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MKS 910-11000-0016 Quick Start Manual

MKS 910-11000-0016 Quick Start Manual

Vacuum transducer

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P/N: 100017557
REV: A, June 2012
Connector: 15 pin SubD
Output: 33 (685 emulation 1VDC/decade)
RoHS Compliant
Measuring range (N
MP Accuracy
(1)
PZa Accuracy
MP Repeatability
Supply Voltage:
Power consumption:
Fuse (thermal recoverable):
Analog output: (100 Ω impedance):
Analog output resolution:
Materials exposed to vacuum:
Internal volume:
Flange and Housing material:
Weight (910 with KF16):
Climate category:
Operating temperature:
Bakeout temperature (Power off):
(1) Refer to Operation and Installation manual for Piezo accuracy details.
(2) Accuracy and repeatability values are typical values measured in Nitrogen atmosphere at
ambient temperature after zero adjustment.
and Air):
2
-4
5×10
to 1×10
-3
1×10
to 100 Torr:
100 to atm.
10 to 1000 Torr:
1 to 10 torr:
(2)
-3
1×10
to 100 Torr:
KF16 flange
MKS Instruments HPS Products
www.mksinst.com
-5
1×10
-3
Torr:
± 10%
± 5%
± 25%
± 0.75 % of reading
± 1 %
± 2%
9 – 30 VDC
< 1.2 Watt
200 mA
1 V/decade (1-9 VDC)
16 bit
304 Stainless steel, Silicon
SiO
, Si
2
Low outgassing Epoxy resin
2.8 cm
Stainless steel 304
170 g
IP40
0 to 40
o
85
C
to 1500 Torr
of reading
of reading
of reading
of reading
of reading
N
, gold, Viton
3
4
3
o
C
®

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Summary of Contents for MKS 910-11000-0016

  • Page 1 0 to 40 Bakeout temperature (Power off): (1) Refer to Operation and Installation manual for Piezo accuracy details. (2) Accuracy and repeatability values are typical values measured in Nitrogen atmosphere at ambient temperature after zero adjustment. MKS Instruments HPS Products www.mksinst.com...
  • Page 2 1 pcs. Short form manual (P/N: 100017557) 1 pcs. Documentation & Software DVD (P/N: 100017096) If any items are missing contact MKS customer service. This short form manual provides the basic information for simple use and setup. For system integration and advanced setup refer to Operation and Installation manual and demo software on the supplied Documentation &...
  • Page 3 Use a cable with a female 9 pin D-sub connector with strain reliefs to ensure proper electrical connection and to reduce stress on the connectors.  Ensure a low impedance electrical connection between the 910 transducer body and the grounded vacuum system to shield the sensor from external electromagnetic sources.
  • Page 4 Refer to Operation and installation manual for gas dependency data. US & ASIA: EUROPE: MKS Instruments, Inc., HPS™ MKS Denmark ApS Products, Inc., Ndr. Strandvej 119G 5330 Sterling Drive, Boulder, CO...

This manual is also suitable for:

100017557