Products Descriptions; Product Overview - BRONKHORST u-FLOW Series Instruction Manual

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Bronkhorst High-Tech B.V. cannot be held liable for any damage resulting from improper or unsafe
use, use for other than the intended purpose or use with other media and/or under other conditions
than specified on the purchase order.
See also section

1.3. Products descriptions

The µ-FLOW and LIQUI-FLOW instruments are measurement devices for thermal mass flow and control of liquids.
They are equipped with a digital electronic multi-bus pc-board and consist of a micro-controller with peripheral circuitry
for measuring, controlling and communication. The flow signal is measured, digitized and processed by means of the
internal software (firmware). The measured and processed values can be output through the analog interface or through
the digital communication line (RS232 or optional fieldbus interface).
For controllers the setting for the actuator is calculated by the firmware. The setpoint can be given through the analog
interface or through the digital communication line.
These digital instruments offer great flexibility thanks to the "multi-bus" concept, whereby the instruments can be
equipped with an optional fieldbus interface (CANopen, DeviceNet™, EtherCAT®, Ethernet/IP, FLOW-BUS, Modbus
(RTU/ASCII/TCP), POWERLINK, PROFIBUS DP, and PROFINET.
Numerous input/output options can be installed through the programmable 9-pin D-sub or 8DIN connector (see
Customized I/O). In addition to the various analog signal options and the standard RS232 communication, there are
such options as RS485 communication, digital frequency/pulse output, alarm output/reset, valve purge/close and analog
valve output.
The micro switches and LED's on top of the instrument can also be used for
Control valves can either be integrally or separately mounted. The standard control valves on Bronkhorst® mass flow
controllers are suited for max. 100 bar pressure ratings. These valves are normally closed and available up to Kv-values
of 2.37 * 10 -3 . Normally open valves can also be supplied.

1.4. Product overview

Optional connector for fieldbus
Inlet connection
Optional connector for fieldbus
Inlet connection
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9.17.161 µ-FLOW & LIQUI-FLOW Instruction Manual L01, L13(I), L23(I), L13V12, L23V12
Bronkhorst
Sealing material compatibility.
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manual operation
LED status indicator and push button
9-pin D-sub connector
Outlet connection
LED status indicator and push button
9-pin D-sub connector
Outlet connection
of some options.
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