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Agilent Technologies IMG-500 Manual

Compact cold cathode gauge
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Summary of Contents for Agilent Technologies IMG-500

  • Page 4: Table Of Contents

    Contents Product Identification Validity Intended Use Functional Principle Safety 1.1 Symbols Used 1.2 Personnel Qualifications 1.3 General Safety Instructions 1.4 Liability and Warranty Technical Data Installation 3.1 Vacuum Connection 3.2 Power Connection Operation Deinstallation Maintenance, Troubleshooting Returning the Product Disposal Literature For cross-references within this document, the symbol (...

  • Page 6: Product Identification

    Compact Cold Cathode Gauge IMG-500 Product Identification In all communications with Agilent, please specify the infor- mation given on the product nameplate. For convenient refer- ence copy that information into the space provided below. Agilent Technologies Model: Made in Liechtenstein...

  • Page 7: Intended Use

    Compact Cold Cathode Gauge IMG-500 Intended Use The Compact Cold Cathode Gauge IMG-500 has been designed for vacuum measurement of gases in the pressure range of … 1×10 2×10 mbar. The gauges can be operated in connection with an Agilent Vacuum Gauge Controller AGC-100, an Agilent Turbo AG Rack Controller, or with another controller.

  • Page 8: Safety

    Compact Cold Cathode Gauge IMG-500 Safety Symbols Used DANGER Information on preventing any kind of physical injury. WARNING Information on preventing extensive equipment and environ- mental damage. Caution Information on correct handling or use. Disregard can lead to malfunctions or minor equipment damage.

  • Page 9: General Safety Instructions

    Compact Cold Cathode Gauge IMG-500 General Safety Instructions  Adhere to the applicable regulations and take the necessary precautions for the process media used. Consider possible reactions with the product materials. Consider possible reactions (e.g. explosion) of the process media due to the heat generated by the product.

  • Page 10: Liability And Warranty

    Compact Cold Cathode Gauge IMG-500 Liability and Warranty Agilent assumes no liability and the warranty becomes null and void if the end-user or third parties  disregard the information in this document  use the product in a non-conforming manner ...

  • Page 11: Technical Data

    Compact Cold Cathode Gauge IMG-500 Technical Data … 1×10 Measuring range (air, N 2×10 mbar ±30% (in the range Accuracy … 1×10 1×10 mbar) ±5% (in the range Reproducibility … 1×10 1×10 mbar) Output signal (measuring signal) 0 … +10.5 V Voltage range Voltage vs.
  • Page 12 Compact Cold Cathode Gauge IMG-500 ≤2 W Power consumption ≤1 AT Fuse 16 … 30 VDC Voltage at the supply unit with ≤ maximum cable length (ripple Adjustment the gauge is adjusted at the factory and requires no maintenance. Electrical connection...
  • Page 13 Compact Cold Cathode Gauge IMG-500 Temperatures +5 … +55 °C Operation Bakeout 150 °C (without electronics and magnetic shielding) -40 … +65 °C Storage ≤80% at temperatures Relative humidity ≤+31°C decreasing to 50% at +40°C Mounting orientation indoors only, altitude up to...
  • Page 14 Compact Cold Cathode Gauge IMG-500 Measuring Signal vs. Pressure Pressure p 1E+00 1E–01 mbar 1E–02 torr 1E–03 1E–04 1E–05 1E–06 1E–07 1E–08 1E–09 1E–10 0.0 0.5 1.0 1.5 10.0 10.5 Measurement signal U [V]  p = 10 U = c + log...
  • Page 15 Compact Cold Cathode Gauge IMG-500 Gas Type Dependence Indicated pressure (gauge calibrated for air) p [mbar] Luft / Air Xe Kr Ne He –3 –4 –5 –6 –7 –7 –6 –5 –4 –3 –2 [mbar] In the range below 10 mbar, the pressure indication is linear.

