MKS 901P Operation And Installation Manual
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MKS 901P Operation And Installation Manual

Vacuum pressure transducer rs232 / rs485 / display
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901P Loadlock
Vacuum pressure transducer
RS232 / RS485 / Display
Operation and Installation Manual
P/N: 100017121
901P Loadlock Transducer
Operation and Installation Manual
Revision: I, September 2014

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Summary of Contents for MKS 901P

  • Page 1 901P Loadlock Vacuum pressure transducer RS232 / RS485 / Display Operation and Installation Manual P/N: 100017121 901P Loadlock Transducer Operation and Installation Manual Revision: I, September 2014...
  • Page 2 Extent of the Warranty MKS Instruments, Inc., HPS™ Products Inc. and MKS Denmark ApS. warrants the 901P LoadlockVacuum Transducer and its accessories to be free from defects in materials and workmanship for one (1) year from the date of shipment by HPS™ or authorized representative to the original purchaser (PURCHASER).

  • Page 3: Table Of Contents

    Table of Contents Safety information .............................. 2 Symbols used: ............................... 2 Unpacking ................................3 Description ................................. 4 901P Functions ..............................5 User Switch ................................ 5 LED Status Indicator ............................5 Transducer installation (mechanical) ......................... 6 Transducer installation (electrical) ........................7 Serial user interface ............................
  • Page 4 DK-3150 Hellebaek Denmark Tel: +45 44 92 92 99 – Fax: +45 44 92 94 99 E-mail: mksdenmark@mksinst.com MKS Instruments, HPS Products 5330 Sterling Dr. Boulder, CO 80301 Tel: +1 303 449 9861 - Fax: + 1 303 449 2003...

  • Page 5: Safety Information

    Calls attention to important procedures, practices or conditions. Attention: General safety information The safety instructions should always be followed during installation and operation of the 901P Loadlock transducer. Pass safety information to all users. Safety Precautions: Electrical connections. The 901P must be properly electrically connected in order to perform according to the specifications.

  • Page 6: Unpacking

    Short form manual 100017096 Documentation & Software CD If any items are missing, please call MKS Customer Service at +1 800 345-1967 or +1 303 449-9861 or your local MKS sales office or distributor. Part number The 901P Loadlock part number system has 5 digits that identify flange, communication interface, analog output type, I/O connector and sensor sealing type.

  • Page 7: Description

    The 901P has up to three mechanical relays which can be used for process control such as interlocking valves or pumps. The analog voltage output can be interfaced to external analog equipment for pressure readout or control.

  • Page 8: 901P Functions

    901P Functions User Switch I/O Connector Red or Green LED Status Indicator User Switch The user switch has the following functions: 1. Vacuum Zero adjustment (VAC! Command) 2. Atmospheric adjustment (ATZ! Command) 3. Transducer firmware upgrade mode Refer to pages 17, 18 and 48 for operation procedure.

  • Page 9: Transducer Installation (Mechanical)

    If the 901P transducer is located close to a gas source connection like a flow controller or leak valve the transducer pressure measurement can be higher than the actual chamber pressure. Location close to a pumping system connection can cause a lower pressure measurement than actual chamber pressure.

  • Page 10: Transducer Installation (Electrical)

    Transducer installation (electrical) The 901P is available with different input/output connectors. Use a cable with strain relief to ensure proper electrical connection and to reduce stress on the connectors.  Ensure a low impedance electrical connection between the 901P transducer body and the grounded vacuum system to shield the sensor from external electromagnetic sources.
  • Page 11 To comply with EN61326-1 immunity requirements, use a braided shielded cable. Connect the braid to the metal hoods at both ends of the cable with the end for power supply connected to earth ground. 901P I/O Connector (15 pin) PIN Description...

  • Page 12: Serial User Interface

    At high communication baud rates and when using long cable runs, a termination resistor of typical 120 Ohm should be connected between pin 1 and 2 at the 901P DSUB connector and between pin A and B at the data communication equipment.

