Mounting The Filament Power Supply Module(S); Grounding Requirements; Figure 2-1 Mounting Hole Pattern For Fps Module(S) - ferrotec Temescal CV-6SLX User Manual

Table of Contents

Section 2: Installation

maintained through the cabinet and keep the ambient air temperature at the input to the

power supply below 104° F (40° C). All air passages must be unobstructed. If air filters are

used on the cabinet air input, they should be checked on a regular schedule for dirt and dust

accumulation.

Cabinet doors and panels must not block air vents located on the unit's front and rear panels,

providing at least 2" of clearance from these vents. A fan located on the rear panel pulls air in

through the vents on the front panel, and exhausts warmer air through the rear vent.

2.4

Mounting the Filament Power Supply Module(s)

Install the FPS module(s) in the vacuum cubicle, within 6 feet of the high-voltage feedthoughs

that supply power to the e-beam gun. To do so, first drill four holes at the installation

location, in the pattern shown in Figure 2-1. Then place the holes in the bottom of the FPS

module over the drilled holes and secure the FPS in place with the hardware provided.

Removal of any of the covers on the FPS module can expose personnel to dangerous or lethal

voltages. Particular care should be taken regarding high voltage, which can arc over a

considerable distance. It is not necessary to be in physical contact with a live terminal in order

for an arc to send a lethal high-voltage discharge through a person's body.

2.5

2.5.1 Facility Low-Impedance Grounding Requirements

Safe, dependable operation of the power supply cannot be ensured unless a good earth

ground is provided for the system and the power supply. This ground must provide a low-

impedance path for radio frequency (RF) as well as direct current (dc) electricity, and it must

not be connected to that of any other system or equipment. Figure 2-2 shows two different

methods of providing the required low-impedance ground on the facility side of the

installation.

0101-8242-0, Rev. C

2.4 Mounting the Filament Power Supply Module(s)

CAUTION

DANGER: HIGH VOLTAGE

2-3

CV-6SLX User Manual

Table of Contents