Agilent Technologies IMG-500 Manual page 14

Compact Cold Cathode Gauge IMG-500
Measuring Signal vs. Pressure
Pressure p
1E+00
1E–01
1E–02
1E–03
1E–04
1E–05
1E–06
1E–07
1E–08
1E–09
1E–10
0.0 0.5 1.0 1.5 2.0
p = 10
c
valid in the range
2.5 3.0 3.5 4.0 4.5 5.0 5.5
Measurement signal U [V]
U-c 
mbar Pa
10.5 8.5
-9
2×10 mbar < p < 1×10
-9
1.5×10 Torr < p < 7.5 ×10
-7
2×10 Pa < p < 1 Pa
14
6.0 6.5 7.0 7.5 8.0 8.5 9.0
U = c + log
Torr
10.625
-2
mbar
-3
Torr
Pa
mbar
torr
9.5 10.0 10.5
p
10