MKS Baratron 622A Instruction Manual
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MKS Baratron 622A Instruction Manual

Absolute pressure transducers
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114492-P1
Rev F, 10/98
Instruction Manual
®
MKS Baratron
Type
622A/626A/627A/628A/629A
Absolute Pressure Transducers
Six Shattuck Road
Fax: (978) 975-0093
Andover, MA 01810-2449
E-mail: mks@mksinst.com
(800) 227-8766 or (978) 975-2350
Web site: http://www.mksinst.com

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  • Page 1 114492-P1 Rev F, 10/98 Instruction Manual ® MKS Baratron Type 622A/626A/627A/628A/629A Absolute Pressure Transducers Six Shattuck Road Fax: (978) 975-0093 Andover, MA 01810-2449 E-mail: mks@mksinst.com (800) 227-8766 or (978) 975-2350 Web site: http://www.mksinst.com...
  • Page 2 WARRANTY CONCERNING DATE-RELATED OPERATIONS. For the period commencing with the date of shipment of this equipment and ending two years later, MKS will, at its option, either repair or replace any part which is defective in materials or workmanship or with respect to the date-related operations warranty without charge to the purchaser.
  • Page 3 114492-P1 Rev F, 10/98 ® MKS Baratron Type 622A/626A/627A/628A/629A Absolute Pressure Transducers ZERO SIGNAL Sig Output Type 62x Pwr Com Pressure -15 VDC Transducer ZERO +15 VDC SIGNAL + VDC 250 mA Sig Com Pwr Com Chassis Type 622 Sig Com...
  • Page 4 All rights reserved. No part of this work may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopying and recording, or by any information storage or retrieval system, except as may be expressly permitted in writing by MKS Instruments, Inc.

  • Page 5: Table Of Contents

    Table of Contents Table of Contents Pressure Transducer Safety Information.................. 1 Symbols Used in This Instruction Manual..............1 Symbols Found on the Unit ..................2 Safety Procedures and Precautions ................3 Sicherheitshinweise für den Druckmeßumformer..............5 In dieser Betriebsanleitung vorkommende Symbole ........... 5 Erklärung der am Gerät angebrachten Symbole ............
  • Page 6 Troubleshooting Chart....................40 Appendix A: Product Specifications..................41 MKS Types 622 and 626 Units...................41 MKS Type 627 and 629 Units ..................42 MKS Type 627 and 629 50 mTorr Units ..............43 MKS Type 628 Units ....................44 Appendix B: Model Code Explanation...................45 Model Code .......................45...
  • Page 7 List of Figures and Tables List of Figures and Tables Figures Figure 1: Preferred Method To Connect an Overall Metal Braided Shielded Cable ....22 Figure 2: Alternate Method To Connect an Overall Metal Braided Shielded Cable ....22 Figure 3: Metal Single and Double Ferrule Compression-type Vacuum Fittings ....24 Figure 4: Location of the Zero Pot on Transducer Endcaps ............
  • Page 8 List of Figures and Tables...

  • Page 9: Pressure Transducer Safety Information

    Pressure Transducer Safety Information Symbols Used in This Instruction Manual Pressure Transducer Safety Information Symbols Used in This Instruction Manual Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual. Warning The WARNING sign denotes a hazard to personnel. It calls attention to a procedure, practice, condition, or the like, which, if not correctly performed or adhered to, could result in injury to personnel.

  • Page 10: Symbols Found On The Unit

    Symbols Found on the Unit Pressure Transducer Safety Information Symbols Found on the Unit The following table describes symbols that may be found on the unit. Definition of Symbols Found on the Unit Protective earth (ground) Off (Supply) Earth (ground) On (Supply) IEC 417, No.5019 IEC 417, No.5017...

  • Page 11: Safety Procedures And Precautions

    DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT Do not install substitute parts or perform any unauthorized modification to the instrument. Return the instrument to an MKS Calibration and Service Center for service and repair to ensure that all safety features are maintained.
  • Page 12 Safety Procedures and Precautions Pressure Transducer Safety Information CHECK FOR LEAK-TIGHT FITTINGS Carefully check all vacuum component connections to ensure leak-tight installation. OPERATE AT SAFE INLET PRESSURES Never operate at pressures higher than the rated maximum pressure (refer to the product specifications for the maximum allowable pressure).

