MKS MicroPirani 925 Series Operation And Installation Manual
  1. Manuals
  2. Brands
  3. MKS Manuals
  4. Transducer
  5. MicroPirani 925 Series
  6. Operation and installation manual

MKS MicroPirani 925 Series Operation And Installation Manual

Vacuum pressure transducer
Hide thumbs Also See for MicroPirani 925 Series:
Table of Contents

Advertisement

Quick Links

925 MicroPirani™
Vacuum Pressure Transducer
Models with RS-232/RS-485,
EtherCAT
, or Digital Display
®
Operation and Installation Manual
P/N: 100017129
925 MicroPirani™ Transducer
Operation and Installation Manual
Revision: K, February 2020
925 MicroPirani™
1
Operation Manual

Advertisement

Table of Contents
loading
Need help?

Need help?

Do you have a question about the MicroPirani 925 Series and is the answer not in the manual?

Questions and answers

Subscribe to Our Youtube Channel

Related Manuals for MKS MicroPirani 925 Series

Summary of Contents for MKS MicroPirani 925 Series

  • Page 1 925 MicroPirani™ Vacuum Pressure Transducer Models with RS-232/RS-485, EtherCAT , or Digital Display ® Operation and Installation Manual P/N: 100017129 925 MicroPirani™ Transducer Operation and Installation Manual Revision: K, February 2020 925 MicroPirani™ Operation Manual...

  • Page 2: Warranty Information

    The MKS Instruments, Inc. general terms and conditions of sale provide the complete and exclusive warranty for MKS products. This document is located on our web site at www.mksinst.com, or may be obtained by a contacting an MKS customer service representative.

  • Page 3: Table Of Contents

    This document contains confidential proprietary information belonging to MKS Instruments, Inc. This information is not for publication and has been provided to MKS on the condition that it not be copied, reproduced or disclosed, either wholly or in part, to third parties without the expressed written consent of MKS Instruments, Inc.

  • Page 4: Symbols Used

    Service and Repair on page 55. Do not install substituted parts or perform any unauthorized modification to the instrument. Return the instrument to an MKS Calibration and Service Center for service and repair to ensure all of the safety features are maintained.

  • Page 5: Unpacking

    925 Transducer 100017128 Quick Start Guide If any items are missing, call MKS Customer Service at +1-833-986-1686 or your local MKS sales office or distributor. Part Number The 925 MicroPirani part number system has 5 digits that identify flange, communication interface, analog output type, I/O connector and sensor sealing type.

  • Page 6: Description

    Description The 925 MicroPirani™ vacuum transducer offers a wide measuring range from 1×10 Torr to atmosphere and is based on measurement of thermal conductivity. It can be used in a variety of applications as standalone unit or with the PDR900 display and controller unit. (not available in EtherCAT units) The transducer has RS-232 or RS-485 digital communication interface for setup of transducer parameters and to provide real time pressure measurement.

  • Page 7: 925 Functions

    925 Functions User Switch (RS-232/RS-485 models only) The user switch has the following functions: 1. Vacuum Zero adjustment (VAC! Command) 2. Atmospheric adjustment (ATM! Command) 3. Transducer firmware upgrade mode If the user switch is activated by accident and vacuum Zero or Atmospheric adjustment is executed ...

  • Page 8: Transducer Installation (Mechanical)

    Transducer installation (mechanical) Do not use or install the 925 transducer where the following conditions occur: - Temperatures lower than 0 C or higher than 40 - Corrosive or explosive gases - Direct sunlight or other heat sources Process compatibility The 925 transducer is intended for use in relatively clean environments.

  • Page 9: Transducer Installation (Electrical)

    Transducer installation (electrical) The 925 is available with different input/output connectors. Use a cable with strain relief to ensure proper electrical connection and to reduce stress on the connectors. Ensure a low impedance electrical connection between the 925 transducer body and the ...
  • Page 10 Input/Output Wiring Connect braided cable to the metal hoods at both ends of the cable with the end for the power supply connected to Earth ground. 925 I/O Connector (9 pin) PIN Description Relay, Normally Open Relay, Normally Closed Power + (9-30VDC) Power return - Analog Output + Relay, Common...
  • Page 11 EtherCAT I/O Connectors 925 I/O Connector PIN Description (6 pin Hirschmann) Identification resistor (3K) Analog Output + Analog Output – Power + (9-30VDC) Power return - Chassis 925 I/O Connector PIN Description (8 pin RJ45/FCC68) Power + (9-30VDC) Power return - Analog Output + Identification resistor Analog Output -...

