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Summary of Contents for SMC Networks ZSE50F
- Page 1 CAT.ES100-43 For General Fluids High Precision Digital Pressure Switch F/ISE Series High precision/High resolution pressure switch. Applicable for pressure detection with a wide range of fluids, by using a stainless steel diaphragm.
- Page 2 Stainless steel diaphragm Sensor and fittings are electron-beam welded. Leakage is kept at the lowest level by using VCR € and Swedgelok fittings. € ZSE50F / ISE50 1 x 10 Pa⋅m ZSE60F / ISE60 1 x 10 Pa⋅m IP65 Enclosure...
- Page 3 Pa . m Leak rate: 1 x 10 ZSE/ ISE60 ( F )- A2 ZSE/ ISE60 ( F )- B2 URJ 1 / 4 TSJ 1 / 4 ZSE50F ISE50 ZSE60F ISE60 Model Special fittings for the semiconductor industry Standard thread type...
- Page 4 Note) Auto shift input is used for the auto shift function. For more information, please refer to Auto Shift Function on page 5. Lead wire length Panel mount + Front protection cover Analog output ZSE50F/ISE50- -22/62(L)-(M) Suitable model: Series ISE50 Series ZSE50F Unit specification 1.0MPa...
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Page 5: Specifications
For General Fluids ZSE50F/ISE50 Series High Precision Digital Pressure Switch Specifications ZSE50F (Compound pressure) ISE50 (Positive pressure) Rated pressure range 100 to 100kPa 0.000 to 1.000MPa Operating pressure range and regulating pressure range 100 to 100kPa 0.100 to 1.000MPa Proof pressure 500kPa 1.5MPa... -
Page 6: Output Method
ZSE50F/ISE50 Series Output Method Hysteresis mode Large pressure and vacuum pressure H (Fix hysteresis) = 3 digits Window comparator mode Large pressure and vacuum pressure Output OUT1 mode ∗Same with OUT2. Hysteresis mode Large pressure and vacuum pressure H (Fix hysteresis) = 3 digits... - Page 7 For General Fluids ZSE50F/ISE50 Series High Precision Digital Pressure Switch Example of Internal Circuit and Wiring - -22(L)-(M) - -30(L)-(M) F/ISE F/ISE With analog output With auto shift input DC (+) DC (+) (Brown) (Brown) 1.2KΩ Analog output Auto shift input...
- Page 8 ZSE50F/ISE50 Series Auto Shift Function This function uses the measured pressure at the time of auto shift Auto shift function conditions and explanation ⋅ input as the reference pressure value and corrects the set point Keep the pressure constant at least for 5 ms after the last values "P_1"...
- Page 9 Bring the pressure back to atmosp- 0.071MPa or more with ISE50/60 heric pressure and try using the zero Residual pressure error 7.1kPa or more with ZSE50F/60F out function. ∗After displaying for 3 seconds, it will return to the measuring mode.
- Page 10 ZSE50F/ISE50 Series Dimensions ZSE50F/ISE50- 23.4 (In case of NPT 23.9) 2-M3 x 0.5 depth 4 8.45 Piping port M5 x 0.8 depth 5 Piping port R, NPT 1/4 ø3.5 25.1 8.45 12.4 10.1 Piping port G 1/4 Piping port G...
- Page 11 For General Fluids ZSE50F/ISE50 Series High Precision Digital Pressure Switch Dimensions Bracket A 41.5 Bracket A ZS-24-A View A Bracket D 41.5 Bracket D View A ZS-24-D Cutting dimensions for panel mounting 43 or more Panel mount +0.5 42.4 25.4 Front protection cover The thickness of the panel is to 3.2mm.
- Page 12 For General Fluids High Precision Digital Pressure Switch ZSE60F/ISE60 Series How to Order ISE60 For positive pressure For compound pressure ZSE60 Piping specifications Option ∗ URJ 1/4 , Piping in the backward direction None ∗ TSJ 1/4 , Piping in the backward direction Bracket A ∗URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.
