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Summary of Contents for MKS UniMag 971B
- Page 1 971B UniMag™ Vacuum Pressure Transducer RS232 / RS485 / Display Operation and Installation Manual P/N: 100017129 971B UniMag™ Transducer Operation and Installation Manual Revision: J, February 2020 971B UniMag™ Operation manual...
- Page 2 When the product exhibits a distinct change in performance. This indicates a need for service. Service and Warranty Some minor problems are readily corrected on site. If the product requires service, contact the MKS Technical Support Department at +1-833-986-1686. If the product must be returned to the factory for service, request a Return Material Authorization (RMA) from MKS.
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Page 3: Table Of Contents
This document contains confidential proprietary information belonging to MKS Instruments, Inc. This information is not for publication and has been provided to MKS on the condition that it not be copied, reproduced or disclosed, either wholly or in part, to third parties without the expressed written consent of MKS Instruments, Inc. -
Page 4: Safety Information
Service and Repair page 32. Do not install substituted parts or perform any unauthorized modification to the instrument. Return the instrument to a MKS Calibration and Service Center for service and repair to ensure all of the safety features are maintained. -
Page 5: Unpacking
971B Transducer 100017130 Short form manual 100017096 Documentation & Software CD If any items are missing, call MKS Customer Service at or your local MKS sales office +1-833-986-1686 or distributor. Part Number The 971B UniMag part number system has 5 digits that identify flange, communication interface, analog output type, I/O connector and sensor sealing type. -
Page 6: Description
Description The 971B UniMag™ vacuum transducer offers a wide measuring range from 1×10 to 5×10 Torr and is based on measurement of cold cathode ionization current. The 971B is designed for general purpose pressure measurement and control as a standalone unit or with the PDR900 display and controller unit. -
Page 7: 971B Functions
971B Functions User Switch I/O Connector Red or Green LED Status Indicator User Switch The user switch turns ON the cold cathode sensor. Refer to page 18 for operation procedure. The cold cathode sensor should only be turned on when vacuum pressure is below 5×10 Torr If the transducer is delivered with customer specified parameters, the User Switch is disabled. -
Page 8: Transducer Installation (Mechanical)
Transducer Installation (Mechanical) Do not use or install the 971B transducer where the following conditions occur: - Temperatures lower than 0 C or higher than 40 - Corrosive or explosive gases - Direct sunlight or other heat sources - Magnetic fields Process compatibility The 971B transducer is intended for use in relatively clean environments. -
Page 9: Transducer Installation (Electrical)
Transducer Installation (Electrical) The 971B is available with different input/output connectors. Use a cable with strain relief to ensure proper electrical connection and to reduce stress on the connectors. Ensure a low impedance electrical connection between the 971B transducer body and the ... - Page 10 Input/Output Wiring 971B I/O Connector (15 pin) PIN Description RS485- / RS232 Transmit RS485+ / RS232 Receive Power + (9-30 VDC) Power return - Analog Output + Analog Output - Relay 1, Normally Open Relay 1, Common Relay 1, Normally Closed Relay 2, Normally Closed 15 pin male HD DSUB Relay 2, Common...
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Page 11: Serial User Interface
Serial user interface The 971B is as standard supplied with RS232 or RS485 user interface. The user interface allows change of transducer parameters such as set point settings and calibration. The serial interface uses the following data format: 8 data bits, 1 stop bit and no parity bit. RS232 user interface The 971B is DCE (Data Communication Equipment) and can be connected to DTE (Data Terminal Equipment), typically a... -
Page 12: Communication Protocol
To the right is illustrated the W indows communication port properties for communicating with transducer factory default settings. MKS also offers communication software examples that can be downloaded at: www.mksinst.com/vtsw/ In OEM applications transducer communication software routines are normally integrated with other system control software. - Page 13 The transducer will reply in the current baud rate and then change to the new value. Addressing The transducer uses an addressable communication protocol that allows multiple MKS 900 Series transducer devices to be connected in a RS485 network. The address is required in both RS232 and RS485 communication.
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Page 14: Setpoint Relays
Setpoint relays The 971B can be ordered with 3 mechanical relays that can be used for controlling external process equipment. The relay has closing and breaking contacts and the contacts are rated 30 VDC, 1A resistive load. If the transducer is supplied without setpoint relays, the setpoint commands can still be accessed. Refer to part number definition page 3 to verify if setpoint relays are included. - Page 15 When using the setpoint relay to control process equipment, always take appropriate precautions to prevent system damage in case of transducer power failure. The NC contact will be closed in case of transducer power failure. If the transducer is supplied as a special version (P/N: 97B1-xxxxx-xxxx) with pre-configured ...