  • Page 12: Serial User Interface

    Serial user interface The standard 925 is supplied with RS-232 or RS-485 user interface. The user interface allows change of transducer parameters such as set point settings and calibration. The serial interface uses the following format: 8 data bits, 1 stop bit and no parity bit. RS-232 user interface The 925 is DCE (Data Communication Equipment) and can be connected to DTE (Data Terminal Equipment), typically a...

  • Page 13: Communication Protocol

    To the right is illustrated the Windows communication port properties for communicating with transducer factory default settings. MKS also offers communication software examples that can be downloaded at: www.mksinst.com/vtsw/ In OEM applications transducer communication software routines are normally integrated with other system control software.
  • Page 14 The transducer will reply in the current baud rate and then change to the new value. Addressing (not available in EtherCAT units) The transducer uses an addressable communication protocol that allows multiple MKS 900 Series transducer devices to be connected in a RS-485 network. The address is required in both RS-232 and RS-485 communication.

  • Page 15: Setpoint Relays

    (not available in EtherCAT units) Setpoint relays The 925 has up to 3 mechanical relays that can be used to control external process equipment. The relay has closing and breaking contacts and the contacts are rated 30 VDC, 1A, resistive load. If the transducer is supplied without setpoint relays, the setpoint commands can still be accessed.
  • Page 16 When using the setpoint relay to control process equipment always take appropriate precautions to prevent system damage in case of transducer power failure. The NC contact will be closed in case of transducer power failure. If the transducer is supplied as a special version (p/n: 925-xxxxx-xxxx) with pre-configured ...

  • Page 17: Integrated Touch Display (Not Available In Ethercat Units)

    Setpoint safety delay (not available in EtherCAT units) The setpoint safety delay function requires 5 continuously measurements that exceeds setpoint value before the relay is tripped. This feature prevents false trigging of the setpoint relay due to noise. If fast setpoint response is required the setpoint safety delay can be disabled.
  • Page 18 The following table shows the different menus and options available: Display-screen Information Start-up MKS logo and transducer model Home The Home screen shows the current pressure, the transducer model, the status of the setpoints, the triggering direction of each setpoint and shows if an alarm is enabled.
  • Page 19 Pressure output The 925 transducer can provide pressure measurement output as an analog voltage value or RS-232/RS-485 digital value. The digital value is 3 digits scientific notation for PR1 reading and 4 digits for PR4 reading. NOTE: For EtherCAT units, see the EtherCAT Communication Protocol instruction manual #20003335. Pressure request: Query: @253PR1?;FF...

  • Page 20: Calibration And Adjustment

    Calibration and adjustment The 925 is factory calibrated when delivered and in most applications further calibration is not required. If the sensor element has been contaminated or damaged by process gases, adjustment of zero and full scale can be executed to compensate for measurement errors. ...
  • Page 21 If the transducer is reading 8.00E-5 Torr at an actual pressure of 1.00E-5 Torr, the offset error is +7.00E-5 or 700% error of actual pressure. At two decades higher pressure of 1.00E-3 Torr the offset error is a factor 100 lower when measured of the actual value, so the 7.00E-5 Torr offset will cause a 7% error at 1.00E-3 Torr.

  • Page 22: Factory Defaults

    AO1! × Analog out 2: AO2! × (1) If the transducer is delivered with other analog output than standard mks (part number specified), then the factory default value will be specified by the specials part number. Calibration setup: Description Command...

  • Page 23: Transducer Lock Function (Not Available On Ethercat Units)

    This option is defined in the special settings. If delivered with factory lock, the transducer settings can only be changed by returning the transducer to MKS. User Switch Command (not available on EtherCAT units) To prevent accidental execution of zero and atmospheric adjustments the User Switch function can be disabled.

  • Page 24: Status Query Commands

    Status Query Commands (For EtherCAT, see the EtherCAT Communication Protocol Manual #20003335) Device Type - DT Specifies transducer device type name: Query: @253DT?;FF Query reply: @253ACKMICROPIRANI;FF Firmware Version - FV Specifies transducer firmware version: Query: @253FV?;FF Query reply: @253ACK1.31;FF Hardware Version - HV Specifies transducer hardware version: Query: @253HV?;FF...