  • Page 13: Sicherheitshinweise Für Den Druckmeßumformer

    Sicherheitshinweise für den Druckmeßumformer In dieser Betriebsanleitung vorkommende Symbole Sicherheitshinweise für den Druckmeßumformer In dieser Betriebsanleitung vorkommende Symbole Bedeutung der mit WARNUNG!, VORSICHT! und HINWEIS gekennzeichneten Absätze in dieser Betriebsanleitung. Warnung! Das Symbol WARNUNG! weist auf eine Gefahr für das Bedienpersonal hin.

  • Page 14: Erklärung Der Am Gerät Angebrachten Symbole

    Erklärung der am Gerät angebrachten Symbole Sicherheitshinweise für den Druckmeßumformer Erklärung der am Gerät angebrachten Symbole Nachstehender Tabelle sind die Bedeutungen der Symbole zu entnehmen, die am Gerät angebracht sein können. Bedeutung der am Gerät angebrachten Symbole Ein (Energie) Aus (Energie) Erdanschluß...

  • Page 15: Sicherheitsvorschriften Und Vorsichtsmaßnahmen

    Ersetzen Sie keine Teile mit baugleichen oder ähnlichen Teilen, und nehmen Sie keine eigenmächtigen Änderungen am Gerät vor. Schicken Sie das Gerät zwecks Wartung und Reparatur an den MKS-Kalibrierungs- und -Kundendienst ein. Nur so wird sichergestellt, daß alle Schutzvorrichtungen voll funktionsfähig bleiben.
  • Page 16 Sicherheitsvorschriften und Vorsichtsmaßnahmen Sicherheitshinweise für den Druckmeßumformer Anweisungen zum Installieren der Armaturen! Alle Anschlußstücke und Armaturenteile müssen mit der Gerätespezifikation übereinstimmen, und mit dem geplanten Einsatz des Gerätes kompatibel sein. Der Einbau, insbesondere das Anziehen und Abdichten, muß gemäß den Anweisungen des Herstellers vorgenommen werden. Verbindungen auf Undichtigkeiten prüfen! Überprüfen Sie sorgfältig alle Verbindungen der Vakuumkomponenten auf undichte Stellen.

  • Page 17: Informations Relatives À La Sécurité Pour Le Transducteur De Pression

    Informations relatives à la sécurité pour le Symboles utilisés dans ce manuel d'utilisation transducteur de pression Informations relatives à la sécurité pour le transducteur de pression Symboles utilisés dans ce manuel d'utilisation Définitions des indications AVERTISSEMENT, ATTENTION, et REMARQUE utilisées dans ce manuel.

  • Page 18: Symboles Apparaissant Sur L'unité

    Symboles apparaissant sur l'unité Informations relatives à la sécurité pour le transducteur de pression Symboles apparaissant sur l'unité Le tableau suivant décrit les symboles pouvant apparaître sur l'unité. Définition des symboles apparaissant sur l'unité Marche Terre de protection (sous tension) Arrêt (hors tension) Terre (masse) (masse)

  • Page 19: Mesures De Sécurité Et Précautions

    Ne pas installer des pièces de substitution ou effectuer des modifications non autorisées sur l'appareil. Renvoyer l'appareil à un centre de service et de calibrage MKS pour tout dépannage ou réparation afin de garantir le l'intégrité des dispositifs de sécurité.
  • Page 20 Mesures de sécurité et précautions Informations relatives à la sécurité pour le transducteur de pression VÉRIFICATION DE L'ÉTANCHÉITÉ DES CONNEXIONS Vérifier attentivement toutes les connexions des composants pour le vide afin de garantir l'étanchéité de l'installation. EXPLOITATION AVEC DES PRESSIONS D'ENTRÉE NON DANGEREUSES Ne jamais utiliser des pressions supérieures à...

  • Page 21: Medidas De Seguridad Del Transductor De Presión

    Medidas de seguridad del transductor de presión Símbolos usados en este manual de instrucciones Medidas de seguridad del transductor de presión Símbolos usados en este manual de instrucciones Definiciones de los mensajes de advertencia, precaución y de las notas usados en el manual. Advertencia El símbolo de advertencia indica la posibilidad de que se produzcan daños personales.