  • Page 16: Vacuum Connection

    Compact Cold Cathode Gauge IMG-500 Installation Vacuum Connection DANGER DANGER: overpressure in the vacuum system >1 bar Injury caused by released parts and harm caused by escaping process gases can result if clamps are opened while the vacuum system is pressurized.
  • Page 17 Compact Cold Cathode Gauge IMG-500 DANGER DANGER: protective ground Products that are not correctly connected to ground can be extremely hazardous in the event of a fault. Electrically connect the gauge to the grounded vacuum chamber. This connection must conform to...
  • Page 18 Compact Cold Cathode Gauge IMG-500 WARNING WARNING: electric arcing Helium may cause electric arcing with detrimental effects on the electronics of the product. Before performing any tightness tests put the pro- duct out of operation and remove the electronics unit.
  • Page 19 Compact Cold Cathode Gauge IMG-500 When making a CF flange connection, it can be ad- vantageous to temporarily remove the electronics and the magnet unit. Hex. socket AF 1.5 AF 7 Protective lid Keep the protective lid.
  • Page 20 Compact Cold Cathode Gauge IMG-500 Remove the protective lid and connect the product to the vacuum system. Seal with centering ring Protective lid Clamp Seal with centering ring and filter Keep the protective lid.

  • Page 21: Power Connection

    Compact Cold Cathode Gauge IMG-500 Power Connection Make sure the vacuum connection is properly made ( "Vacuum Connection").  If no sensor cable is available, make one according to the following diagram. Signal – 10 k Ident – Electrical connection Supply ( 15 …...

  • Page 22: Operation

    Compact Cold Cathode Gauge IMG-500 Operation When the supply voltage is applied, the measuring signal is available between pins 3 and 5. Over the whole measurement range, the measuring signal is output as a logarithm of the pressure (measuring signal vs. pressure  "Technical Data").
  • Page 23 Compact Cold Cathode Gauge IMG-500 Ignition Delay When cold cathode measurement systems are activated upon switching the gauge on, an ignition delay occurs, which is typi- cally: 0.1 minute mbar 1 minute mbar 5 minutes 2×10 mbar Contamination Gauge failures due to contamination or wear and tear, as well as expendable parts (e.g.

  • Page 24: Deinstallation 244

    Compact Cold Cathode Gauge IMG-500 Deinstallation DANGER DANGER: contaminated parts Contaminated parts can be detrimental to health and environment. Before beginning to work, find out whether any parts are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts.

  • Page 25: Maintenance, Troubleshooting

    Compact Cold Cathode Gauge IMG-500  Remove the gauge from the vacuum system and place the protective lid. When deinstalling a CF flange connection, it can be ad- vantageous to temporarily remove the electronics and the magnet unit (  19).

  • Page 26: Returning The Product

    Compact Cold Cathode Gauge IMG-500 Returning the Product WARNING WARNING: forwarding contaminated products Contaminated products (e.g. radioactive, toxic, caustic or microbiological hazard) can be detrimen- tal to health and environment. Products returned to Agilent should preferably be free of harmful substances. Adhere to the for-...

  • Page 27: Disposal

    Compact Cold Cathode Gauge IMG-500 Disposal DANGER DANGER: contaminated parts Contaminated parts can be detrimental to health and environment. Before beginning to work, find out whether any parts are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts.

  • Page 28: Literature

    Compact Cold Cathode Gauge IMG-500 Literature  [1] www.agilent.com Instruction Manual Compact Cold Cathode Pirani Gauge IMG-500 tqna75e1 Agilent Technologies, Lexington, MA 02421, USA  www.agilent.com Instruction Manual Vacuum Gauge Controller AGC-100 tqnb15e1 Agilent Technologies, Lexington, MA 02421, USA...
  • Page 29 Compact Cold Cathode Gauge IMG-500 Notes...
  • Page 30 Compact Cold Cathode Gauge IMG-500 Notes...

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