SMC Networks ZSE50F Manual page 3

High precision and high resolution
Compound pressure
Positive pressure
Repeatability
Anti-chattering function
Variety of
Prevents erroneous operation due to sud-
functions
den fluctuations in primary pressure, by all-
owing the response time to be changed.
Auto shift function
Pressure detection is not affected by
fluctuations in primary pressure.
Series ZSE60F/ISE60
Special fitting types are used in semiconductor
production equipment (metal gasket seal fittings)
Pa . m
-10
Leak rate: 1 x 10
ZSE/ ISE60 ( F )- A2
URJ 1 / 4
Variations
Rated pressure range
Output
0.2%F.S. 1digit or less
Selectable response times: 2.5ms (default), 24ms,
192ms, 768ms or less
3 /s
ZSE/ ISE60 ( F )- B2
ZSE50F
Model
Standard thread type
R 1/ 4⋅NPT 1/4⋅G 1/ 4 (with M 5 male thread)
Port size
Leak rate
100kPa
0
-100kPa
Switch output
Analog output
1/2000 ( 0.1kPa )
1/1000 ( 0.001MPa )
Auto preset function
Automatic pressure setting is possible.
Saves time for setting operation.
Key lock function
Peak and bottom display
function
Zero out function
Confirmation of atmospheric pressure of load lock
TSJ 1 / 4
ISE50
Pa . m
-5
3
1 x 1 0 / s
1MPa
0
2 NPN or PNP
outputs
Output voltage
ZSE60F ISE60
Special fittings for the semiconductor industry
(metal gasket seal fittings)
URJ 1 /4⋅ TSJ 1 / 4
Pa ⋅ m
-1 0
3
1 x 1 0 / s
100kPa 1MPa
0 0
-100kPa
1 to 5V
Features 2