connection complies with the requirements of a protective bonding according to EN 61010. - Page 25 Dismantling Prerequisites ● Vacuum system vented to atmospheric pressure ● Supply voltage switched off Disassembling the gauge 1. Disconnect the measurement cable from the gauge. 2. Disassemble the gauge from the vacuum system. 3. Fit the protective cap onto the connection flange. 25/44...
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Page 26: Maintenance
► Only operate the unit in a dry environment. ► Operate the unit away from fluids and sources of moisture. ► Do not switch on the unit if fluid has entered it. Instead contact Pfeiffer Vacuum Service. ► Always disconnect the power supply before cleaning the unit. -
Page 27: Calibrating Gauge
► Operate the unit away from fluids and sources of moisture. ► Take special precautions if there is a risk of dripping water. ► Do not switch on the unit if fluid has penetrated into it, instead contact the Pfeiffer Vacuum Serv- ice Center. -
Page 28: Carrying Out Zero Point Calibration With "Zero" Button
Maintenance Recommended final pressure CMR 374 < 5 × 10 < 4 × 10 torr CMR 375 < 5 × 10 < 4 × 10 torr Tbl. 8: Recommended final pressure for zero point calibration Operation with a measurement instrument If you operate the gauge with a measurement instrument, zero adjustment must be carried out at the measurement instrument for the entire measuring system: Calibrate the gauge first and then the measurement instrument. -
Page 29: Carry Out Zero Point Calibration With "Zero" Button And Ramp Function
Maintenance The “STATUS“ LED flashes until zero point calibration is complete (duration ≤ 8 s). The “STATUS“ LED flashes if zero point calibration fails, or if the gauge has a negative output signal (< -20 mV) at the final pressure. Following zero point calibration, the gauge automatically returns to measuring mode. The “STATUS“... -
Page 30: Load Factory Settings
Maintenance 8.3 Load factory settings Modified settings are lost This function allows you to reset all parameters set/changed by the user to the default val- ues (factory settings). All modified settings are lost on resetting to the factory settings. You cannot undo this function. Required tools ●... -
Page 31: Shipping
► Comply with the instructions for safe distribution. Decontamination subject to charge Pfeiffer Vacuum decontaminates products not clearly declared "Free of contamination" at your expense. Ship product safely ► Do not ship microbiological, explosive or radioactively contaminated products. -
Page 32: Recycling And Disposal
● Help to reduce the wastage of natural resources. ● Prevent contamination. 10.1 General disposal information Pfeiffer Vacuum products contain materials that you must recycle. ► Dispose of our products according to the following: – Iron – Aluminium –... -
Page 33: Service Solutions By Pfeiffer Vacuum
We are always focused on perfecting our core competence – servicing of vacuum components. Once you have purchased a product from Pfeiffer Vacuum, our service is far from over. This is often exactly where service begins. Obviously, in proven Pfeiffer Vacuum quality. - Page 34 Service solutions by Pfeiffer Vacuum 5. Prepare the product for transport in accordance with the provisions in the contamination declaration. a) Neutralize the product with nitrogen or dry air. b) Seal all openings with blind flanges, so that they are airtight.
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Page 35: Accessories
ActiveLine on our website. 12.1 Accessory information Measurement cable Measurement cable in different lengths for connecting to a Pfeiffer Vacuum total pressure measuring and control unit Line connector (Hirschmann plug) Cable socket for fabrication of the application-specific connecting cable... -
Page 36: Technical Data And Dimensions
Tbl. 10: Conversion table: Units for gas throughput 13.2 Technical data Parameter Value Measuring range CMR 371 1 × 10 hPa (1 V) 1100 hPa (9.8 V) 1000 hPa (FS, 9 V) CMR 372 1 × 10 hPa (1 V) 110 hPa (9.8 V) -
Page 37: Tbl. 11: Measured And Pressure Values
Technical data and dimensions Parameter Value Temperature influence on zero point CMR 371 0.0025% FS/ °C CMR 372 CMR 373 CMR 374 CMR 375 0.005% FS/ °C Temperature influence on range 0.01% of measured value/ °C Resolution 0.003% FS Gauge calibration Button for zero point calibration Tbl. -
Page 38: Tbl. 12: Electrical Data
Technical data and dimensions Parameter Value Grounding concept Vacuum connection and signal earth Connected via 1 MΩ (volt- age difference < 18 V) Supply earth and signal earth routed separately for differ- ential measurement (10 Ω) Tbl. 12: Electrical data Parameter Value Internal volume... -
Page 39: Dimensions
Technical data and dimensions 13.3 Dimensions DN 16 ISO-KF DN 16 CF-R Ø ½" 8 VCR outer dia. internal thread Fig. 9: Dimensions Dimensions in mm 39/44... -
Page 40: Etl Certification
ETL LISTED The products CMR 371 – CMR 375 - conform to the UL standard UL 61010-1. - are certified to the CAN/CSA standard CAN/CSA C22.2 No. 61010-1. 3103457... -
Page 41: Ec Declaration Of Conformity
EC Declaration of Conformity This declaration of conformity has been issued under the sole responsibility of the manufac- turer. Declaration for product(s) of the type: Capacitive gauge CMR 371 CMR 372 CMR 373 CMR 374 CMR 375 We hereby declare that the listed product satisfies all relevant provisions of the following European Directives. -
Page 42: Declaration Of Conformity
EN IEC 61326-1:2021 EN IEC 63000:2018 The manufacturer's authorized representative in the United Kingdom and the authorized agent for compiling the technical documentation is Pfeiffer Vacuum Ltd, 16 Plover Close, In- terchange Park, MK169PS Newport Pagnell. Signature: Pfeiffer Vacuum GmbH Berliner Straße 43... - Page 43 43/44...
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