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Intended Use
The Compact Cold Cathode Gauge IMG-500 has been designed
for vacuum measurement of gases in the pressure range of
-9
2×10
The gauges can be operated in connection with an Agilent
Vacuum Gauge Controller AGC-100, an Agilent Turbo AG Rack
Controller, or with another controller.
Functional Principle
The gauge functions with a cold cathode ionization measure-
ment circuit (according to the inverted magnetron principle).
Over the whole measurement range, the measuring signal is
output as a logarithm of the pressure.
Compact Cold Cathode Gauge IMG-500
-2
... 1×10
mbar.
7
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