BRONKHORST EL-FLOW Select Series Instruction Manual
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Instruction Manual
EL-FLOW® Select series
Thermal Mass Flow Meters and Controllers
Doc. no.: 9.17.099 rev. J
Date: 22-02-2022
ATTENTION
Please read this document carefully before installing and operating the product.
Not following the guidelines could result in personal injury and/or damage to the equipment.
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Table of Contents
Related Manuals for BRONKHORST EL-FLOW Select Series
Summary of Contents for BRONKHORST EL-FLOW Select Series
- Page 1 Instruction Manual EL-FLOW® Select series Thermal Mass Flow Meters and Controllers Doc. no.: 9.17.099 rev. J Date: 22-02-2022 ATTENTION Please read this document carefully before installing and operating the product. Not following the guidelines could result in personal injury and/or damage to the equipment.
- Page 2 Disclaimer This document has been reviewed and is believed to be accurate. Bronkhorst High-Tech B.V. does not assume liability for errors, inaccuracies or absence of information. The material in this document merely serves information and illustration purposes;...
- Page 3 Bronkhorst® Warranty Bronkhorst® products are warranted against defects in material and workmanship for a period of three years from the date of shipment, provided they are used in accordance with the ordering specifications and not subject to abuse or physical damage.
- Page 4 Bronkhorst® Instruction Manual EL-FLOW® Select 9.17.099J...
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Page 5: Table Of Contents
Bronkhorst® Table of contents Introduction ......................7 Scope of this manual . - Page 6 Bronkhorst® 3.6.2 Digital operation (RS232) ......................30 3.6.2.1...
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Page 7: Introduction
If you are planning to use the product (including any third party components supplied by Bronkhorst, such as pumps or valves) with other media and/or other conditions, always check the wetted materials (including seals) for compatibility. See the technical specifications of the product and consult third party documentation (if applicable) to check the incorporated materials. -
Page 8: Calibration
Bronkhorst® The standard control valves on Bronkhorst® mass flow controllers are suited for max. 64 or 100 bar pressure ratings. These valves are normally closed and available up to Kv-values of 1.5. Normally open valves can also be supplied. Various other valve constructions enable the controlling of flow rates at very low differential pressure or at high pressure (max. -
Page 9: Documentation
The EL-FLOW® Select comes with all necessary documentation for basic operation and maintenance. Some parts of this manual refer to other documents, most of which can be downloaded from the Bronkhorst website. Calibration certificates, test certificates and material certificates are included in the scope of delivery or can be provided on request. -
Page 10: Model Key
Bronkhorst® Model key The model key on the serial number label contains information about the technical properties of the instrument as ordered. The specific properties can be retrieved with the diagrams below. 1.7.1 EL-FLOW® Select Instruction Manual EL-FLOW® Select 9.17.099J... -
Page 11: El-Flow® Metal Sealed
Bronkhorst® 1.7.2 EL-FLOW® Metal Sealed 9.17.099J Instruction Manual EL-FLOW® Select... -
Page 12: Sealing Material Compatibility
When in doubt, do not hesitate to contact your Bronkhorst representative for more information. The table below lists compatibility with some commonly used gases: Sealing material Viton®... -
Page 13: Installation
· Input and output signal Operating conditions Test pressure Bronkhorst® instruments are pressure tested to at least 1.5 times the specified operating pressure and outboard leak tested to at least 2 * 10 mbar l/s Helium. · The test pressure is stated on a red label on the device; if this label is missing or if the test pressure is insufficient, the device must not be used and should be returned to the factory. -
Page 14: Piping Requirements
FLOW arrow on the body of the instrument. Tighten connections according to the instructions of the supplier of the fittings. The use of Swagelok RS- type stainless steel adapters is recommended, in combination with Bronkhorst® elastomer O-rings. -
Page 15: Fieldbus Connection
· · Ensure all electrical components are grounded to earth. When in doubt about the shielding of your cabling and/or electrical connections, contact your Bronkhorst representative. Always turn off electrical power before connecting or disconnecting equipment electrically. Fieldbus connection If the instrument is provided with a dedicated fieldbus interface, it can be operated digitally in a fieldbus system, using RS485 communication. -
Page 16: Modbus
Bronkhorst® 2.7.2 Modbus Modbus is a 3-wire, RS-485-based fieldbus communication system for parameter value exchange. In this system each instrument/device is equipped with a micro-controller for its own dedicated task. The instrument behaves as a slave, which means all communication (instructions and readout) is initiated by a master device on the Modbus system. -
Page 17: Rs232 Communication
RS232 communication Using a Windows computer, the instrument can be monitored and operated via RS-232. For operation, the free Bronkhorst FlowWare tools can be used, providing a comprehensive user interface to the digital instrument functions. This example uses the following components: EL-FLOW®... -
Page 18: Fieldbus Communication
