MKS HPS Products 999 Quattro Series Operation And Maintenance Manual
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MKS HPS Products 999 Quattro Series Operation And Maintenance Manual

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Series 999 Quattro
Multisensor Transducer
Operation and
Maintenance Manual

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Summary of Contents for MKS HPS Products 999 Quattro Series

  • Page 1 Series 999 Quattro Multisensor Transducer Operation and Maintenance Manual...
  • Page 3 Series 999 Quattro Multisensor Transducer Part # 100012689 Revision A Series 999 Quattro Transducer...
  • Page 4 (The part number can be found on your packing slip. Both the part number and serial number are located on the bottom side of the housing.) For more information or literature, contact: ® Products of MKS Instruments, Inc. 5330 Sterling Drive Boulder, CO 80301 USA Phone: 1- 303-449-9861...

  • Page 5: Table Of Contents

    Table of Contents Package Contents ..............9 Symbols Used in this Manual ..........10 Safety Precautions ..............11 General Specifications ............13 Feature and Control Locations ..........14 About the 999 Quattro Transducer ........... 15 Typical Applications for the 999 Quattro Transducer ....16 Installing the 999 Quattro Transducer ........
  • Page 6 Firmware Version Piezo – FV2 ............28 Firmware Version Hot Cathode – FVHC ........... 28 Hardware Version MicroPirani – HV ..........28 Hardware Version Hot Cathode – HVHC ........... 28 Manufacturer – MF ................29 Model – MD ..................29 Serial Number –...
  • Page 7 Accessories ................46 NOTES: ................... 47 Warranty .................. 48 Appendix: How the 999 Quattro Transducer Works ....49 Hot Cathode Ionization Sensor ............... 49 Piezo ...................... 50 Pirani Sensor ..................51 MicroPirani Sensor Series 999 Quattro Transducer...
  • Page 8 Series 999 Quattro Transducer...

  • Page 9: Package Contents

    If any items are missing from the package, call MKS Customer Service at 1-303-449-9861 or 1-800-345-1967. Do not return the product to MKS unless specified to do so by MKS Customer Service. MKS customer service and support: MKS Instruments, Inc.

  • Page 10: Symbols Used In This Manual

    Symbols Used in this Manual CAUTION: Risk of electrical shock. CAUTION: Refer to the manual. Failure to heed the message could result in personal injury, serious damage to the equipment, or both. Calls attention to important procedures, practices, or conditions. Series 999 Quattro Transducer...

  • Page 11: Safety Precautions

    Do not substitute parts or modify instrument. Do not install substitute parts or perform any unauthorized modification to the instrument. Return the instrument to an MKS Calibration and Service Center for service and repair to ensure that all of the safety features are maintained.
  • Page 12 Allow only qualified technicians to service the transducer. Users should not remove covers, casing, or plug-in components. Injury may result. A qualified technician must perform any part replacement or internal adjustments. Keep the unit free of contaminants. Do not allow contamination of any kind to enter the unit before or during use.

  • Page 13: General Specifications

    General Specifications Measuring range 5x10 to 1500 Torr Set point range (absolute) 5x10 to 1500 Torr Set point range (differential) ± 760 Torr Analog out DAC1 0.5 to 7.09V DAC2 .75 to 10.23V Maximum pressure 1500 Torr Repeatability 1x10 to1500 ±...

  • Page 14: Feature And Control Locations

    Feature and Control Locations All user access is through the 15-pin D-sub connector and the two push buttons. See the RS-485 Command Set section for more information. The POWER LED indicates when power is applied to the 999 Quattro Transducer. The FILAMENT ON LED indicates when power is applied to the transducer filament.

  • Page 15: About The 999 Quattro Transducer

    About the 999 Quattro Transducer The 999 Quattro Transducer not only includes three sensors in one package but also gives the functionality of four sensors: 1) hot cathode ionization sensor; 2) micro Pirani sensor; 3) differential piezo sensor; 4) absolute piezo sensor.

  • Page 16: Typical Applications For The 999 Quattro Transducer

    Typical Applications for the 999 Quattro Transducer ♦ Measure total vacuum pressure: atmosphere, sub atmosphere, low and high vacuum. ♦ Control system pressure using digital communications or analog output as input to an automatic pressure controller. ♦ Control valves and pumps to automate pump-down using relay set points.

