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Instruction Manual
µ-FLOW & LIQUI-FLOW series
Thermal Mass Flow Meters/Controllers for liquids
Doc. no.: 9.17.161A Date: 18-02-2022
µ-FLOW L01(V12)
LIQUI-FLOW L13(V12), L23(V12)
LIQUI-FLOW L13I, L23I
ATTENTION
Please read this document carefully before installing and operating the product.
Not following the guidelines could result in personal injury and/or damage to the equipment.
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Table of Contents
Related Manuals for BRONKHORST u-FLOW Series
Summary of Contents for BRONKHORST u-FLOW Series
- Page 1 Instruction Manual µ-FLOW & LIQUI-FLOW series Thermal Mass Flow Meters/Controllers for liquids Doc. no.: 9.17.161A Date: 18-02-2022 µ-FLOW L01(V12) LIQUI-FLOW L13(V12), L23(V12) LIQUI-FLOW L13I, L23I ATTENTION Please read this document carefully before installing and operating the product. Not following the guidelines could result in personal injury and/or damage to the equipment.
- Page 2 Check the outside packaging box for damage incurred during shipment. If the box is damaged, the local carrier must be notified at once regarding his liability. At the same time a report should be submitted to your Bronkhorst representative. Carefully remove the equipment from the box. Verify that the contents of the package was not damaged during shipment.
- Page 3 ______________________________________ Warranty Bronkhorst® products are warranted against defects in material and workmanship for a period of three years from the date of shipment, provided they are used in accordance with the ordering specifications and not subject to abuse or physical damage. Products that do not operate properly during this period may be repaired or replaced at no charge.
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Page 4: Table Of Contents
Contents ______________________________________ Bronkhorst ® ______________________________________ Introduction ............................7 1.1. Scope of this manual ........................7 1.2. Intended use ............................. 7 1.3. Products descriptions ........................8 1.4. Product overview ..........................8 1.5. Calibration............................9 1.6. Maintenance ............................. 9 1.7. Documentation ..........................9 Product specifications ........................ - Page 5 ______________________________________ Bronkhorst ® ______________________________________ 4.10. Communication interface ........................ 21 4.10.1. Analog operation ........................22 4.10.2. Digital operation ........................22 4.10.2.1. RS-232 communication ......................22 4.10.2.2. Fieldbus operation ........................ 23 4.11. Hardware interface ......................... 23 4.11.1. LED indications ......................... 23 4.11.1.1.
- Page 6 ______________________________________ Bronkhorst ® ______________________________________ Returns ............................. 50 7.1. Removal and return instructions ..................... 50 7.2. Disposal (end of lifetime) ........................ 50 ________________________________________________________________________________________________ Page 6 of 50 9.17.161 µ-FLOW & LIQUI-FLOW Instruction Manual L01, L13(I), L23(I), L13V12, L23V12...
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Page 7: Introduction
(e.g. pressure, temperature) as specified at ordering time. If you are planning to use the product (including any third party components supplied by Bronkhorst, such as pumps or valves) with other media and/or other conditions, always check the wetted materials (including seals) for compatibility. -
Page 8: Products Descriptions
Control valves can either be integrally or separately mounted. The standard control valves on Bronkhorst® mass flow controllers are suited for max. 100 bar pressure ratings. These valves are normally closed and available up to Kv-values of 2.37 * 10... -
Page 9: Calibration
The µ-FLOW and LIQUI-FLOW come with all necessary documentation for basic operation and maintenance. Some parts of this manual refer to other documents, most of which can be downloaded from the Bronkhorst website. Calibration certificates, test certificates and material certificates are included in the scope of delivery or can be provided on request. - Page 10 ______________________________________ Bronkhorst ® ______________________________________ Technical Hook-up diagram CANopen 9.16.217 9.16.216 documentation Hook-up diagram DeviceNet™ 9.16.122 9.16.129 Hook-up diagram EtherCAT® 9.16.124 9.16.253 Hook-up diagram EtherNet/IP 9.16.215 9.16.253 Hook-up diagram FLOW-BUS 9.16.120 9.16.127 Hook-up diagram Modbus ASCII / RTU 9.16.123 9.16.130 Hook-up diagram Modbus TCP 9.16.234...