  • Page 25: Analog Output

    Pascal Pascal The standard MKS analog output provides always 1VDC/decade. If the transducer pressure unit is changed from Torr to Pascal or mbar the analog output scaling will change as well, so it represents 1VDC/decade Torr or 1VDC/decade mbar or Pa.
  • Page 26 9 = MKS Moducell 325 (x3) 10 = MKS Baratron 0.1 Torr (0-10VDC) 11 = MKS Baratron 1 Torr (0-10 VDC) / Hasting 2002OBE, Channel 2 12 = MKS Baratron 10 Torr (0-10VDC) 13 = MKS Baratron 100 Torr (0-10VDC)
  • Page 27 The 925 is available with dual analog output which can be used to provide an alternative output for amplification of range or emulate another transducer type while still using the MKS standard output. This feature is a hardware option. Refer to part number specifications on page 5.
  • Page 28 Analog Output calibration = 1 (Edwards APG-L emulation) The APG-L emulation provides a strongly non-linear output with very poor resolution in the low range and virtually no signal from 100 Torr to atmosphere. Torr mbar Pascal Vout 1.90E-5 2.53E-5 2.53E-3 1.99 3.00E-5 4.00E-5...
  • Page 29 Analog Output calibration = 3 (Edwards WRG Emulation) The WRG emulation covers a wider measuring range than supported by the 925 range. = 10 (1.5× Vout -12.125) = (log )+12.125) / 1.5 Torr Torr = 10 = (log )+12) / 1.5 (1.5×...
  • Page 30 Analog Output calibration = 5 (Inficon MPG400 / Pfeiffer PKR251 Emulation) = 10 = log ) ×0.6+6.875 ((Vout -6.875)/0.6) Torr Torr = 10 ((Vout -6.8)/0.6) = log ) ×0.6+6.8 mbar mbar = 10 = log ) ×0.6+5.6 ((Vout -5.6)/0.6) Pascal Pascal Torr mbar...
  • Page 31 Analog Output calibration = 7 (MKS 275 Emulation) The MKS 275 emulation provides a strongly non-linear output with very poor resolution in the low range and close to atmospheric pressure. Torr mbar Pascal Vout 1.00E-05 1.33E-05 1.33E-03 0.372 1.00E-04 1.33E-04 1.33E-02...
  • Page 32 1.07E+05 3.2398 Analog out calibration = 9 (MKS Moducell 325, amplified 3 times) The Moducell x3 emulation is in curve form identical with the standard Moducell, however to provide better signal resolution the signal is amplified by a factor three.
  • Page 33 Analog out calibration = 10 (MKS Baratron 0.1 Torr) The 0.1 Torr Baratron emulation provides a signal directly proportional with pressure with a full scale reading of 10 VDC at 0.1 Torr. Torr mbar Pascal Vout 1.00E-3 1.33E-3 1.33E-1 0.100 5.00E-3...
  • Page 34 Analog out calibration = 13 (MKS Baratron 100 Torr) The 100 Torr Baratron emulation provides a signal directly proportional with pressure with a full scale reading of 10 VDC at 100 Torr. Torr mbar Pascal Vout 1.33 1.333E+2 0.100 6.66 6.66E+2...
  • Page 35 Analog out calibration = 16 (Edwards AIM-S /-SL) The Edwards AIM-S / SL emulation provides a strongly non-linear output. The 925 provides only values above 1.00E-5 Torr. Torr mbar Pascal Vout 1.00E-8 1.33E-8 1.33E-6 1.80E-8 2.40E-8 2.40E-6 4.40E-8 5.87E-8 5.87E-6 6.10E-8 8.13E-8 8.13E-6...
  • Page 36 Analog out calibration = 18 (Pfeiffer IKR251) The Pfeiffer IKR251 emulation provides a log linear output. The 925 provides only values above 1.00E-5 Torr. Torr mbar Pascal Vout 5.00E-9 6.67E-9 6.67E-7 2.3240 1.00E-8 1.33E-8 1.33E-6 2.6250 5.00E-8 6.67E-8 6.67E-6 3.3240 1.00E-7 1.33E-7 1.33E-5...
  • Page 37 Analog out calibration = 20 (OBE Special) The OBE special emulation provides a linear output from 1 to 1000 Torr. Torr mbar Pascal Vout 1.33E-01 1.33E+01 1.33E+00 1.33E+02 2.67E+00 2.67E+02 5.005 5.33E+00 5.33E+02 5.015 6.67E+00 6.67E+02 5.02 1.33E+01 1.33E+03 5.045 3.33E+01 3.33E+03 5.12...
  • Page 38 925 MicroPirani™ Operation Manual...
  • Page 39 Analog Output calibration = 23 (MKS 275 Emulation 9 VDC FS) The MKS 275 with 9 VDC full scale emulation provides a strongly non-linear output with very poor resolution in the low range and close to atmospheric pressure. Torr mbar...
  • Page 40 9.99 Analog Output calibration = 25 (MKS 275 Emulation 5.6 VDC FS) The MKS 275 emulation with 5.6 VDC full scale provides a strongly non-linear output with very poor resolution in the low range and close to atmospheric pressure. Torr...
  • Page 41 Analog Output calibration = 26 (Edwards APG100-LC) The APG100-L emulation provides a strongly none linear output with limited resolution in the low range and close to atmosphere. Torr mbar Pascal Vout 7.50E-06 1.00E-05 1.00E-03 1.70E-04 2.27E-04 2.27E-02 3.75E-04 5.00E-04 5.00E-02 8.10E-04 1.08E-03 1.08E-01...
  • Page 42 Analog Output calibration = 27 (Edwards APG100-M) The APG100-M emulation provides a strongly none linear output with limited resolution in the low range and close to atmosphere Torr mbar Pascal Vout 7.50E-05 1.00E-04 1.00E-02 1.73E-04 2.31E-04 2.31E-02 2.05 4.66E-04 6.21E-04 6.21E-02 1.02E-03 1.36E-03...
  • Page 43 Analog Output calibration = 28 (MKS 907) Torr mbar Pascal Vout 7.50E-04 1.00E-03 1.00E-01 0.387 1.50E-03 2.00E-03 2.00E-01 0.397 3.00E-03 4.00E-03 4.00E-01 0.418 4.50E-03 6.00E-03 6.00E-01 0.437 6.00E-03 8.00E-03 8.00E-01 0.456 7.50E-03 1.00E-02 1.00E+00 0.473 1.50E-02 2.00E-02 2.00E+00 0.551 2.25E-02 3.00E-02...
  • Page 44 Analog Output calibration = 29 (K6080) Torr mbar Pascal Vout 7.50E-06 1.00E-05 1.00E-03 3.75E-05 5.00E-05 5.00E-03 7.50E-05 1.00E-04 1.00E-02 3.00E-04 4.00E-04 4.00E-02 6.00E-04 8.00E-04 8.00E-02 7.50E-04 1.00E-03 1.00E-01 0.41 3.00E-03 4.00E-03 4.00E-01 0.48 3.75E-03 5.00E-03 5.00E-01 6.75E-03 9.00E-03 9.00E-01 0.55 1.50E-02 2.00E-02 2.00E+00...
  • Page 45 5.25E-01 7.00E-01 7.00E+01 8.75 7.50E-01 1.00E+00 1.00E+02 1.50E+00 2.00E+00 2.00E+02 2.25E+00 3.00E+00 3.00E+02 Analog Output calibration = 33 (MKS 685) P = 10 (Vout – 4) = 4 + log Torr mbar Pascal Vout 1.00E-05 1.33E-05 1.33E-03 1.00 1.00E-04 1.33E-04 1.33E-02...

