MKS Baratron 722B Instruction Manual

MKS Baratron 722B Instruction Manual

Absolute pressure transducer
Table of Contents

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1034138-001
Revision A, 5/09
®
MKS Baratron
Type 722B
Absolute Pressure Transducer

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Summary of Contents for MKS Baratron 722B

  • Page 1 1034138-001 Revision A, 5/09 ® MKS Baratron Type 722B Absolute Pressure Transducer...
  • Page 2 All rights reserved. No part of this work may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopying and recording, or by any information storage or retrieval system, except as may be expressly permitted in writing by MKS Instruments, Inc.
  • Page 3: Table Of Contents

    Table of Contents Table of Contents Pressure Transducer Safety Information..................9 Symbols Used in This Instruction Manual..............9 Symbols Found on the Unit ....................10 Safety Procedures and Precautions .................11 Sicherheitshinweise für den Druckmeßumformer ...............13 In dieser Betriebsanleitung vorkommende Symbole ............13 Erklärung der am Gerät angebrachten Symbole .............14 Sicherheitsvorschriften und Vorsichtsmaßnahmen............15 Informations relatives à...
  • Page 4 Table of Contents Fittings .......................48 Making Mechanical Connections ..............48 Connectors ......................49 How to Wire a PDR-C and PDR-D Series Readout to a Type 722B Transducer with a 9-pin Type “D” Connector...........51 Electrical Information ..................52 NW-16-KF Fitting Information .................52 Interface Cables ....................53 Attaching the Terminal Block Connector Cable..........55 How To Check the Transducer Zero................56 How To Zero the 722B Transducer ..............56...
  • Page 5 Table of Contents NW-16-KF Fitting Information ..................69 Index ............................71...
  • Page 7 List of Figures and Tables List of Figures and Tables Figures Figure 1: Dimensions of the Low Pressure (up to 1000 Torr) Type 722B Transducer ....45 Figure 2: Fitting Dimensions for the Low Pressure Type 722B Transducer ......45 Figure 3: Dimensions of the High Pressure (>1000 to 25,000 Torr) Type 722B Transducer ...........................46 Figure 4: Fitting Dimensions of the High Pressure Type 722B Transducer.......46 Figure 5: Vertical Mounting Positions..................47...
  • Page 8 List of Figures and Tables viii...
  • Page 9: Pressure Transducer Safety Information

    Pressure Transducer Safety Information USymbols Used in This Instruction Manual Pressure Transducer Safety Information Symbols Used in This Instruction Manual Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual. Warning The WARNING sign denotes a hazard to personnel. It calls attention to a procedure, practice, condition, or the like, which, if not correctly performed or adhered to, could result in injury to personnel.
  • Page 10: Symbols Found On The Unit

    U Symbols Found on the Unit Pressure Transducer Safety Information Symbols Found on the Unit The following table describes symbols that may be found on the unit. Definition of Symbols Found on the Unit Protective earth (ground) Earth (ground) Off (Supply) On (Supply) IEC 417, No.5017 IEC 417, No.5019...
  • Page 11: Safety Procedures And Precautions

    DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT Do not install substitute parts or perform any unauthorized modification to the instrument. Return the instrument to an MKS Calibration and Service Center for service and repair to ensure that all safety features are maintained.
  • Page 12 U Safety Procedures and Precautions Pressure Transducer Safety Information OPERATE AT SAFE INLET PRESSURES Never operate at pressures higher than the rated maximum pressure (refer to the product specifications for the maximum allowable pressure). INSTALL A SUITABLE BURST DISC When operating from a pressurized gas source, install a suitable burst disc in the vacuum system to prevent system explosion should the system pressure rise.
  • Page 13: Sicherheitshinweise Für Den Druckmeßumformer

    Sicherheitshinweise für den Druckmeßumformer UIn dieser Betriebsanleitung vorkommende Symbole Sicherheitshinweise für den Druckmeßumformer In dieser Betriebsanleitung vorkommende Symbole Bedeutung der mit WARNUNG!, VORSICHT! und HINWEIS gekennzeichneten Absätze in dieser Betriebsanleitung. Warnung! Das Symbol WARNUNG! weist auf eine Gefahr für das Bedienpersonal hin.
  • Page 14: Erklärung Der Am Gerät Angebrachten Symbole