  • Page 13: Communication Protocol

    Communication Protocol The 901P transducer command set allows the user to change transducer parameters and receive pressure measurements. Settings and parameters like set point values, set point configurations and calibration data are stored in the transducers non volatile memory. Communication software Communication software is required to communicate from a PC via RS232/485 interface to the transducer.
  • Page 14 Factory default: Communication delay (RS485) The 901P half duplex RS485 interface requires that data is transmitted and received on the same communication line. Some RS485 transceiver equipment have a settling time when changing from transmit to receive mode. If the transducer replies too fast the first character(s) will not be received as the following...

  • Page 15: Setpoint Relays

    Setpoint relays The 901P can be ordered with 3 mechanical relays that can be used for controlling external process equipment. The relay has closing and breaking contacts and the contacts are rated 30 VDC, 1A resistive load. If the transducer is supplied without setpoint relays, the setpoint commands can still be accessed. Refer to part number definition page 3 to verify if setpoint relays are included.
  • Page 16 Piezo measurement.  The 901P transducer has an auto hysteresis setting of 10% of the set point value that overwrites the current hysteresis value whenever the set point value or set point direction is changed. If other hysteresis value than 10% is required, first set the set point value and set point direction before setting hysteresis value.

  • Page 17: Display

    @253ACKON;FF Factory default: Display The 901P with integrated display provides real time pressure readout, pressure trend and setpoint status. The display setup can be changed via the intuitive menu interface. The settings menu views transducer settings. Use the [] and [] keys to scroll the cursor and select menu point by pressing the [+] key.
  • Page 18 Pressure output The 901P transducer can provide pressure measurement output as an analog voltage or RS232/RS485 digital value. The digital value is 3 digits scientific notation for PR1, PR2 and PR3 reading and 4 digits for PR4 reading. Pressure request: Query: @253PR1?;FF...
  • Page 19 3 or 4 digit resolution 1.234E-3 Measuring noise External sources can interfere with the sensor signal and cause noise in the signal. The low measuring range is most sensitive to measuring noise due to low signal levels. 901P Loadlock Operation manual...

  • Page 20: Calibration And Adjustment

    Torr at ambient pressure. Accuracy and repeatability The 901P measuring accuracy is specified as transducer reading ± a percentage of the actual pressure. The basic measuring accuracy is factory calibrated and cannot be user adjusted. The repeatability specification is the transducers ability to repeat the same measurement value after multiple pressure cycles. Refer to the transducer specification page 53 for actual values.
  • Page 21 5.00E+2 to 7.80E+2 Command reply: @253ACK;FF Query: @253ATM?;FF Query reply: @253ACK1.00E+2;FF Reset to default: @FD!ATM;FF Factory default: Factory adjustment value The query feature reads the delta value between the user atmospheric adjustment value and the factory default value. 901P Loadlock Operation manual...
  • Page 22 100 to 760 Torr. Executing Piezo differential full scale adjustment. Command: @253ATS!1.00E+2;FF Command values: 1.00E+2 to 7.60E+2 Command reply: @253ACK;FF Reset to default: @253FD!ATS;FF Factory default: Factory adjustment value Sensor value to high: @253NAK8;FF 901P Loadlock Operation manual...

  • Page 23: Factory Default

    AO1! × Analog out 2: AO2! × (1) If the transducer is delivered with other analog output than standard mks (part number specified), then the factory default value will be specified by the specials part number. Calibration setup: Description Command...

  • Page 24: Transducer Lock Function

    The 901P transducer can be delivered with factory locked tamperproof settings for safety interlock applications. This option is defined in the special settings. If delivered with factory lock the transducer settings can only by changed by return of gauge to MKS.

