Pfeiffer Vacuum CCR 351 Operating Instructions Manual
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OPERATING INSTRUCTIONS
EN
Translation of the Original
CCR 351∣352∣353
Capacitive gauge

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Summary of Contents for Pfeiffer Vacuum CCR 351

  • Page 1 OPERATING INSTRUCTIONS Translation of the Original CCR 351∣352∣353 Capacitive gauge...
  • Page 2 Dear Customer, Thank you for choosing a Pfeiffer Vacuum product. Your new gauge is designed to support you in your individual application with maximum performance and without malfunctions. The name Pfeiffer Vacuum stands for high-quality vacuum technology, a comprehensive and complete range of top-quality products and first-class service.
  • Page 3: Table Of Contents

    Foreseeable improper use Responsibilities and warranty Owner requirements Personnel qualification 2.9.1 Ensuring personnel qualification 2.9.2 Personnel qualification for maintenance and repair 2.9.3 Advanced training with Pfeiffer Vacuum 2.10 Operator requirements Product description Function Identifying the product Scope of delivery Transport and storage...
  • Page 4 Table of contents 12.2 Technical data 12.3 Dimensions EC Declaration of Conformity UK Declaration of Conformity 4/36...
  • Page 5 List of tables List of tables Tbl. 1: Applicable documents Tbl. 2: Variants Tbl. 3: Abbreviations used Tbl. 4: Permissible ambient conditions Tbl. 5: Constants for converting measuring signal and pressure Tbl. 6: Recommended final pressure for zero point calibration Tbl.
  • Page 6 List of figures List of figures Fig. 1: Connection diagram Fig. 2: Relation between measuring signal and pressure Fig. 3: Zero point calibration with button Fig. 4: Dimensions 6/36...
  • Page 7: About This Manual

    Variants You can find the part number on the rating plate of the product. Pfeiffer Vacuum reserves the right to make technical changes without prior notification. The figures in this document are not to scale. Dimensions are in mm unless stated otherwise.
  • Page 8: Pictographs

    About this manual Individual action step A horizontal, solid triangle indicates the only step in an action. ► This is an individual action step. Sequence of multi-part action steps The numerical list indicates an action with multiple necessary steps. 1. Step 1 2.
  • Page 9: Trademark Proof

    About this manual Abbreviation Explanation Mean sea level Pressure Protective earth (earthed conductor) PELV Protective extra low voltage Measuring signal [V] (output voltage) Trademark of the Swagelok Company Tbl. 3: Abbreviations used 1.4 Trademark proof ● VCO ® is a trademark of the Swagelok Company. 9/36...
  • Page 10: Safety

    Safety instructions according to product life stages All safety instructions in this document are based on the results of a risk assessment. Pfeiffer Vacuum has taken into account all the relevant life stages of the product. Risks during installation DANGER Danger to life due to dangerous contact voltage Voltages above 30 V (AC) or 60 V (DC) are considered dangerous in accordance with EN 61010.
  • Page 11 ► Only operate the unit in a dry environment. ► Operate the unit away from fluids and sources of moisture. ► Do not switch on the unit if fluid has entered it. Instead contact Pfeiffer Vacuum Service. ► Always disconnect the power supply before cleaning the unit.
  • Page 12: Safety Precautions

    Safety Risks during disposal WARNING Health hazard through poisoning from toxic contaminated components or devices Toxic process media result in contamination of devices or parts of them. During maintenance work, there is a risk to health from contact with these poisonous substances. Illegal disposal of toxic sub- stances causes environmental damage.
  • Page 13: Proper Use

    The gauge is used for vacuum measurement of gases within its defined measuring range. Use the product according to its intended purpose ► Operate the gauge with a Pfeiffer Vacuum total pressure measuring and control unit or with an evaluation unit provided by the customer.
  • Page 14: Personnel Qualification

    ─ Customer with Pfeiffer Vacuum service training ─ Pfeiffer Vacuum service technician 2.9.3 Advanced training with Pfeiffer Vacuum For optimal and trouble-free use of this product, Pfeiffer Vacuum offers a comprehensive range of courses and technical trainings. For more information, please contact Pfeiffer Vacuum technical training.
  • Page 15: Operator Requirements

    4. Comply with the limits of use. 5. Observe the technical data. 6. Please contact the Pfeiffer Vacuum Service Center if your questions on operation or maintenance of the product are not answered in these operating instructions. – You can find information in the Pfeiffer Vacuum service area.
  • Page 16: Product Description

    You will need all the data from the rating plate to safely identify the product when communicating with Pfeiffer Vacuum. ► To ensure clear identification of the product when communicating with Pfeiffer Vacuum, always keep all of the information on the rating plate to hand.
  • Page 17: Transport And Storage

    Transport and storage 4 Transport and storage 4.1 Transporting the product NOTICE Damage caused by incorrect transport Transport in unsuitable packaging or failure to install all transport locks can result in damage to the product. ► Comply with the instructions for safe transport. Packing We recommend keeping the transport packaging and original protective cover.
  • Page 18: Installation