  • Page 17: Installing The 999 Quattro Transducer

    Installing the 999 Quattro Transducer Quattro Transducer Installation Location Locate the 999 Quattro Transducer where it can measure chamber pressure. Install the device away from pumps and gas sources so it will give the most representative pressure values. Orientation The 999 Quattro Transducer can be installed and operated in any position without compromising accuracy.

  • Page 18: Contamination

    Contamination Locate and orient the 999 Quattro Transducer where contamination is least likely. For example, if the 999 Quattro Transducer is mounted directly above a source of evaporation, the vapor could contaminate the sensor elements and cause the calibration to shift. Whenever possible, install the 999 Quattro Transducer with the vacuum port facing down to keep particulates or liquids from entering the device.

  • Page 19: Electrical Connection

    Electrical Connection Use a cable with a female, 15-pin, high-density D-sub connector with strain reliefs to ensure proper electrical connection and to reduce stress on the connectors. Ensure a low impedance electrical connection between the 999 sensor body and the grounded vacuum system to shield the sensor from external electromagnetic sources.

  • Page 20: 999 Quattro Transducer Electrical Connections Table

    999 Quattro Transducer Electrical Connections Table The digital communications connections are pins 1 and 2. RS-485 uses pin 1 for RS485(-) and pin 2 for RS485(+). RS485 -/RS232 TXD RS485 +/RS232 RXD POWER + (24V) PIN 1 PIN 5 POWER - ANALOG OUT + ANALOG OUT - RELAY 1 N.O.
  • Page 21 Pressure reading gas dependence: The MicroPirani is based on measurement of thermal conductivity; therefore, the MicroPirani readout depends on the gas type and concentration. The MicroPirani is calibrated for Nitrogen gas, and will read a higher pressure when exposed to atmospheric air. The Hot Cathode sensor is based on measurement of gas ionization;...

  • Page 22: Operation

    Operation The 999 Quattro Transducer operation parameters are preset at the factory. The table below shows the factory default settings. Use the commands described on the following pages to change parameter settings as necessary. The user interface to the 999 Quattro Transducer is through RS-485 or RS- 232 serial communications.

  • Page 23: Rs-485 Protocol

    RS-485 Protocol RS232 USES THE SAME PROTOCOL. The 999 supports 2400, 4800, 9600, and 19200 baud rates (factory default: 9600). The data format is 8 data bits, no parity, and one stop bit. RS485 is two wires (half duplex). Standard Addresses Valid addresses are 3 digits, 001 to 253 (factory default: 253).

  • Page 24: Response Syntax (Ack/Nak)

    Response Syntax (ACK/NAK) The ASCII characters 'ACK' or 'NAK' preface the query or command response string. The ACK sequence signifies the message was processed successfully. The NAK sequence indicates there was an error. The response to a query or a successful command is: @<device address>ACK<data>;FF The response to a message with an error is: @<device address>NAK<NAK code>;FF...

  • Page 25: Rs-485 Command Set

    RS232/RS-485 Command Set The query and command formats shown in this section are examples; the values may vary for the user’s installation. Set Up Commands Active Filament – AF The AF command returns which of the Hot Cathode sensor’s two filaments is active, or selects between the sensor’s two filaments.

  • Page 26: Baud Rate - Br

    Baud Rate – BR The BR command returns or sets the baud rate of the communications protocol. The 999 responds to this command at the present baud rate; however, the user will need to change the baud rate on the host to ensure future commands are sent at the same rate.

  • Page 27: Rs Delay - Rsd

    RS Delay – RSD The RSD command enables or disables a delay of up to 5 milliseconds between recieve and transmit mode. This is useful if communucation issues arise with in the RS232 installation. Values: OFF, ON (default ON) Query: @001RSD?;FF Query Response: @001ACKOFF;FF...

  • Page 28: Status Commands

    Status Commands Device Type – DT The DT command returns the transducer device type. Query: @001DT?;FF Query Response: @001ACKMP-HC 999;FF Filament Status – FS The FS command returns the operating status of the active filament. To select between the sensor’s two filaments, see Active Filament – AF (Set Up Commands section).