  • Page 22: Símbolos Hallados En La Unidad

    Símbolos hallados en la unidad Medidas de seguridad del transductor de presión Símbolos hallados en la unidad La tabla siguiente contiene los símbolos que puede hallar en la unidad. Definición de los símbolos hallados en la unidad Encendido Apagado (alimentación eléctrica) (alimentación eléctrica) Puesta a tierra Protección a tierra...

  • Page 23: Procedimientos Y Precauciones De Seguridad

    No instale piezas que no sean originales ni modifique el instrumento sin autorización. Para asegurar el correcto funcionamiento de todos los dispositivos de seguridad, envíe el instrumento al Centro de servicio y calibración de MKS toda vez que sea necesario repararlo o efectuar tareas de mantenimiento.
  • Page 24 Procedimientos y precauciones de seguridad Medidas de seguridad del transductor de presión USE ACCESORIOS ADECUADOS Y REALICE CORRECTAMENTE LOS PROCEDIMIENTOS DE AJUSTE Todos los accesorios del instrumento deben cumplir las especificaciones del mismo y ser compatibles con el uso que se debe dar al instrumento. Arme y ajuste los accesorios de acuerdo con las instrucciones del fabricante.

  • Page 25: Chapter One: General Information

    Type 622A, 626A, 627A, 628A, and 629A Absolute Pressure Transducers are part of the MKS family of general purpose pressure transducers designed to provide accurate, reliable, and repeatable pressure measurements in the range from 1K Torr to as low as 0.05 Torr F.S.

  • Page 26: How This Manual Is Organized

    Number) from the MKS Calibration and Service Center before shipping. The ERA Number expedites handling and ensures proper servicing of your instrument. Please refer to the inside of the back cover of this manual for a list of MKS Calibration and Service Centers.

  • Page 27: Chapter Two: Installation

    If you find any damage, notify your carrier and MKS immediately. If it is necessary to return the unit to MKS, obtain an ERA Number (Equipment Return Authorization Number) from the MKS Service Center before shipping.

  • Page 28: Interface Cables

    January 1, 1997, some products shipped to the European Community must also comply with the Product Safety Directive 92/59/EEC and Low Voltage Directive 73/23/EEC, which cover general safety practices for design and workmanship. MKS products that meet these requirements are identified by application of the CE Mark.

  • Page 29: Generic Shielded Cable Guidelines

    Chapter Two: Installation Interface Cables Generic Shielded Cable Guidelines Should you choose to manufacture your own cables, follow the guidelines listed below: 1. The cable must have an overall metal braided shield, covering all wires. Neither aluminum foil nor spiral shielding will be as effective; using either may nullify regulatory compliance. 2.

  • Page 30: Figure 1: Preferred Method To Connect An Overall Metal Braided Shielded Cable

    Interface Cables Chapter Two: Installation Example 1: Preferred Method To Connect Cable (shown on a transducer) Metal Cable Clamp Screw Transducer Split Lock Washer Overall Insulation External Tooth Lock Washer (if present) Bare Metal Cable Clamp Transducer Housing Making Firm Contact To Braid Braid Here Is Desirable Optional Plastic or Metal Cable (but not usually necessary)

  • Page 31: Product Location And Requirements

    Chapter Two: Installation Product Location and Requirements Product Location and Requirements Types 622 and 626: • Ambient operating temperature should remain between 0° C and 50° C (32° F and 122° F) • Input required is ±15 VDC (±5%) @ 35 mA (maximum) with <20 mV p-p noise and ripple Type 627 and 629: •...

  • Page 32: Fittings

    • Mini-CF Caution MKS does not warranty the 622, 626, 627, 628, or 629 transducer when single or double metal ferrule compression-type vacuum fittings (shown in Figure 3, page 24) are used because damage will occur to the transducer when improper tightening procedures are followed.

  • Page 33: Setup

    (or reset) by adjusting the zero potentiometer located on the top cover of the transducer or at the front panel of any MKS Power Supply/Readout which is being used. The unit must be fully stabilized before you change the zero adjustment. Stabilization is accomplished by allowing the unit to warm up for approximately: •...