  • Page 46: Micropirani Gas Dependence

    MicroPirani gas dependence The 925 MicroPirani is based on measurement of thermal conductivity and consequently its reading depends on gas and gas concentration. The 925 has calibration curves for a number of common gases. For gas setup refer to gas calibration beginning on page 20. The 925 is per factory default calibrated for Nitrogen gas and below is showed the 925 Nitrogen reading in different gas types.
  • Page 47 925 MicroPirani™ Operation Manual...
  • Page 48 Argon gas dependence Hydrogen gas dependence 925 MicroPirani™ Operation Manual...

  • Page 49: Query Command List

    Setpoint safety delay Transducer information Command Response Explanation @xxxMD?;FF @xxxACK925;FF Model number (925) @xxxDT?;FF @xxxACKMicroPirani;FF Device type name (MicroPirani) @xxxMF?;FF @xxxACKMKS;FF Manufacturer name (MKS) @xxxHV?;FF @xxxACKA;FF Hardware version @xxxFV?;FF @xxxACK1.31;FF Firmware version @xxxSN?;FF @xxxACK11350123456;FF Serial number @xxxSW?;FF @xxxACKON;FF Switch enable @xxxTIM?;FF...

  • Page 50: Setup And Configuration Command List

    Setup and configuration command list (For EtherCAT, see the EtherCAT Communication Protocol Manual #20003335) Setpoint setup and configuration Command Response Explanation @xxxSP1!2.00E+1;FF @xxxACK2.00E+1;FF Setpoint 1-3 switch value. @xxxSP2!2.00E+1;FF @xxxSP3!2.00E+1;FF @xxxSH1!5.00E+1;FF @xxxACK5.00E+1;FF Setpoint 1-3 hysteresis switch value. @xxxSH2!5.00E+1;FF @xxxSH3!5.00E+1;FF @xxxEN1!ON;FF @xxxACKON;FF Setpoint 1-3 enable status (ON or OFF) @xxxEN2!ON;FF @xxxEN3!ON;FF...

