MKS 925 MicroPirani Short Form Manual

P/N: 100017415
Short form manual
REV: A, November 2009
Product: 925-x1280
I/O connector: RJ45 / FCC68
Output: 2 (Edwards APG-100)
RoHS Compliant
Measuring range (N
(1)
Accuracy (N )
2
(1)
Repeatability (N
Supply Voltage:
Power consumption:
Fuse (thermal recoverable):
Analog output (100 Ω impedance):
Analog output resolution:
Setpoint relay range;
Relay contact rating:
Setpoint relay response time:
Materials exposed to vacuum:
Internal volume:
Housing material:
Weight (925 with KF16):
Operating temperature:
Bakeout temperature (Power off):
(1) Accuracy and repeatability values are typical values measured in Nitrogen atmosphere at
ambient temperature after zero adjustment.
(2) Transducer without Viton seal is available for use in UHV applications.
and Air):
2
-4
5×10 to 1x10
-3
1×10 to 100 Torr:
100 to Atm.:
-3
): 1×10 to 100 Torr
2
KF16 flange
KF16 long flange
KF25 flange
VCR4 flange
VCR8 flange
MKS Instruments HPS Products
www.mksinst.com
™
-4
1×10
-3
Torr: ±10% of reading
± 5%
± 25% of reading
± 2%
9 – 30 VDC
< 1.2 Watt
200 mA
2-9Vdc
16 bit
-4
1×10
1A @ 30 VDC/AC resistive load
<100 msec
304 Stainless steel, Silicon
SiO , Si
2
Low out gassing Epoxy resin
2.80 cm
6.63 cm
3.55 cm
1.84 cm
3.06 cm
Stainless steel 304
170g
0 to 40
o
85 C
Torr to Atmosphere
of reading
of reading
Torr to Atm.
N , gold, Viton
3 4
3
3
3
3
3
o
C
(2)