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Page 16: Integrated Touch Display
Setpoint safety delay The setpoint safety delay function requires 5 continuously measurements that exceeds setpoint value before the relay is tripped. This feature prevents that noise or pressure pulse can trig the relay. If fast setpoint response is required the setpoint safety delay can be disabled. Setpoint safety delay Command: @253SPD!ON;FF... - Page 17 Main screen. The following table shows the different menus and options available: Display-screen Information Start-up MKS logo and transducer model Home The Home screen shows the current pressure, the transducer model, the status of the setpoints, the triggering direction of each setpoint and shows if an alarm is enabled.
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Page 18: Cold Cathode Sensor Control
Cold Cathode Sensor Control The cold cathode sensor must be turned on before the transducer can provide pressure measurement values. The 971B can be controlled via digital interface, external analog control or manually. P/N: 971B-x1090-0001, will always enable the high voltage when power is turned on. Power supply must be external controlled by switching power (pin 4) on and off to avoid continuously operation at high pressure. - Page 19 Pressure request: Query: @253PR1?;FF Query reply: @253ACK1.23E-4;FF Pressure outputs: PR1: Cold Cathode reading PR2: Cold Cathode reading PR3: Cold Cathode reading PR5: Cold Cathode reading The default analog output is based on the combined PR1 reading and provides a 16 bit voltage output of 0.5 VDC/decade standard configuration.
- Page 20 Cold Cathode protect setpoint The Cold Cathode protect setpoint automatically turns off the Cold Cathode high voltage if the cold cathode measurement exceeds 5.00E-3 Torr for 120 seconds. The protect setpoint can be turned off (disabled) or time set between 0 and 999 seconds. Command: @253PRO!ON;FF Command values:...
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Page 21: Calibration And Adjustment
Calibration and Adjustment The 971B is factory calibrated when delivered and in many applications further calibration is not required. If the sensor element has been contaminated or damaged by process gases, adjustment of zero and full scale can be executed to compensate for small measurement errors. Pressure unit setting The transducer can provide digital and analog output in torr, mbar and Pascal pressure units. -
Page 22: Factory Defaults
Switch enable: × Analog out 1: AO1! × (1) If the transducer is delivered with other analog output than standard mks (part number specified), then the factory default value will be specified by the specials part number. Calibration setup: Description Command... -
Page 23: Transducer Lock Function
This option is defined in the special settings. If delivered with factory lock the transducer settings can only by changed by return of gauge to MKS. User Switch Command The User Switch command defines if the Cold Cathode sensor voltage is turned on by level trig or pulse trig. -
Page 24: Status Query Commands
Status Query Commands Device Type - DT Specifies transducer device type name: Query: @253DT?;FF Query reply: @253ACKUNIMAG;FF Firmware Version - FV Specifies transducer firmware version: Query: @253FV?;FF Query reply: @253ACK1.12;FF Hardware Version - HV Specifies transducer hardware version: Query: @253HV?;FF Query reply: @253ACKA;FF Manufacturer - MF... -
Page 25: Analog Output
(2×Vout - 9) Pascal The standard MKS analog output always provides 0.5 VDC/decade. If the transducer pressure unit is changed from Torr to Pascal or mbar the analog output scaling will change as well, so it represents 0.5 VDC/decade Torr or 0.5 VDC/decade mbar or Pascal. -
Page 26: Analog Output Setup
9 = MKS Moducell 325 (x3) 10 = MKS Baratron 0.1 Torr (0-10 VDC) 11 = MKS Baratron 1 Torr (0-10 VDC) / Hasting 2002OBE, Channel 2 12 = MKS Baratron 10 Torr (0-10 VDC) 13 = MKS Baratron 100 Torr (0-10 VDC) - Page 27 Analog output calibration = 3 (Edward WRG emulation) The WRG emulation covers a wider measuring range than supported by the 971B range. = 10 = (log )+12.125) / 1.5 (1.5× Vout -12.125) Torr Torr = 10 = (log )+12) / 1.5 (1.5×...
- Page 28 Analog output calibration = 6 (Inficon BPG400 emulation) = 10 ((Vout -7.75)/0.75) -0.125 = log +0.125) × 0.75 + 7.75 Torr Torr = 10 = log ) × 0.75 (Vout/0.75) mbar mbar = 10 = log – 2) × 0.75 (Vout/0.75) Pascal Pascal...
- Page 29 Analog out calibration = 17 (Edwards AIM-X /-XL) The Edwards AIM-X / XL emulation provides a log linear output. Torr mbar Pascal Vout 1.00E-8 1.33E-8 1.33E-6 3.286 5.00E-8 6.67E-8 6.67E-6 4.084 1.00E-7 1.33E-7 1.33E-5 4.428 5.00E-7 6.67E-7 6.67E-5 5.227 1.00E-6 1.33E-6 1.33E-4 5.571...
