Varian Turbo-V 2000 ICE Instruction Manual page 90

•
Press the PUMP CURRENT push-button and the
display shows:
L O W E R B E A R I
T 2 S E N S O R :
Detection of the pump's lower bearing temperature. OFF
will always be indicated if there is no sensor on this
bearing.
and then:
S O F T S T A R T
S E L E C T I O N :
where: XXX = YES or NO.
If YES is selected, the Soft Start mode allows the pump to
rump-up the Normal speed within ten steps.
When NO is selected, the Soft Start mode is deselected
and the rump-up of the pump will be done within 10
minutes.
The controller is factory set to YES.
NOTE
The Soft Start mode may be deselected/selected only
when the pump is stopped.
•
Press CYCLE NUMBER push-button to select YES or
NO
S O F T S T A R T
S E L E C T I O N :
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•
N G
O F F
M O D E
X X X
where: XXXXXX = Argon or Air
If Argon is selected the maximum power delivered to
the eletrical motor allows the pumps to work properly
with heavy gases such Argon, Silane and Arsine). If Air
is selected the maximum power delivered to the
electrical motor allows the pump to work properly with
light gases such as Nitrogen, Helium and Hydrogen.
The controller is factory set to Argon.
•
M O D E
Y E S
83
TECHNICAL INFORMATION
Press the PUMP CURRENT push-button and the
display shows:
P R O C E S S
X X X X X
Press CYCLE NUMBER to select Argon or Air.
P R O C E S S
A R G O N
G A S ?
G A S ?
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