  • Page 25: Status Query Commands

    C within ±3 Query: @253TEM?;FF Query reply: @253ACK2.50E+1;FF Transducer Status - T The T command returns the MicroPirani sensor status as O for OK, M for MicroPirani fail or Z for Piezo fail. Query: @253T?;FF Query reply: @253ACKO;FF 901P Loadlock Operation manual...

  • Page 26: Analog Output

    Pascal Pascal The standard MKS analog output always provides 1 VDC/decade. If the transducer pressure unit is changed from Torr to Pascal or mbar the analog output scaling will change as well, so it represents 1 VDC/decade Torr or 1 VDC/decade mbar or Pascal.
  • Page 27 Analog output setup The 901P can emulate analog voltage outputs from other vacuum transducers. The 901P analog output can be assigned to the MicroPirani sensor measurement (PR1), Piezo Differential sensor measurement (PR2) and the combined Piezo/MicroPirani reading (PR3). This is set by the first digit. The second and third digit represents the analog output calibration.
  • Page 28 Dual analog output The 901P is available with dual analog output which can be used to provide an alternative output for amplification of range or to emulate another transducer type while still using the MKS standard output. This feature is a hardware option and must be specially ordered. Refer to part number specifications page 3.
  • Page 29 = log Pascal Pascal Torr mbar Pascal Vout 7.50E-5 1.00E-4 1.00E-2 2.00 7.50E-4 1.00E-3 1.00E-1 3.00 7.50E-3 1.00E-2 1.00 4.00 7.50E-2 1.00E-1 10.0 5.00 7.50E-1 1.00 6.00 7.50 10.0 1.000 7.00 75.0 10.000 8.00 1.000 100.000 9.00 901P Loadlock Operation manual...
  • Page 30 Analog output calibration = 3 (Edward WRG emulation) The WRG emulation covers a wider measuring range than supported by the 901P range. (1.5× Vout -12.125) = 10 = (log )+12.125) / 1.5 Torr Torr (1.5× Vout -12) = 10 = (log )+12) / 1.5...
  • Page 31 1.00E-04 1.33E-04 1.33E-02 4.843 5.00E-04 6.67E-04 6.67E-02 5.367 1.00E-03 1.33E-03 1.33E-01 5.593 1.00E-02 1.33E-02 1.33E+00 6.343 1.00E-01 1.33E-01 1.33E+01 7.093 1.00E+00 1.33E+00 1.33E+02 7.843 1.00E+01 1.33E+01 1.33E+03 8.593 1.00E+02 1.33E+02 1.33E+04 9.343 7.60E+02 1.01E+03 1.01E+05 10.004 901P Loadlock Operation manual...
  • Page 32 5.00E+01 6.67E+01 6.67E+03 4.965 7.50E+01 1.00E+02 1.00E+04 5.075 1.00E+02 1.33E+02 1.33E+04 5.137 2.50E+02 3.33E+02 3.33E+04 5.274 5.00E+02 6.67E+02 6.67E+04 5.333 6.00E+02 8.00E+02 8.00E+04 5.345 7.00E+02 9.33E+02 9.33E+04 5.353 7.60E+02 1.01E+03 1.01E+05 5.357 8.00E+02 1.07E+03 1.07E+05 5.360 901P Loadlock Operation manual...
  • Page 33 1.07E+05 3.2398 Analog out calibration = 9 (MKS Moducell 325, amplified 3 times) The Moducell x3 emulation is in curve form identical with the standard Moducell, however, to provide better signal resolution the signal is amplified by a factor three.
  • Page 34 Analog out calibration = 10 (MKS Baratron 0.1 Torr) The 0.1 Torr Baratron emulation provides a signal directly proportional with pressure with a full scale reading of 10 VDC at 0.1 Torr. Torr mbar Pascal Vout 1.00E-3 1.33E-3 1.33E-1 0.100 5.00E-3...
  • Page 35 Analog out calibration = 13 (MKS Baratron 100 Torr) The 100 Torr Baratron emulation provides a signal directly proportional with pressure with a full scale reading of 10 VDC at 100 Torr. Torr mbar Pascal Vout 1.33 1.333E+2 0.100 6.66 6.66E+2...