  • Page 51: Firmware Upgrades (Rs-232 Only)

    5. Run the 900 Series firmware download software and start download  Transducers with RS-485 interface cannot be firmware upgraded by the user. Transducers with EtherCAT interface can be upgraded; contact MKS Customer Service for details. 925 MicroPirani™ Operation Manual...

  • Page 52: Faq

    FAQ (Frequently Asked Questions Applications Q: Can the transducer and sensor element continuously withstand vibrations from mechanical fore-pump. A: Yes – The MEMS MicroPirani sensor element can withstand continuously vibrations. Q: Is the transducer compatible with fluorine gases? A: No – The 925 is not intended for use in aggressive environments, like semiconductor etch applications, Q: When the transducer is pumped down and isolated by closing a valve the pressure is increasing, Is the transducer leaking? A: Not likely - When a confined space is evacuated and the pumping is stopped the pressure will rise because of...
  • Page 53 Q: Reverse voltage has been connected to power supply input. Is the transducer damaged? A: Not likely – The transducer power supply circuit has reverse voltage and over voltage protection however. MKS cannot guarantee that the transducer will not be damaged.

  • Page 54: Troubleshooting

    Troubleshooting Symptom Possible Cause/Remedy No digital communication Check electrical connections RS-232/RS-485 units (3 wires from transducer to communication equipment) Transducer and communication equipment baud rate matches Use of incorrect transducer address. Try address 254 Attention characters missing (@) Termination characters missing (;FF) NAK180 is received when The transducer setup is locked.

  • Page 55: Service And Repair

    Transducers with integrated display (P/N: 901P-xxxx4 and 901P-xxxx6) can be repaired ONLY be an MKS service technician; contact MKS Customer Service for details. Transducers with an EtherCAT sensor can be repaired ONLY be an MKS service technician; contact MKS Customer Service for details.
  • Page 56 6. Remove the top circuit board (2). 7. Mount the top circuit board (2) on the new 925 Sensor repair kit flange and make sure the printed circuit board alignment identifications match on the two boards. 8. Carefully assemble the enclosure (3) and make sure the mounting tabs (1) click out. 9.

  • Page 57: Specifications

    ± 2% of reading Supply Voltage: 9 – 30 VDC Power consumption: < 1.2 Watt Fuse (thermal recoverable): 200 mA Analog output (mks standard): 1-9 VDC Analog output 1 resolution: 16 bit Analog output 2 resolution: (N/A EtherCAT) 12 bit Analog output impedance: 100 Ω...
  • Page 58 925 MicroPirani™ Operation Manual...

  • Page 59: 925 Transducer Dimensions

    925 Transducer Dimensions 972B Transducer Standard Model Dimensions 972B Transducer Digital Display Model Dimensions 925 MicroPirani™ Operation Manual...
  • Page 60 972B Transducer EtherCAT Model Dimensions 925 MicroPirani™ Operation Manual...

  • Page 61: Accessories And Replacement Part Numbers

    Accessories and replacement part numbers PDR900 controller Part number Description Interface PDR900-12-EU PDR900 Controller EU schuko power cable PDR900-12-US PDR900 Controller US power cable PDR900-12-UK PDR900 Controller UK power cable PDR900-12-JP PDR900 Controller JP power cable, mbar / Pascal unit PDR900 Transducer Cables for 925 (9 pin sub D) For transducer part number: 925-x100x, 925-x101x Part number...
  • Page 62 PDR 900 Display and power supply (N/A EtherCAT) • Plug and play readout for 900 Series transducers • The easy way for setup and configuration • Data logger tool for data analysing See m or e on : w ww .m k s i n st. co m /p d r 90 0 925 DualTrans transducer with integrated display (N/A EtherCAT) •...

  • Page 63: Index

    Index Accessories and replacement part numbers ... 62 Model ............... 24 Accuracy ..............56 Moducell 325 ............32 Accuracy and repeatability ........20 Addressing ............... 14 NAK Code ..............13 Analog output ............25 NAK180 ............16, 23, 53 Applications ..............6 Operating temperature ..........
  • Page 64 925 MicroPirani™ Operation Manual...
  • Page 65 925 MicroPirani™ Vacuum Pressure Transducer Models with RS-232/RS-485, EtherCAT , or Digital Display ® Operation and Installation Manual P/N: 100017129 925 MicroPirani™ Transducer Operation and Installation Manual Revision: K, February 2020...

This manual is also suitable for:

Micropirani rs-232Micropirani rs-485

Table of Contents