  • Page 34: Figure 4: Location Of The Zero Pot On Transducer Endcaps

    Setup Chapter Two: Installation ZERO Potentiometer ZERO ZERO ZERO SIGNAL Type 622 SIGNAL Pwr Com Type 626 Sig Output Pressure Sig Com Pwr Com Pressure Transducer SIGNAL Sig Output -15 VDC Type 62X Transducer Sig Output +15 VDC-35 mA -15 VDC +15 VDC Pressure +15 VDC-35 mA...

  • Page 35: Coarse Zero Adjustment

    Chapter Two: Installation Setup Coarse Zero Adjustment All 600 Series transducers provide additional zero range capability through the coarse zero adjustment feature. The zero potentiometer provides ample control under normal conditions. Note Use the coarse zero adjustment only if the zero potentiometer fails to provide sufficient adjustment.
  • Page 36 Setup Chapter Two: Installation Follow the steps below to adjust the coarse zero: 1. Install the transducer in a system with a power supply/readout. 2. Turn the transducer on. 3. Be sure the transducer is properly warmed up (refer to page 25 for warm up times) and pumped down below its resolution (refer to Table 6, page 26, for recommended pressure levels).

  • Page 37: Dimensions

    All dimensions are listed in inches with millimeters referenced in parentheses. 2.56 DIA 2.56 DIA 0.31 (65.0) (65.0) 0.13 (7.9) (3.30) Manufactured by MKS Instruments, Inc. Manufactured by MKS Instruments, Inc. 3.17 3.17 (80.52) (80.52) 4.93 4.75 (125.22) (120.65) 1.45 1.45...

  • Page 38: Electrical Information

    Electrical Information Chapter Two: Installation Electrical Information The Types 622, 626, 627, 628, and 629 transducers require an external power source capable of supplying the voltages stated in Table 7. Noise and ripple should be less than 20 mV p-p. You may use any readout device which has input capabilities of less than 0 to greater than 10 VDC, and impedance greater than 10K ohms.

  • Page 39: Connectors

    Chapter Two: Installation Electrical Information Connectors The 622 unit has a 5-pin terminal block connector, whose pinout is listed in Table 8. The 626, 627, and 628 units use a common 15-pin Type “D” connector, refer to Table 9 for the pinout. The 629 transducer uses a 9-pin Type “D”...

  • Page 40: Table 10: Pinout Of Type 629 Transducer

    Electrical Information Chapter Two: Installation Pinout of Type 629 Transducer Pin Number Assignment Signal Output + 15 VDC - 15 VDC External Zero Signal Common Power Common Table 10: Pinout of Type 629 Transducer...

  • Page 41: Chapter Three: Overview

    DC voltage output: a sensor, signal conditioner, and power supply. An analog or digital meter is required to display the DC output in pressure units. MKS Types 622, 626, 627, 628, and 629 transducers contain two of the above components: the sensor and signal conditioner. An MKS or MKS-compatible power supply is required to complete the pressure to DC voltage output conversion, and an MKS or MKS-compatible display unit is required for direct pressure readout.

  • Page 42: Differences In The Type 629 Unit

    Differences in the Type 629 Unit Chapter Three: Overview Differences in the Type 629 Unit The Type 629 transducer performs identically to the Type 627 transducer, with the following exceptions: • The Type 629 transducer has a unique connector and pinout Refer to Table 10, page 32 for the pinout description.

  • Page 43: Chapter Four: Operation

    Chapter Four: Operation General Chapter Four: Operation General After installation and during periodic maintenance, check the transducer zero to verify proper output. If the output is incorrect, set the output by adjusting the zero potentiometer (refer to Checking the Transducer Zero, page 25, for zeroing instructions). The transducer should be powered and allowed to warm up before use.

  • Page 44: Table 11: Suggested Pressures For Reading And Control

    General Chapter Four: Operation Suggested Pressures for Reading and Control Full Scale Range Lowest Suggested Pressure Lowest Suggested Pressure (Torr) for Reading (Torr) for Control (Torr) 0.05* 2.5 x 10 2.5 x 10 0.1 ** 5 x 10 5 x 10 5 x 10 5 x 10 5 x 10...