    U Erklärung der am Gerät angebrachten Symbole Sicherheitshinweise für den Druckmeßumformer Erklärung der am Gerät angebrachten Symbole Nachstehender Tabelle sind die Bedeutungen der Symbole zu entnehmen, die am Gerät angebracht sein können. Bedeutung der am Gerät angebrachten Symbole Ein (Energie) Aus (Energie) Erdanschluß...
  • Page 15: Sicherheitsvorschriften Und Vorsichtsmaßnahmen

    Ersetzen Sie keine Teile mit baugleichen oder ähnlichen Teilen, und nehmen Sie keine eigenmächtigen Änderungen am Gerät vor. Schicken Sie das Gerät zwecks Wartung und Reparatur an den MKS-Kalibrierungs- und -Kundendienst ein. Nur so wird sichergestellt, daß alle Schutzvorrichtungen voll funktionsfähig bleiben.
  • Page 16 U Sicherheitsvorschriften und Vorsichtsmaßnahmen Sicherheitshinweise für den Druckmeßumformer Anweisungen zum Installieren der Armaturen! Alle Anschlußstücke und Armaturenteile müssen mit der Gerätespezifikation übereinstimmen, und mit dem geplanten Einsatz des Gerätes kompatibel sein. Der Einbau, insbesondere das Anziehen und Abdichten, muß gemäß den Anweisungen des Herstellers vorgenommen werden. Verbindungen auf Undichtigkeiten prüfen! Überprüfen Sie sorgfältig alle Verbindungen der Vakuumkomponenten auf undichte Stellen.
  • Page 17: Informations Relatives À La Sécurité Pour Le Transducteur De Pression

    Informations relatives à la sécurité pour le USymboles utilisés dans ce manuel d'utilisation Informations relatives à la sécurité pour le transducteur de pression Symboles utilisés dans ce manuel d'utilisation Définitions des indications AVERTISSEMENT, ATTENTION, et REMARQUE utilisées dans ce manuel. Avertissement L'indication AVERTISSEMENT signale un danger pour le personnel.
  • Page 18: Symboles Apparaissant Sur L'unité

    U Symboles apparaissant sur l'unité Informations relatives à la sécurité pour le Symboles apparaissant sur l'unité Le tableau suivant décrit les symboles pouvant apparaître sur l'unité. Définition des symboles apparaissant sur l'unité Marche Terre de protection (sous tension) Arrêt (hors tension) Terre (masse) (masse) IEC 417, No.5007...
  • Page 19: Mesures De Sécurité Et Précautions

    Ne pas installer des pièces de substitution ou effectuer des modifications non autorisées sur l'appareil. Renvoyer l'appareil à un centre de service et de calibrage MKS pour tout dépannage ou réparation afin de garantir le l'intégrité des dispositifs de sécurité.
  • Page 20 U Mesures de sécurité et précautions Informations relatives à la sécurité pour le VÉRIFICATION DE L'ÉTANCHÉITÉ DES CONNEXIONS Vérifier attentivement toutes les connexions des composants pour le vide afin de garantir l'étanchéité de l'installation. EXPLOITATION AVEC DES PRESSIONS D'ENTRÉE NON DANGEREUSES Ne jamais utiliser des pressions supérieures à...
  • Page 21: Medidas De Seguridad Del Transductor De Presión

    Medidas de seguridad del transductor de presión USímbolos usados en este manual de instrucciones Medidas de seguridad del transductor de presión Símbolos usados en este manual de instrucciones Definiciones de los mensajes de advertencia, precaución y de las notas usados en el manual. Advertencia El símbolo de advertencia indica la posibilidad de que se produzcan daños personales.
  • Page 22: Símbolos Hallados En La Unidad

    U Símbolos hallados en la unidad Medidas de seguridad del transductor de presión Símbolos hallados en la unidad La tabla siguiente contiene los símbolos que puede hallar en la unidad. Definición de los símbolos hallados en la unidad Encendido Apagado (alimentación eléctrica) (alimentación eléctrica) Puesta a tierra...
  • Page 23: Procedimientos Y Precauciones De Seguridad