For information about setting up a fieldbus network with Bronkhorst® instruments, consult the according fieldbus manual. If you need assistance with setting up a fieldbus system, contactyour Bronkhorst representative for information. 2.8.3 E-8000 power supply, readout and control Using an E-8000 module, instruments can be powered (100…240 Vac) and operated via RS-... -
Page 19: Bright Readout And Control
Use the 9-pin D-sub connector on the side of the instrument to plug in the T-part that comes with the BRIGHT module. Consult the BRIGHT manual (document 9.17.048) for more information. This manual can be downloaded from the Accessories and software section on the Bronkhorst® product pages (www.bronkhorst.com/products). 9.17.099J... -
Page 20: Operation
Bronkhorst® Operation After correct installation of the EL-FLOW® Select and when all safety precautions have been taken into account, the instrument can be used for measuring and/or controlling mass flow in the system. Powering up and powering down To maintain control of the fluid system and ensure a safe situation, it is recommended to turn on power before applying fluid pressure and to switch off power only after the fluid system is depressurized. -
Page 21: Changing Fluid Set
When switching to another fluid set, controller settings are automatically adjusted to the new process conditions, so there is no need to change PID controller settings manually. The FlowTune™ software and the associated documentation can be downloaded from the product pages on the Bronkhorst website: www.bronkhorst.com/products To connect with FlowTune™, use RS-232 communication via the 9-pin D-sub connector. -
Page 22: Valve Safe State
Bronkhorst® Valve Safe State When a controlling instrument is not powered or cannot communicate with the fieldbus network (if applicable), all electrical valves operated by the instrument (whether integrated or external) automatically return to their default state. The default state is closed for 'normally closed' valves (n/c) and fully open for 'normally open' valves (n/o). Taking into account the typical process conditions under which the instrument is used (such as the processed media and ambient conditions;... - Page 23 Bronkhorst® Pattern Time Indication continuous Critical error; the instrument needs servicing before it can be used short flash 0.1 sec on, Node occupied: re-install instrument FLOW-BUS 2 sec off No data exchange between master and slave (automatic recovery) PROFIBUS DP...
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Page 24: Interface Status
Bronkhorst® 3.5.1.1 Interface status On instruments with an Ethernet based fieldbus interface, a third LED (bi-color'; green and red) indicates the status of the communication interface: Pattern Time EtherCAT® PROFINET continuous Power off or initializing Interface not (yet) started continuous... -
Page 25: Multifunctional Switch
Bronkhorst® Network status Pattern Time Indication continuous Power off or offline continuous Online , connected, link OK on, green 0.5 sec on, Online, not connected; the instrument is online but has no connections to other blinking, 0.5 sec off nodes or is not allocated to a master green 0.5 sec on,... -
Page 26: Power-Up Functions
Bronkhorst® 3.5.2.2 Power-up functions In order to access these functions, press and hold the switch while powering up the instrument. · · As long as the switch is held, the LEDs show a repeating sequence of patterns, where each pattern indicates a function. -
Page 27: Network Settings - Readout/Change
Bronkhorst® To execute a step, follow these instructions: Press and hold the switch (flashing slows) · · To select value 0 (zero), release the switch within 1 second, otherwise: · Count the number of LED flashes Release the switch when the required value is reached ·... -
Page 28: Rotary Switches
Bronkhorst® Changing network settings · By briefly pressing the switch 5 times with intervals of up to 1 second in normal operation mode, the instrument enters a state in which the node address and baud rate can be changed (non-Ethernet based protocols only; for Ethernet based protocols, network parameters are configured by the fieldbus master and cannot be set on the instrument). -
Page 29: Communication
EtherCAT® Bronkhorst® instruments with an EtherCAT® interface have 3 rotary switches, with which the EtherCAT® Second Address can be set in the range of 0 – 4095 (0xFFF). This value is copied to the Configured Station Alias register (address 0x0012:0x0013) at instrument start-up. -
Page 30: Analog Operation
3.6.2.1 FlowDDE Digital Bronkhorst® instruments can be operated via RS-232 using the Bronkhorst® FlowDDE server application. Dynamic Data Exchange (DDE) provides a basic level of inter process communication between Windows applications. Together with a client application, either self-made or with a third party SCADA program, it is possible to create an easy way of data exchange between the flow meter/controller and a Windows application. -
Page 31: Software (Dde Applications)
MS-Office, LabVIEW, InTouch and Wizcon. Bronkhorst® software applications 'FlowView' (left) and 'FlowPlot' (right) FlowDDE and other Bronkhorst® applications are available on the support CD or can be downloaded from the product pages on the Bronkhorst website: www.bronkhorst.com/products 3.6.3 Digital fieldbus operation (RS485) The following optional fieldbuses are available for EL-FLOW®... - Page 32 Microsoft Office or custom made software, built with third party development software like LabVIEW or a SCADA platform. The FlowWare tools and associated documentation can be downloaded from the product pages on the Bronkhorst website: www.bronkhorst.com/products FlowWare can only be used if the 9-pin D-sub (power) connector is configured for RS232 communication.