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Page 11: Product Specifications
If you have a question about the product or if you find the product does not meet the specifications as ordered, do not hesitate to contact your Bronkhorst representative. See section Service for contact information. The serial number label shows some essential technical specifications of the product as ordered (note that the image does not necessarily reflect the actual specifications of your instrument): •... - Page 12 ______________________________________ Bronkhorst ® ______________________________________ Type Range Configurable input/output (pin 5) Code Instrument type Disabled, 0 Vdc (default) µ-FLOW meter/controller, ≤2g/h 0...10 Vdc output, controller LIQUI-FLOW meter/controller, ≤100g/h 4...20 mA output, controller LIQUI-FLOW meter/controller, ≤1000g/h 3.8...20.8 mA output, (TEIP11/Badger) controller Digital output, min/max alarm...
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Page 13: Sealing Material Compatibility
When in doubt, do not hesitate to contact your Bronkhorst representative for more information. • Always make sure that the used process gases or mixtures thereof are compatible with the sealing materials the instrument is equipped with. - Page 14 ______________________________________ Bronkhorst ® ______________________________________ The default frequency range to represent 0…100% flow is 0…10000 Hz. Any other frequency range must be specified on order. Digital pulse output, batch counter M8/A2 is pulled down to 0Vdc when a given batch size is reached (during a given pulse length).
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Page 15: Installation
Contact your local Bronkhorst representative for more information. Always use the mounting holes to fixate the instrument. Consult the... -
Page 16: Fluid Connections
• For leak tight installation, follow the guidelines of the supplier of the fittings. Bronkhorst® µ-FLOW and LIQUI-FLOW meters/controllers can be fitted with different fitting types (e.g. compression) or special fitting types on request. Check the fluid system for leaks before applying full operating pressure, especially when using •... -
Page 17: Fieldbus Connection
Always check the total power consumption of your instruments before connecting them to a fieldbus system. Do not exceed the maximum power of the power supply unit. If you need assistance with setting up a bus configuration, contact your Bronkhorst representative for information. -
Page 18: Other Fieldbuses
______________________________________ Bronkhorst ® ______________________________________ Consult Instruction manual Modbus interface (document no. 9.17.035) for more information about setting up a Modbus network. 3.3.3. Other fieldbuses For other fieldbuses consult the concerning fieldbus manual. ________________________________________________________________________________________________ Page 18 of 50 9.17.161 µ-FLOW & LIQUI-FLOW Instruction Manual L01, L13(I), L23(I), L13V12, L23V12... -
Page 19: Operation
4.4. Rapid gas decompression / explosive decompression For instruments used above 10 bar (g): Bronkhorst recommends a maximum decompression rate of 70 bar/min, according to NACE TM0297. Exceeding this rate can have negative influence on the lifetime of the sealing materials. -
Page 20: Mass Flow Measurement And Control
______________________________________ Bronkhorst ® ______________________________________ 4.5. Mass flow measurement and control When powering up, the instrument needs a couple of seconds to start up the electronics. As soon as the start-up sequence has finished (green LED glows continuously), the instrument is ready to... -
Page 21: Preventing Condensation
Condensed water will influence the measurement and can cause a product failure. Continuous purging of the housing interior or exterior with a dry, inert gas like Nitrogen can help prevent condensation. Contact your Bronkhorst representative for setting up an optimal purging configuration. 4.9.2. Cleaning temperature The µ-FLOW and LIQUI-FLOW may be cleaned with high temperature fluids. -
Page 22: Analog Operation
No limitations on setpoint values below 2 % 4.10.2.1. RS-232 communication Digital Bronkhorst® instruments can be monitored and operated via RS-232 using the free FlowWare software tools for Windows. These tools provide a graphical interface to the ProPar protocol (used by FLOW-BUS), for monitoring and changing instrument parameters. -
Page 23: Fieldbus Operation
® ______________________________________ 4.10.2.2. Fieldbus operation For information about parameter access and availability for Bronkhorst® instruments in a specific fieldbus network, consult the according Documentation. 4.11. Hardware interface The µ-FLOW and LIQUI-FLOW offer – depending on the installed digital interface type – the following controls: LED indications •... -
Page 24: Interface Status
______________________________________ Bronkhorst ® ______________________________________ FLOW-BUS Waiting for communication PROFIBUS DP Not used 0.2 sec on, Modbus Not used blink 0.2 sec off DeviceNet™ No bus power EtherCAT ® Not used PROFINET Not used FLOW-BUS Not used PROFIBUS DP Requested parameter not available... -
Page 25: Multifunctional Switch
______________________________________ Bronkhorst ® ______________________________________ • • (green/red) Module status (MOD; right) The tables on the next page list the different LED indications. Network status Pattern Time Indication • continuous Power off or offline • on, green continuous Online, connected, link OK •... -
Page 26: Power-Up Functions