  • Page 45: How To Use The External Zero On The Type 629 Unit

    Chapter Four: Operation How to Use the External Zero on the Type 629 Unit How to Use the External Zero on the Type 629 Unit The Type 629 transducer output is fully differential with respect to the voltage input to the external zero (pin 7).

  • Page 46: Figure 9: Type 629 Transducers Connected To Reject Common Mode Voltages

    How to Use the External Zero on the Type 629 Unit Chapter Four: Operation Signal Output 629 Transducer (top view) External Zero Data 3 MUX Signal Common Acquisition + 15V System Power Common + 15V - 15V D/A Ground Chassis Ground ±...

  • Page 47: Chapter Five: Maintenance And Troubleshooting

    Any damage should be reported to the carrier and MKS Instruments immediately. If there is no obvious damage and the continuity is correct, obtain an ERA Number (Equipment Return Authorization Number) before returning the unit to MKS Instruments for service.

  • Page 48: Troubleshooting Chart

    (transducer to electronics Inspect cable and transducer. module). Replace if necessary. Measurement slowly goes Overpressure and/or a build- Return to MKS for servicing positive over time up of contamination in the P or transducer replacement. cavity. Unstable zero output The ambient temperature may Refer to Appendix A: be too high.

  • Page 49: Appendix A: Product Specifications

    Appendix A: Product Specifications MKS Types 622 and 626 Units Appendix A: Product Specifications MKS Types 622 and 626 Units Type 622 and 626 (Unheated) Accuracy (non-linearity, hysteresis and 0.25% of Reading non-repeatability) Optional: 0.15% 0° to 50° C (32° to 122° F)

  • Page 50: Mks Type 627 And 629 Units

    MKS Type 627 and 629 Units Appendix A: Product Specifications MKS Type 627 and 629 Units Type 627 and 629 (Temperature Controlled at 45°C) Accuracy (non-linearity, hysteresis and 0.12% of Reading non-repeatability) 0.15% for 0.1 Torr units 15° to 40° C (59° to 104° F)

  • Page 51: Mks Type 627 And 629 50 Mtorr Units

    Appendix A: Product Specifications MKS Type 627 and 629 50 mTorr Units MKS Type 627 and 629 50 mTorr Units MKS Type 627 and 629 50 mTorr (Temperature Controlled at 45°C) 0.15% of Reading Accuracy (non-linearity, hysteresis and non- repeatability) Ambient operating temperature range 15°...

  • Page 52: Mks Type 628 Units

    MKS Type 628 Units Appendix A: Product Specifications MKS Type 628 Units MKS Type 628 (Temperature Controlled at 100°C) Accuracy (non-linearity, hysteresis and non- 0.25% of Reading repeatability) 0.5% of Reading for 0.1 Torr units 20° to 70° C (68° to 158° F)

  • Page 53: Appendix B: Model Code Explanation

    Appendix B: Model Code Explanation Model Code Appendix B: Model Code Explanation Model Code The options of your unit are identified in the model code. The model code is identified as follows: 62XAXXXYYZ where: Type 62XA Type Number Full Scale Range Fittings Accuracy Type Number (62XA)
  • Page 54 Model Code Appendix B: Model Code Explanation Full Scale Range (XXX) The full scale range is indicated by a three character code. Full Scale Range Ordering Code 0.05* 0.1** 1000 *Available on 627 and 629 units only ** Available on 627, 628, and 629 units only Fittings (Y) The choice of fittings is designated by a single letter code.

  • Page 55: Index

    Index Index 50m Torr transducers, 25 Setup, 7 Signal Conditioner/Electronics, 15 Specifications, 6, 23-26 Coarse Zero adjustment, 9-10 Companion products, 5 Customer support, 4 Troubleshooting, 22 Type 622 transducer, 23 Type 626 transducer, 23 Dimensions, 11 Type 627 transducer, 16, 24 50m Torr, 25 Type 628 transducer, 26 Electrical installation, 12...

This manual is also suitable for:

Baratron 626aBaratron 628aBaratron 627aBaratron 629a

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