Agilent Technologies IMG-500 Manual page 15

Compact Cold Cathode Gauge IMG-500
Gas Type Dependence
Indicated pressure (gauge calibrated for air)
p [mbar]
4
2
–3
10
8
6
4
2
–4
10
8
6
4
2
–5
10
8
6
4
2
–6
10
8
6
4
2
–7
10
–7 –6
10 10
2 4 6 2
In the range below 10
For gases other than air, the pressure can be determined by
means of a simple conversion formula:
Where
Xe Kr
–5 –4
10 10
4 6 2 4 6
p [mbar]
eff
-5
mbar, the pressure indication is linear.
p = K × pressure reading
eff
Gas type
Air (O , CO, N )
2 2
Xe
Kr
Ar
H
2
Ne
He
15
Luft / Air
O
2
CO
Ar N H Ne He
2 2
–3
10
2 4 6 2 4 6
K (mean values)
1.0
0.4
0.5
0.8
2.4
4.1
5.9
–2
10