  • Page 29: Manufacturer - Mf

    Manufacturer – MF The MF command returns the 999 manufacturer. Query: @001MF?;FF Query Response: @001ACKMKS/HPS-PRODUCTS;FF Model – MD The MD command returns the 999 model number. Query: @001MD?;FF Query Response: @001ACK999;FF Serial Number – SN The SN command returns the 999 serial number. Query: @001SN?;FF Query Response:...

  • Page 30: Transducer Temperature - Tem1, Tem2

    Transducer Temperature – TEM1, TEM2 The TEM1 command returns the MicroPirani on-chip sensor temperature in C. The TEM2 command returns the Hot Cathode micorprocessor temperature in C. If the temperature exceeds 70 C, the ambient temperature may be too high or the filament power is too high (nominal temperature rise is C above ambient).

  • Page 31: Pressure Reading - Pr1, Pr2, Pr3, Pr4

    Pressure Reading – PR1, PR2, PR3, PR4 The pressure reading command returns the measured pressure from either the MicroPirani (PR1), the Hot Cathode (PR2), the Piezo (PR4) or a combination of all (PR3). For pressures above 60 Torr the Piezo provides the reading (see ATD command).

  • Page 32: Set Point Value - Sp1, Sp2, Sp3

    Set Point Value – SP1, SP2, SP3 The set point value command returns or sets the set point value. The set point value is the pressure either below or above which the set point relay will be energized (i.e., N.O. and C contacts will be closed). The direction of the set point (ABOVE or BELOW) is configured using the Set Point Direction –...

  • Page 33: Enable Set Point - En1, En2, En3

    Enable Set Point – EN1, EN2, EN3 The enable set point command returns enable status, or enables/disables the set point relay. Values: OFF,ABS,DIFF Query: @001EN1?;FF Query Response: @001ACKOFF;FF Command: @001EN1!ON;FF Command Response: @001ACKON;FF Enable Control Set Point – ENC The ENC command allows the MicroPirani to turn the Hot Cathode on or off. If the value is ON, decreasing pressure turns the Hot Cathode on at 3x10 Torr and increasing pressure turns the Hot Cathode off at 5x10 Torr.

  • Page 34: Calibration Commands

    Calibration Commands Atmospheric Calibration – ATM The ATM command sets full scale readout for the MicroPirani. Vent the transducer to atmospheric pressure before performing atmospheric calibration. For best results, leave the MicroPirani at the calibration pressure for at least 20 minutes before using the ATM command.

  • Page 35: Atmospheric Piezo Absolute Pressure Output Calibration - Atd

    Atmospheric Piezo Absolute Pressure output Calibration – ATD The ATD command sets the combined pressure reading (PR3 and analog output) at zero differential pressure. The factory default value is 760 Torr and the transducer will read 760 Torr @ 0 differential pressure unless the ATD value is entered.

  • Page 36: Analog Output

    Analog Output The 999 Quattro Transducer analog voltage signal pins are 5 (+) and 6 (-). Connect them to a differential input. The transducer provides 2 analog output scales: DAC1 is 0.5V/decade; DAC2 is 0.75V/decade, DAC1 is the default. Do not connect the negative side of the analog output (pin 6) to the power supply return (pin 4) or to any other ground.

  • Page 37: Dac1 Pressure To Voltage Table

    DAC1 Pressure to Voltage Table Pressure (Torr) Volts Pressure (Torr) Volts 1.0E-10 0.50 8.0E-04 3.95 2.0E-10 0.65 1.0E-03 4.00 4.0E-10 0.80 2.0E-03 4.15 8.0E-10 0.95 4.0E-03 4.30 1.0E-09 1.00 8.0E-03 4.45 2.0E-09 1.15 1.0E-02 4.50 4.0E-09 1.30 2.0E-02 4.65 8.0E-09 1.45 4.0E-02 4.80...
  • Page 38 To calculate Pressure from Voltage: V-7.75 P=10 Where: C=0 for mBar C=2 for Pascal C=-0.125 for Torr Series 999 Quattro Transducer...