______________________________________ Bronkhorst ® ______________________________________ Reset instrument; clear all warnings and error messages and restart the 4…8 sec instrument Reset instrument; clear all warnings and error messages and restart the 8…12 sec instrument Enable FLASH mode for firmware update: 12…16 sec the instrument shuts down and both LEDs are switched off •... -
Page 27: Network Settings - Readout/Change
______________________________________ Bronkhorst ® ______________________________________ • At the start of each step, the according LEDs starts flashing fast (0.1 second on, 0.1 second off). By pressing and holding the switch, the associated action is started and the flashing slows (0.5 seconds on, 0.5 seconds off). -
Page 28: Rotary Switches
______________________________________ Bronkhorst ® ______________________________________ 400000 19200 19200 250000 38400 45450 500000 56000 93750 57600 187500 115200 500000 128000 1500000 256000 3000000 6000000 12000000 Changing network settings By briefly pressing the switch 5 times with intervals of up to 1 second in normal operation mode, the instrument •... -
Page 29: Adjusting Zero Point
______________________________________ 4.12. Adjusting zero point The zero point of a Bronkhorst® flow meter/controller (the measurement signal that indicates the absence of a flow) is factory adjusted at approximately 20 °C and atmospheric pressure (ambient conditions), with the instrument positioned upright. Under normal circumstances (i.e. when process conditions are constant), the zero point will remain stable. -
Page 30: Digitally
4.13. FlowDDE Digital Bronkhorst® instruments can be operated via RS232 using the Bronkhorst® FlowDDE server application. Dynamic Data Exchange (DDE) provides a basic level of inter process communication between Windows applications. Together with a client application, either self-made or with a third party SCADA program, it is possible to create an easy way of data exchange between the flow meter/controller and a Windows application. -
Page 31: Software (Dde Applications)
(document no. 9.17.067) or the help file in the application. 4.13.1. Software (DDE applications) Examples of free Bronkhorst® DDE client applications: FlowPlot and FlowView. Other software programs (third party) supporting DDE are for example MS-Office, LabVIEW, InTouch and Wizcon. Bronkhorst® software applications 'FlowView' (left) and 'FlowPlot' (right) FlowDDE and other Bronkhorst®... -
Page 32: Digital Parameters
______________________________________ Bronkhorst ® ______________________________________ 5. Digital parameters Each instrument is controlled internally by a number of digital parameters, most of which can only be accessed using digital communication. Each communication protocol uses its own methods for communicating with instruments and accessing parameters. -
Page 33: Special Parameters
______________________________________ Bronkhorst ® ______________________________________ 5.2. Special parameters Init Reset Type Access Range FlowDDE FLOW-BUS Modbus Unsigned char 82/64 0/10 0x000A/11 Value Description unlocked, secured parameters can be read and written to locked, secured parameters are read-only At power-up, Init Reset is always set to ‘Locked’ (value 82). -
Page 34: Default Control Mode
______________________________________ Bronkhorst ® ______________________________________ FLOW-BUS slave Acting as slave instrument on FLOW-BUS RS485 only: FLOW-BUS master output x Slave Factor/100% Valve Close Controller disabled, valve closed Controller Idle Controller disabled, valve frozen in current position Setpoint 100% Controlling, setpoint fixed to 100%... -
Page 35: Advanced Measurement And Control
______________________________________ Bronkhorst ® ______________________________________ Type Access Range FlowDDE FLOW-BUS Modbus Unsigned int 0…41942 0x0020/33 This parameter indicates the flow metered by the instrument. The value of 32000 corresponds to 100%, the maximum measured value output is 131.07%, which translates to 41942. -
Page 36: Device Identification
______________________________________ Bronkhorst ® ______________________________________ Type Access Range FlowDDE FLOW-BUS Modbus Unsigned int 0…30000 0x0022/35 The value of this parameter represents the time it would take to adjust the setpoint if it were changed from 0 to 100%. This feature can be used to smooth 'nervous' controller behavior, e.g. to reduce setpoint overshoot or undershoot. -
Page 37: Alarms
113/1 0xF108…0xF10A/61705…61707 Device type information string; this parameter contains an abbreviation referring to the identification number. 5.5. Alarms Alarm settings are most easily accessible using FlowPlot or FlowView or a Bronkhorst readout and ® control unit. The built-in alarm functionality can be used to handle different alarm types: system errors and warnings •... - Page 38 ______________________________________ Bronkhorst ® ______________________________________ (On DeviceNet™ instruments, only modes 0 and 1 are available). Alarm Info Type Access Range FlowDDE FLOW-BUS Modbus Unsigned char 0…255 1/20 0x0034/53 This parameter provides information about the event type(s) that triggered an alarm situation. The value is a bitwise summation of the issued alarm types;...
