MKS 910-11000-0016 Quick Start Manual

P/N: 100017557
REV: A, June 2012
Connector: 15 pin SubD
Output: 33 (685 emulation 1VDC/decade)
RoHS Compliant
Measuring range (N
MP Accuracy
(1)
PZa Accuracy
MP Repeatability
Supply Voltage:
Power consumption:
Fuse (thermal recoverable):
Analog output: (100 Ω impedance):
Analog output resolution:
Materials exposed to vacuum:
Internal volume:
Flange and Housing material:
Weight (910 with KF16):
Climate category:
Operating temperature:
Bakeout temperature (Power off):
(1) Refer to Operation and Installation manual for Piezo accuracy details.
(2) Accuracy and repeatability values are typical values measured in Nitrogen atmosphere at
ambient temperature after zero adjustment.
and Air):
2
-4
5×10 to 1×10
-3
1×10 to 100 Torr:
100 to atm.
10 to 1000 Torr:
1 to 10 torr:
(2) -3
1×10 to 100 Torr:
KF16 flange
MKS Instruments HPS Products
www.mksinst.com
-5
1×10
-3
Torr: ± 10%
± 5%
± 25%
± 0.75 % of reading
± 1 %
± 2%
9 – 30 VDC
< 1.2 Watt
200 mA
1 V/decade (1-9 VDC)
16 bit
304 Stainless steel, Silicon
SiO , Si
2
Low outgassing Epoxy resin
2.8 cm
Stainless steel 304
170 g
IP40
0 to 40
o
85 C
to 1500 Torr
of reading
of reading
of reading
of reading
of reading
N , gold, Viton
3 4
3
o
C
®