- Page 13 For General Fluids ZSE60F/ISE60 Series High Precision Digital Pressure Switch Specifications ZSE60F (Compound pressure) ISE60 (Positive pressure) Rated pressure range 100 to 100kPa 0.000 to 1.000MPa Operating pressure range and regulating pressure range 100 to 100kPa 0.100 to 1.000MPa Proof pressure 500kPa 1.5MPa 0.001...
- Page 14 ø3.5 21.7 8.45 Piping port TSJ 1/4 Piping port TSJ The following items are identical with those of series ZSE50F/ISE50. Item Reference page Output type Example of internal circuit and wiring Auto shift function, Chattering prevention function Measures to be taken when error occurs...
- Page 15 For General Fluids ZSE60F/ISE60 Series High Precision Digital Pressure Switch Dimensions Bracket A 41.5 Bracket A ZS-24-A View A Bracket D 41.5 Bracket D ZS-24-D View A Cutting dimensions for panel mounting 43 or more Panel mount +0.5 „ 42.4 25.4 Piping port URJ 1/4...
- Page 16 ZSE F/ISE Series Description (Common to ZSE50F/ISE50 and ZSE60F/ISE60) digit LED Displays current pressure Displays current mode Displays error mode LED (Red) LED (Green) Displays OUT 2 switch output status OUT1 OUT2 Displays OUT 1 switch output status Light up when ON...
- Page 17 For General Fluids ZSE F/ISE Series High Precision Digital Pressure Switch Setting (Common to ZSE50F/ISE50 and ZSE60F/ISE60) Initial setting 1. Initial setting mode 2. OUT1 output mode selection 3. OUT2 output mode selection Press the SET button. Press the SET button at least 2 Select the "output mode"...
- Page 18 ZSE F/ISE Series Setting (Common to ZSE50F/ISE50 and ZSE60F/ISE60) Auto preset (Example: Adsorption Confirmation) 1. Auto preset mode 2. Preparation of auto preset 3. OUT1 auto preset Press the SET button. Select auto preset mode as the Prepare the equipment to be set Repeat vacuum and break several initial setting mode.
- Page 19 For General Fluids ZSE F/ISE Series High Precision Digital Pressure Switch Setting (Common to ZSE50F/ISE50 and ZSE60F/ISE60) Key lock function Can prevent incorrect operation of operation buttons on the switch front. Key lock cancel Key lock start Press the SET...
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Page 20: Safety Instructions
ZSE F/ISE Series Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage. These instructions indicate the level of potential hazard by a label of "Caution", "Warning" or "Danger". To ensure safety, be sure to observe Note 1) Note 2) ISO 4414... - Page 21 ZSE F/ISE Series Pressure Switch Precautions Be sure to read before handling. Refer to pages 17 through 19 for safety instructions and pressure switch precautions, and to page 20 for specific product precautions. Design and Selection Wiring Warning Warning 1. Operate the switch only within the specified 1.
- Page 22 ZSE F/ISE Series Digital Pressure Switch Precautions Be sure to read before handling. Refer to pages 17 through 19 for safety instructions and pressure switch precautions, and to page 20 for specific product precautions. Selection Pressure Source Warning Warning 1. Use the switch within the specified fluid and 1.
- Page 23 ZSE F/ISE Series Pressure Switch Precautions 1 Be sure to read before handling. Refer to pages 17 through 19 for safety instructions and pressure switch common precautions. Handling Pressure Source Warning Warning 1. Use of toxic, corrosive or flammable gas. 1.
- Page 24 SMC'S GLOBAL MANUFACTURING, DISTRIBUTION AND SERVICE NETWORK EUROPE EUROPE ASIA AUSTRIA SLOVAKIA THAILAND SMC Pneumatik GmbH SMC Thailand Ltd. SMC Priemyselná Automatizáciá, s.r.o. CZECH SLOVENIA NORTH AMERICA SMC Industrial Automation CZ s.r.o. SMC Industrijska Avtomatika d.o.o. DENMARK CANADA SPAIN/PORTUGAL SMC Pneumatik A/S SMC Pneumatics (Canada) Ltd.
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