MKS 901P Short Form Manual

P/N: 100017411
Short form manual
REV: A, December 2009
Product: 901P-x1090-0072
Connector: 6 pin Hirschmann
Output: 19 (TPR280,TPR265)
RoHS Compliant
Measuring range (N
MP Accuracy
(1)
PZd Accuracy
MP Repeatability
Supply Voltage:
Power consumption:
Fuse (thermal recoverable):
Analog output 1: (100 Ω impedance):
Analog output 1 resolution:
Materials exposed to vacuum:
Internal volume:
Flange and Housing material:
Weight (901P with KF16):
Climate category:
Operating temperature:
Bakeout temperature (Power off):
(1) Refer to Operation and Installation manual for Piezo accuracy details.
(2) Accuracy and repeatability values are typical values measured in Nitrogen atmosphere at
ambient temperature after zero adjustment.
and Air):
2
-4
5×10 to 1×10
-3
1×10 to 100 Torr:
100 to Atm.:
-760 to +100 Torr:
(2) -3
1×10 to 100 Torr:
KF16 flange
KF16 long flange
KF25 flange
1/8" NPT , VCR8
VCR4 flange
MKS Instruments HPS Products
www.mksinst.com
-5
1×10
-3
Torr: ± 10%
± 5%
± 25%
± 1-10 % of reading
± 2%
9 – 30 VDC
< 1.2 Watt
200 mA
2.199 – 8.625 VDC
16 bit
304 Stainless steel, Silicon
SiO , Si
2
Low outgassing Epoxy resin
2.8 cm
6.7 cm
3.6 cm
3.1 cm
1.9 cm
Stainless steel 304
170 g
IP40
0 to 40
o
85 C
to 1500 Torr
of reading
of reading
of reading
of reading
N , gold, Viton
3 4
3
3
3
3
3
o
C
®