Absolute and differential pressure transducer (52 pages)
Summary of Contents for MKS 910-11000-0016
Page 1
0 to 40 Bakeout temperature (Power off): (1) Refer to Operation and Installation manual for Piezo accuracy details. (2) Accuracy and repeatability values are typical values measured in Nitrogen atmosphere at ambient temperature after zero adjustment. MKS Instruments HPS Products www.mksinst.com...
Page 2
1 pcs. Short form manual (P/N: 100017557) 1 pcs. Documentation & Software DVD (P/N: 100017096) If any items are missing contact MKS customer service. This short form manual provides the basic information for simple use and setup. For system integration and advanced setup refer to Operation and Installation manual and demo software on the supplied Documentation &...
Page 3
Use a cable with a female 9 pin D-sub connector with strain reliefs to ensure proper electrical connection and to reduce stress on the connectors. Ensure a low impedance electrical connection between the 910 transducer body and the grounded vacuum system to shield the sensor from external electromagnetic sources.
Page 4
Refer to Operation and installation manual for gas dependency data. US & ASIA: EUROPE: MKS Instruments, Inc., HPS™ MKS Denmark ApS Products, Inc., Ndr. Strandvej 119G 5330 Sterling Drive, Boulder, CO...
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