    No instale piezas que no sean originales ni modifique el instrumento sin autorización. Para asegurar el correcto funcionamiento de todos los dispositivos de seguridad, envíe el instrumento al Centro de servicio y calibración de MKS toda vez que sea necesario repararlo o efectuar tareas de mantenimiento.
  • Page 24 U Procedimientos y precauciones de seguridad Medidas de seguridad del transductor de presión USE ACCESORIOS ADECUADOS Y REALICE CORRECTAMENTE LOS PROCEDIMIENTOS DE AJUSTE Todos los accesorios del instrumento deben cumplir las especificaciones del mismo y ser compatibles con el uso que se debe dar al instrumento. Arme y ajuste los accesorios de acuerdo con las instrucciones del fabricante.
  • Page 25: Chapter One: General Information

    Chapter One: General Information UIntroduction Chapter One: General Information Introduction ® The Baratron Type 722B Absolute Pressure Transducer offers the proven technology of the Baratron transducer in a smaller RoHS (Restriction of Hazardous Substances)- compliant package. The unit provides an accuracy of 0.5% of Reading and carries a CE Mark to indicate full compliance with the EMC Directive 2004/108/EEC.
  • Page 26: How This Manual Is Organized

    U How This Manual is Organized Chapter One: General Information How This Manual is Organized This manual is designed to provide instructions on how to set up, install, and operate a Type 722B unit. Before installing your Type 722B unit in a system and/or operating it, carefully read and familiarize yourself with all precautionary notes in the Safety Messages and Procedures section at the front of this manual.
  • Page 27 Chapter One: General Information U Symbols Found on the Unit Symbols Found on the Unit The following table describes symbols that may be found on the unit. Definition of Symbols Found on the Unit Protective earth (ground) Earth (ground) Off (Supply) On (Supply) IEC 417, No.5017 IEC 417, No.5019...
  • Page 28 DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT Do not install substitute parts or perform any unauthorized modification to the instrument. Return the instrument to an MKS Calibration and Service Center for service and repair to ensure that all safety features are maintained.
  • Page 29 Chapter One: General Information U Safety Procedures and Precautions OPERATE AT SAFE INLET PRESSURES Never operate at pressures higher than the rated maximum pressure (refer to the product specifications for the maximum allowable pressure). INSTALL A SUITABLE BURST DISC When operating from a pressurized gas source, install a suitable burst disc in the vacuum system to prevent system explosion should the system pressure rise.
  • Page 30 UIn dieser Betriebsanleitung vorkommende Symbole Sicherheitshinweise für den Druckmeßumformer Sicherheitshinweise für den Druckmeßumformer In dieser Betriebsanleitung vorkommende Symbole Bedeutung der mit WARNUNG!, VORSICHT! und HINWEIS gekennzeichneten Absätze in dieser Betriebsanleitung. Warnung! Das Symbol WARNUNG! weist auf eine Gefahr für das Bedienpersonal hin.
  • Page 31 Sicherheitshinweise für den Druckmeßumformer U Erklärung der am Gerät angebrachten Symbole Erklärung der am Gerät angebrachten Symbole Nachstehender Tabelle sind die Bedeutungen der Symbole zu entnehmen, die am Gerät angebracht sein können. Bedeutung der am Gerät angebrachten Symbole Ein (Energie) Aus (Energie) Erdanschluß...
  • Page 32 Ersetzen Sie keine Teile mit baugleichen oder ähnlichen Teilen, und nehmen Sie keine eigenmächtigen Änderungen am Gerät vor. Schicken Sie das Gerät zwecks Wartung und Reparatur an den MKS-Kalibrierungs- und -Kundendienst ein. Nur so wird sichergestellt, daß alle Schutzvorrichtungen voll funktionsfähig bleiben.
  • Page 33 Sicherheitshinweise für den Druckmeßumformer U Sicherheitsvorschriften und Vorsichtsmaßnahmen Anweisungen zum Installieren der Armaturen! Alle Anschlußstücke und Armaturenteile müssen mit der Gerätespezifikation übereinstimmen, und mit dem geplanten Einsatz des Gerätes kompatibel sein. Der Einbau, insbesondere das Anziehen und Abdichten, muß gemäß den Anweisungen des Herstellers vorgenommen werden. Verbindungen auf Undichtigkeiten prüfen! Überprüfen Sie sorgfältig alle Verbindungen der Vakuumkomponenten auf undichte Stellen.
  • Page 34 USymboles utilisés dans ce manuel d'utilisation Informations relatives à la sécurité pour le Informations relatives à la sécurité pour le transducteur de pression Symboles utilisés dans ce manuel d'utilisation Définitions des indications AVERTISSEMENT, ATTENTION, et REMARQUE utilisées dans ce manuel. Avertissement L'indication AVERTISSEMENT signale un danger pour le personnel.
  • Page 35 Informations relatives à la sécurité pour le U Symboles apparaissant sur l'unité Symboles apparaissant sur l'unité Le tableau suivant décrit les symboles pouvant apparaître sur l'unité. Définition des symboles apparaissant sur l'unité Marche Terre de protection (sous tension) Arrêt (hors tension) Terre (masse) (masse) IEC 417, No.5007...
  • Page 36 Ne pas installer des pièces de substitution ou effectuer des modifications non autorisées sur l'appareil. Renvoyer l'appareil à un centre de service et de calibrage MKS pour tout dépannage ou réparation afin de garantir le l'intégrité des dispositifs de sécurité.
  • Page 37 Informations relatives à la sécurité pour le U Mesures de sécurité et précautions VÉRIFICATION DE L'ÉTANCHÉITÉ DES CONNEXIONS Vérifier attentivement toutes les connexions des composants pour le vide afin de garantir l'étanchéité de l'installation. EXPLOITATION AVEC DES PRESSIONS D'ENTRÉE NON DANGEREUSES Ne jamais utiliser des pressions supérieures à...
  • Page 38 USímbolos usados en este manual de instrucciones Medidas de seguridad del transductor de presión Medidas de seguridad del transductor de presión Símbolos usados en este manual de instrucciones Definiciones de los mensajes de advertencia, precaución y de las notas usados en el manual. Advertencia El símbolo de advertencia indica la posibilidad de que se produzcan daños personales.
  • Page 39 Medidas de seguridad del transductor de presión U Símbolos hallados en la unidad Símbolos hallados en la unidad La tabla siguiente contiene los símbolos que puede hallar en la unidad. Definición de los símbolos hallados en la unidad Encendido Apagado (alimentación eléctrica) (alimentación eléctrica) Puesta a tierra...
  • Page 40 No instale piezas que no sean originales ni modifique el instrumento sin autorización. Para asegurar el correcto funcionamiento de todos los dispositivos de seguridad, envíe el instrumento al Centro de servicio y calibración de MKS toda vez que sea necesario repararlo o efectuar tareas de mantenimiento.
  • Page 41 Medidas de seguridad del transductor de presión U Procedimientos y precauciones de seguridad USE ACCESORIOS ADECUADOS Y REALICE CORRECTAMENTE LOS PROCEDIMIENTOS DE AJUSTE Todos los accesorios del instrumento deben cumplir las especificaciones del mismo y ser compatibles con el uso que se debe dar al instrumento. Arme y ajuste los accesorios de acuerdo con las instrucciones del fabricante.
  • Page 42: Customer Support