    Installation 5 Installation 5.1 Establishing vacuum connection DANGER Danger to life due to electric shock An improperly grounded product is potentially fatal in the event of a fault. ► Connect the product galvanically with the earthed vacuum chamber. ► Ensure that the connection complies with the requirements of a protective connection according to EN 61010.
  • Page 19: Establishing Electric Connection

    ● Requirements of the earthed protective extra-low voltage (PELV) ● Limited power source (LPS) Class 2 ► Secure the line to the product. – Pfeiffer Vacuum measuring and control equipment complies with this requirement. Required tool ● Torque wrench (≤ 0.4 Nm) Required materials ●...
  • Page 20 2. Tighten the locking screw on the D-sub cable socket. – Tightening torque: ≤ 0.4 Nm 3. Connect the gauge to a Pfeiffer Vacuum total pressure measuring and control unit or an evalua- tion unit provided by the customer. 20/36...
  • Page 21: Operation

    Operation 6 Operation After switching on the supply voltage, the gauge is ready for operation. The measuring signal is inde- pendent of the gas type. Recommendations ► On initial operation, perform zero point calibration. ► Allow a start-up time of at least 1 minute for general pressure measurements within the specifica- tions.
  • Page 22: Dismantling

    Dismantling 7 Dismantling DANGER Danger to life due to electric shock An improperly grounded product is potentially fatal in the event of a fault. ► Connect the product galvanically with the earthed vacuum chamber. ► Ensure that the connection complies with the requirements of a protective connection according to EN 61010.
  • Page 23: Maintenance

    ► Only operate the unit in a dry environment. ► Operate the unit away from fluids and sources of moisture. ► Do not switch on the unit if fluid has entered it. Instead contact Pfeiffer Vacuum Service. ► Always disconnect the power supply before cleaning the unit.
  • Page 24: Calibrating Gauge

    ► Operate the unit away from fluids and sources of moisture. ► Take special precautions if there is a risk of dripping water. ► Do not switch on the unit if fluid has penetrated into it, instead contact the Pfeiffer Vacuum Serv- ice Center.
  • Page 25 Maintenance Required tools ● Stylus (max. Ø 1.1 mm) Fig. 3: Zero point calibration with button Preparing for calibration 1. Ensure the same installation and ambient conditions as those applicable for normal use. 2. Check the filter for contamination as required. 3.
  • Page 26: Shipping

    ► Comply with the instructions for safe distribution. Decontamination subject to charge Pfeiffer Vacuum decontaminates products not clearly declared "Free of contamination" at your expense. Ship product safely ► Do not ship microbiological, explosive or radioactively contaminated products.
  • Page 27: Recycling And Disposal

    ● Help to reduce the wastage of natural resources. ● Prevent contamination. 10.1 General disposal information Pfeiffer Vacuum products contain materials that you must recycle. ► Dispose of our products according to the following: – Iron – Aluminium –...
  • Page 28: Service Solutions By Pfeiffer Vacuum

    We are always focused on perfecting our core competence – servicing of vacuum components. Once you have purchased a product from Pfeiffer Vacuum, our service is far from over. This is often exactly where service begins. Obviously, in proven Pfeiffer Vacuum quality.
  • Page 29 Service solutions by Pfeiffer Vacuum 5. Prepare the product for transport in accordance with the provisions in the contamination declaration. a) Neutralize the product with nitrogen or dry air. b) Seal all openings with blind flanges, so that they are airtight.
  • Page 30: Technical Data And Dimensions

    0.76 atm cm Tbl. 8: Conversion table: Units for gas throughput 12.2 Technical data Parameter Value Measuring range CCR 351 1 × 10 Torr/1000 Torr (FS) CCR 352 1 × 10 Torr/100 Torr (FS) CCR 353 1 × 10 Torr/10 Torr (FS) Maximum pressure (absolute) ≥500 Torr/mbar (FS)
  • Page 31: Tbl. 10: Electrical Data

    0 – +70 °C Compensated temperature range +10 – +50 °C The gauge is protected against polarity reversal of the supply voltage. Pfeiffer Vacuum measuring and control units comply with this requirement. Larger conductor cross sections are required for longer cables. 31/36...
  • Page 32: Tbl. 13: Temperatures

    Technical data and dimensions Parameter Value Bake out (not operational) ≤ 110 °C at flange Storage -20 – +85 °C Tbl. 13: Temperatures Parameter Value Flange, tube Stainless steel AISI 316L Sensor, feedthrough Aluminum oxide ceramic (Al ≥ 99.5%) Tbl. 14: Substances in contact with media 12.3 Dimensions 28.3...
  • Page 33 This declaration of conformity has been issued under the sole responsibility of the manufac- turer. Declaration for product(s) of the type: Capacitive gauge CCR 351 CCR 352 CCR 353 We hereby declare that the listed product satisfies all relevant provisions of the following European Directives.
  • Page 34 EN IEC 61326-1:2021 EN IEC 63000:2018 The manufacturer's authorized representative in the United Kingdom and the authorized agent for compiling the technical documentation is Pfeiffer Vacuum Ltd, 16 Plover Close, In- terchange Park, MK169PS Newport Pagnell. Signature: Pfeiffer Vacuum GmbH Berliner Straße 43...
  • Page 35 35/36...

This manual is also suitable for:

Ccr 352Ccr 353

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