  • Page 36 2.00E+2 2.67E+2 2.67E+4 8.30 3.00E+2 4.00E+2 4.00E+4 8.48 4.00E+2 5.33E+2 5.33E+4 8.60 5.00E+2 6.67E+2 6.67E+4 8.70 6.00E+2 8.00E+2 8.00E+4 8.78 7.00E+2 9.33E+2 9.33E+4 8.85 8.00E+2 1.07E+3 1.07E+5 8.90 9.00E+2 1.20E+3 1.20E+5 8.95 1.00E+3 1.33E+3 1.33E+5 9.00 901P Loadlock Operation manual...
  • Page 37 Analog out calibration = 16 (Edwards AIM-S /-SL) The Edwards AIM-S / SL emulation provides a strongly non linear output. The 901P provides only values above 1.00E-5 Torr. Torr mbar Pascal Vout 1.00E-8 1.33E-8 1.33E-6 1.80E-8 2.40E-8 2.40E-6 4.40E-8 5.87E-8 5.87E-6...
  • Page 38 Analog out calibration = 18 (Pfeiffer IKR251) The Pfeiffer IKR251 emulation provides a log linear output. The 901P provides provide only values above 1E-5 Torr. Torr mbar Pascal Vout 5.00E-9 6.67E-9 6.67E-7 2.3240 1.00E-8 1.33E-8 1.33E-6 2.6250 5.00E-8 6.67E-8 6.67E-6 3.3240...
  • Page 39 7.65E-3 1.02E-02 1.02E+00 4.12E-2 5.49E-02 5.49E+00 1.32E-1 1.76E-01 1.76E+01 5.12E-1 6.83E-01 6.83E+01 1.87E+00 1.87E+02 3.29 4.39E+00 4.39E+02 9.53 1.27E+01 1.27E+03 16.8 2.24E+01 2.24E+03 26.5 3.53E+01 3.53E+03 49.9 6.65E+01 6.65E+03 1.41E+02 1.41E+04 6.16E+02 6.16E+04 9.95 1.01E+03 1.01E+05 901P Loadlock Operation manual...
  • Page 40 64.1 8.55E+01 8.55E+03 7.700 114.1 1.52E+02 1.52E+04 7.800 200.7 2.68E+02 2.68E+04 7.910 257.0 3.43E+02 3.43E+04 8.000 314.3 4.19E+02 4.19E+04 8.100 368.5 4.91E+02 4.91E+04 8.200 478.0 6.37E+02 6.37E+04 8.400 606.0 8.08E+02 8.08E+04 8.600 773.1 1.03E+03 1.03E+05 8.800 901P Loadlock Operation manual...
  • Page 41 5.019 2.00E+02 2.67E+02 2.67E+04 5.111 3.00E+02 4.00E+02 4.00E+04 5.224 4.00E+02 5.33E+02 5.33E+04 5.329 5.00E+02 6.67E+02 6.67E+04 5.419 6.00E+02 8.00E+02 8.00E+04 5.495 7.00E+02 9.33E+02 9.33E+04 5.534 7.60E+02 1.01E+03 1.01E+05 5.558 8.00E+02 1.07E+03 1.07E+05 5.614 9.00E+02 1.20E+03 1.20E+05 901P Loadlock Operation manual...
  • Page 42 3.51E+00 3.51E+02 3.13E+00 4.17E+00 4.17E+02 4.05E+00 5.40E+00 5.40E+02 5.30E+00 7.06E+00 7.06E+02 7.27E+00 9.69E+00 9.69E+02 9.68E+00 1.29E+01 1.29E+03 1.25E+01 1.66E+01 1.66E+03 1.55E+01 2.07E+01 2.07E+03 2.54E+01 3.39E+01 3.39E+03 4.74E+01 6.32E+01 6.32E+03 1.08E+02 1.44E+02 1.44E+04 9.95 7.60E+02 1.00E+03 1.00E+05 901P Loadlock Operation manual...
  • Page 43 7.63E+00 7.63E+02 7.04E+00 9.39E+00 9.39E+02 9.53E+00 1.27E+01 1.27E+03 1.25E+01 1.67E+01 1.67E+03 1.68E+01 2.24E+01 2.24E+03 2.16E+01 2.88E+01 2.88E+03 2.65E+01 3.53E+01 3.53E+03 3.36E+01 4.48E+01 4.48E+03 4.99E+01 6.65E+01 6.65E+03 1.06E+02 1.41E+02 1.41E+04 4.62E+02 6.16E+02 6.16E+04 9.95 7.60E+02 1.00E+03 1.00E+05 901P Loadlock Operation manual...
  • Page 44 Analog Output calibration = 28 (MKS 907) Torr mbar Pascal Vout 7.50E-04 1.00E-03 1.00E-01 0.387 1.50E-03 2.00E-03 2.00E-01 0.397 3.00E-03 4.00E-03 4.00E-01 0.418 4.50E-03 6.00E-03 6.00E-01 0.437 6.00E-03 8.00E-03 8.00E-01 0.456 7.50E-03 1.00E-02 1.00E+00 0.473 1.50E-02 2.00E-02 2.00E+00 0.551 2.25E-02 3.00E-02...
  • Page 45 Torr mbar Pascal Vout 1.00E-08 1.33E-08 1.33E-06 2.186111 1.00E-07 1.33E-07 1.33E-05 3.516111 1.00E-06 1.33E-06 1.33E-04 4.846111 1.00E-05 1.33E-05 1.33E-03 6.176111 1.00E-04 1.33E-04 1.33E-02 7.506111 5.00E-04 6.67E-04 6.67E-02 8.435741 1.00E-03 1.33E-03 1.33E-01 8.836111 1.00E-02 1.33E-02 1.33E+00 10.16611 901P Loadlock Operation manual...
  • Page 46 5.25E-01 7.00E-01 7.00E+01 8.75 7.50E-01 1.00E+00 1.00E+02 1.50E+00 2.00E+00 2.00E+02 2.25E+00 3.00E+00 3.00E+02 Analog Output calibration = 33 (MKS 685) (Vout – 4) P = 10 = 4 + log Torr mbar Pascal Vout 1.00E-05 1.33E-05 1.33E-03 1.00 1.00E-04 1.33E-04 1.33E-02...