    MKS, please obtain an RMA (Return Material Authorization) Number from the MKS Calibration and Service Center before shipping. The RMA Number expedites handling and ensures proper servicing of your instrument. Please refer to the inside of the back cover of this manual for a list of MKS Calibration and Service Centers. Warning All returns to MKS Instruments must be free of harmful, corrosive, radioactive, or toxic materials.
  • Page 43: Chapter Two: Installation

    Chapter Two: Installation How To Unpack the Type 722B Unit MKS has carefully packed the Type 722B unit so that it will reach you in perfect operating order. Upon receiving the unit, however, you should check for defects, cracks, broken connectors, etc., to be certain that damage has not occurred during shipment.
  • Page 44: Product Location And Requirements

    Product Location and Requirements Operating Environmental Requirements • Ambient Operating Temperature: 0° C to 50° C (32° F to 122° F), 15° C to 40° C(59° F to 104° F) 1 and 2 torr only. • Ventilation requirements include sufficient air circulation Dimensions Note All dimensions are listed in inches with millimeters referenced in...
  • Page 45: Figure 1: Dimensions Of The Low Pressure (Up To 1000 Torr) Type 722B Transducer

    Chapter Two: Installation UDimensions 1.50 (38.1) Dia. 15-Pin Type "D" Connector 9-Pin Type "D" Connector 6.00 (152) 0.19 (4.7) Screw Access From This Side 5-Pin Terminal Block 2.75 (69.8) Connector Wire Entry 28 AWG to 14 AWG 0.54 (13.7) 0.94 (23.9) Max.
  • Page 46: Figure 3: Dimensions Of The High Pressure (>1000 To 25,000 Torr) Type 722B

