MKS 925 MicroPirani Short Form Manual

P/N: 100017430
Short form manual
REV: A, December 2009
Product: 925-x1590
I/O connector: 6 pin Hirschmann
Output: 5 (PKR251)
RoHS Compliant
Measuring range (N
(1)
Accuracy (N )
2
(1)
Repeatability (N
Supply Voltage:
Power consumption:
Fuse (thermal recoverable):
Analog output 1: (100 Ω impedance):
Analog output 1 resolution:
Materials exposed to vacuum:
Internal volume:
Housing material:
Weight (925 with KF16):
Operating temperature:
Bakeout temperature (Power off):
(1) Accuracy and repeatability values are typical values measure in Nitrogen atmosphere at
ambient temperature after zero adjustment.
(2) Transducer without Viton seal is available for use in UHV applications.
and Air):
2
-4
5×10 to 1x10
-3
1×10 to 100 Torr:
100 to Atm.:
-3
): 1×10 to 100 Torr
2
KF16 flange
KF16 long flange
KF25 flange
VCR4 flange
VCR8 flange
MKS Instruments HPS Products
www.mksinst.com
™
-5
1×10
-3
Torr: ±10% of reading
± 5%
± 25% of reading
± 2%
9 – 30 VDC
< 1.2 Watt
200 mA
3.875 – 8.675 VDC
16 bit
304 Stainless steel, Silicon
SiO , Si
2
Low out gassing Epoxy resin
2.80 cm
6.63 cm
3.55 cm
1.84 cm
3.06 cm
Stainless steel 304
170g
0 to 40
o
85 C
Torr to Atmosphere
of reading
of reading
N , gold, Viton
3 4
3
3
3
3
3
o
C
® (2)