  • Page 47: Micropirani Gas Dependence

    The 901P MicroPirani is based on measurement of thermal conductivity and consequently its reading depends on gas and gas concentration. The 901P has calibration curves for a number of common gases. For gas setup refer to gas calibration page 17.
  • Page 48 Argon gas dependence Hydrogen gas dependence 901P Loadlock Operation manual...

  • Page 49: Query Command List

    @xxxSD3?;FF below relay will be energized below setpoint value. @xxxSPD?;FF @xxxACKON;FF Setpoint safety delay Transducer information Command Response Explanation @xxxMD?;FF @xxxACK901P;FF Model number (901P) @xxxDT?;FF @xxxACKLoadlock;FF Device type name (MicroPirani) @xxxMF?;FF @xxxACKMKS;FF Manufacturer name (MKS) @xxxHV?;FF @xxxACKA;FF Hardware version @xxxFV?;FF @xxxACK1.00;FF...

  • Page 50: Setup And Configuration Command List

    Set analog voltage output 2 calibration. Information setup Command Response Explanation @xxxUT!LOADLOCK;FF @xxxACKLOADLOCK;FF Set transducer user tag User Switch Command Response Explanation @xxxSW!ON;FF @xxxACKON;FF Enable / disable user switch = Transducer communication address (001 to 253. Broadcast addresses: 254, 255) 901P Loadlock Operation manual...