    15-Pin Type "D" 1.50 (38.1) Dia. Connector 9-Pin Type "D" Connector 6.00 (152) 0.19 (4.7) Screw Access From This Side 5-Pin Terminal Block Connector 2.68 (68.1) Wire Entry 28 AWG to 14 AWG 0.54 (13.7) Max. 1.36 (34.4) 4-VCR Female Figure 3: Dimensions of the High Pressure (>1000 to 25,000 Torr) Type 722B Transducer 1.07 (27.1) 0.75 (19.1)
  • Page 47: Setup

    Chapter Two: Installation USetup Setup Mounting The 722B transducer can be mounted with the cylindrical end in either a vertical (upright) or horizontal position. The mounting requirements allow any foreign matter entering the pressure port to fall away from the sensing diaphragm. Mounting the Unit in a Vertical Position If the unit is mounted in a vertical position, the cylindrical end of the unit must point upwards, as shown in Figure Error! Bookmark not defined..
  • Page 48: Fittings

    NW-16-KF • Mini-CF Caution 1. MKS does not warranty the 722B transducer when single or double metal ferrule compression-type vacuum fittings are used because damage will occur to the transducer when improper tightening procedures are followed. 2. Before proceeding to Setup, page 47, carefully check all plumbing connections to the instrument to ensure a leak-tight installation.
  • Page 49: Connectors

    Chapter Two: Installation USetup Connectors The 722B transducer is available with a 9-pin Type “D”, a 5-pin terminal block connector, or a 15-pin Type “D” on a 6 inch cable Note A “No Connection” pin assignment means that the pin has no internal connection.
  • Page 50: Table 7: Pinout Of The 15-Pin Type "D" Connector

    Pinout of the 15-Pin Type “D” Connector Assignment No Connection Pressure Output No Connection No Connection Power Return No Connection + Power Input No Connection No Connection No Connection No Connection Pressure Return No Connection No Connection Chassis Table 7: Pinout of the 15-Pin Type “D” Connector...
  • Page 51: How To Wire A Pdr-C And Pdr-D Series Readout To A Type 722B Transducer With A 9-Pin Type "D" Connector

    Chapter Two: Installation USetup How to Wire a PDR-C and PDR-D Series Readout to a Type 722B Transducer with a 9-pin Type “D” Connector. Caution DO NOT use the -15 VDC output of the PDR-C and PDR-D readout to power the 722B transducer. When the -15 VDC signal of the PDR- C and PDR-D is connected to the power return of the transducer, a short between the -15 VDC of the transducer and the A GND of the PDR-C and PDR-D occurs.
  • Page 52: Electrical Information

    Electrical Information The 722B transducer requires an external power source capable of supplying the voltages listed in Appendix A: Product Specifications, page 65. Noise and ripple should be less than 20 mV (peak-to-peak) over a 10 kHz bandwidth. You may use any readout device capable of reading from -0.6 V to 11 V.
  • Page 53: Interface Cables

    USetup Interface Cables Interface cables to all MKS companion products can be purchased from MKS. Refer to Table 5 for a listing of the cable numbers. As of July 20, 2009, all products shipped to the European Community must comply with the EMC Directive 2004/108/EEC, which covers radio frequency emissions and immunity tests.
  • Page 54 Generic Shielded Cable Description MKS offers a full line of cables for all MKS equipment. Should you choose to manufacture your own cables, follow the guidelines listed below: 1. The cable must have a braided shield, covering all wires. Neither aluminum foil nor spiral shielding will be as effective;...
  • Page 55: Attaching The Terminal Block Connector Cable

    Chapter Two: Installation U How To Check the Transducer Zero Attaching the Terminal Block Connector Cable The cable to the terminal block connector must be firmly attached to the top of the transducer, in order to comply with CE Mark requirements. Figure 2 shows the preferred method to connect the cable;...
  • Page 56: How To Check The Transducer Zero

    (or reset) by adjusting the zero potentiometer located on the top cover of the transducer or, on the front panel of an MKS Power Supply/Readout, if you are using one. Refer to Figure Error! Bookmark not defined., page 45, for the location of the zero potentiometer on a low pressure 722B transducer;...
  • Page 57: Span Adjustment