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Page 33: Adjusting Zero Point
Adjusting zero point The zero point (the signal that corresponds to zero flow) of a Bronkhorst® flow meter/controller is factory adjusted at approximately 20 °C and atmospheric pressure, with the instrument in an upright position. If the ambient conditions or mounting position are significantly different, the instrument might detect a flow when actually there is none. -
Page 34: Digital Parameters
Modbus address blocks are two bytes big. Larger data types use up to 8 subsequent address blocks, resulting in a maximum variable length of 16 bytes. Values longer than the maximum length are truncated. For more detailed information about setting up a Modbus network with Bronkhorst® instruments, consult the Modbus manual (see Documentation). -
Page 35: Special Parameters
Bronkhorst® Special parameters Init Reset Type Access Range FlowDDE FLOW-BUS Modbus Unsigned char 82/64 0/10 0x000A/11 Init Reset is used to unlock secured parameters (marked with a symbol) for writing. It supports the following values: Value Description unlocked, secured parameters can be read and written to locked, secured parameters are read-only At power-up, Init Reset is always set to ‘Locked’... -
Page 36: Default Control Mode
Bronkhorst® Value Mode Instrument action Setpoint source Setpoint 100% Controlling, setpoint fixed to 100% Valve Fully Open Controller disabled, valve fully opened Calibration Mode Calibration mode enabled (factory only) Analog Slave Acting as slave of other instrument in analog mode... -
Page 37: Measurement And Control
Bronkhorst® Measurement and control Measure Type Access Range FlowDDE FLOW-BUS Modbus Unsigned int 0…41942 0x0020/33 This parameter indicates the flow metered by the instrument. The value of 32000 corresponds to 100%, the maximum measured value output is 131.07%, which translates to 41942. -
Page 38: Device Identification
FLOW-BUS Modbus Unsigned char[20] 113/3 0xF118…0xF11F/ 61721…61728 Instrument serial number for identification. BHT Model Number Type Access Range FlowDDE FLOW-BUS Modbus Unsigned char[35] 113/2 0xF110…0xF117/ 61713…61720 This parameter shows the Bronkhorst® instrument model type information. Instruction Manual EL-FLOW® Select 9.17.099J... -
Page 39: Alarms
Device type information string; this parameter contains an abbreviation referring to the identification number. Alarms Alarm settings are most easily accessible using FlowSuite, FlowPlot or FlowView or a Bronkhorst® readout and control unit. The built-in alarm functionality can be used to handle different alarm types: ·... - Page 40 Bronkhorst® Alarm Info Type Access Range FlowDDE FLOW-BUS Modbus Unsigned char 0…255 1/20 0x0034/53 This parameter provides information about the event type(s) that triggered an alarm situation. The value is a bitwise summation of the issued alarm types; convert the value to binary to see which types are issued. The following alarm types...