  • Page 51: Firmware Upgrades (Rs232 Only)

    3. Hold down the User switch while turning power on 4. Release the User switch 5. Run the 900 Series firmware download software and start download  Transducer with RS485 interface cannot be firmware upgraded by the user. Contact MKS customer service for upgrade. 901P Loadlock Operation manual...

  • Page 52: Faq

    Q: Is the transducer compatible with fluorine gases? A: No – the 901P is not intended for use in aggressive environments like semiconductor etch applications. Q: When the transducer is pumped down and isolated by closing a valve the pressure is raising. Is the...
  • Page 53 A: No - the sensor elements cannot be changed with change without its measuring electronics. The transducer flange assembly can be exchanged with the 901P repair kit. Refer to Service and Repair page 52. Q: +24 VDC supply voltage has been connected to analog output+. Is the transducer damaged? A: Likely - the analog output is not protected against applying power to the output pin.

  • Page 54: Trouble Shooting

    Check electrical connection. Check part number to see if transducer has setpoint relays. No analog output Power supply turned off. Check electrical connections. Status LED illuminating red Sensor element defect. Refer to Service and Repair page 901P Loadlock Operation manual...

  • Page 55: Service And Repair

    5. Carefully remove the enclosure (3). 6. Remove the top circuit board (2). 7. Mount the top circuit board (2) on the new 901P Sensor repair kit flange and make sure the printed circuit board alignment identifications match the two boards.

  • Page 56: Specifications

    ± 1% of reading 9 – 30 VDC Supply Voltage: Power consumption: < 1.2 Watt Fuse (thermal recoverable): 200 mA Analog output (MKS standard): 1-9 VDC Analog output 1 resolution: 16 bit Analog output 2 resolution: 12 bit 100 Ω...

  • Page 57: Dimensions

    Dimensions KF16 flange (P/N: 901P-1xxx) mm. [Inch.] Dimensions KF16 long flange (P/N: 901P-8xxx) mm. [Inch.] Dimensions KF25 flange (P/N: 901P-2xxx) mm. [Inch.] 901P Loadlock Operation manual...
  • Page 58 Dimensions VCR4 flange (P/N: 901P-4xxx) mm. [Inch.] Dimensions VCR8 flange (P/N: 901P-5xxx) mm. [Inch.] 901P Loadlock Operation manual...
  • Page 59 Dimensions NPT 1/8” flange (P/N: 901P-3xxx) mm. [Inch.] 901P Loadlock Operation manual...

  • Page 60: Accessories And Replacement Part Numbers

    PDR900-12-JP PDR900 Controller JP power cable. mbar / Pascal unit PDR900-12-DK PDR900 Controller Danish power cable PDR900 Transducer Cables for 901P (15 pin HD DSUB) For transducer part number: 901P-x12x. 901P-x13x. 901P-x15x Part number Description Interface 100013620 3 m (10ft.)

  • Page 61: Ce Declaration Of Conformity

    I, the undersigned, hereby declare that the equipment above conforms to the above Directive(s) and Standard(s). When installed in accordance with specifications specified in this short form manual and Operation and Installation manual. MKS Denmark ApS. Hellebaek. Denmark July 1, 2009 Ole Wenzel – Managing Director...
  • Page 62  The easy way for setup and configuration  Data logger tool for data analysing S ee mo r e on: w w w .mks in st. co m/p dr 9 0 0 910 DualTrans transducer with integrated display  Display of real time pressure measurements ...

  • Page 63: Index

    User Switch ............ 5; 21 Inductive relay load ..........12 Input/Output Wiring ..........8 Vacuum connections..........6 Internal volume ........... 53 Vibrations ............. 6 Lock function ............21 Warranty .............. 2 Manufacturer ............22 Zero Adjustment ..........17 901P Loadlock Operation manual...
  • Page 64 P/N: 100017121 901P Loadlock Transducer Operation and Installation Manual Revision: I, September 2014...

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