    The span setting may require adjustment periodically. Only adjust the pot in conjunction SPAN with a calibration transfer standard. Do not adjust the span setting if a calibration transfer standard is not available. Instead, send the unit back to an MKS Service Center for calibration.
  • Page 58 This page intentionally left blank...
  • Page 59: Chapter Three: Overview

    An MKS or MKS-compatible power supply is required to complete the pressure to DC voltage output conversion, and an MKS or MKS-compatible display unit is required for direct pressure readout. The display unit could be a personal computer, an MKS pressure controller, or an MKS PDR Series power supply/readout unit.
  • Page 60: Signal Conditioning Electronics

    Signal Conditioning Electronics The signal conditioner contains state-of-the-art balanced bridge circuitry, self-compensated for thermal stability with ambient temperature changes. The circuit board construction uses surface mount technology. The output is either a DC voltage or mA current, which is linear with pressure.
  • Page 61: Chapter Four: Operation

    Chapter Four: Operation UGeneral Chapter Four: Operation General After installation and during periodic maintenance, check the transducer zero to verify proper output. If the output is incorrect, set the output by adjusting the zero potentiometer. Refer to How To Check the Transducer Zero, page 56, for zeroing instructions. Lowest Suggested Pressure Available for Reading The pressures listed in the middle column of Table 7 reflect reliable and practical pressures for different range transducers.
  • Page 62 This page intentionally left blank.
  • Page 63: Chapter Five: Maintenance And Troubleshooting

    Any damage should be reported to the carrier and MKS Instruments immediately. If there is no obvious damage and the continuity is correct, obtain an ERA Number (Equipment Return Authorization Number) before returning the unit to MKS Instruments for service.
  • Page 64: Troubleshooting

    (transducer to electronics Inspect cable and transducer. module). Replace if necessary. Measurement slowly goes Overpressure and/or a build- Return to MKS for servicing positive over time up of contamination in the P or transducer replacement. cavity. Unstable zero output The ambient temperature may Refer to Operating be too high.
  • Page 65: Appendix A: Product Specifications

    Appendix A: Product Specifications Performance Specifications Appendix A: Product Specifications Performance Specifications Accuracy 0.5% of Reading CE Mark Compliance EMC Directive 2004/108/EEC RoHS (Restriction of Hazardous Fully compliant to Directive 2002-95-EC Substances) Compliance Temperature Coefficients Zero 0.008% of F.S./ °C 10 Torr through 25,000 Torr 0.020% of F.S./ °C 1 and 2 Torr Span 0.04% of Rdg./ °C...
  • Page 66: Electrical Specifications

    Warning Units with NW16-KF fittings and a full scale range greater than 1200 Torr (23 psi) require an HPS overpressure ring. Operating the unit without a protective overpressure ring may result in injury. The HPS part number for the overpressure ring is HPS 100316301. Electrical Specifications Input Required 0 to 5 Volt output...
  • Page 67: Appendix B: Model Code Explanation

    Appendix B: Model Code Explanation UModel Code Appendix B: Model Code Explanation Model Code The options of your transducer are identified in the model code when you order the unit. The model code is identified as follows: 722BXXXYYZF# where: 722B Type Number Full Scale Range Fittings...
  • Page 68 Full Scale Range (XXX) The full scale range is indicated by a two digit / one letter code. Full Scale Range Ordering Code 1,000* 5,000* 10,000* 25,000* *must include a fitting. Fittings (YY) Six types of fittings are available, designated by a two letter code. Ordering Code 4-VCR Type Female ½0 tube weld stub...
  • Page 69 Appendix B: Model Code Explanation NW-16-KF Fitting Information NW-16-KF Fitting Information The NW-16-KF fittings are only available for units with full scale pressure of a maximum of 5000 Torr (100 psia). Warning Units with NW-16-KF fittings and a full scale range greater than 1200 Torr (23 psi) require an HPS overpressure ring.
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  • Page 71 Index Accuracy, 25, 49, 53 Pinout 5-pin terminal block, 33 9-pin Type, 33 Cables, interface, 37 Power, 52 CE Mark, 25, 37, 49 Pressure limit, 49 Connectors, 25, 33, 53 Pressure, lowest for control, 45 Customer support, 26 Pressure, lowest reading, 45 Dimensions, 28–30 Range, 25, 49, 52 Readout device, 36, 43...

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