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2
Technical Data
Measuring range (air, N
Accuracy
Reproducibility
Output signal (measuring signal)
Voltage range
Voltage vs. pressure
Error signal
Output impedance
Minimum loaded impedance
Response time
p > 10
p = 10
Identification gauge
Supply
Voltage at the gauge
1)
Agilent controllers fulfill this requirement.
Compact Cold Cathode Gauge IMG-500
)
2
-6
mbar
-8
mbar
DANGER
The gauge may only be connected to power sup-
plies, instruments or control devices that conform
to the requirements of a grounded protective extra-
low voltage (SELV). The connection to the gauge
has to be fused
-9
... 1×10
2×10
±30% (in the range
-8
... 1×10
1×10
±5% (in the range
-8
... 1×10
1×10
0 ... +10.5 V
logarithmic , 1.0 V/decade
<0.5 V
2×10
10 k
, short-circuit proof
(pressure dependent)
<10 ms
1000 ms
100 k, referenced to
supply common
1)
.
15 ... 30 VDC
(ripple
11
-2
mbar
-3
mbar)
-3
mbar)
no supply
1 V
)
pp
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