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Page 41: Counter
Externally (obsolete) By parameter Reset Automatically (when alarm conditions no longer apply) Counter Counter settings are most easily accessible using FlowSuite, FlowPlot or FlowView or a Bronkhorst® readout and control · unit. · When the instrument is powered down, it remembers the state of the counter. If the counter is active when the instrument is powered down, it is activated when powered up and then continues to count from the value at the time of power down. -
Page 42: Network Configuration
Bronkhorst® Counter Value Type Access Range FlowDDE FLOW-BUS Modbus Float 0… 104/1 0xE808…0xE809/59401…59402 10000000 Current counter value in units selected with parameter Counter Unit. Counter Limit Type Access Range FlowDDE FLOW-BUS Modbus Float 0…9999999 104/3 0xE818…0xE819/59417…59418 Counter limit/batch size in units selected with parameter Counter Unit. - Page 43 Bronkhorst® Default settings Network configuration is done ex factory as ordered. The table below shows the supported configurations for the available interface protocols (default settings are printed in bold): Protocol ProPar FLOW-BUS Modbus PROFIBUS DP CANopen DeviceNet™ (RS-232) (RS-485) (RTU/ASCII) Address 3…125...
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Page 44: Fluid Set
When the parameters described in this section are changed manually, no such checks are performed, and the instrument output may become disordered or the instrument may even get damaged if used in conditions the instrument is not suited for. When in doubt, consult your Bronkhorst representative. -
Page 45: Advanced Fluid Set Parameters
Bronkhorst® Capacity 100% Type Access Range FlowDDE FLOW-BUS Modbus Float 1E-10… 1/13 0x8168…0x8169/33129…33130 1E+10 · This parameter represents the 100 % readout/control value (span) for the selected fluid, expressed in the selected Capacity Unit. Capacity 100% is scaled when Inlet Pressure, Fluid Temperature or Fluid Name is changed for the selected fluid. -
Page 46: Master/Slave Configuration (Flow-Bus)
Bronkhorst® Inlet Pressure Type Access Range FlowDDE FLOW-BUS Modbus Float 0…3.4E+38 113/13 0xF168…0xF169/61801…61802 Inlet pressure of the selected fluid in bar(a) Outlet Pressure Type Access Range FlowDDE FLOW-BUS Modbus Float 0…3.4E+38 113/14 0xF170…0xF171/61809…61810 Outlet pressure of the selected fluid in bar(a). - Page 47 Bronkhorst® The slave instrument polls the output value of its master periodically and uses the slave factor to set its own flow relative to the master's. To prevent damage to the instruments an/or the system(s) they are connected to, be sure to avoid circular references between devices on the same fieldbus.
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Page 48: Troubleshooting And Service
To track down problems in the fluid system, depressurize the fluid system and disconnect the suspected unit from the process line. Dirt or clogging might be quickly detected by visual inspection of disassembled fluid connections. If you suspect leakage, do not disassemble the device for inspection, but contact your Bronkhorst representative for service or repairs. -
Page 49: Common Issues
Check cable hook-up · Invalid node address Change node address (see Network configuration) Other Reset instrument and/or restart master. If problem persists, contact Bronkhorst. No output signal No power supply · Check power supply · Check cable connection Check cable hook-up ·... - Page 50 Piping, filters and/or control valve · Flush fluid system with clean, dry air. If reaches setpoint clogged or blocked problem persists, contact Bronkhorst. · For external proportional control valves: supply 0…15 Vdc and operational inlet pressure to valve and slowly increase voltage.
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Page 51: Service
Bronkhorst® Service For current information about Bronkhorst® and worldwide service addresses, please visit our website: www.bronkhorst.com Do you have any questions about our products? Our Sales department will gladly assist you selecting the right product for your application. Contact sales by e-mail: sales@bronkhorst.com... -
Page 52: Returns
(only if applicable, otherwise contact your Bronkhorst representative for local arrangements.) Disposal (end of lifetime) If you are a customer within the European Union and wish to dispose of Bronkhorst® equipment bearing the symbol of a crossed out waste disposal bin, you can return it in accordance with the removal and return instructions. -
Page 53: Parameter Index
Bronkhorst® Fmeasure Parameter index Fsetpoint Measure Parameters Pressure Parameters - Alarms Setpoint Alarm Delay Time Setpoint Slope Alarm Info Temperature Alarm Maximum Limit Valve Output Alarm Minimum Limit Parameters - Network configuration Alarm Mode Fieldbus1 Address Alarm New Setpoint Fieldbus1 Baud Rate...
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