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Page 30: Query Command List
Transducer information Command Response Explanation @xxxMD?;FF @xxxACK971B;FF Model number (971B) @xxxDT?;FF @xxxACKUniMag;FF Device type name (UniMag) @xxxMF?;FF @xxxACKMKS;FF Manufacturer name (MKS) @xxxHV?;FF @xxxACKA;FF Hardware version @xxxFV?;FF @xxxACK1.12;FF Firmware version @xxxSN?;FF @xxxACK10350123456;FF Serial number @xxxSW?;FF @xxxACKON;FF Switch enable @xxxTIM?;FF... -
Page 31: Setup And Configuration Command List
Setup and configuration command list Setpoint setup and configuration Command Response Explanation @xxxSP1!2.00E+1;FF @xxxACK2.00E+1;FF Set point 1-3 switch value. @xxxSP2!2.00E+1;FF @xxxSP3!2.00E+1;FF @xxxSH1!5.00E+1;FF @xxxACK5.00E+1;FF Set point 1-3 hysteresis switch value. @xxxSH2!5.00E+1;FF @xxxSH3!5.00E+1;FF @xxxEN1!ON;FF @xxxACKON;FF Set point 1-3 enable status (ON or OFF) @xxxEN2!ON;FF @xxxEN3!ON;FF @xxxSD1!BELOW;FF... -
Page 32: Faq (Frequently Asked Questions)
FAQ (Frequently Asked Questions) Applications Q: Can the transducer and sensor element continuously withstand vibrations from a mechanical fore-pump. A: Yes – the cold cathode sensor can withstand continuous vibrations. Q: When the transducer is pumped down and isolated by closing a valve the pressure is raising. Is the transducer leaking? A: Not likely - when a confined space is evacuated and the pumping is stopped, the pressure will rise because of out-gassing, mainly by water vapor. - Page 33 Q: Reverse voltage has been connected to power supply input. Is the transducer damaged? A: Not likely – the transducer power supply circuit has reverse voltage and over voltage protection however. MKS cannot guarantee that the transducer will not be damaged. Q: The status LED is constantly illuminating red? A: The red status indicates a defect sensor element.
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Page 34: Troubleshooting
Troubleshooting Symptom Possible Cause/Remedy No digital communication Check electrical connections (3 wires from transducer to communication equipment) Transducer and communication equipment baud rate matches Use of incorrect transducer address. Try address 254 Attention characters missing (@) Termination characters missing (;FF) NAK180 is received when The transducer setup is locked. -
Page 35: Service And Repair
Service and Repair When a Cold Cathode sensor is turned on and operated at pressures higher than 1.0E-3 Torr, the inside wall of the ionization chamber can be sputtered by ions formed by the high energetic plasma. Inert gases like argon are easier to ionize and consequently the sputter effect is more significant in such environment. -
Page 36: Specifications
±30% of reading Supply Voltage: 9 – 30 VDC Power consumption: < 2 Watt Fuse (thermal recoverable): 200 mA Analog output (MKS standard): 1-9 VDC Analog output 1 resolution: 16 bit Analog output 2 resolution: 12 bit Analog output impedance: 100 Ω... - Page 37 Dimensions KF25 flange (P/N: 971B-2xxx) mm. [Inch.] Dimensions CF2.75” flange (P/N: 971B-7xxx) mm. [Inch.] 971B UniMag™ Operation manual...
- Page 38 Dimensions KF40 flange (P/N: 971B-9xxx) mm. [Inch.] 971B UniMag™ Operation manual...
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Page 39: Accessories And Replacement Parts
Accessories and Replacement Parts PDR900 controller Part number Description Interface PDR900-12-EU PDR900 Controller EU Schuko power cable PDR900-12-US PDR900 Controller US power cable PDR900-12-UK PDR900 Controller UK power cable PDR900-12-JP PDR900 Controller JP power cable. mbar / Pascal unit PDR900-12-DK PDR900 Controller Danish power cable PDR900 Transducer Cables for 971B (15 pin HD DSUB) -
Page 40: Pdr 900 Display And Power Supply
PDR 900 Display and Power Supply • Plug and play readout for 900 Series transducers • The easy way for setup and configuration • Data logger tool for data analysing 900 Series VacuumLog software • Data logger software • Pressure curve plotting •... -
Page 41: Index
Index Accessories and replacement part numbers ..36 Model ..............21 Accuracy .............33 Addressing ............11 NAK Code ............10 Analog output..........22;29 NAK180 ............ 13;20;31 Applications .............4;29 Atmospheric adjustment ........18 Operating temperature ........33 Bake out..............6 Part number ............3 Bake out temperature .........33 Part Number............ - Page 42 971B UniMag™ Vacuum Pressure Transducer RS232 / RS485 / Display Operation and Installation Manual P/N: 100017129 971B UniMag™ Transducer Operation and Installation Manual Revision: J, February 2020...
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