  • Page 39: Dac2 Pressure To Voltage Table

    DAC2 Pressure to Voltage Table Series 999 Quattro Transducer...

  • Page 40: Sensitivities Relative To Nitrogen

    Sensitivities Relative to Nitrogen If using a gas other than air/nitrogen in the system, then the user will need to change the gas correction factor for the Hot Cathode to provide an accurate pressure reading (see Gas Correction – GC in the Set Up Commands section).

  • Page 41: Control And Status Pins Operation

    Control and Status Pins Operation Degas On (Pin 13) Degas is enabled by connecting this pin to power ground. This line has precedence over the DG command or the Degas pushbutton. If this line is still connected to ground after degas times out (30 minutes) the line will need to be disconnected and reconnected to ground to re-enable degas.

  • Page 42: Degassing The Sensor

    Degassing the Sensor Sensitivity of the Hot Cathode sensor may drift if the sensor elements become contaminated with system process gasses. This becomes more of a problem the lower the pressure being measured (i.e., (≤10 Torr). To rid the sensor elements of the excess system process gasses, periodically degas the sensor.

  • Page 43: Leak Detection

    Leak Detection Its inherent sensitivity to gas type makes the 999 Quattro Transducer useful for detecting leaks at rates greater than 10 std cc/sec of helium. It is a useful complement to a mass spectrometer leak detector, which locates smaller leaks. Probe the suspected leak areas with a gas that is different from that of the system gas.

  • Page 44: Maintenance And Troubleshooting

    Maintenance and Troubleshooting Maintenance and Troubleshooting Table i l a – i l a i l a – e i l a l i g i l a l i e l i a l i l l i Series 999 Quattro Transducer...

  • Page 45: Cleaning The 999 Quattro Transducer Case And Sensor Tube

    x i f Cleaning the 999 Quattro Transducer Case and Sensor Tube The finish of the 999 Quattro Transducer case is designed to resist many laboratory solvents; clean the case with water or alcohol. Take care to prevent a liquid from entering the electronic enclosure. Roughing pump oils and other fluids condensing or decomposing on the heated filament can contaminate the sensors elements.

  • Page 46: Accessories

    Accessories Description Part Number Connector Kit (female 15-pin D-sub) 100008104 Operation and Maintenance Manual 100012689 Series 999 Quattro Transducer...

  • Page 47: Notes

    NOTES: Series 999 Quattro Transducer...

  • Page 48: Warranty

    MKS or authorized representative to the original purchaser (PURCHASER). Any product or parts of the product repaired or replaced by MKS under this warranty are warrantied only for the remaining unexpired part of its one (1) year original warranty period. After expiration of the applicable warranty period, the PURCHASER shall be charged MKS’...

  • Page 49: Appendix: How The 999 Quattro Transducer Works

    Appendix: How the 999 Quattro Transducer Works The Series 999 Quattro Transducer is a combination of three different types of pressure sensors: the Hot Cathode , Piezo, and the MicroPirani. The Hot Cathode sensor measures pressure indirectly from ion currents, which is proportional to pressure and ionization probability.

  • Page 50: Piezo

    Piezo The Piezo sensor consists of a bridge of piezoresistive elements on a diaphragm, which change their resistance proportional to the pressure applied to the sensor. The resistance change in a monocrystalline semiconductor (piezoelectric effect) is substantially higher than that in a standard strain gauge.

  • Page 51: Pirani Sensor

    The sensitivity (K) is dependent on gauge geometry and electrode potentials. Pirani Sensor The Pirani sensor is a type of thermal conductivity sensor. It consists of a hot wire suspended from supports. This wire loses thermal energy in three ways: ♦...

  • Page 52: Micropirani Sensor

    Implanted resistors Silicon R+∆R R-∆R Depletion region R-∆R R+∆R Diaphragm MicroPirani Sensor The MicroPirani sensor functions the same as a traditional Pirani sensor, but instead of a heated wire, a thin film Nickel resistive element is deposited onto a silicon substrate. This heated filament is maintained at a constant temperature above the ambient temperature of the substrate.
  • Page 53 Series 999 Quattro Transducer...
  • Page 54 Series 999 Quattro Transducer...

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