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Page 39: Counter
Value Description Multifunctional switch Externally (deprecated) By parameter Reset Automatically (when alarm conditions no longer apply) 5.6. Counter Counter settings are most easily accessible using FlowPlot or FlowView or a Bronkhorst ® readout and control unit. Counter Mode Type Access... - Page 40 ______________________________________ Bronkhorst ® ______________________________________ Mass Normal volume Standard volume Custom volume (Capacity (1.01325 bar(a), 0 °C) (1.01325 bar(a), 20 °C) Unit Pressure, Capacity Unit Type Temperature) ug, mg, g, kg uln, mln, ln, uls, mls, ls, ul, ml, l, mm3n, cm3n, dm3n, m3n...
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Page 41: Network Configuration
______________________________________ Bronkhorst ® ______________________________________ Automatically (e.g. when Counter value is reset) 5.7. Network configuration Changes made to the network settings will not be restored by a factory reset. Default settings Network configuration is done ex factory as indicated on the serial number label or in the technical specifications. The... -
Page 42: Fluid Set
When the parameters described in this section are changed manually, no such checks are performed, and the instrument output may become disordered or the instrument may even get damaged if used in conditions the instrument is not suited for. When in doubt, consult your Bronkhorst representative. Fluid Set Index... - Page 43 ______________________________________ Bronkhorst ® ______________________________________ Type Access Range FlowDDE FLOW-BUS Modbus Unsigned char [10] 1/17 0x8188…0x818C/33161…33165 This parameter contains the name of the current fluid. Capacity Type Access Range FlowDDE FLOW-BUS Modbus 1E-10… Float 1/13 0x8168…0x8169/33129…33130 1E+10 This parameter sets the maximum readout/control value (100%) for the current fluid in readout units corresponding to Capacity Unit.
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Page 44: Advanced Fluid Set Parameters
______________________________________ Bronkhorst ® ______________________________________ 5.8.1. Advanced fluid set parameters Note that the parameters described in this section do not contain any actual measurement values, but only fixed reference values, which can be used for capacity calculations, etc. Inlet Pressure Type... -
Page 45: Master/Slave Configuration (Flow-Bus)
______________________________________ Bronkhorst ® ______________________________________ Dynamic viscosity of the current fluid in Pa·s. 5.9. Master/slave configuration (FLOW-BUS) Normally, there is no communication between slave instruments in a fieldbus system. The FLOW-BUS protocol, however, provides a feature to set up a master/slave relationship between two instruments. The typical behavior of a slave instrument is to automatically set its own setpoint relative to the output (measurement value) of its master. -
Page 46: Troubleshooting And Service
Energizing and de-energizing the equipment can indicate whether there is an electronic failure. After energizing, control behavior can be checked by applying fluid pressure. If you suspect leakage, do not disassemble the device for inspection, but contact your Bronkhorst representative for service or repairs. - Page 47 Piping, filters and/or control Flush fluid system with clean, dry air. If • valve clogged or blocked problem persists, contact Bronkhorst. For external proportional control valves: • supply 0…15 Vdc and operational inlet pressure to valve and slowly increase voltage.
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Page 48: Service
State) Sensor failure Return equipment to factory 6.4. Service For current information about Bronkhorst ® and service addresses, please visit our website: www.bronkhorst.com Do you have any questions about our products? Our Sales Department will gladly assist you selecting the right product for your application. - Page 49 ______________________________________ Bronkhorst ® ______________________________________ +31 859 02 18 66 Bronkhorst High-Tech B.V. Nijverheidsstraat 1A NL-7261 AK Ruurlo The Netherlands ________________________________________________________________________________________________ Page 49 of 50 9.17.161 µ-FLOW & LIQUI-FLOW Instruction Manual L01, L13(I), L23(I), L13V12, L23V12...
- Page 50 ® products covered by the WEEE directive (the majority) carry an image of a crossed-out waste bin (usually on the serial number label). If you wish to dispose of Bronkhorst ® equipment bearing this symbol, simply return it in accordance with the removal and return instructions, and Bronkhorst ®...
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